JPH0415974A - Laser oscillator - Google Patents
Laser oscillatorInfo
- Publication number
- JPH0415974A JPH0415974A JP11941590A JP11941590A JPH0415974A JP H0415974 A JPH0415974 A JP H0415974A JP 11941590 A JP11941590 A JP 11941590A JP 11941590 A JP11941590 A JP 11941590A JP H0415974 A JPH0415974 A JP H0415974A
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- laser
- anode
- cathode
- discharge start
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002123 temporal effect Effects 0.000 abstract description 3
- 238000000034 method Methods 0.000 abstract description 2
- 230000003014 reinforcing effect Effects 0.000 abstract 3
- 230000007547 defect Effects 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は切断、溶接、熱処理なとのためにレザ光を発生
させるレーザ発振器に関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a laser oscillator that generates laser light for cutting, welding, heat treatment, and the like.
従来の技術
従来のこの種のレーザ発振器の構成について第2図を参
照して説明する。1または複数の放電管からなる放電管
群1には、各放電管ごとに陽極2a2bと陰極3a、3
bからなる1組の放電電極か具備されて2組の放電管を
形成し、2組の放電管は対称に配置されて、放電管群1
が形成され、それぞれの放電管に高電圧電源4から電力
か供給される。また、放電管群1の両端には出力ミラー
5、終端ミラー6が配設されて光共振器を形成している
。さらに、放電管群1の両端部分の陰極電極3a、3b
近傍と中央部の陽極電極2a、2b間はほぼE字形の循
環管体7により接続されてガス循環路が形成され、この
循環管体7にはガスを循環させる送風機8や、ガスを冷
却する熱交換機9が配設されている。2. Description of the Related Art The structure of a conventional laser oscillator of this type will be explained with reference to FIG. A discharge tube group 1 consisting of one or more discharge tubes includes an anode 2a2b and a cathode 3a, 3 for each discharge tube.
A set of discharge electrodes consisting of B is provided to form two sets of discharge tubes, and the two sets of discharge tubes are arranged symmetrically to form discharge tube group 1.
are formed, and power is supplied to each discharge tube from a high voltage power supply 4. Furthermore, an output mirror 5 and an end mirror 6 are arranged at both ends of the discharge tube group 1 to form an optical resonator. Further, cathode electrodes 3a and 3b at both ends of the discharge tube group 1
A gas circulation path is formed by connecting the anode electrodes 2a and 2b in the vicinity and the central part by an approximately E-shaped circulation tube 7, and this circulation tube 7 includes a blower 8 for circulating gas and a blower 8 for cooling the gas. A heat exchanger 9 is provided.
このように構成されているレーザ発振器は、ガス流方向
と放電方向とレーザ光の発振軸が同軸であるため、光軸
方向から見たときに、その放電およびその放電によって
形成されるゲイン分布が同心で対称性かよい。従って、
出力されるレーザ光を用いて加工を行う場合加工性能が
良いさされている。In a laser oscillator configured in this way, the gas flow direction, the discharge direction, and the laser beam oscillation axis are coaxial, so when viewed from the optical axis direction, the discharge and the gain distribution formed by the discharge are Concentric and symmetrical. Therefore,
Machining performance is said to be good when processing is performed using the output laser light.
発明が解決しようとする課題
しかしながら、1または複数の放電管で構成されている
放電管群内のレーザ媒質ガスの流速、圧力等の条件は時
間的な変化があるため、特にパルス列状に定周期で断続
出力する場合にごくまれな頻度で着火ミスが発生し、レ
ーザ出力が出なかったりレーザ出力が極端に低下し、加
工不良の原因となることがある。Problems to be Solved by the Invention However, since the conditions such as the flow rate and pressure of the laser medium gas within a discharge tube group consisting of one or more discharge tubes change over time, especially when the pulse train has a constant period. In the case of intermittent output, ignition errors occur very rarely, resulting in no laser output or an extremely low laser output, which can lead to processing defects.
