JPH0415142U - - Google Patents

Info

Publication number
JPH0415142U
JPH0415142U JP5584690U JP5584690U JPH0415142U JP H0415142 U JPH0415142 U JP H0415142U JP 5584690 U JP5584690 U JP 5584690U JP 5584690 U JP5584690 U JP 5584690U JP H0415142 U JPH0415142 U JP H0415142U
Authority
JP
Japan
Prior art keywords
power supply
ion source
control
voltage
control device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5584690U
Other languages
Japanese (ja)
Other versions
JP2506766Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990055846U priority Critical patent/JP2506766Y2/en
Publication of JPH0415142U publication Critical patent/JPH0415142U/ja
Application granted granted Critical
Publication of JP2506766Y2 publication Critical patent/JP2506766Y2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Control Of Voltage And Current In General (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案によるイオン源の制御装置の１
実施例を示すブロツク図、第２図はイオン源の概
略構成図、第３図は従来例のブロツク図である。 １２……アーク電源、１３……加速電源、１４
……減速電源、１８〜２０……コンパレータ、２
１〜２３……タイマ回路。 Figure 1 shows one of the ion source control devices according to the present invention.
A block diagram showing an embodiment, FIG. 2 is a schematic configuration diagram of an ion source, and FIG. 3 is a block diagram of a conventional example. 12...Arc power supply, 13...Acceleration power supply, 14
... Deceleration power supply, 18-20 ... Comparator, 2
1 to 23...Timer circuit.

Claims (1)

【実用新案登録請求の範囲】 イオン電流のフイードバツク制御により自動制
御運転を行う熱フイラメント型イオン源の制御装
置において、 設定電圧に基づく定電圧制御を行い過電流によ
り定電流制御に移行するイオン源電源に対し、該
電源の出力電圧と前記設定電圧との差からブレー
クダウンを検出する検出回路と、該検出回路から
の検出信号が所定時間継続することにより持続放
電を判定し前記電源の立ち下げ用の信号を出力す
るタイマ回路とを設けたイオン源の制御装置。[Scope of Claim for Utility Model Registration] In a control device for a hot filament type ion source that performs automatic control operation through feedback control of ion current, an ion source power supply that performs constant voltage control based on a set voltage and shifts to constant current control due to overcurrent. In contrast, a detection circuit detects a breakdown from the difference between the output voltage of the power supply and the set voltage, and a detection signal from the detection circuit continues for a predetermined period to determine a sustained discharge and is used to shut down the power supply. An ion source control device equipped with a timer circuit that outputs a signal.
JP1990055846U 1990-05-28 1990-05-28 Ion source controller Expired - Fee Related JP2506766Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990055846U JP2506766Y2 (en) 1990-05-28 1990-05-28 Ion source controller

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990055846U JP2506766Y2 (en) 1990-05-28 1990-05-28 Ion source controller

Publications (2)

Publication Number Publication Date
JPH0415142U true JPH0415142U (en) 1992-02-06
JP2506766Y2 JP2506766Y2 (en) 1996-08-14

Family

ID=31579160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990055846U Expired - Fee Related JP2506766Y2 (en) 1990-05-28 1990-05-28 Ion source controller

Country Status (1)

Country Link
JP (1) JP2506766Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108695128A (en) * 2017-04-11 2018-10-23 上海伟钊光学科技股份有限公司 Kaufman ion source with line automatic feedback control

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6074299A (en) * 1983-09-30 1985-04-26 株式会社東芝 Ion source power source
JPS60182639A (en) * 1984-03-01 1985-09-18 Toshiba Corp Ion source electric-discharge power supply device
JPH01265438A (en) * 1988-04-18 1989-10-23 Nippon Telegr & Teleph Corp <Ntt> Ion generator
JPH0254850A (en) * 1988-08-18 1990-02-23 Nissin Electric Co Ltd Control method of ion processor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6074299A (en) * 1983-09-30 1985-04-26 株式会社東芝 Ion source power source
JPS60182639A (en) * 1984-03-01 1985-09-18 Toshiba Corp Ion source electric-discharge power supply device
JPH01265438A (en) * 1988-04-18 1989-10-23 Nippon Telegr & Teleph Corp <Ntt> Ion generator
JPH0254850A (en) * 1988-08-18 1990-02-23 Nissin Electric Co Ltd Control method of ion processor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108695128A (en) * 2017-04-11 2018-10-23 上海伟钊光学科技股份有限公司 Kaufman ion source with line automatic feedback control

Also Published As

Publication number Publication date
JP2506766Y2 (en) 1996-08-14

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Legal Events

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