JPH04143092A - Laser beam machine - Google Patents
Laser beam machineInfo
- Publication number
- JPH04143092A JPH04143092A JP2267286A JP26728690A JPH04143092A JP H04143092 A JPH04143092 A JP H04143092A JP 2267286 A JP2267286 A JP 2267286A JP 26728690 A JP26728690 A JP 26728690A JP H04143092 A JPH04143092 A JP H04143092A
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- workpiece
- laser
- work
- irradiated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims description 6
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 abstract description 5
- 238000010586 diagram Methods 0.000 description 6
- 239000000498 cooling water Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000010791 quenching Methods 0.000 description 3
- 239000006096 absorbing agent Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000000171 quenching effect Effects 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Mounting And Adjusting Of Optical Elements (AREA)
- Laser Beam Processing (AREA)
- Optical Elements Other Than Lenses (AREA)
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野コ
本発明は、レーザ光を被加工物の表面に照射して加工す
るレーザ加工装置に関し、さらに詳細には、熱処理加工
を行なう際に、被加工物の表面及び背面を同時に加工す
ることのできるレーザ加工装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a laser processing device that processes the surface of a workpiece by irradiating a laser beam onto the surface of the workpiece. The present invention relates to a laser processing device that can simultaneously process the front and back surfaces of a workpiece.
[従来の技術]
従来、レーザ光を用いた熱処理加工では、主にレーザ焼
入れなとか行なわれている。これは、第6図に示すよう
に、レーザ発振器21から出力されたレーザ光22を、
反射鏡23によって方向転換した後、レーザ加エノスル
24内に収納された焦点距離Fの集光レンス25によっ
て集光する。[Prior Art] Conventionally, heat treatment using laser light mainly involves laser hardening. As shown in FIG. 6, this means that the laser beam 22 output from the laser oscillator 21 is
After the direction is changed by the reflecting mirror 23, the light is condensed by a condensing lens 25 with a focal length F housed in the laser processing enosle 24.
被加工物26は、移動装置27によって移動されつつ、
表面ヘレーザ光22の照射を受けることで、焼入れが行
なわれる。While the workpiece 26 is being moved by the moving device 27,
Hardening is performed by irradiating the surface with laser light 22.
レーザ焼入れの場合、高周波焼入れなとの他の焼入れ方
法に比べ、被加工物を局部的に、かつ、極めて短時間で
加熱でき、さらに、母材への熱拡散による自己冷却作用
を用いるため、水冷などの作業を伴わないといった利点
がある。In the case of laser hardening, compared to other hardening methods such as induction hardening, the workpiece can be heated locally and in an extremely short time, and furthermore, because it uses a self-cooling effect due to heat diffusion to the base material, It has the advantage of not requiring work such as water cooling.
また、入熱量も少ないため、他の焼入れ方法に比べ、焼
入れ歪みも小さく、焼入れ後の修正加工を省略、または
大幅に削減することかできる。Furthermore, since the amount of heat input is small, the quenching distortion is smaller than that of other quenching methods, and post-quenching correction work can be omitted or significantly reduced.
[発明が解決しようとする課題]
しかしながら、第6図に示すように、被加工物26の断
面積が比較的小さく、それに対し、加工方向の長さが長
いような場合、レーザ焼入れにおいても入熱による焼入
れ歪みが無視できなくなる。[Problems to be Solved by the Invention] However, as shown in FIG. 6, when the cross-sectional area of the workpiece 26 is relatively small and the length in the processing direction is long, the laser hardening process may also be difficult. Hardening distortion due to heat cannot be ignored.
第6図において、1面以上に焼入れを行なう場合、第7
図に示すように、最後に焼入れを行なった面が、レーザ
光の入射方向に対して凸となるような熱変形か生じる。In Figure 6, when hardening is performed on more than one surface, the seventh
As shown in the figure, the surface that was finally hardened undergoes thermal deformation such that it becomes convex with respect to the direction of incidence of the laser beam.
このため、焼入れ後に焼入れ面の平面度等を修正する必
要が生じ、前述したようなレーザ焼入れの利点が失われ
ていた。For this reason, it became necessary to correct the flatness of the hardened surface after hardening, and the advantages of laser hardening as described above were lost.
本発明は、上述した問題点を解決するためになされたも
のであり、低歪みかつ高能率の熱処理加工を行なうこと
か可能なレーザ加工装置を提供することを目的としてい
る。The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a laser processing apparatus that can perform heat treatment processing with low distortion and high efficiency.
