JPH0415483A - Baking furnace - Google Patents

Baking furnace

Info

Publication number
JPH0415483A
JPH0415483A JP11950990A JP11950990A JPH0415483A JP H0415483 A JPH0415483 A JP H0415483A JP 11950990 A JP11950990 A JP 11950990A JP 11950990 A JP11950990 A JP 11950990A JP H0415483 A JPH0415483 A JP H0415483A
Authority
JP
Japan
Prior art keywords
space
furnace body
wall
furnace
compressor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11950990A
Other languages
Japanese (ja)
Inventor
Masanori Kitamura
北村 雅則
Isao Yano
功 谷野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP11950990A priority Critical patent/JPH0415483A/en
Publication of JPH0415483A publication Critical patent/JPH0415483A/en
Pending legal-status Critical Current

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  • Vertical, Hearth, Or Arc Furnaces (AREA)

Abstract

PURPOSE:To increase the working ratio by providing reflection plates which are arranged in a space in a furnace, facing outer and inner walls, a vacuum pump which evacuate air, a compressor which introduces low temperature outside air, and a changeover valve. CONSTITUTION:Reflection plates 26 are arranged in a spaces 24 inside a baking furnace 21, facing inner walls 23 and outer walls 25. Crucibles 43 in which ceramic molded pieces to be baked are contained are stacked on a hearth 29 loaded on a lift 31. A pipe P1 is connected to the space 24 and switched either to a vacuum pump 36 or compressor 37 by a three-way changeover valve 35. When the molded pieces are heated up, the air in the space 24 is evacuated by the vacuum pump 36 so that convection heat transfer is diminshed and radiant heat is reflected by the reflection plates 26, resulting in less heat releasing loss. In cooling process, low temperature outside air is sent by the compressor 37 so that cooling time period can be shortened, resulting in an increase of the working ratio.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は主としてセラミノクコンテンサ等のセラミック
電子部品の製造に使用される焼成炉に関する。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates primarily to a firing furnace used for manufacturing ceramic electronic components such as ceramic condensers.

(従来の技術) 般に、セラミック電子部品の製造に使用される焼成炉に
は、連続式の焼成炉やハツチ式の焼成炉か使用される。
(Prior Art) Generally, a continuous type firing furnace or a hatch type firing furnace is used as a firing furnace used for manufacturing ceramic electronic components.

従来のこの種のバッチ式の焼成炉の一例の縦断面を第3
図に、その11−■線に沿う断面を第4図にホす。
The vertical cross section of an example of a conventional batch-type firing furnace of this type is shown in Figure 3.
A cross section taken along the line 11-■ is shown in FIG.

上記従来の焼成炉1は炉床昇降式のもので、リフタ5に
より、矢印AI、Δ2で示すように、炉体2の下部間[
]3に対して昇降する炉床4を有する。
The above-mentioned conventional firing furnace 1 is of a hearth raising and lowering type, and the lifter 5 moves the lower part of the furnace body 2 [
] It has a hearth 4 that goes up and down with respect to 3.

上記炉体2および炉床4は、炉体2内から炉体2の外部
に逃げる熱をできるたけ少なくするため、通常、レン力
、クラスウールあるいはカオウール等の断熱材を枠体8
内に多層に重ね合せて支持する構成を有する。
In order to reduce the amount of heat escaping from the inside of the furnace body 2 to the outside of the furnace body 2 as much as possible, the furnace body 2 and the hearth 4 are usually made of heat insulating material such as fiberglass, Kras wool, or Kao wool.
It has a structure in which it is supported by being stacked in multiple layers.

−1−記炉床4は、内部にシール材9か装着された横断
面かU字形状を有するリンク状の溝部材11か外嵌して
固定されている。これにより、上記炉床4か所定位置ま
で」1貸したときに、この溝部材11の−上記ンール材
9に炉体2の枠体8のF端縁8aか圧接し、炉体2の内
部をンールする。
-1- The hearth 4 is fixed by fitting a link-shaped groove member 11 having a U-shaped cross section into which a sealing material 9 is attached. As a result, when the hearth 4 is moved to a predetermined position, the F edge 8a of the frame 8 of the furnace body 2 comes into pressure contact with the groove member 9 of the groove member 11, and the inside of the furnace body 2 to run.

