JPH0829067A - Vertical baking furnace - Google Patents

Abstract

PURPOSE:To provide a vertical type baking furnace, small in the size of the furnace body and capable of rising or lowering temperature of a ceramics material suddenly. CONSTITUTION:A vertical baking furnace 1 is provided with a furnace body 2. A baking chamber 4 and a degreasing chamber 5 are provided in the furnace body 2 while a shutter 7 and a heat insulating plate 9 are provided at the boundary between the baking chamber 4 and the degreasing chamber 5. An elevating rod 10, to which a box 11 and an elevating lid 12 are attached at the upper end thereof, is elevated and descended between the degreasing chamber 5 and the baking chamber 4 under a condition that a material to be treated is put on the box 11 whereby baking is effected. In this case, the shutter 7 is opened and/or closed and the heat insulating plate 9 is elevated and/or descended in accordance with the elevation and/or descending of the elevating rod 10.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vertical firing furnace used for firing a ceramic body that constitutes an electronic component such as a ceramic capacitor.

[0002]

2. Description of the Related Art A conventional vertical firing furnace will be described with reference to FIG. In FIG. 2, reference numeral 21 is a vertical firing furnace in which a furnace body 22 is placed on a pedestal 23. here,
The furnace body 22 has a firing chamber 24 inside thereof, a gas discharge pipe 25 communicating from the upper end portion of the firing chamber 24 to the outside of the furnace, a heater 26 provided in a recess 24 a of the firing chamber 24, and a lower end portion thereof. In addition, the elevating rod 27 is inserted into the baking chamber 24 upward from the opening 22a protruding toward the gantry 23 side. Further, a box 28 for mounting a ceramic body (not shown) as an object to be processed is attached to the upper end of the lifting rod 27, and a gas supply pipe 29 is provided near the lower end of the lifting rod 27.
Is connected. The gas supply pipe 29 penetrates the inside of the lifting rod 27 and has an opening (not shown) at the upper end of the lifting rod 27.

In the vertical firing furnace 21 having such a configuration, the inside of the firing chamber 24 extends from the bottom to the top.
A temperature gradient from a low temperature to a high temperature is formed, and the ceramic body is fired as follows. That is, when the elevating rod 27 moves upward, it is degreased below the baking chamber 24, and after the main firing is performed above, the elevating rod 27 moves downward to move it below the baking chamber 24 again. It is cooled. In this way, the temperature of the ceramic body can be raised and lowered rapidly.
Further, a degreasing gas and a firing gas (not shown) are taken into the firing chamber 24 via the gas supply pipe 29, and a used gas (not shown) is taken out of the furnace via the gas discharge pipe 25. Is discharged to.

[0004]

However, in the vertical firing furnace 21 configured as described above, a temperature gradient must be formed in order to rapidly raise and lower the temperature of the ceramic body, and the firing chamber 24 is It was necessary to lengthen the dimension in the longitudinal direction. As a result, the size of the furnace body is, for example, 5 m to 10
It became a huge thing called m. Therefore, an object of the present invention is to provide a vertical firing furnace having a small furnace body size and capable of rapidly raising and lowering the temperature of a ceramic body.

[0005]

In order to achieve the above object, in the present invention, as a constitution of a vertical firing furnace, a firing chamber and a degreasing chamber which are respectively arranged at upper and lower positions inside a furnace body and which are continuous with each other. And, at the boundary between the baking chamber and the degreasing chamber, with a shutter that can be opened and closed,
A box and an elevating lid are attached to the upper end, and the object to be processed is placed on the box, and is inserted into the degreasing chamber from below the furnace body upward, and the degreasing chamber and the baking chamber above it. It is characterized in that it is provided with a lifting rod that moves up and down between the two.

Further, the lifting bar is provided with a rotating mechanism which rotates along the circumference of the shaft.

Further, the shutter is provided with a cooling mechanism.

Further, as the cooling mechanism of the shutter, a pipe in which cooling water is injected is provided inside the shutter.

