JPH0416070Y2 - - Google Patents

Info

Publication number
JPH0416070Y2
JPH0416070Y2 JP10562486U JP10562486U JPH0416070Y2 JP H0416070 Y2 JPH0416070 Y2 JP H0416070Y2 JP 10562486 U JP10562486 U JP 10562486U JP 10562486 U JP10562486 U JP 10562486U JP H0416070 Y2 JPH0416070 Y2 JP H0416070Y2
Authority
JP
Japan
Prior art keywords
gas
pipe
gas supply
vaporized
heating chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10562486U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6312000U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10562486U priority Critical patent/JPH0416070Y2/ja
Publication of JPS6312000U publication Critical patent/JPS6312000U/ja
Application granted granted Critical
Publication of JPH0416070Y2 publication Critical patent/JPH0416070Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Spray Control Apparatus (AREA)
JP10562486U 1986-07-11 1986-07-11 Expired JPH0416070Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10562486U JPH0416070Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-07-11 1986-07-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10562486U JPH0416070Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-07-11 1986-07-11

Publications (2)

Publication Number Publication Date
JPS6312000U JPS6312000U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-01-26
JPH0416070Y2 true JPH0416070Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-04-10

Family

ID=30980231

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10562486U Expired JPH0416070Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-07-11 1986-07-11

Country Status (1)

Country Link
JP (1) JPH0416070Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5435366B2 (ja) * 2010-09-09 2014-03-05 株式会社パイプ環境サービス 配管の洗浄方法及びその洗浄装置

Also Published As

Publication number Publication date
JPS6312000U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-01-26

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