[課題を解決するための手段]
この目的を達成するために、本発明のレーザ加工装置は
、レーザ光の、被加工物への照射面に対して背面側に、
少なくとも1個の集光反射鏡を設けている。[Means for Solving the Problems] In order to achieve this object, the laser processing apparatus of the present invention has a laser beam on the back side with respect to the irradiation surface of the workpiece with the laser beam.
At least one condensing reflector is provided.
さらに、集光反射鏡によって反射されたレーザ光が、被
加工物の背面側に照射されるよう、集光反射鏡を駆動す
る駆動手段を設けている。Furthermore, a driving means for driving the condenser reflector is provided so that the laser beam reflected by the condenser reflector is irradiated onto the back side of the workpiece.
なお、レーザ光の被加工物表面への照射部直前における
ビーム径は、被加工物の加工方向に対して直交方向の長
さよりも、大きなビーム径であることを必要とする。Note that the beam diameter immediately before the irradiation part of the laser beam onto the surface of the workpiece needs to be larger than the length in the direction orthogonal to the processing direction of the workpiece.
[作用]
上記の構成を有する本発明によれば、レーザ光を直接照
射される被加工物の表面側で加工か行なわれるのと同時
に、被加工物へ照射されないレーザ光が、背面側に配置
された集光反射鏡に到達し、反射した後、被加工物の背
面側に照射され、加工が行なわれる。[Operation] According to the present invention having the above configuration, processing is performed on the front side of the workpiece that is directly irradiated with laser light, and at the same time, the laser light that is not irradiated onto the workpiece is placed on the back side. After reaching the converging reflector and being reflected, the light is irradiated onto the back side of the workpiece, and processing is performed.
集光反射鏡は、被加工物の形状や、寸法に応じて、駆動
手段によって駆動し、
背面側への照射位置や、照射スポット径を調整する。こ
れにより、レーザ光を直接照射される被加工物の表面側
と、集光反射鏡を介して照射される背面側の、双方にお
ける照射パワー密度なと、レーザ光の照射条件を均等化
する。The condensing reflector is driven by a driving means to adjust the irradiation position on the back side and the irradiation spot diameter according to the shape and dimensions of the workpiece. This equalizes the irradiation conditions of the laser beam, including the irradiation power density on both the front side of the workpiece, which is directly irradiated with the laser beam, and the back side, which is irradiated with the laser beam through the condensing reflector.
[実施例]
以下、本発明を具体化した一実施例を図面を参照して説
明する。[Example] Hereinafter, an example embodying the present invention will be described with reference to the drawings.
最初に、第1図を参照して、本発明のレーザ加工装置の
概略を示す。First, referring to FIG. 1, an outline of the laser processing apparatus of the present invention will be shown.
CO2レーザ発振器1から発振された波長10゜6μm
(マイクロ・メートル)のレーザ光2は、反射鏡3によ
って反射され、レーザ加工ノズル4に到達する。Wavelength 10°6 μm oscillated from CO2 laser oscillator 1
(micrometer) laser beam 2 is reflected by a reflecting mirror 3 and reaches a laser processing nozzle 4.
レーザ光2は、レーザ加工ノズル4内にある焦点距離F
の集光レンス5に入射した後、集光され、集光レンズ5
の下方へFの距離の位置において、焦点6を形成する。The laser beam 2 has a focal length F within the laser processing nozzle 4.
After entering the condensing lens 5, the light is condensed and the condensing lens 5
A focal point 6 is formed at a distance F below.
さらに、焦点6から下方へ焦点はずし距離+dすれた位
置に、被加工物7を配置する。被加工物7のさらに下方
には、集光反射鏡8が常にレーザ光2の光路上にあるよ
うに配置されている。Furthermore, the workpiece 7 is placed at a position that is away from the focal point 6 by a defocus distance +d. Further below the workpiece 7, a condensing reflector 8 is arranged so as to be always on the optical path of the laser beam 2.
また、被加工物7は、移動装置9に固定されており、レ
ーザ光2を照射しつつ移動装置9によって移動されるこ
とで、加工を完了する。Further, the workpiece 7 is fixed to a moving device 9, and is moved by the moving device 9 while being irradiated with the laser beam 2, thereby completing the processing.
さらに、本実施例で用いた被加工物7の形状を、第2図
(a)及び第2図(b)に示す。Furthermore, the shape of the workpiece 7 used in this example is shown in FIGS. 2(a) and 2(b).
