JPH0415142U - - Google Patents
Info
- Publication number
- JPH0415142U JPH0415142U JP5584690U JP5584690U JPH0415142U JP H0415142 U JPH0415142 U JP H0415142U JP 5584690 U JP5584690 U JP 5584690U JP 5584690 U JP5584690 U JP 5584690U JP H0415142 U JPH0415142 U JP H0415142U
- Authority
- JP
- Japan
- Prior art keywords
- power supply
- ion source
- control
- voltage
- control device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims 3
- 230000015556 catabolic process Effects 0.000 claims 1
- 230000002459 sustained effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 230000001133 acceleration Effects 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
- Control Of Voltage And Current In General (AREA)
Description
第1図は本考案によるイオン源の制御装置の1
実施例を示すブロツク図、第2図はイオン源の概
略構成図、第3図は従来例のブロツク図である。
12……アーク電源、13……加速電源、14
……減速電源、18〜20……コンパレータ、2
1〜23……タイマ回路。
Figure 1 shows one of the ion source control devices according to the present invention.
A block diagram showing an embodiment, FIG. 2 is a schematic configuration diagram of an ion source, and FIG. 3 is a block diagram of a conventional example. 12...Arc power supply, 13...Acceleration power supply, 14
... Deceleration power supply, 18-20 ... Comparator, 2
1 to 23...Timer circuit.
Claims (1)
御運転を行う熱フイラメント型イオン源の制御装
置において、 設定電圧に基づく定電圧制御を行い過電流によ
り定電流制御に移行するイオン源電源に対し、該
電源の出力電圧と前記設定電圧との差からブレー
クダウンを検出する検出回路と、該検出回路から
の検出信号が所定時間継続することにより持続放
電を判定し前記電源の立ち下げ用の信号を出力す
るタイマ回路とを設けたイオン源の制御装置。[Scope of Claim for Utility Model Registration] In a control device for a hot filament type ion source that performs automatic control operation through feedback control of ion current, an ion source power supply that performs constant voltage control based on a set voltage and shifts to constant current control due to overcurrent. In contrast, a detection circuit detects a breakdown from the difference between the output voltage of the power supply and the set voltage, and a detection signal from the detection circuit continues for a predetermined period to determine a sustained discharge and is used to shut down the power supply. An ion source control device equipped with a timer circuit that outputs a signal.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990055846U JP2506766Y2 (en) | 1990-05-28 | 1990-05-28 | Ion source controller |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990055846U JP2506766Y2 (en) | 1990-05-28 | 1990-05-28 | Ion source controller |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0415142U true JPH0415142U (en) | 1992-02-06 |
JP2506766Y2 JP2506766Y2 (en) | 1996-08-14 |
Family
ID=31579160
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1990055846U Expired - Fee Related JP2506766Y2 (en) | 1990-05-28 | 1990-05-28 | Ion source controller |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2506766Y2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108695128A (en) * | 2017-04-11 | 2018-10-23 | 上海伟钊光学科技股份有限公司 | Kaufman ion source with line automatic feedback control |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6074299A (en) * | 1983-09-30 | 1985-04-26 | 株式会社東芝 | Ion source power source |
JPS60182639A (en) * | 1984-03-01 | 1985-09-18 | Toshiba Corp | Ion source electric-discharge power supply device |
JPH01265438A (en) * | 1988-04-18 | 1989-10-23 | Nippon Telegr & Teleph Corp <Ntt> | Ion generator |
JPH0254850A (en) * | 1988-08-18 | 1990-02-23 | Nissin Electric Co Ltd | Control method of ion processor |
-
1990
- 1990-05-28 JP JP1990055846U patent/JP2506766Y2/en not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6074299A (en) * | 1983-09-30 | 1985-04-26 | 株式会社東芝 | Ion source power source |
JPS60182639A (en) * | 1984-03-01 | 1985-09-18 | Toshiba Corp | Ion source electric-discharge power supply device |
JPH01265438A (en) * | 1988-04-18 | 1989-10-23 | Nippon Telegr & Teleph Corp <Ntt> | Ion generator |
JPH0254850A (en) * | 1988-08-18 | 1990-02-23 | Nissin Electric Co Ltd | Control method of ion processor |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108695128A (en) * | 2017-04-11 | 2018-10-23 | 上海伟钊光学科技股份有限公司 | Kaufman ion source with line automatic feedback control |
Also Published As
Publication number | Publication date |
---|---|
JP2506766Y2 (en) | 1996-08-14 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |