JPH04148814A - Non-contact type measuring apparatus - Google Patents

Abstract

PURPOSE:To measure both the attitude, i.e. the inclination, and the distance of the surface of a material to be inspected accurately at the same time by picking up the images of a plurality of marks arranged in a mark pattern via the surface of the material to be inspected. CONSTITUTION:The light of an attitude detecting mark pattern is projected on a surface of a material to be inspected 14 from a pattern pickup means 12. The mark pattern light is regularly reflected from the surface 14 and received with an image sensing means 16. At this time, the image of the projected mark pattern light is formed on a two-dimensional photoelectric converting means 20. At this time, at least two or more marks are arranged in the mark pattern light. The marks are received at the positions which are different in correspondence with the attitude of the surface 14. Therefore, an attitude operating means 22 can operate the distance between an attitude detecting means 10 and the surface 14 and the relative inclination of the surface 14 based on the two-dimensional coordinate data of each mark which is received by the converting means 20.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a non-contact measuring device that non-contactly measures the distance and inclination (hereinafter referred to as posture) to the surface of an object to be inspected.

[Prior Art] Devices for non-contact measurement of the inclination of the surface of a shiny object to be inspected are well known. This conventional device has a probe in which a laser light source, a light receiving element r, and 17 photodiode arrays are arranged in a predetermined positional relationship, and the beam light emitted from the laser light source is directed onto the surface of the object to be inspected. A predetermined position is irradiated (hereinafter, the point of the irradiated beam light is referred to as a measurement point), and the reflected beam light is received by a photodiode array.

At this time, the beam light incident on the surface of the object to be inspected from the angle θ is reflected in the direction of 1]-reflection, but if the surface of the object to be inspected is tilted by an angle δ, the reflected beam light is
It is reflected in the angular direction of θ+26). Therefore, the inclination δ of the surface of the object to be inspected can be detected from the position of the beam light incident on the photodiode array placed at a predetermined position in the 11-reflection direction.

However, this conventional device measures the inclination on the premise that the surface of the object to be inspected is inclined around a predetermined measurement point as a fulcrum. Therefore, when there is a change in the distance from the probe to the measurement point, that is, when there is a displacement, there is a problem that only the inclination can be detected.

Additionally, measurement devices that measure only the distance to the surface of the object to be inspected without contact are also known, and examples of such 4111 measurement devices include optical distance sensors that utilize the well-known principle of H-angle measurement. , currently ([, has been put into practical use.

However, this conventional apparatus has a problem in that it cannot accurately measure the distance between the probe and the surface of the object to be inspected by 11 degrees unless it has a configuration that eliminates the influence of the inclination of the surface of the object to be inspected.

In addition, when optically measuring the surface properties of the surface of the object to be inspected, such as smoothness and gloss, the distance between the surface of the object to be inspected and the measuring device and the relative inclination of the two, etc. An important condition is to accurately measure and control the positional relationship between the two so that the distance and inclination meet predetermined reference values.

However, the above-mentioned conventional technology can only detect either the inclination of the surface of the object to be inspected or the distance, and in particular, the inclination measurement is severely restricted and difficult to put into practical use.

Therefore, when optically measuring the surface texture of an object to be inspected, it is necessary to use a contact-type posture control device for positioning, and as a result, for example, it is difficult to measure the surface texture after coating. The problem was that I couldn't do it.

[Problems to be Solved by the Invention] The present invention has been made in view of the above-mentioned conventional problems, and its purpose is to simultaneously determine the attitude of the surface of an object to be inspected, that is, both the inclination and the distance. 1. Developing a non-contact measuring device that can accurately measure without contact.

Another object of the present invention is to provide a non-contact measuring device that can optically and accurately measure the surface properties of an object to be inspected without contact.

[Means for Solving the Problems] FIG. 1 shows the basic configuration of a non-contact measuring device of the present invention.

The apparatus of the present invention comprises: a pattern projection means 12 for projecting attitude detection mark pattern light having at least two "-" marks arranged thereon toward a surface 14 of an object to be inspected; and a predetermined positional relationship with the pattern projection means 12. an imaging means 16 arranged so as to hold the mark pattern light reflected by the surface 14 of the object to be inspected as two-dimensional information; and based on the two-dimensional coordinates of each mark included in the imaged mark pattern light It is characterized by including: posture calculation means 22 that calculates an angle and distance with respect to the surface 14 of the object to be inspected as posture information.

In the above configuration, one stage of pattern projection 12 and the imaging means 1
It is preferable that 6 is formed as an attitude detection means 17 which is handled as one body with all the predetermined CI'L positional relationships.

The imaging means 16 also includes an imaging means 18 that collects the mark pattern light reflected by the surface 14 of the object to be inspected, and a two-dimensional photoelectric device that images the formed pattern light as two-dimensional 7-trix information. It is preferable that the configuration includes a converting means 20.

Furthermore, the marks included in the mark pattern light may be formed using not only light spots but also dark spots as necessary.

Principle of the Invention Next, prior to a detailed explanation of the present invention, the principle of the present invention will be explained in detail.

The present inventor studied conventional measurement techniques for non-contact measurement of the inclination or distance of the surface 14 of the object to be inspected, which determines the gloss. As a result, conventionally, only either the inclination or the distance of the surface 14 of the object to be inspected can be measured, and it has been difficult to measure the inclination and distance simultaneously and separately.

After investigating the cause of this, we discovered that because conventional measurement techniques use only one light source or light spot, it is not possible to extract both tilt information and distance information of the surface 14 of the object to be inspected. .

Furthermore, although 51 measurements of inclination and distance require information containing two components, the inclination component and the distance component, conventional measurement techniques cannot extract either one of the components. The other component may be sacrificed, or the structure may be such that it is not affected by one component, or if the other component is not affected, the structure may be such that both components cannot be separated. I realized that this was the main reason for not being able to solve the above problem.

Therefore, the present inventors prepared a mark pattern light for attitude detection in which at least 2 survey marks were arranged, and projected it from the pattern projection means 12 toward the surface 14 of the object to be inspected.

Furthermore, if the inspection object surface 14 is viewed as a mirror and the mark slam light projected from the pattern projection means 12 is imaged on the imaging means 16- through the inspection object surface 14, then an image is taken. , depending on the attitude of the surface 14 of the object to be inspected interposed between the
, we thought that the imaging position of each imaged mark would change. In other words, posture 5 includes two components: inclination and distance.
For one measurement, these two components must be determined. Information for extracting these components requires unique multi-point information and must reflect the attitude of the surface 14 of the object to be inspected. For this reason, we have come to the conclusion that this information can be obtained by focusing on the mark pattern that serves as a reference.

Next, the measurement principle of the present invention will be explained in more detail based on FIGS. 2 and 3.

FIG. 2 shows the case where one mark 1j is added in the mark pattern light. In the same figure, 4.4.
a represents a mark pattern projection surface on the pattern projection means 12, and 54a represents a mark pattern light receiving surface on the two-dimensional photoelectric conversion means 20''.

First, as shown in FIG. 2(a), the surface 14 of the object to be inspected is
Considering the case where is at the reference position of measurement d], the coordinate point P of the mark in the mark pattern projection plane 44a,
is the mark pattern light-receiving surface 54 through the inspection object surface 14.
a''-coordinate point P,' is reached.

However, even when the surface 14 of the object to be inspected is not at the measurement reference position, if it is in a spatial positional relationship as shown in FIGS. 2(b) and 2(c), the mark P is
Similarly to a), the coordinate point indicated by P1' on the mark pattern light receiving surface 54a is reached.

This is the case shown in Fig. 2(a), Fig. 2(b),
It is not possible to distinguish between the case shown in (c) and the inclination and distance of the surface 14 of the object to be inspected cannot be accurately measured.

On the other hand, the mark pattern light receiving surface 44 is shown in FIG.
The measurement principle of the present invention is shown in which two marks p, , p2 are provided at a-, 1-. Here, Pl is located at the same seven coordinate positions as Pl shown in FIG. 2 (not shown), and P2 is located at a different coordinate position. Furthermore, FIG. 3(a),
The position of the inspection object surface 14 in (b) and (c) is the second
This corresponds to the position of the surface 14 of the object to be inspected in Figures (a), (b), and (C), respectively.

As shown in FIG. 3(a), when the surface 14 of the object to be inspected is at the measurement reference position, the marks P1 and P2 of the mark pattern 44a J-, respectively, are on the mark pattern light-receiving surface 54.
1 [] reaches the coordinate point P,', P,' of a.

Then, as shown in FIGS. 3(b) and 3(c), when the surface of the object to be inspected 14 is not at the measurement base or position, the mask P similarly reaches the coordinate P1' of the mark pattern light receiving surface 54a. However, due to geometric considerations, the mark P is as shown in Fig. 3(b).
In this case, the coordinate point P2b (≠P2') is reached, and in FIG. 3(C), the coordinate point P2='(≠P2',P2=') is reached.

This means that if the positional relationship of the inspection object surface 14 differs, the coordinate points of the two marks imaged on the mark pattern light-receiving surface 54a'2 will correspondingly differ. In other words, this indicates that the mark patterns received by the light receiving surface 54a of the two-dimensional photoelectric conversion means 20 are different. Of course, the number of marks included in the mark pattern light may be as large as possible, but it is necessary to be able to distinguish and recognize individual marks. Furthermore, it is also possible to increase the measurement accuracy by increasing the number of marks.

From the above, if the imaged mark pattern light is analyzed based on the change in the imaging position of the mark of the imaged mark pattern light, the relative attitude of the attitude detection means 10 and the surface of the object to be inspected 14 can be determined. In other words, it will be understood that tilt and distance can be measured simultaneously without contact.

Next, a case will be considered in which the surface properties of the surface 14 of the object to be inspected are optically measured. In this case, usually Figure 3 (
As shown in a), since the imaging condition of constant n1 is set with the surface 14 of the object to be inspected at the measurement reference position, this positional relationship has a significant influence on the measured value. For this reason, conventional contact-type positioning has been relied upon to measure surface properties. In contrast, (7) in the present invention, as described above, the surface of the object to be inspected is
Since the posture consisting of the inclination and distance of 4 can be measured in a non-contact manner, using this makes it possible to accurately perform non-contact positioning, which has been considered difficult in the past.

When a predetermined surface texture detection pattern light is projected onto the surface 14 of the object to be inspected which has been positioned in a non-contact manner in this manner, the pattern light reflected and modulated by the surface 14 of the object to be inspected includes the surface of the object to be inspected 14. Contains physical information. Therefore, various surface properties can be measured in a non-contact manner by analyzing the reflective batten.

As described above, according to the present invention, it is possible to accurately measure the attitude of the shiny surface 14 of the object to be inspected in a non-contact manner.
Moreover, it will be understood that the posture of the surface 14 of the object to be inspected can be controlled to a predetermined reference position based on the detected posture, and the surface texture can also be measured in a good non-contact manner.

[Work] Next, the present invention will be explained in detail.

When performing posture detection using the apparatus of the present invention, first, mark pattern light for posture detection is projected from the pattern photographing means 12 toward the surface 14 of the object to be inspected.

Then, this mark pattern light is reflected by + and E from the surface 14 of the object to be inspected and is received by the imaging means 16. At this time, since the imaging means 12 is set to focus on the projection surface 44a of the pattern projection means 12, the projected mark pattern light is transmitted to the two-dimensional photoelectric conversion means 20''-
The image will be formed.

In the present invention, at least two or more marks are arranged within the mark pattern light, and each of these marks is received at a different position depending on the attitude of the surface 14 of the object to be inspected. Therefore, the two-dimensional +! of each mark received by the first stage of two-dimensional photoelectric conversion 20! Based on the Iv target information, the posture calculation means 22 can calculate the distance and relative inclination between the posture detection means 10 and the surface of the object to be inspected]4.

As described above, according to the present invention, by imaging a plurality of marks arranged at predetermined positions in a mark pattern through the surface 14 of the object to be inspected, images can be taken according to the attitude of the surface 14 of the object to be inspected. The two-dimensional coordinate position of each mark changes. At this time, if there is only one mark, it is not possible to detect the attitude of the surface 14 of the object to be inspected, that is, both the inclination and the distance, but if there are at least two marks! By determining the position of the surface 14 of the object to be inspected, it becomes possible for the first time to detect the attitude of the surface 14 of the object to be inspected, that is, the dual angles of inclination and distance, simultaneously and with 11" accuracy without contact.

[Effects of the Invention] As described above, according to the present invention, it is possible to simultaneously and accurately detect the attitude, ie, the distance and angle, of the surface of a shiny object to be inspected in a non-contact manner.

[Description of Other Inventions] [Description of Second Invention] In the non-contact measuring device of the second invention (as stated in claim (2)), the attitude detection means 10 and the object to be inspected are connected based on the detected attitude. It is characterized by including an attitude control means for relatively controlling the positions of the two so that the attitude relative to the surface 14 becomes a predetermined reference position.

As a result, according to the second invention, it becomes possible to control the relative position of the measuring device and the object to be inspected to the reference position in a non-contact manner based on the measured attitude of the surface of the object to be inspected. .

[Description of the third invention: Non-contact measuring device of the third invention (as described in claim (13))
, the surface of the object to be inspected 1 whose posture is controlled to the reference position.
4, a predetermined surface texture detection pattern light is projected from the pattern projection means 12, and the specularly reflected light is imaged as two-dimensional and optical information using the imaging means]6. Then, the surface texture of the surface 14 of the object to be inspected is measured based on the optical modulation of the imaged surface texture detection pattern light.

In this way, according to the third invention of 'C1, it becomes possible to optically measure the surface properties of the surface of the object to be inspected, which is positioned and controlled at a predetermined reference position, in a non-destructive and non-contact manner.

In particular, it is possible to optically measure the surface texture of the surface of an object to be inspected, even in fields that could not be achieved using conventional contact positioning control means, such as the field of FA (Factory/Flexible Automation). This has the effect of making it possible to do so.

[Example] Next, a preferred example of the present invention will be described in which the surface properties of the painted surface of the object to be inspected (hereinafter referred to as the painted surface), particularly the smoothness of the painted surface (undulations, citrus skin, etc.), are measured. This will be explained using an example.

FIG. 4 shows a preferred example of the non-contact measuring device of this embodiment. The measuring device of the embodiment measures the surface properties of the coated surfaces 32a of the objects 32 to be inspected that are conveyed one after another through the line conveyor 3 (II-1=) after painting has been completed. includes a non-contact probe 40 disposed at 1, a posture calculation circuit 60 and a surface texture discrimination circuit 70 connected to the probe 40.

The non-contact probe 40 includes a support housing 42, a pattern projection device 44, and a TV left camera 6 as an imaging device. The support casing 42 has an open bottom end and is formed into a cylindrical shape, into which a pattern projection device 44 and a TV left camera 6 are fixed in a predetermined positional relationship.

The pattern projection device 44 generates mark pattern light 1 for attitude detection shown in FIG. 6(A). It is formed so as to be able to selectively project the mark pattern light 2OO for surface texture measurement shown in FIG.

The predetermined pattern light projected from the pattern projection device 44 is transmitted to a mirror 4 provided on the side surface of the support case 42.
8 toward the painted surface 32a of the object 32 to be inspected.

Then, this pattern light is reflected by the painted surface 32a, and is imaged by the TV left camera 6 via a mirror 50 provided on the side surface of the probe.

The attitude calculation circuit 6 [] is formed to use the non-contact probe 40 to detect the distance between the probe 4 [] and the painted surface '32a and its inclination angle.

That is, the posture calculation circuit 60 outputs the first support signal S1 supporting the projection of the posture detection mark pattern shown in FIG. 6(A) to the pattern projection device 44. As a result, the pattern projection device 44 projects the mark pattern light 100 shown in FIG.
After being subjected to IF reflection at a, the image is captured by the imaging device 46. The imaging device 46 outputs the video signal S2 at this time to the attitude calculation circuit 60.

The posture calculation circuit 60 performs image processing on this video signal S2,
Displayed on monitor display 60-L.

Furthermore, by analyzing and processing this video signal, the distance between the probe/lO and the painted surface 32g and the relative inclination of the two are calculated, and this is displayed on the monitor display 1 noise 62, and this is also It is output to the attitude control device 64 as information S3.

The attitude control device 64 controls the attitude of the non-contact probe 4 [] to 6.
It is composed of an actuator 66 that controls the axis, and an actuator control I/roller 68 that controls this actuator 66. Then, based on the posture information S3 detected by the posture calculation circuit 60, posture control is performed so that the non-contact probe 40 is at a predetermined reference position with respect to the painted surface 32a.

Further, the surface quality determination circuit 70 is formed to measure the surface quality of the painted surface 32a. Painted surface 3
When the non-contact probe 40 is posture-controlled to the reference position with respect to 2a, the surface texture discrimination circuit 70 issues a second control command 1 instructing the projection of the surface texture detection pattern light 200 shown in FIG. 6(B). S4 is directed to the pattern projection device 44 and output. As a result, the pattern projection device 44 projects the bang light 200 onto the painted surface 32 a, and the jl-reflected light is imaged by the TV right camera 6 and outputted to the surface texture discrimination circuit 70 as a video signal S2. Ru. The surface quality determination circuit 70 determines the quality of the painted surface '32a based on the optical modulation of the detection pattern light inputted as the video signal S2. Please display the determination results on the monitor display 62.
- Displayed in -.

FIG. 5 shows a state in which the bang projection device 44 and the TV right camera 6 housed in the probe 40 are expanded in a plane symmetrical direction by means of mirrors 48 and 50. This optically operates exactly the same as the probe 40 shown in FIG. 4.

In this space, if we consider an XYZ orthogonal coordinate system (with the origin as O), the pattern projection device 44 has an incident angle θ (the angle between Z and 11) at a distance r from the origin 0.
It is installed in the position of

Mata, T V h Mela 46 i; t, distance from origin O @
e2, it is installed at the position of the reflection angle θ (the angle formed by the Z axis and r). In the example, this human reflection angle θ is 45°
is set to .

Moreover, as mentioned above, this pattern projection device 44
Command S from posture calculation circuit 601 and surface texture discrimination circuit 70
1. According to S4, the mark pattern light 100 for posture detection and the surface texture detection pattern light 2 as shown in FIG.
(] Is it possible to selectively specify 0?

In the present invention, the mark slam light 10 for the posture detection 84 is provided.
0 has at least two marks 110. In this embodiment, the mark pattern is divided into four parts as shown in FIG. 6(A), and square light spots are placed in the center of each divided area as marks 11 [] and [7]. Further, areas other than these marks 110 are formed as dark areas.

Further, the surface texture detection pattern light 200 is shown in FIG.
As shown in B), it is formed of a black and white striped lattice pattern (with a pitch of 3 mm in this embodiment) with equal intervals.

Then, when each of these pattern lights is projected from these pattern projection devices 44 toward the painted surface 32a, the 11
``The reflected image will be captured by the TV right camera 6.

The TV right camera 6 of the embodiment has a display surface 4.4 of a pattern projection device 44 using an imaging lens 52 that has a principal point 52a.
It is designed to focus on point a.

Furthermore, the distance from this principal point 52a to the light receiving surface 54a of the two-dimensional photoelectric converter r54 is set to . As a result, each pattern light shown on the display surface 4.4a of the pattern projection device 44 is reflected by the coating surface 2a, and is imaged on the two-dimensional photoelectric conversion element 54 via the imaging lens 52. That will happen.

The image data captured by the two-dimensional photoelectric conversion element 54 is outputted to the attitude determination circuit 607 and the surface texture determination circuit 70 as two-dimensional pigs of each pattern of light.

FIG. 7 shows a specific example of the circuit configuration of a computer 80 configured to function with the attitude calculation circuit 60 and the surface texture discrimination circuits 70 and 12.

This computer 80 has a well-known CPU 82 and ROM 84.
．． 17, mainly consisting of RAM 86 and frame memory 88,
These parts and the input/output circuit 92. The A/D converter (hereinafter referred to as the "image input circuit") 4, the D/A converter (hereinafter referred to as the image output circuit) 06 and the bus 9 [] are connected to the image processing circuit 7, and the image processing circuit and logic It is configured to function as an arithmetic circuit.

In this case, the pattern projection device 44 and the actuator controller 68 are connected to the input/output circuit 92, respectively.

Further, the TV right camera 6 is connected to the image input circuit 94, and the monitor display 62 is connected to the image output circuit 96.

The present embodiment has the following configuration.Next, the operation of non-contact measurement of the smoothness of the painted surface 32a using this device will be explained. The image data output from the TV right camera 6 is constantly converted into a digital signal by the image input circuit 92, and the latest 2' information for one stroke of the TV camera is always stored and updated in the frame memory 88. There is.

FIG. 8 shows an example of the vulgarity measuring operation of this embodiment.

First, the pattern projection device 44 projects the posture-enhancing mark pattern light 100 shown in FIG. At this time, the TV right camera 6 is capturing the image of the line conveyor '3 [ ], which is conveying inspection parts '32 that have finished the painting process one after another (step 10).
).