In addition, a heat insulating plate for raising and lowering the inside of the firing chamber is provided above the shutter.

[0010]

According to the vertical firing furnace of the present invention, the amount of heat conducted from the firing chamber to the degreasing chamber is controlled by the shutter provided at the boundary between the firing chamber and the degreasing chamber, and the firing chamber is heated to a high temperature and the degreasing chamber is heated. Is kept cold. Further, by opening the shutter, heat is conducted from the firing chamber to the degreasing chamber.

[0011]

EXAMPLE FIG. 1 shows the structure of a vertical firing furnace according to the present invention.
An explanation will be given using (a). In FIG. 1 (a), 1 is a vertical firing furnace, in which a furnace body 2 is placed on a pedestal 3. Here, the furnace body 2 is provided with a firing chamber 4 and a degreasing chamber 5 which are continuously formed in the upper and lower positions inside thereof. In addition, a concave portion 4a is formed inside the baking chamber 4, and a columnar heater 6 is formed in the concave portion 4a, and one end thereof is formed into the concave portion 4a.
It is arranged in a state of being inserted in the upper part of a. Further, a shutter 7 arranged at the boundary between the baking chamber 4 and the degreasing chamber 5
Is connected to a driving device (not shown) such as a pneumatic cylinder mechanism installed outside the furnace, and opens or closes the firing chamber 4 and the degreasing chamber 5 to each other. Further, the shutter 7 includes a cooling mechanism (not shown). This cooling mechanism cools the heated shutter 7 by injecting cooling water into a pipe provided inside the shutter 7, for example.

A heat insulating plate 9 supported by a supporting rod 8 is arranged above the shutter 7 inside the baking chamber 4. Here, the support rod 8 is connected to a drive device (not shown) such as a pneumatic cylinder mechanism installed outside the furnace, and the drive device moves the support rod 8 and the heat insulating plate 9 up and down. It is a thing. Further, below the furnace body 2, an elevating rod 10 inserted into the degreasing chamber 5 and the firing chamber 4 upward from the opening 2a at the lower end of the furnace body 2 (before insertion in FIG. 1A). Is displayed). Lifting rod 10
A box 11 on which a ceramic body (not shown) as a workpiece is placed is attached to the upper end of the box, and an elevating lid 12 is attached below the box 11 in contact with the box 11. Here, the elevating lid 12 is formed by laminating a plurality of plate-shaped heat insulating materials with a space therebetween. Further, the lower end portion of the lifting rod 10 is connected to a driving device (not shown) such as a cylinder mechanism installed outside the furnace, and this driving device performs the lifting operation of the lifting rod 10 as well as the lifting rod. 10
It also serves as a mechanism for rotating the shaft around the axis. The box 11 is provided with a temperature sensor (not shown) such as a thermocouple for detecting the temperature near the ceramic body, and the detected temperature information is control means such as a microcomputer installed outside the furnace. (Not shown), the control means controls the operation of the drive device connected to the elevating rod 10 based on the temperature information, and controls the ascending / descending speed of the elevating rod 10 and the stop position.

On the side of the degreasing chamber 5, a degreasing gas supply pipe 13 for supplying a degreasing gas and a firing gas discharge pipe 14 for discharging a used firing gas are provided outside the furnace. It is provided in communication. Further, at the upper end of the firing chamber 4, a firing gas supply pipe 15 for supplying a firing gas,
Gas exhaust pipes 16 for exhausting the used degreasing gas and firing gas are provided so as to communicate with the outside of the furnace.

Next, how the firing is performed in the vertical firing furnace 1 will be described with reference to FIGS. 1 (b) and 1 (c). In the vertical firing furnace 1, a degreasing gas (not shown) is supplied to the degreasing chamber 5 via the degreasing gas supply pipe 13, where degreasing is performed, and the degreasing gas is supplied via the firing gas supply pipe 15. A firing gas is supplied to the chamber 4, where the main firing is performed. Since the baking chamber 4 and the degreasing chamber 5 are arranged via the heat insulating plate 9 and the shutter 7, conduction of radiant heat by the heater 6 to the degreasing chamber 5 is significantly suppressed when the shutter 7 is closed. Therefore, the temperature of the firing chamber 4 is rapidly raised by the heater 6, and, for example, 100
It becomes a high temperature of 0 ° C., and the high temperature is maintained.
Here, as shown in FIG. 1 (b), the ceramic body mounted on the box 11 is put into the degreasing chamber 5 by the lifting bar 10 moving upward. Then, the opening / closing lid 12 attached to the lifting rod 10 closes the opening 2 a of the furnace body 2. At this time, the elevating lid 12 is formed by stacking a plurality of heat insulating materials with a gap therebetween, and prevents the degreasing gas and heat inside the degreasing chamber 5 from leaking to the outside.

Next, by opening the shutter 7, the radiant heat of the heater 6 is conducted to the degreasing chamber 5 via the heat insulating plate 9. Then, by adjusting the opening degree of the shutter 7 and adjusting the vertical position of the heat insulating plate 9, the amount of heat to be conducted can be controlled, and the temperature of the ceramic body on the box 11 is maintained at 400 ° C., for example. . At this time, the shutter 7 is cooled by the cooling mechanism provided inside the shutter 7.
Since the heat conducted to the degreasing chamber 5 is absorbed, it has a great effect in controlling the amount of heat conducted from the firing chamber 4 to the ceramic body on the box 11. Furthermore, the lifting bar 10
Is rotated along the circumference of the shaft, for example, 5 to 10 times per minute, so that the ceramic body on the box 11 is heated uniformly.

In this way, after the ceramic body is degreased, the shutter 7 is fully opened, and the support rod 8 for supporting the heat insulating plate 9 is moved upward, whereby the heat insulating plate 9 is moved to the firing chamber 4. Move above. In this way, the ceramic body is put into the firing chamber 4 by the ascending / descending movement of the elevating rod 10 to the place where the path of the elevating rod 10 is opened. Then, as shown in FIG. 1C, the shutter 7 is closed again, and the elevating lid 12 attached to the elevating rod 10 closes the baking chamber 4 together with the shutter 7. At this time, the lifting lid 1
Reference numeral 2 closes the firing chamber 4 and suppresses the amount of heat conducted from the firing chamber 4 to the shutter 7. In this way, the ceramic body is rapidly heated by being transferred from the low-temperature degreasing chamber 5 to the high-temperature firing chamber 4, and the temperature rises by 5 ° C. per second, for example. Then, the ceramic body is heated to a top temperature of 1300 ° C., for example, and then heated to, for example, 10
The temperature is lowered to 00 ° C.

When the main firing is completed in this way, the shutter 7 is opened again and the elevating rod 10 is moved downward, so that the ceramic body is put into the degreasing chamber 5 again. Here, since the opening 2a below the furnace body 2 is not closed during the main firing of the ceramic body, the heat inside the degreasing chamber 5 is dissipated through the opening 2a, and the degreasing chamber 5 is rapidly cooled. The temperature is lowered to. As a result, the ceramic body placed in the degreasing chamber 5 is rapidly cooled to a low temperature of, for example, 100 ° C. or lower, and then the elevating rod 10 is further moved downward, so that the ceramic body is taken out of the furnace. The firing is completed.