被加工物7は、角柱状の鉄鋼材料であり、加工を行なう
表面側10および背面側11には、その表面にレーザ光
2の吸収率を高めるため、グラファイト系のレーザ光吸
収剤12が塗布しである。The workpiece 7 is a prismatic steel material, and a graphite-based laser light absorbing agent 12 is coated on the front side 10 and back side 11 to be processed to increase the absorption rate of the laser beam 2. It is.
次に、被加工物7及び集光反射鏡8の周辺部の詳細につ
いて、第3図を参照して説明する。Next, details of the peripheral portions of the workpiece 7 and the condensing reflector 8 will be explained with reference to FIG.
ここでは、集光反射鏡8を、便宜的に左右1対の2個の
反射鏡に分けており、各々の構成及び作用は同等である
。Here, for convenience, the condensing reflecting mirror 8 is divided into two reflecting mirrors, a pair of left and right reflecting mirrors, each having the same configuration and function.
集光反射鏡8は、連結軸13によってレーザ加工ヘッド
4に保持されており、常にレーザ光2の光路上にあるよ
うに配置されている。連結軸13には、Z軸移動装置1
4がついており、被加工物7に対する集光反射鏡8の位
置を調整できる。また、集光反射鏡8には、角度調節機
構15がついており、反射されたレーザ光2か、被加工
物7へ照射される位置を調整できる。なお、集光反射鏡
8は、冷却水経路16に冷却水を通過させることによっ
て加工中の温度上昇を防止している。The condensing reflector 8 is held on the laser processing head 4 by a connecting shaft 13, and is arranged so as to be always on the optical path of the laser beam 2. The connecting shaft 13 has a Z-axis moving device 1
4, the position of the condensing reflector 8 with respect to the workpiece 7 can be adjusted. Further, the condensing reflector 8 is provided with an angle adjustment mechanism 15, so that the position at which the reflected laser beam 2 is irradiated onto the workpiece 7 can be adjusted. Note that the condensing reflector 8 prevents temperature rise during processing by allowing cooling water to pass through the cooling water path 16.
さらに加工時の具体例を、第4図を参照して説明する。Further, a specific example of processing will be described with reference to FIG. 4.
集光レンズ5の焦点距離をF=50mm (ミリ・メー
トル)とし、集光レンズ5へのレーザ光2の入射ビーム
径をD=30mm (ミリ・メートル)とし、焦点はず
し距離D=+30mm (ミリ・メートル)の位置に、
被加工物7の表面側10があるように配置する。レーザ
光の広がり等を無視し、レーザ光の経路を概略化すると
、レーザ光2は、図中実線のように集光する。そして、
被加工物7の表面側10は、加工方向の直交方向におい
て、全面にレーザ光2が照射される。The focal length of the condenser lens 5 is F = 50 mm (millimeter), the beam diameter of the laser beam 2 entering the condenser lens 5 is D = 30 mm (millimeter), and the defocus distance D = +30 mm (millimeter).・At the position (meters),
The workpiece 7 is arranged so that the front side 10 thereof is located. Ignoring the spread of the laser beam, etc., and simplifying the path of the laser beam, the laser beam 2 is focused as shown by the solid line in the figure. and,
The entire surface side 10 of the workpiece 7 is irradiated with the laser beam 2 in a direction orthogonal to the processing direction.
被加工物7の表面側10に照射されないレーザ光2は、
集光反射鏡8まで到達し、反射されて、被加工物7の背
面側11に照射される。集光反射鏡8の曲率は、焦点距
離か30mm(ミリ・メートル)とした。被加工物7に
対する距離については、表面側10へのレーザ光2の照
射パワー密度と、背面側11への照射パワー密度か等し
くなるように、Z軸移動装置14及び角度調節機構15
を調節することで求める。この際、レーザ光2のビーム
のエネルギー分布についても、考慮を要する。The laser beam 2 that is not irradiated onto the surface side 10 of the workpiece 7 is
The light reaches the condensing reflector 8, is reflected, and is irradiated onto the back side 11 of the workpiece 7. The curvature of the condensing reflector 8 was set to a focal length of 30 mm (millimeter). Regarding the distance to the workpiece 7, the Z-axis moving device 14 and the angle adjustment mechanism 15 are adjusted so that the irradiation power density of the laser beam 2 on the front side 10 is equal to the irradiation power density on the back side 11.
Find it by adjusting. At this time, consideration must also be given to the energy distribution of the laser beam 2.
以上の工程は、同時に行なわれるため、被加工物7の表
面側10及び背面側11の双方の面に対して、同一の照
射パワー密度にてレーザ光2か照射され、さらに、被加
工物7が移動装置9によって移動されることで、加工方
向全面における加工か完了する。Since the above steps are performed simultaneously, both the front side 10 and back side 11 of the workpiece 7 are irradiated with the laser beam 2 at the same irradiation power density, and the workpiece 7 is irradiated with the laser beam 2 at the same irradiation power density. is moved by the moving device 9, thereby completing the machining over the entire surface in the machining direction.