課題を解決するための手段
本発明は前記課題を解決するために、陽極と陰極の間に
ある放電管の外周に放電開始補助リングを配置し、かつ
前記放電開始補助リングと陽極または陰極を電気的に接
続するものである。Means for Solving the Problems In order to solve the above problems, the present invention arranges a discharge starting auxiliary ring around the outer periphery of the discharge tube between the anode and the cathode, and connects the discharge starting auxiliary ring and the anode or the cathode with electricity. It connects to the
作用
上記の構成により、放電開始電圧が低下し、1または複
数の放電管で構成されている放電管群内のレーザ媒質ガ
スの流速、圧力等の条件に時間的な変化がある場合でも
着火ミスか発生ぜず、レーザ出力が出なかったりレーザ
出力か極端に低下するようなことはなく、加工不良はな
くなる。Effect The above configuration reduces the discharge starting voltage and prevents ignition errors even if there are temporal changes in conditions such as the flow rate and pressure of the laser medium gas in the discharge tube group consisting of one or more discharge tubes. There is no problem of no laser output or an extreme drop in laser output, and processing defects are eliminated.
実施例 以下、本発明の一実施例を図を用いて説明する。Example An embodiment of the present invention will be described below with reference to the drawings.
第1図に本発明の一実施例を示す。10a、10bは放
電開始補助リングであり、陽極2a、2bと電気的に接
続されている。なお、第2図と同一の構成要素には同じ
番号を付し、説明を省略する。FIG. 1 shows an embodiment of the present invention. Reference numerals 10a and 10b are discharge start assisting rings, which are electrically connected to the anodes 2a and 2b. Components that are the same as those in FIG. 2 are given the same numbers and their explanations will be omitted.
次に上記の実施例の発振器の作用について図を用いて説
明する。第3図および第4図に陽極2a。Next, the operation of the oscillator of the above embodiment will be explained using the drawings. Anode 2a is shown in FIGS. 3 and 4.
2bまたは陰極3a、3bに接続された放電開始補助リ
ング10a、10bと陽極2a、2bまたは陰極3a、
3bの相対的位置と放電開始電圧の関係について示す。2b or cathodes 3a, 3b and discharge starting auxiliary rings 10a, 10b connected to anodes 2a, 2b or cathodes 3a,
The relationship between the relative position of 3b and the discharge starting voltage will be shown.
第3図からも明らかなように放電開始補助リング10a
、10bを陽極2aと陰極3aまたは陽極2bと陰極3
bの間の放電管の外周に取り付は陽極と電気的に接続す
ると、放電開始電圧は著しく低下し、陽極2a、2bと
陰極3a、3b間の距離の約30%を過ぎた付近からな
だらかになる傾向を示し、陽極2a、2bと陰極3a、
3b間の距離の半分を過ぎた付近でほぼ一定となる。As is clear from FIG. 3, the discharge starting auxiliary ring 10a
, 10b as anode 2a and cathode 3a or anode 2b and cathode 3
When the anode is electrically connected to the outer periphery of the discharge tube between the anodes 2a and 2b, the discharge starting voltage decreases significantly, and gradually decreases from around 30% of the distance between the anodes 2a and 2b and the cathodes 3a and 3b. The anodes 2a, 2b and the cathode 3a,
It becomes almost constant near half of the distance between 3b.
なお第3図における「放電開始補助リングの相対的な位
置」は
で表される位置である。また、第4図からも明らかなよ
うに放電開始補助リング10を陽極2aと陰極3aまた
は陽極2bと陰極3bの間の放電管の外周に取り付は陰
極3a、3bと電気的に接続すると、放電開始電圧は著
しく低下し、陽極2a2bと陰極3a、3b間の距離の
約30%を過ぎた付近からなだらかになる傾向を示し、
陽極2a2bと陰極3a、3b間の距離の半分を過ぎた
付近でほぼ一定となる。Note that the "relative position of the discharge start assisting ring" in FIG. 3 is the position indicated by . Further, as is clear from FIG. 4, when the discharge starting auxiliary ring 10 is attached to the outer periphery of the discharge tube between the anode 2a and the cathode 3a or between the anode 2b and the cathode 3b, it is electrically connected to the cathodes 3a and 3b. The discharge starting voltage decreases significantly, and shows a tendency to become gradual from around 30% of the distance between the anode 2a2b and the cathodes 3a, 3b,
It becomes almost constant near half the distance between the anode 2a2b and the cathodes 3a, 3b.
なお第4図における「放電開始補助リングの相対的な位
置」は
で表される位置である。In addition, the "relative position of the discharge start assisting ring" in FIG. 4 is the position represented by.
第3図において放電開始補助リングの相対的な位置か0
%となった場合は上記リングが陽極2a。In Figure 3, the relative position of the discharge starting auxiliary ring is 0.
%, the above ring is the anode 2a.
2bと重なっていることを、第4図において放電開始補
助リングの相対的な位置が0%となった場合は上記リン
グが陰極3a、3bと重なっていること示しており、ど
ちらの場合も放電開始補助リングが全く取り付けられて
いないのと等価であり、放電開始補助リングがなければ
放電開始電圧か極めて高くなり、ミス着火の可能性が高
くなることを示している。したがって放電開始補助リン
グ10a、10bを陽極2a、2bと陰極3a、3bの
間に取り付は陽極2a、2bまたは陰極3a。In Fig. 4, when the relative position of the discharge starting auxiliary ring is 0%, it means that the ring overlaps with the cathodes 3a and 3b, and in either case, the discharge starts. This is equivalent to not having the starting auxiliary ring attached at all, and this shows that without the starting auxiliary ring, the discharge starting voltage would be extremely high, increasing the possibility of mis-ignition. Therefore, the discharge starting auxiliary rings 10a, 10b are attached between the anodes 2a, 2b and the cathodes 3a, 3b at the anodes 2a, 2b or the cathodes 3a.
3bと電気的に接続することで放電開始電圧を低下させ
、特に断続出力時の着火ミス防止ができ、放電開始を安
定化できる。したがって、1または複数の放電管で構成
されている放電管群内のレーザ媒質ガスの流速、圧力等
の条件に時間的な変化がある場合でも、放電開始電圧が
低いため着火ミスが発生せず、レーザ出力が出なかった
りレーザ出力が極端に低下するようなことはなく、加工
不良はなくなる。By electrically connecting with 3b, the discharge starting voltage can be lowered, ignition errors can be prevented especially during intermittent output, and the discharge starting can be stabilized. Therefore, even if there are temporal changes in conditions such as the flow rate and pressure of the laser medium gas in a discharge tube group consisting of one or more discharge tubes, ignition errors will not occur because the discharge starting voltage is low. , there is no possibility that the laser output will not be output or the laser output will be extremely reduced, and there will be no processing defects.
発明の効果
以上の説明からも明らかなように、本発明によれば、レ
ーザの着火ミスを防止しレーザ加工工程の不良を皆無に
することができ、生産性を飛躍的に向上させることがで
きる。Effects of the Invention As is clear from the above explanation, according to the present invention, it is possible to prevent laser ignition mistakes and eliminate defects in the laser processing process, and it is possible to dramatically improve productivity. .
第1図は本発明のレーザ発振器の一実施例を示す構成図
、第2図は従来のレーザ発振器を示す構成図、第3図は
放電開始補助リングの位置と放電開始電圧の関係(放電
開始補助リングを陽極に電気的に接続する場合)を示す
グラフ、第4図は放電開始補助リングの位置と放電開始
電圧の関係(放電開始補助リングを陰極に電気的に接続
する場合)を示すグラフである。
1・・・・・・放電管群、2a・・・・・・左陽極、2
b・・・・・・右陽極、3a・・・・・・左陰極、3b
・・・・・・右陰極、4・・・・・・高圧電源、5・・
・・・・出力ミラー 6・・・・・・終端ミラー7・・
・・・・循環管体、8・・・・・・送風機、9・・・・
・・熱交換器、10a・・・・・・左放電開始補助リン
グ、10b・・・・右放電開始補助リング。
代理人の氏名 弁理士 粟野重孝 はか1名族電管詳
友拠をE
石 鳩ヤk
i7st本に
石ル地
高瓦電涜
出tミラ
1く略ミラー
イAiテJ−1り艷4イ(トζ
@2図
1θ^ と於’−t Fw”j を呂補」カリ〜りlθ
b 石放甲1関]白神メカリごり
/′
/
第
図
方父を開如うh斡耳カールグの主目すftつ14”連1
j1(ン2第
図Fig. 1 is a block diagram showing an embodiment of the laser oscillator of the present invention, Fig. 2 is a block diagram showing a conventional laser oscillator, and Fig. 3 is the relationship between the position of the discharge start auxiliary ring and the discharge start voltage (discharge start Figure 4 is a graph showing the relationship between the position of the discharge starting auxiliary ring and the discharge starting voltage (when the auxiliary discharge ring is electrically connected to the cathode). It is. 1...Discharge tube group, 2a...Left anode, 2
b...Right anode, 3a...Left cathode, 3b
...Right cathode, 4...High voltage power supply, 5...