Thus, the vertical firing furnace 1 according to the present invention
In the above, the shutter 7 and the heat insulating plate 9 are used to control the amount of heat conducted from the baking chamber 4 to the degreasing chamber 5 to maintain the baking chamber 4 at a high temperature and the degreasing chamber 5 at a low temperature. Then, by simply moving the ceramic body from the degreasing chamber 5 to the firing chamber 4 or from the firing chamber 4 to the degreasing chamber 5, it is possible to rapidly raise or lower the temperature of the ceramic body. Therefore, the distance for moving the ceramic body may be short, and the size of the furnace body 2 in the longitudinal direction is, for example, 2 minutes as compared with the size of the conventional furnace body in which the furnace body is not separated. It is possible to reduce the vertical firing furnace to a smaller size. Also, with the downsizing of the firing furnace,
The energy consumption may be, for example, about one half of the energy consumption required for the conventional vertical firing furnace, and the cost required for firing can be reduced. Further, in the vertical firing furnace 1 according to the present invention, the ceramic body can be cooled simply by moving it from the firing chamber 4 to the degreasing chamber 5. Therefore, when the ceramic body is cooled, the firing time can be shortened to, for example, about one half of that of the conventional firing furnace in which the furnace body must be cooled first.

In this embodiment, the lifting bar 10
However, the case where the rotary mechanism that rotates along the axial direction is provided has been described, but the present invention can also be applied to a vertical firing furnace that does not have such a rotary mechanism. Also,
In the present embodiment, the case where the shutter 7 has the cooling mechanism has been described, but the present invention can be applied to a vertical firing furnace that does not have such a cooling mechanism. Further, although the case where the heat insulating plate 9 is provided has been described in the present embodiment, the present invention can be applied to a vertical firing furnace in which the heat insulating plate is not provided. In addition, in the present embodiment, the case where the elevating lid 12 is formed by laminating a plurality of heat insulating materials has been described, but the vertical firing furnace using the elevating lid composed of a single heat insulating material is also applicable to The invention can be applied.

[0020]

According to the vertical firing furnace of the present invention, the shutter and the heat insulating plate control the heat conduction in the furnace, so that the firing chamber is maintained at a high temperature and the degreasing chamber is maintained at a low temperature. . Thus, the ceramic body can be rapidly heated and lowered only by moving the ceramic body, which is the object to be fired, from the degreasing chamber to the firing chamber or from the firing chamber to the degreasing chamber. Therefore, the distance for moving the ceramic body is shortened, so that the dimension of the furnace body in the longitudinal direction can be reduced and the vertical firing furnace can be downsized. Further, with the downsizing of the firing furnace, less energy consumption is required, and the firing cost can be reduced.

Further, after the main calcination, the ceramic body can be cooled simply by moving it from the calcination chamber to the degreasing chamber without waiting until the inside of the furnace is cooled, so that the calcination time can be greatly shortened.

[Brief description of drawings]

FIG. 1 is a side cross-sectional view of a vertical firing furnace according to the present invention, in which (a) shows a state before firing, (b) shows a degreasing step, and (c) shows a main firing step. Is.

FIG. 2 is a side sectional view of a conventional vertical firing furnace.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Vertical firing furnace 2 Furnace body 4 Firing chamber 5 Degreasing chamber 7 Shutter 9 Heat insulating plate 10 Lifting rod 11 Box 12 Lifting lid

Claims (5)

[Claims] 1. A firing chamber and a degreasing chamber, which are arranged at respective upper and lower positions inside a furnace body and are continuous with each other, are provided with shutters that can be opened and closed at a boundary portion between the firing chamber and the degreasing chamber, and an upper end portion. A box and an elevating lid are attached to the box, and the object to be processed is placed on the box and inserted into the degreasing chamber from below the furnace body upward, and between the degreasing chamber and the baking chamber above it. A vertical baking furnace, which is equipped with an elevating rod for elevating and lowering. 2. The vertical firing furnace according to claim 1, wherein the elevating rod is provided with a rotating mechanism that rotates along an axis of the elevating rod. 3. The vertical firing furnace according to claim 1, wherein the shutter is provided with a cooling mechanism. 4. The vertical firing furnace according to claim 3, wherein a pipe in which cooling water is injected is provided inside the shutter as a cooling mechanism of the shutter. 5. A heat insulating plate for raising and lowering the inside of the baking chamber is provided above the shutter.
Vertical firing furnace described in.