本発明は、以上詳述した実施例に限定されることなく、
その主旨を逸脱しない範囲において種々の変更を加える
ことができる。The present invention is not limited to the embodiments detailed above, but
Various changes can be made without departing from the spirit of the invention.
例えば、焼入れの他、クラツデイングや表面合金化など
の他の熱処理加工において実施することも可能である。For example, in addition to hardening, it is also possible to perform other heat treatments such as cladding and surface alloying.
さらに、被加工物の形状も、軸等の円筒形状でも可能で
あり、寸法か大きいものについては、レーザ出力などで
調節することもてきる。集光レンズの焦点距離や、被加
工物の背面側に配置する集光反射鏡の曲率は、主に加工
を行なう被加工物の形状や寸法に応じて、適宜定めれば
よい。Furthermore, the shape of the workpiece can also be a cylindrical shape such as a shaft, and if the size is large, it can be adjusted by laser output or the like. The focal length of the condensing lens and the curvature of the condensing reflector disposed on the back side of the workpiece may be determined as appropriate, depending mainly on the shape and dimensions of the workpiece to be processed.
また、集光レンズの代わりに、集光反射鏡等を用いるこ
とも可能である。Furthermore, instead of a condenser lens, a condenser reflector or the like may be used.
[発明の効果]
以上、詳述したことから明らかなように、本発明によれ
ば、被加工物の表面側および背面側を同時に加工するこ
とができ、さらに、双方におけるレーザ光の照射条件を
均一化することで、低歪みかつ高能率の熱処理加工を行
なうことか可能なレーザ加工装置を提供できるという、
産業上者しい効果を奏する。[Effects of the Invention] As is clear from the above detailed description, according to the present invention, the front side and the back side of the workpiece can be processed simultaneously, and furthermore, the laser beam irradiation conditions on both sides can be changed. By making it uniform, it is possible to provide laser processing equipment that can perform heat treatment processing with low distortion and high efficiency.
It has an industrial effect.
第1図から第5図までは本発明を具体化した実施例を示
すもので、第1図はレーザ加工装置の概略構成図、第2
図(a)及び(b)は被加工物の形状を示した構成図、
第3図は被加工物及び集光反射鏡の周辺の詳細を示した
構成図、第4図は加工時の具体例を示した説明図、第5
図は被加工物の形状を示した説明図である。また第6図
は従来技術でのレーザ加工装置の概略構成図、第7図は
従来技術で加工後の被加工物の様子を示した説明図であ
る。
図中、1はCO2レーレーザ器、2はレーザ光、3は反
射鏡、4はレーザ加工ヘッド、5は集光レンズ、6は焦
点、7は被加工物、8は集光反射鏡、9は移動装置、1
0は表面側、11は背面側、12はレーザ光吸収剤、1
3は連結軸、14はZ軸移動装置、15は角度調節機構
、16は冷却水経路である。1 to 5 show embodiments embodying the present invention, and FIG. 1 is a schematic configuration diagram of a laser processing device, and FIG.
Figures (a) and (b) are configuration diagrams showing the shape of the workpiece,
Fig. 3 is a configuration diagram showing the details of the workpiece and the surroundings of the condensing reflector, Fig. 4 is an explanatory drawing showing a specific example during processing, and Fig. 5
The figure is an explanatory diagram showing the shape of the workpiece. Further, FIG. 6 is a schematic configuration diagram of a laser processing apparatus according to the prior art, and FIG. 7 is an explanatory diagram showing the appearance of a workpiece after processing using the prior art. In the figure, 1 is a CO2 laser device, 2 is a laser beam, 3 is a reflector, 4 is a laser processing head, 5 is a condenser lens, 6 is a focal point, 7 is a workpiece, 8 is a condenser reflector, and 9 is a condenser reflector. mobile device, 1
0 is the front side, 11 is the back side, 12 is the laser light absorber, 1
3 is a connecting shaft, 14 is a Z-axis moving device, 15 is an angle adjustment mechanism, and 16 is a cooling water path.
