JPH0413950U - - Google Patents
Info
- Publication number
- JPH0413950U JPH0413950U JP5577690U JP5577690U JPH0413950U JP H0413950 U JPH0413950 U JP H0413950U JP 5577690 U JP5577690 U JP 5577690U JP 5577690 U JP5577690 U JP 5577690U JP H0413950 U JPH0413950 U JP H0413950U
- Authority
- JP
- Japan
- Prior art keywords
- photomask
- corner
- mounting
- frame
- exposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 230000001747 exhibiting effect Effects 0.000 claims 1
- 239000003795 chemical substances by application Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5577690U JPH0413950U (xx) | 1990-05-28 | 1990-05-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5577690U JPH0413950U (xx) | 1990-05-28 | 1990-05-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0413950U true JPH0413950U (xx) | 1992-02-04 |
Family
ID=31579029
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5577690U Pending JPH0413950U (xx) | 1990-05-28 | 1990-05-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0413950U (xx) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61264725A (ja) * | 1985-05-17 | 1986-11-22 | Nec Corp | ステツプ・アンド・リピ−ト用軟ｘ線転写マスク及びその製造方法 |
| JPS6236670A (ja) * | 1985-08-12 | 1987-02-17 | Matsushita Electronics Corp | フオトマスク用基板保持装置 |
| JPH0294428A (ja) * | 1988-09-30 | 1990-04-05 | Canon Inc | Ｘ線マスク構造体 |
-
1990
- 1990-05-28 JP JP5577690U patent/JPH0413950U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61264725A (ja) * | 1985-05-17 | 1986-11-22 | Nec Corp | ステツプ・アンド・リピ−ト用軟ｘ線転写マスク及びその製造方法 |
| JPS6236670A (ja) * | 1985-08-12 | 1987-02-17 | Matsushita Electronics Corp | フオトマスク用基板保持装置 |
| JPH0294428A (ja) * | 1988-09-30 | 1990-04-05 | Canon Inc | Ｘ線マスク構造体 |