Then, the combination coater 80 determines whether or not the mark pattern light 1 (] () or the image pickup 11J is enabled based on the image data that is sequentially updated and stored in the frame memory 88. Prepare for inspection of parts transported via [) (Step 0)
.

At this time, if there is no component 32 to be inspected on the line conveyor 30, the mark pattern light 100 will be diffused by the diffusion surface DS on the top surface of the line conveyor. Therefore, the TV right camera 6 cannot image the mark pattern light 100, so the computer 80 determines that the part '32 has not been delivered and repeats this preparation process (7
and waits (step 30, No).

Furthermore, when the component 32 is transported by the line conveyor 30 and reaches a predetermined position where the non-contact probe 40 is installed, the TV right camera 6 images the mark pattern light 100 reflected by the painted surface 32a of the inspection component 32. I will do it.

As a result, the computer 80 detects that the part has been transported and exits from this process (step 30.
;S), the next posture detection processing operation is started (step 4()).

When this attitude detection process is started, the apparatus of the embodiment shifts to the attitude a1 measurement process subroutine shown in FIG. Its attitude is controlled so that it comes to the reference position.

Next, the processing procedure in step 40 is explained in the flowchart shown in FIG. 9 and in the non-contact probe 4 shown in FIG.
This will be explained in detail using the 0 coordinate system.

First, when the operation of this subroutine is started, each mark (Pi, where 1 is set in the mark) is calculated from the image data stored in the frame memory 88. 3), and calculate the XYZ coordinate values of Pl' (step 41).

At this time, since the XY coordinate values of each mark (Pi) of the mark pattern displayed on the pattern projection device 44 and each parameter of the non-contact probe 40 are known, the painted surface is 32a, that is, the distance and angle from the probe 40 to the paint 11ii 32a can be solved and calculated (step 42
).

As shown in Figure 1 (), the painted surface 2a is
x + b y + c z→-d = 0 (
c > 0), and its normal vector is defined as r- (a.

b.

C) If it is 1, r is the slope of the painted surface 32a It will be expressed.

Also, next vector Think of Toru.

Also, K i - Ci x P shall be.

and, P the two marks j j) Then, however ” shall be.

becomes.

moreover, When calculating the above d, becomes.

Here, since equations (2) and l) change the coefficients of the painted surface equation of equation (1), it is possible to eliminate the attitude of the painted surface 32 a with respect to the coordinate system based on the imaging system. (Step 42). For example, if a=b=d=0, the painted surface 32a is at the measurement reference position.

Also, from now on, the non-contact probe 4o will be applied to the painted surface 32a.
It is also possible to back-calculate what kind of attitude the object is in with respect to the measurement reference position for performing the smoothness measurement (step 43).

Then, this non-contact probe 40 is adjusted as far as possible for posture compensation [
In other words, the inclination and distance are compensated by 1 [If the movement is made, the back calculation value obtained in step 43 is converted into the attitude correction data so that it can be indicated whether it is in the measurement h (quasi-position) with respect to the painted surface 32a. Conversion and backward calculation are performed (step 44).

Thereafter, based on this posture correction data, it is determined whether the non-contact probe 40 is at the reference position with respect to the painted surface 32a (step 45).

If the attitude correction data is 0, it is determined that the non-contact probe 40 is already installed at the reference position and there is no need for attitude correction. Return to the main routine shown (step 45
．． YES).

In addition, if the posture correction data is other than 0, the posture correction iE
Since this is necessary, the process proceeds to the next subroutine (step 45: No).

When it is determined that the attitude correction iE is necessary, the attitude correction data is output as an attitude correction control signal S3 to the actuator controller 68, and the actuator 66 is driven and controlled. As a result, the non-contact probe 40
Posture correction control is performed for the inspection part 32 so that it approaches the measurement reference position (step 46).

By repeating such attitude correction, it becomes possible to more accurately and precisely control the attitude of the non-contact probe 40 to the smoothness measurement reference position.

When the non-contact probe 40 is set to the reference position by such attitude 51 measurement processing operation in step 40, the computer 80 then issues a projection command S4 of the pattern light 200 for smoothing measurement shown in FIG. 6(B). is output to the pattern projection device 44.

As a result, this pattern light 200 is projected from the pattern projection device 44 toward the painted surface 32a (step 50).
, the smoothness ITII is determined (step 60).