上記炉床4の土には、焼成するセラミック成形体(図示
ぜす。)か収容された匣鉢6が積み重ねられる。そして
、上記セラミンク成形体は、炉体2の天井部2aから炉
床4に向かって懸垂させた炭化ケイ素(SiC)等のU
字状のヒータ7により加熱され、昇温、焼成および冷却
等の工程からなる予め定められた所定の焼成プログラム
に従って焼成される。
In the soil of the hearth 4, saggers 6 containing ceramic compacts (not shown) to be fired are stacked. The ceramic molded body is made of silicon carbide (SiC), etc. suspended from the ceiling 2a of the furnace body 2 toward the hearth 4.
It is heated by a letter-shaped heater 7 and fired according to a predetermined firing program consisting of steps such as temperature raising, firing, and cooling.

(発明が解決しようとする課題) ところで、上記のように、炉体2内から炉体2の外部に
逃げる熱をできるたけ少なくするため、炉体2とその炉
床4か断熱材か多層に重ね合わされてなる焼成炉lては
、炉体2内の温度を、セラミック成形体の焼成に必要な
高温に保持した後、ヒータ7の電源を切って、焼成工程
から冷却工程に移行しても、炉体2内のt!lIX度は
なかなか降下しない。このため、上記従来の焼成炉1て
は降温時内壁と外壁との間の空間における空気の対流に
よる熱伝達が抑えられるとともに、反射板の作用により
炉体内部から炉体外部に向かって放射される輻射熱も反
射される。これにより、昇温工程において、炉体外に熱
か逃げるのか抑えられる。
(Problem to be Solved by the Invention) As mentioned above, in order to reduce the heat escaping from the inside of the furnace body 2 to the outside of the furnace body 2 as much as possible, the furnace body 2 and its hearth 4 are covered with a multilayer insulation material. In the overlapping firing furnace 1, after the temperature inside the furnace body 2 is maintained at a high temperature necessary for firing the ceramic molded body, the power to the heater 7 is turned off and the firing process is shifted to the cooling process. , t! in the furnace body 2! IIX degrees do not fall easily. Therefore, in the conventional firing furnace 1 described above, heat transfer due to air convection in the space between the inner wall and outer wall is suppressed when the temperature falls, and heat is radiated from the inside of the furnace body toward the outside of the furnace body due to the action of the reflector. radiant heat is also reflected. This prevents heat from escaping outside the furnace body during the temperature raising step.

一方、冷却工程では、上記炉体の空間内には温度の低い
外気か導入されて炉体の上記空間内を流れる。これによ
り、冷却工程において、炉体の内部か速やかに冷却され
る。
On the other hand, in the cooling process, low-temperature outside air is introduced into the space of the furnace body and flows through the space of the furnace body. Thereby, in the cooling process, the inside of the furnace body is quickly cooled.

(発明の効果) 本発明によれば、昇温時には、上記脱気により炉体の上
記空間における対流熱伝達が抑えられるとともに、反射
板の作用により炉体内部から炉体外部に向かって放射さ
れる輻射熱か反射されるので、昇温工程において、炉体
外に熱か逃げるのか抑えられ、熱効率が高い焼成炉を得
ることかできる。
(Effects of the Invention) According to the present invention, when the temperature rises, convective heat transfer in the space of the furnace body is suppressed by the deaeration, and heat is radiated from the inside of the furnace body toward the outside of the furnace body due to the action of the reflector. Since the radiant heat is reflected, it is possible to suppress heat escaping outside the furnace body during the temperature raising process, making it possible to obtain a firing furnace with high thermal efficiency.

また、本発明によれば、炉体の内壁と外壁との間の空間
内に導入される温度の低い外気により炉体か冷却される
ので、炉体内部の降温時間が短縮間が長くなり、稼動率
か低いという問題かあった。
Further, according to the present invention, since the furnace body is cooled by the low temperature outside air introduced into the space between the inner wall and the outer wall of the furnace body, the temperature drop time inside the furnace body is shortened and the time is increased. There was a problem with low operating rates.

