JPH04159605A - Attaching holder for mr sensor - Google Patents
Attaching holder for mr sensorInfo
- Publication number
- JPH04159605A JPH04159605A JP2284720A JP28472090A JPH04159605A JP H04159605 A JPH04159605 A JP H04159605A JP 2284720 A JP2284720 A JP 2284720A JP 28472090 A JP28472090 A JP 28472090A JP H04159605 A JPH04159605 A JP H04159605A
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- holder
- sensitive part
- mrr
- adhesive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000853 adhesive Substances 0.000 claims description 19
- 230000001070 adhesive effect Effects 0.000 claims description 19
- 230000005291 magnetic effect Effects 0.000 claims description 14
- 230000000694 effects Effects 0.000 claims description 2
- 230000007423 decrease Effects 0.000 abstract description 12
- 230000005389 magnetism Effects 0.000 abstract 6
- 239000007767 bonding agent Substances 0.000 abstract 4
- 238000001125 extrusion Methods 0.000 abstract 2
- 238000010586 diagram Methods 0.000 description 6
- 239000010408 film Substances 0.000 description 5
- 230000005294 ferromagnetic effect Effects 0.000 description 4
- 239000000203 mixture Substances 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000004026 adhesive bonding Methods 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measuring Magnetic Variables (AREA)
- Magnetic Heads (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、磁気記録媒体から磁気記録情報を読み出すＭ
ＲＲセンサ子を固定するＭＲＲセンサホルダに関するも
のである。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an M method for reading magnetically recorded information from a magnetic recording medium.
This invention relates to an MRR sensor holder that fixes an RR sensor element.
近年、強磁性磁気抵抗効果膜を用いた回転角および回転
速度を検出する磁気（ＭＲ）センサの開発が急速に進展
している。ＭＲＲセンサは膜厚が２５〜４００ｎｍの強
磁性磁気抵抗効果膜が用いられるのが一般的である。強
磁性磁気抵抗効果膜をＭＲＲセンサして使用する場合、
特に重要な特性は抵抗変化率と異方性磁界である。よく
知られているようにＭＲＲセンサ子の抵抗値は、磁界の
正負には関係がなく、磁界が大きくなるにつれ減少し飽
和する。そこで高感度なＭＲＲセンサ条件としては、
ｉ）できるだけ微小な磁界に悪心させるために異方性磁
界を小さくする事、
ｉｉ）それによる検出出力を大きくするために抵抗変化
率を太き（する事、
が必要である。In recent years, the development of magnetic (MR) sensors that detect rotational angles and rotational speeds using ferromagnetic magnetoresistive films has progressed rapidly. The MRR sensor generally uses a ferromagnetic magnetoresistive film with a film thickness of 25 to 400 nm. When using a ferromagnetic magnetoresistive film as an MRR sensor,
Particularly important characteristics are the resistance change rate and the anisotropic magnetic field. As is well known, the resistance value of the MRR sensor element has no relation to the positive or negative polarity of the magnetic field, and decreases and saturates as the magnetic field increases. Therefore, the conditions for a highly sensitive MRR sensor are: i) to reduce the anisotropic magnetic field to make the magnetic field as small as possible, and ii) to increase the resistance change rate to increase the detection output. , is necessary.
前記１）ｉｉ）はＭＲ特性と総称される。The above 1) and ii) are collectively referred to as MR characteristics.
一方、ＭＲＲセンサ子をデバイスとしてＭＲＲセンサ組
立てるには、接着剤でＭＲＲセンサホルダに接着するの
が通常である。On the other hand, in order to assemble the MRR sensor element as a device, it is usual to adhere it to the MRR sensor holder with an adhesive.
第４図に従来のＭＲＲセンサホルダ１を示す。FIG. 4 shows a conventional MRR sensor holder 1.
ＭＲＲセンサ子４は接着面２に接着剤によって固着され
、接着剤の逃げ溝３に余剰の接着剤がはみ出すように工
夫されていた。The MRR sensor element 4 is fixed to the adhesive surface 2 with an adhesive, and an arrangement is made such that the excess adhesive protrudes into the adhesive relief groove 3.
−ａ的なＭＲＲセンサ子４を第５図に示す。合金薄膜の
感磁部５〜７が基板上に配置されている。-a type MRR sensor element 4 is shown in FIG. Magnetically sensitive parts 5 to 7 made of alloy thin films are arranged on the substrate.
前記ＭＲＲセンサは第４図に示した凹部に設置後、接着
される。After the MRR sensor is installed in the recess shown in FIG. 4, it is bonded.
一般に、強磁性磁気抵抗効果膜は、磁歪組成を０にした
場合、応力による抵抗変化率の低下は起こらない。Generally, in a ferromagnetic magnetoresistive film, when the magnetostriction composition is set to 0, the rate of change in resistance does not decrease due to stress.
しかしＭＲＲセンサ子とする場合、その製造プロセスに
おいて様々な熱履歴を受けるため前記組成は、磁歪ゼロ
の組成からずれ、結果として応力を受けた場合、抵抗変
化率が低下するＭＲＲセンサ子となる問題点がある。However, when making an MRR sensor element, the composition deviates from a composition with zero magnetostriction because it is subjected to various thermal histories during the manufacturing process, resulting in an MRR sensor element whose resistance change rate decreases when subjected to stress. There is a point.
前記ＭＲＲセンサ子を従来のＭＲＲセンサホルダ１にて
接着・組立を行なった場合、第６図に示す様に、接着剤
８が図に示すセンサ感磁部５，７の裏面にはみ出し固ま
る。この時接着剤８は、組立時に加わる力を保持し固ま
った後にセンサ感磁部５，７とＭＲセセン用ホルダｌと
の間に残留応力を生じさせる。前記残留応力によりセン
サ感磁部５．７の抵抗変化率は、組立接着前では図７に
示す様であったが組立接着後は図に示す様に大きく低下
するという問題点があった。When the MRR sensor element is bonded and assembled with the conventional MRR sensor holder 1, as shown in FIG. 6, the adhesive 8 protrudes onto the back surfaces of the sensor magnetic sensing parts 5 and 7 shown in the figure and hardens. At this time, the adhesive 8 retains the force applied at the time of assembly and, after hardening, generates residual stress between the sensor magnetic sensing parts 5, 7 and the MR sensing holder 1. Due to the residual stress, the rate of change in resistance of the sensor magnetic sensitive part 5.7 was as shown in FIG. 7 before assembly and adhesion, but after assembly and adhesion, the rate of change in resistance of the sensor magnetic sensing part 5.7 significantly decreased as shown in the figure.
本発明は、上記センサの持つ抵抗変化率を低下′するこ
となく利用できるＭＲセンサ用取付ホルダ提供すること
である。An object of the present invention is to provide a mounting holder for an MR sensor that can be used without reducing the rate of change in resistance of the sensor.
〔課題を解決するための手段］
本発明は、接着剤の逃げ溝が少なくともＭＲセンサ素素
子感磁部面面ないことを特徴とするＭＲセンサ用取付ホ
ルダある。[Means for Solving the Problems] The present invention provides a mounting holder for an MR sensor, characterized in that there is no escape groove for the adhesive at least on the surface of the magnetically sensitive part of the MR sensor element.
本発明において、感磁部裏面に接着剤の逃げ溝をなくす
ことにより感磁部裏面に接着剤のはみ出しがなくなる。In the present invention, by eliminating the escape groove for the adhesive on the back surface of the magnetically sensitive part, the adhesive does not protrude from the backside of the magnetically sensitive part.
これによって感磁部とホルダとの間には、応力が発生す
ることがなく、抵抗変化率の低下は、生じない。As a result, no stress is generated between the magnetic sensing part and the holder, and the rate of change in resistance does not decrease.
以下、本発明について実施例を用い説明するが本発明は
、以下の実施例に限るものではない。Hereinafter, the present invention will be explained using examples, but the present invention is not limited to the following examples.
（実施例１）
第１図は、本発明の１実施例である。図に示す様、ホル
ダ１の接着剤の逃げ溝３の感磁部裏面位置９にあたる溝
のない形状のホルダとする。(Example 1) FIG. 1 shows one example of the present invention. As shown in the figure, the holder has a shape without a groove corresponding to the position 9 on the back surface of the magnetically sensitive part of the adhesive relief groove 3 of the holder 1.
本実施例を用い、組立時に加える力を変えた時の抵抗変
化率の低下の様子を第２図に示し、併せて従来のホルダ
を用いた場合も示す。本実施例を用いた場合抵抗変化率
の低下は生じない。FIG. 2 shows how the rate of change in resistance decreases when the force applied during assembly is changed using this example, and also shows the case where a conventional holder is used. When this embodiment is used, the rate of change in resistance does not decrease.
本実施例は、従来ホルダに比べ組立性において格段に向
上した。組立・接着の際に１０ （ＭＰａ）を越える荷
重圧を加えることが通常だからである。This embodiment has significantly improved assembly efficiency compared to the conventional holder. This is because it is common to apply a load pressure exceeding 10 (MPa) during assembly and bonding.