...Output mirror 6...Terminal mirror 7...
...Circulation tube, 8...Blower, 9...
...Heat exchanger, 10a...Left discharge start auxiliary ring, 10b...Right discharge start auxiliary ring. Name of agent: Patent attorney Shigetaka Awano Haka 1 Meizoku Denkan Shoyu wo E Ishi Hatoya k I7st book shows stone high ground tile electric t Mira 1 abbreviation Mirai Ai Te J-1 Ritsu 4 I (To ζ @2Figure 1θ^ and ▼'-t Fw”j is supplemented with “Kari~ri lθ”
b Shirakami Mekarigori /' / The main aim of the 14" series
j1(n2 fig.
Claims (2)
を有する1または複数の放電管からなる放電管群と、こ
の放電管群の両端に配備されるレーザ共振用のミラーと
、前記放電電極の近傍で前記放電管群に接続されたこの
放電管群と共にガス循環路を構成する循環管体と、前記
ガス循環路にレーザ媒質としてのガスを循環させる送風
装置とからなり、前記陽極と陰極の間にある放電管の外
周に放電開始補助リングを配置し、前記放電開始補助リ
ングと陽極または陰極を電気的に接続したことを特徴と
するレーザ発振器。(1) A discharge tube group consisting of one or more discharge tubes having at least one pair of discharge electrodes consisting of an anode and a cathode, a mirror for laser resonance disposed at both ends of this discharge tube group, and a It consists of a circulation pipe body that is connected to the discharge tube group in the vicinity and forms a gas circulation path together with the discharge tube group, and a blower device that circulates gas as a laser medium in the gas circulation path, and is connected to the anode and cathode. A laser oscillator characterized in that a discharge starting auxiliary ring is disposed around the outer periphery of a discharge tube located between the discharge tubes, and the discharge starting auxiliary ring is electrically connected to an anode or a cathode.
た電極との距離が陽陰極間の距離の30%より大きい請
求項(1)記載のレーザ発振器。(2) The laser oscillator according to claim (1), wherein the distance between the discharge starting auxiliary ring and the electrode to which the ring is electrically connected is greater than 30% of the distance between the anode and cathode.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11941590A JPH0415974A (en) | 1990-05-09 | 1990-05-09 | Laser oscillator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11941590A JPH0415974A (en) | 1990-05-09 | 1990-05-09 | Laser oscillator |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0415974A true JPH0415974A (en) | 1992-01-21 |
Family
ID=14760902
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11941590A Pending JPH0415974A (en) | 1990-05-09 | 1990-05-09 | Laser oscillator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0415974A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0788201A1 (en) | 1996-02-02 | 1997-08-06 | Shibuya Kogyo Co., Ltd | Laser oscillator |
-
1990
- 1990-05-09 JP JP11941590A patent/JPH0415974A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0788201A1 (en) | 1996-02-02 | 1997-08-06 | Shibuya Kogyo Co., Ltd | Laser oscillator |
US5790582A (en) * | 1996-02-02 | 1998-08-04 | Shibuya Kogyo Co., Ltd. | Laser oscillator |
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