JPH0416100Y2 - - Google Patents
Info
- Publication number
- JPH0416100Y2 JPH0416100Y2 JP1987028093U JP2809387U JPH0416100Y2 JP H0416100 Y2 JPH0416100 Y2 JP H0416100Y2 JP 1987028093 U JP1987028093 U JP 1987028093U JP 2809387 U JP2809387 U JP 2809387U JP H0416100 Y2 JPH0416100 Y2 JP H0416100Y2
- Authority
- JP
- Japan
- Prior art keywords
- relay
- activated
- relays
- clean room
- room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000004913 activation Effects 0.000 claims description 3
- 230000003749 cleanliness Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
Landscapes
- Cleaning In General (AREA)
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987028093U JPH0416100Y2 (enrdf_load_stackoverflow) | 1987-02-28 | 1987-02-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987028093U JPH0416100Y2 (enrdf_load_stackoverflow) | 1987-02-28 | 1987-02-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63137227U JPS63137227U (enrdf_load_stackoverflow) | 1988-09-09 |
| JPH0416100Y2 true JPH0416100Y2 (enrdf_load_stackoverflow) | 1992-04-10 |
Family
ID=30830737
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987028093U Expired JPH0416100Y2 (enrdf_load_stackoverflow) | 1987-02-28 | 1987-02-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0416100Y2 (enrdf_load_stackoverflow) |
-
1987
- 1987-02-28 JP JP1987028093U patent/JPH0416100Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63137227U (enrdf_load_stackoverflow) | 1988-09-09 |
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