本発明の目的は、稼動率が高く、しかも熱効率か高い焼
成炉を提供することである。
An object of the present invention is to provide a firing furnace with high operating rate and high thermal efficiency.

(課題を解決するための手段) このため、本発明は、被焼成物が昇温、焼成および冷却
の各二F程を経て熱処理される焼成炉において、 耐熱鋼板からなる内壁、その外側に空間をおいて配置さ
れた外壁および−1−記空間内にてこれら内壁および外
壁と対向して配置されてなる熱の反射板とからなる炉体
と、この炉体の上記空間内の空気を脱気する真空ポンプ
と、上記炉体の空間内に温度の低い外気を圧入するコン
プレッサと、上記被焼成物の昇温、焼成工程において炉
体の一]配充空間を真空ポンプにより脱気させ、上記彼
焼成物の冷却工程において炉体の上記空間内にコンプレ
ッサからの外気を導入する切替弁装置とを備えたことを
特徴としている。
(Means for Solving the Problems) For this reason, the present invention provides a firing furnace in which an object to be fired is heat-treated through heating, firing, and cooling steps of about 2 F each, with an inner wall made of a heat-resistant steel plate, and a space outside the inner wall. A furnace body consisting of an outer wall disposed at a distance from the inner wall and a heat reflecting plate disposed facing the inner wall and the outer wall in the space described above; a compressor that presses low-temperature outside air into the space of the furnace body; The apparatus is characterized in that it includes a switching valve device for introducing outside air from a compressor into the space of the furnace body during the cooling process of the fired product.

(作用) 炉体内部の昇n1時には、上記脱気により炉体のされ、
炉の稼動率を」−げることができ、炉体の冷却速度も任
意に制御することかできる。
(Function) At the time of rising inside the furnace body, the above deaeration causes the furnace body to
The operating rate of the furnace can be increased, and the cooling rate of the furnace body can also be controlled arbitrarily.

(実施例) 以下に、添付の図面を参照して本発明の詳細な説明する
(Example) Below, the present invention will be described in detail with reference to the accompanying drawings.

本発明に係るハツチ式の焼成炉の一実施例の縦断面を第
1図に、また、この第1図のIV−IV線に沿う断面を
第2図にそれぞれ示す。
FIG. 1 shows a longitudinal cross section of an embodiment of a hatch-type firing furnace according to the present invention, and FIG. 2 shows a cross section taken along line IV--IV in FIG. 1.

上記焼成炉21は、炉体22が内壁23、その外側に空
間24をおいて配置された外壁25および上記空間24
内に内壁23および外壁25に対向して配置された反射
板26からなる。約1000°C程度の耐熱性が要求さ
れる焼成炉21の場合、上記内壁23および外壁25の
うぢ、内壁23はインコネルやステンレス等の耐熱鋼板
からなる。
The firing furnace 21 includes a furnace body 22, an inner wall 23, an outer wall 25 arranged with a space 24 outside the inner wall 23, and the space 24.
It consists of a reflecting plate 26 disposed inside facing the inner wall 23 and outer wall 25. In the case of the firing furnace 21 which is required to have heat resistance of about 1000°C, the inner wall 23 and the outer wall 25 are made of a heat-resistant steel plate such as Inconel or stainless steel.

そして、焼成炉21が特に耐熱性が要求されるときには
、上記内壁23の内側に断熱材27が張り付けられる。
When the firing furnace 21 is particularly required to have heat resistance, a heat insulating material 27 is attached to the inside of the inner wall 23.

上記炉体22の内壁23と外壁25との間の上記空間2
4内には、その内部にてこれら内壁23および外壁25
と対向して熱の反射板26.26か配置される。これら
反射板26.26.  には、炉体22の冷却時に導入
されるエアーを炉体22の上記空間24内にて還流させ
るために、穴2828、・が形成されている。
The space 2 between the inner wall 23 and the outer wall 25 of the furnace body 22
4 has an inner wall 23 and an outer wall 25 inside.
A heat reflecting plate 26, 26 is arranged opposite to the heat reflecting plate 26, 26. These reflectors 26.26. Holes 2828 are formed in the holes 2828 in order to circulate the air introduced during cooling of the furnace body 22 within the space 24 of the furnace body 22.

