JPH0413687B2 - - Google Patents
Info
- Publication number
- JPH0413687B2 JPH0413687B2 JP59126392A JP12639284A JPH0413687B2 JP H0413687 B2 JPH0413687 B2 JP H0413687B2 JP 59126392 A JP59126392 A JP 59126392A JP 12639284 A JP12639284 A JP 12639284A JP H0413687 B2 JPH0413687 B2 JP H0413687B2
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- immersion oil
- oil
- diene polymer
- weight
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007654 immersion Methods 0.000 claims description 19
- 239000007788 liquid Substances 0.000 claims description 18
- 150000001875 compounds Chemical class 0.000 claims description 10
- 150000001993 dienes Chemical class 0.000 claims description 10
- 229920000642 polymer Polymers 0.000 claims description 10
- -1 aliphatic saturated alcohol Chemical class 0.000 claims description 7
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 5
- 229920000098 polyolefin Polymers 0.000 claims description 4
- 229930195734 saturated hydrocarbon Natural products 0.000 claims description 4
- 125000002723 alicyclic group Chemical group 0.000 claims description 3
- 239000003921 oil Substances 0.000 description 19
- 230000005284 excitation Effects 0.000 description 7
- 150000003071 polychlorinated biphenyls Chemical group 0.000 description 5
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- 229920002545 silicone oil Polymers 0.000 description 3
- KBPLFHHGFOOTCA-UHFFFAOYSA-N 1-Octanol Chemical compound CCCCCCCCO KBPLFHHGFOOTCA-UHFFFAOYSA-N 0.000 description 2
- BBMCTIGTTCKYKF-UHFFFAOYSA-N 1-heptanol Chemical compound CCCCCCCO BBMCTIGTTCKYKF-UHFFFAOYSA-N 0.000 description 2
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- AMQJEAYHLZJPGS-UHFFFAOYSA-N N-Pentanol Chemical compound CCCCCO AMQJEAYHLZJPGS-UHFFFAOYSA-N 0.000 description 2
- OFBQJSOFQDEBGM-UHFFFAOYSA-N Pentane Chemical compound CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 2
- 239000005062 Polybutadiene Substances 0.000 description 2
- 235000011187 glycerol Nutrition 0.000 description 2
- ZSIAUFGUXNUGDI-UHFFFAOYSA-N hexan-1-ol Chemical compound CCCCCCO ZSIAUFGUXNUGDI-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- BKIMMITUMNQMOS-UHFFFAOYSA-N nonane Chemical compound CCCCCCCCC BKIMMITUMNQMOS-UHFFFAOYSA-N 0.000 description 2
- 229920002857 polybutadiene Polymers 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- FBMMEHJLWTZKOR-SOFGYWHQSA-N (1e)-cycloocten-1-ol Chemical compound O\C1=C\CCCCCC1 FBMMEHJLWTZKOR-SOFGYWHQSA-N 0.000 description 1
- XLYMOEINVGRTEX-ONEGZZNKSA-N (e)-4-ethoxy-4-oxobut-2-enoic acid Chemical compound CCOC(=O)\C=C\C(O)=O XLYMOEINVGRTEX-ONEGZZNKSA-N 0.000 description 1
- QHDHNVFIKWGRJR-UHFFFAOYSA-N 1-cyclohexenol Chemical compound OC1=CCCCC1 QHDHNVFIKWGRJR-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- IEPRKVQEAMIZSS-UHFFFAOYSA-N Di-Et ester-Fumaric acid Natural products CCOC(=O)C=CC(=O)OCC IEPRKVQEAMIZSS-UHFFFAOYSA-N 0.000 description 1
- IEPRKVQEAMIZSS-WAYWQWQTSA-N Diethyl maleate Chemical compound CCOC(=O)\C=C/C(=O)OCC IEPRKVQEAMIZSS-WAYWQWQTSA-N 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 229920002367 Polyisobutene Polymers 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- XBDQKXXYIPTUBI-UHFFFAOYSA-M Propionate Chemical compound CCC([O-])=O XBDQKXXYIPTUBI-UHFFFAOYSA-M 0.000 description 1
- KXKVLQRXCPHEJC-UHFFFAOYSA-N acetic acid trimethyl ester Natural products COC(C)=O KXKVLQRXCPHEJC-UHFFFAOYSA-N 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 239000002199 base oil Substances 0.000 description 1