Claims (1)
ザ加工装置において、 前記レーザ光の被加工物への照射面の背面側に、少なく
とも1個の集光反射鏡を設けることを特徴とするレーザ
加工装置。 2、前記集光反射鏡によって反射された前記レーザ光が
、被加工物の背面側に照射されるよう、前記集光反射鏡
を駆動する駆動手段を設けることを特徴とする請求項1
項記載のレーザ加工装置。 3、前記レーザ光の被加工物表面への照射部直前におけ
るビーム径は、被加工物の加工方向に対して直交方向の
長さよりも大なるビーム径であることを特徴とする請求
項1項記載のレーザ加工装置。[Scope of Claims] 1. In a laser processing apparatus that processes a surface of a workpiece by irradiating a laser beam with the workpiece, at least one condensing reflection is provided on the back side of a surface on which the laser beam is irradiated onto the workpiece. A laser processing device characterized by being provided with a mirror. 2. Claim 1, further comprising a driving means for driving the condenser reflector so that the laser beam reflected by the condenser reflector is irradiated onto the back side of the workpiece.
The laser processing device described in Section 1. 3. Claim 1, wherein the beam diameter immediately before the irradiation part of the laser beam onto the surface of the workpiece is larger than the length in the direction orthogonal to the processing direction of the workpiece. The laser processing device described.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2267286A JPH04143092A (en) | 1990-10-04 | 1990-10-04 | Laser beam machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2267286A JPH04143092A (en) | 1990-10-04 | 1990-10-04 | Laser beam machine |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH04143092A true JPH04143092A (en) | 1992-05-18 |
Family
ID=17442722
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2267286A Pending JPH04143092A (en) | 1990-10-04 | 1990-10-04 | Laser beam machine |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH04143092A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104955605A (en) * | 2013-02-05 | 2015-09-30 | 株式会社V技术 | Laser processing apparatus and laser processing method |
US20200246916A1 (en) * | 2019-02-05 | 2020-08-06 | Dukane Ias, Llc | Systems and methods for laser-welding tubular components using a single, fixed optical reflector with multiple reflecting surfaces |
EP4046740A1 (en) * | 2021-02-22 | 2022-08-24 | Dukane IAS, LLC | System and method for laser-welding a workpiece with a laser beam that reaches inaccessible areas of the workpiece using multiple reflecting parts |
US11819940B2 (en) | 2019-02-05 | 2023-11-21 | Dukane Ias, Llc | Systems and methods for laser-welding a workpiece with a laser beam that reaches inaccessible areas of the workpiece using multiple reflecting parts |
US11931823B2 (en) | 2019-02-05 | 2024-03-19 | Dukane Ias, Llc | Systems and methods for laser-welding a workpiece with a laser beam that reaches inaccessible areas of the workpiece using multiple reflecting parts |
-
1990
- 1990-10-04 JP JP2267286A patent/JPH04143092A/en active Pending
Cited By (9)
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CN104955605A (en) * | 2013-02-05 | 2015-09-30 | 株式会社V技术 | Laser processing apparatus and laser processing method |
US20200246916A1 (en) * | 2019-02-05 | 2020-08-06 | Dukane Ias, Llc | Systems and methods for laser-welding tubular components using a single, fixed optical reflector with multiple reflecting surfaces |
US10926355B2 (en) * | 2019-02-05 | 2021-02-23 | Dukane Ias, Llc | Systems and methods for laser-welding tubular components using a single, fixed optical reflector with multiple reflecting surfaces |
CN113396044A (en) * | 2019-02-05 | 2021-09-14 | 杜肯Ias有限责任公司 | System and method for laser welding tubular elements using a single fixed optical reflector having multiple reflective surfaces |
US11819940B2 (en) | 2019-02-05 | 2023-11-21 | Dukane Ias, Llc | Systems and methods for laser-welding a workpiece with a laser beam that reaches inaccessible areas of the workpiece using multiple reflecting parts |
US11931823B2 (en) | 2019-02-05 | 2024-03-19 | Dukane Ias, Llc | Systems and methods for laser-welding a workpiece with a laser beam that reaches inaccessible areas of the workpiece using multiple reflecting parts |
EP4046740A1 (en) * | 2021-02-22 | 2022-08-24 | Dukane IAS, LLC | System and method for laser-welding a workpiece with a laser beam that reaches inaccessible areas of the workpiece using multiple reflecting parts |
CN114951970A (en) * | 2021-02-22 | 2022-08-30 | 杜肯Ias有限责任公司 | System and method for laser welding a workpiece with a laser beam using multiple reflective components to reach inaccessible areas of the workpiece |
JP2022128431A (en) * | 2021-02-22 | 2022-09-01 | デューケイン アイエーエス エルエルシー | Systems and methods for laser-welding workpiece with laser beam that reaches inaccessible areas of workpiece using multiple reflecting parts |
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