上記炉体22には、その下側に昇降式の炉床29か嵌合
する開口32を有している。」1紀炉床29は、その昇
降用のりフタ31の」二に載置されて固定されている。
The furnace body 22 has an opening 32 on its lower side into which an elevating hearth 29 is fitted. The first hearth 29 is placed and fixed on the second part of the lid 31 for lifting and lowering.

上記炉床29は炉体22の一部を構成しており、−1−
に構成を説明した炉体22と同様の構成を有する。−1
−記炉床29には、内部にシール材33か装着された横
断面かU字形状を有するリング状の溝部材3/lか外嵌
している。−上記炉床29が所定位置まで」1昇したと
きに、この溝部材34の上記シール材33に炉体22の
外壁25の下端縁25aか圧接し、炉体22の内部を/
−ルする。
The hearth 29 constitutes a part of the furnace body 22, -1-
It has the same configuration as the furnace body 22 whose configuration was explained in . -1
- The recording hearth 29 is fitted with a ring-shaped groove member 3/l having a U-shaped cross section and having a sealing material 33 installed therein. - When the hearth 29 is raised to a predetermined position, the lower edge 25a of the outer wall 25 of the furnace body 22 comes into pressure contact with the sealing material 33 of the groove member 34, and the inside of the furnace body 22 is closed.
- to play.

上記炉体22および炉床29の内壁23と外壁25との
間の各空間24には、パイプl)1が接続され、このパ
イプPlは3方切替弁35により、り成形体のヒータ4
]による加熱昇温時および高温キープ時は、炉体22お
よびその炉床29の内壁23と外壁25との間の各空間
24のエアーが真空ポンプ36によりたとえば1O−2
Torr程度に脱気される。これにより、上記炉体22
の内壁23と外壁25との間の空間24内での空気の対
流による熱伝達かほとんとなくなるうえに、炉体22外
への輻射熱が反射板26.26.・・に反射され、炉体
22からの放熱ロスが少なくなる。
A pipe 1 is connected to each space 24 between the inner wall 23 and outer wall 25 of the furnace body 22 and the hearth 29, and this pipe Pl is connected to the heater 4 of the molded body by a three-way switching valve 35.
] When the temperature is raised by heating and when the high temperature is kept, the air in each space 24 between the inner wall 23 and outer wall 25 of the furnace body 22 and its hearth 29 is pumped by the vacuum pump 36 to, for example, 1O-2
The air is degassed to about Torr. As a result, the furnace body 22
In addition, heat transfer due to air convection within the space 24 between the inner wall 23 and outer wall 25 of the furnace body 22 is almost eliminated, and radiant heat to the outside of the furnace body 22 is absorbed by the reflecting plates 26, 26, . ..., and the heat radiation loss from the furnace body 22 is reduced.