第３図に本実施例を用い組立・接着を行なった場合のＭ
Ｒ特性を示し、組立接着剤のＭＲ特性の様子を併せて示
す。Figure 3 shows M when this example is used for assembly and gluing.
The R characteristics are shown, and the MR characteristics of the assembly adhesive are also shown.
本実施例を用いた場合、抵抗変化率の低下は生じない、
接着組立時に加える力を従来より大きくしても抵抗変化
率の低下が妨げ組立性が向上した。When this example is used, the rate of change in resistance does not decrease.
Even if the force applied during adhesive assembly is larger than before, the rate of change in resistance is prevented from decreasing, and assembly efficiency is improved.
本実施例は、従来ホルダに比べ接着・組立による抵抗変
化率の低下を格段に抑えることが出来る。This embodiment can significantly suppress a decrease in the rate of change in resistance due to adhesion and assembly compared to conventional holders.
本発明によれば、はみ出した接着剤の残留応力による抵
抗変化率の低下を大幅に防ぐことが出来る。According to the present invention, it is possible to significantly prevent a decrease in the rate of change in resistance due to residual stress of the adhesive that has protruded.
また従来不充分であった組立時の外力に対する抵抗変化
の低下も大幅に向上出来る。Furthermore, the reduction in resistance change against external forces during assembly, which has been insufficient in the past, can be significantly improved.
第１図は本発明に係るＭＲＲセンサホルダの一実施例を
示す図、第２図は本発明の抵抗変化率を示す図、第３図
は本発明のＭＲ特性を示す図、第４図は従来のＭＲＲセ
ンサホルダを示す図、第５図はＭＲＲセンサ子の平面図
、第６図は接着剤はみ出しの模式図、第７図は従来のＭ
ＲＲセンサホルダのＭＲ特性を示す図である。
１：ＭＲセンサ用取付ホル
ダ：接着面
３：接着剤の逃げ溝
４：ＭＲセンサ素子
＠ ）−冊 ド
第３図
（Ｂ −Ｂ’断面図）
第４図
第５図
第６図
印加磁界（Ｏｅ）
第７図FIG. 1 is a diagram showing an embodiment of the MRR sensor holder according to the present invention, FIG. 2 is a diagram showing the resistance change rate of the present invention, FIG. 3 is a diagram showing the MR characteristics of the present invention, and FIG. A diagram showing a conventional MRR sensor holder, FIG. 5 is a plan view of the MRR sensor element, FIG. 6 is a schematic diagram of adhesive protrusion, and FIG. 7 is a conventional MRR sensor holder.
FIG. 3 is a diagram showing MR characteristics of the RR sensor holder. 1: Mounting holder for MR sensor: Adhesive surface 3: Adhesive relief groove 4: MR sensor element @ )-book Figure 3 (B-B' sectional view) Figure 4 Figure 5 Figure 6 Applied magnetic field ( Oe) Figure 7
Claims (1)
るＭＲセンサと、前記ＭＲセンサを固定する接着剤の逃
げ溝を有するＭＲセンサ用取付ホルダにおいて、 前記接着剤の逃げ溝が前記感磁部の裏面にないことを特
徴とするＭＲセンサ用取付ホルダ。[Scope of Claims] 1. An MR sensor mounting holder having an MR sensor that detects a magnetic field in a magnetically sensitive part by a magnetoresistive effect, and an adhesive relief groove for fixing the MR sensor, comprising: an adhesive relief groove for fixing the MR sensor; A mounting holder for an MR sensor, characterized in that the holder is not on the back surface of the magnetically sensitive part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2284720A JPH04159605A (en) | 1990-10-23 | 1990-10-23 | Attaching holder for mr sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2284720A JPH04159605A (en) | 1990-10-23 | 1990-10-23 | Attaching holder for mr sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04159605A true JPH04159605A (en) | 1992-06-02 |
Family
ID=17682111
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2284720A Pending JPH04159605A (en) | 1990-10-23 | 1990-10-23 | Attaching holder for mr sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04159605A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160128198A (en) | 2014-12-09 | 2016-11-07 | 니탄 밸브 가부시키가이샤 | Hydraulic lash adjuster |
-
1990
- 1990-10-23 JP JP2284720A patent/JPH04159605A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160128198A (en) | 2014-12-09 | 2016-11-07 | 니탄 밸브 가부시키가이샤 | Hydraulic lash adjuster |
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