That is, the W slippage measurement pattern light 200 shown in FIG. 6(B) is a black and white striped lattice pattern with equal intervals. Therefore, if this is used as a reference grid without distortion and an image is captured by the TV right camera 6 through the painted surface 32a, the grid of the reference pattern will be distorted depending on the smoothness of the painted surface 32a. The computer 80 quantifies the degree of distortion and measures and evaluates the smoothness of the painted surface 32a (step 60).

The computer 80 displays this measurement result on the monitor display 62'' through the image output circuit 96 and stores the data in the RAM 86 (step 70), and returns to the first step 10 of the main routine. Go back and repeat the same process for the next part.

According to the apparatus of this embodiment described in detail below, the smoothness of the painted surface 32a can be measured without contact.
There are almost no restrictions on the coated surface 32a, and measurement can be performed without damaging the coated surface 32a even in an undried state.

Note that the present invention is not limited to the above embodiments,
Various variations are possible within the scope of the invention.

For example, in the above embodiment, the smoothness of the surface of the object to be inspected is measured, but the present invention is not limited to this, and can also be applied to non-contact measurement of various surface properties such as surface gloss and scratches. I can do it.

Further, the various pattern lights projected from the pattern projection device 44 are not limited to the pattern lights as shown in FIGS.
Any pattern may be adopted if necessary.

In addition, in the above embodiment, the mark pattern light 1 for attitude detection is
Although the description has been made by taking as an example the case where four marks are arranged within 00, the present invention is not limited to this, but the number of each mark can be any number as required as long as it is two or more.

Furthermore, in this embodiment, the shape of the mark is square in 1.
It can be any shape as long as it can be identified.

Furthermore, in the above embodiments, the posture of the non-contact probe 40 is driven and controlled with respect to the surface 32a of the object to be inspected, but the present invention is not limited to this, and the posture of the object to be inspected can be adjusted as necessary. It may also be controlled.

[Brief explanation of drawings]

Fig. 1 is a block circuit diagram showing the basic configuration of a non-contact measuring device according to the present invention, Figs. 2 and 3 are diagrams explaining the principle of the present invention, and Fig. 4 is a conveying belt conveyor. FIG. 5 is an explanatory diagram showing a preferred example of a non-contact measuring device configured to measure the surface properties of the surface of a painted object. FIG. 5 is an explanatory diagram showing the detailed configuration of a non-contact probe. is an explanatory diagram of the display pattern; FIG. 7 is a circuit diagram showing the detailed configuration of the computer that constitutes the main part of the present invention; FIGS. 8 and 9 show the operation of the device of this embodiment. Flowchart 1 and FIG. 10 are explanatory diagrams of the geometric model of the non-contact probe. 32... Inspection object, 32a... Painted surface, 40... Probe, 44... Pattern projection device, 46... TV right camera 52... Lens, 54... Two-dimensional photoelectric conversion r, 60 ...Attitude calculation circuit, 64.. Attitude control device, 70.. Surface texture discrimination circuit. Agent: Patent attorney Yuki Fuse (1 other person)

Claims (3)

[Claims] (1) A pattern projection means for projecting a mark pattern light for posture detection, in which at least two or more marks are arranged, toward the surface of the object to be inspected, and a pattern projection means arranged to have a predetermined positional relationship with the pattern projection means, An imaging means that images the mark pattern light reflected on the surface of the object as two-dimensional information, and an angle and distance to the surface of the object to be inspected based on the two-dimensional coordinates of each mark included in the imaged mark pattern light. A non-contact measuring device comprising: posture calculation means for calculating posture information; (2) In claim (1), based on the calculated posture information, the positions of the pattern projection means and the imaging means are relatively controlled so that the postures of the pattern projection means and the imaging means with respect to the surface of the object to be inspected become predetermined reference postures. A non-contact measurement device characterized by including attitude control means. (3) In claim (2), the pattern projection means is formed to project a predetermined surface texture detection pattern light onto the surface of the object to be inspected whose posture is controlled to a reference posture, and the image pickup means is formed to image the surface texture detection pattern light reflected on the surface of the object to be inspected as two-dimensional and optical information and output it to surface texture discrimination means, and the surface texture discrimination means is configured to image the surface texture detection pattern light reflected on the surface of the object to be inspected. A non-contact measuring device characterized in that the property of the surface of the object to be inspected is determined based on optical modulation of the object.