JPH0173848U - - Google Patents
Info
- Publication number
- JPH0173848U JPH0173848U JP16825887U JP16825887U JPH0173848U JP H0173848 U JPH0173848 U JP H0173848U JP 16825887 U JP16825887 U JP 16825887U JP 16825887 U JP16825887 U JP 16825887U JP H0173848 U JPH0173848 U JP H0173848U
- Authority
- JP
- Japan
- Prior art keywords
- light shielding
- resist pattern
- spread
- projected onto
- coated surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920002120 photoresistant polymer Polymers 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000018109 developmental process Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16825887U JPH0173848U (xx) | 1987-11-02 | 1987-11-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16825887U JPH0173848U (xx) | 1987-11-02 | 1987-11-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0173848U true JPH0173848U (xx) | 1989-05-18 |
Family
ID=31457279
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16825887U Pending JPH0173848U (xx) | 1987-11-02 | 1987-11-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0173848U (xx) |
-
1987
- 1987-11-02 JP JP16825887U patent/JPH0173848U/ja active Pending