高温キープか終了し降温工程に入ると、操作弁38が開
かれるとともに、コンプレッサ37によりパイプP1を
通して温度の低い外気が上記空間24に送られ、上記空
間24内に上記外気が流れる。これにより、炉体22か
−に記エアーにより冷却されて温度が低下し、降温時間
か短縮される。
When the high temperature is finished and the temperature is lowered, the operation valve 38 is opened, and the compressor 37 sends low-temperature outside air to the space 24 through the pipe P1, and the outside air flows into the space 24. As a result, the furnace body 22 is cooled by the air, the temperature is lowered, and the temperature lowering time is shortened.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明に係る焼成炉の一実施例の縦断面図、 第2図は第1図の焼成炉の1V−IV線に沿う断面ロー
タリ式の真空ポンプ36とコンプレッサ37とに接続が
切り替えられる。 上記炉体22およびその炉床29の内壁23と外壁25
との間の各空間24にはまたパイプP。 か接続される。このパイプP、には操作弁38が接続さ
れている。この操作弁28は、3方弁35により、上記
各空間24か真空ポンプ36に接続されたときに大気に
対して閉じられ、−1−記名空間24かコンプレッサ3
7に接続されたときに大気に開放する。 一1―記炉体22には、炭化ケイ素等のU字状のヒータ
41か、上記炉体22の内壁23に沿って、炉体22の
天井部22aから炉床29に向かって懸垂される。 なお、炉床29上には、台板42か載置され、この台板
42の上に、焼成するセラミック成形体く図示せず。)
か収容された匣鉢43か積み重ねられる。 このような構成において、リフタ31によって昇降する
炉床29に乗った匣鉢43内のセラミソ第3図は従来の
焼成炉の一例の縦断面図、第4図は第3図の焼成炉の■
−■線に沿う断面図である。 21・焼成炉、22・炉体、23 内壁24・空間、2
5・外壁、26 反射板28・穴、29 ・炉床、35
・・・3方切替弁36 ・真空ポンプ、37 コンプレ
ッサ38・操作弁。
FIG. 1 is a longitudinal cross-sectional view of one embodiment of the firing furnace according to the present invention, and FIG. 2 is a cross-sectional view of the firing furnace shown in FIG. 1 taken along line 1V-IV. Can be switched. The inner wall 23 and outer wall 25 of the furnace body 22 and its hearth 29
There is also a pipe P in each space 24 between. or connected. A control valve 38 is connected to this pipe P. This operation valve 28 is closed to the atmosphere by a three-way valve 35 when connected to each space 24 or the vacuum pump 36;
Open to atmosphere when connected to 7. 11-A U-shaped heater 41 made of silicon carbide or the like is suspended from the ceiling 22a of the furnace body 22 toward the hearth 29 along the inner wall 23 of the furnace body 22. . A base plate 42 is placed on the hearth 29, and a ceramic molded body to be fired is placed on the base plate 42 (not shown). )
The stored saggers 43 are stacked. In such a configuration, the ceramiso in the sagger 43 mounted on the hearth 29 which is raised and lowered by the lifter 31 is shown in FIG.
It is a cross-sectional view along the -■ line. 21・Firing furnace, 22・Furnace body, 23 Inner wall 24・Space, 2
5. External wall, 26 Reflector plate 28. Hole, 29. Hearth, 35
...3-way switching valve 36 ・Vacuum pump, 37 Compressor 38 ・Operation valve.

Claims (1)

【特許請求の範囲】[Claims] (1)被焼成物が昇温、焼成および冷却の各工程を経て
熱処理される焼成炉において、 耐熱鋼板からなる内壁、その外側に空間をおいて配置さ
れた外壁および上記空間内にてこれら内壁および外壁と
対向して配置されてなる熱の反射板とからなる炉体と、
この炉体の上記空間内の空気を脱気する真空ポンプと、
上記炉体の空間内に温度の低い外気を圧入するコンプレ
ッサと、上記被焼成物の昇温、焼成工程において炉体の
上記空間を真空ポンプにより脱気させ、上記被焼成物の
冷却工程において炉体の上記空間内にコンプレッサから
の外気を導入する切替弁装置とを備えたことを特徴とす
る焼成炉。
(1) In a firing furnace in which the object to be fired is heat-treated through the steps of temperature raising, firing, and cooling, an inner wall made of heat-resistant steel plate, an outer wall placed with a space outside the inner wall, and an inner wall located within the above space. and a heat reflecting plate disposed opposite the outer wall;
a vacuum pump that deaerates the air in the space of the furnace body;
A compressor that presses low-temperature outside air into the space of the furnace body, a vacuum pump to evacuate the space of the furnace body during the temperature raising and firing process of the object to be fired, and a furnace during the cooling process of the object to be fired. A firing furnace characterized by comprising a switching valve device for introducing outside air from a compressor into the space of the body.
JP11950990A 1990-05-09 1990-05-09 Baking furnace Pending JPH0415483A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11950990A JPH0415483A (en) 1990-05-09 1990-05-09 Baking furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11950990A JPH0415483A (en) 1990-05-09 1990-05-09 Baking furnace

Publications (1)

Publication Number Publication Date
JPH0415483A true JPH0415483A (en) 1992-01-20

Family

ID=14763026

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11950990A Pending JPH0415483A (en) 1990-05-09 1990-05-09 Baking furnace

Country Status (1)

Country Link
JP (1) JPH0415483A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102252519A (en) * 2010-12-20 2011-11-23 龚炳生 Crucible roasting furnace

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102252519A (en) * 2010-12-20 2011-11-23 龚炳生 Crucible roasting furnace

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