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 1
- 150000001733 carboxylic acid esters Chemical class 0.000 description 1
- HNEGQIOMVPPMNR-IHWYPQMZSA-N citraconic acid Chemical compound OC(=O)C(/C)=C\C(O)=O HNEGQIOMVPPMNR-IHWYPQMZSA-N 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- KTHXBEHDVMTNOH-UHFFFAOYSA-N cyclobutanol Chemical compound OC1CCC1 KTHXBEHDVMTNOH-UHFFFAOYSA-N 0.000 description 1
- FOTDHUVOUZZTTB-UHFFFAOYSA-N cyclobuten-1-ol Chemical compound OC1=CCC1 FOTDHUVOUZZTTB-UHFFFAOYSA-N 0.000 description 1
- QCRFMSUKWRQZEM-UHFFFAOYSA-N cycloheptanol Chemical compound OC1CCCCCC1 QCRFMSUKWRQZEM-UHFFFAOYSA-N 0.000 description 1
- VEJFFUKFKNSOBD-UHFFFAOYSA-N cyclohepten-1-ol Chemical compound OC1=CCCCCC1 VEJFFUKFKNSOBD-UHFFFAOYSA-N 0.000 description 1
- HPXRVTGHNJAIIH-UHFFFAOYSA-N cyclohexanol Chemical compound OC1CCCCC1 HPXRVTGHNJAIIH-UHFFFAOYSA-N 0.000 description 1
- PQANGXXSEABURG-UHFFFAOYSA-N cyclohexenol Natural products OC1CCCC=C1 PQANGXXSEABURG-UHFFFAOYSA-N 0.000 description 1
- FHADSMKORVFYOS-UHFFFAOYSA-N cyclooctanol Chemical compound OC1CCCCCCC1 FHADSMKORVFYOS-UHFFFAOYSA-N 0.000 description 1
- XCIXKGXIYUWCLL-UHFFFAOYSA-N cyclopentanol Chemical compound OC1CCCC1 XCIXKGXIYUWCLL-UHFFFAOYSA-N 0.000 description 1
- NWZXFAYYQNFDCA-UHFFFAOYSA-N cyclopenten-1-ol Chemical compound OC1=CCCC1 NWZXFAYYQNFDCA-UHFFFAOYSA-N 0.000 description 1
- 150000005690 diesters Chemical class 0.000 description 1
- LDCRTTXIJACKKU-ONEGZZNKSA-N dimethyl fumarate Chemical compound COC(=O)\C=C\C(=O)OC LDCRTTXIJACKKU-ONEGZZNKSA-N 0.000 description 1
- 229960004419 dimethyl fumarate Drugs 0.000 description 1
- CZZYITDELCSZES-UHFFFAOYSA-N diphenylmethane Chemical compound C=1C=CC=CC=1CC1=CC=CC=C1 CZZYITDELCSZES-UHFFFAOYSA-N 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- XLYMOEINVGRTEX-UHFFFAOYSA-N fumaric acid monoethyl ester Natural products CCOC(=O)C=CC(O)=O XLYMOEINVGRTEX-UHFFFAOYSA-N 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 150000002314 glycerols Chemical class 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 229940057995 liquid paraffin Drugs 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- TVMXDCGIABBOFY-UHFFFAOYSA-N octane Chemical compound CCCCCCCC TVMXDCGIABBOFY-UHFFFAOYSA-N 0.000 description 1
- 229920001084 poly(chloroprene) Polymers 0.000 description 1
- 229920001083 polybutene Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001195 polyisoprene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 150000005691 triesters Chemical class 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
- Microscoopes, Condenser (AREA)
- Investigating Or Analysing Biological Materials (AREA)
Description
本発明は顕微鏡用液浸油に関し、さらに詳しく
は時に螢光顕微鏡用の液浸油として好適な液浸油
に関する。
顕微鏡の倍率を高める方法の１として対物レン
ズの開口数を大きくする液浸法が採用されてい
る。この場合に用いる液浸油としてはグリセリ
ン、シリコン油、ポリ塩化ビフエニル（PCB）
を主剤とするもの（以下、PCB油という。）等が
知られている。
しかしながら、グリセリンは吸湿性があり、屈
折率も低く、シリコン油は高粘度であり、屈折率
が低いという欠点がある。また、PCB油は人体
に有害であるという重大な欠点を有している。
本出願人は、上記欠点のない顕微鏡用液浸油と
して特定の鎖状炭化水素とジフエニルメタン等の
混合物を開発したが、この液浸油は螢光を発する
物体等の観察に用いられる螢光顕微鏡用液浸油と
しては不適当である。
そこで本発明者は、上記のような欠点がなく、
しかも螢光の発生も極力抑制された液浸油を開発
すべく検討を重ねた結果、液状ジエン系重合体を
基油とし、これに特定の化合物を配合したものが
有効であることを見出し、かかる知見に基いて本
発明を完成したのである。
すなわち本発明は、液状ジエン系重合体に、液
状オレフイン系重合体、液状飽和炭化水素、脂肪
族飽和アルコール、および脂環式アルコールの中
から選ばれた少なくとも１種の化合物を配合して
なる顕微鏡用液浸油を提供するものである。
本発明に用いる液状ジエン系重合体としてはポ
リブタジエン、ポリイソプレン、ポリクロロプレ
ンなどがあり、分子量500〜20000程度のものが好
適である。これらの中ではポリブタジエンが特に
好ましい。これら液状ジエン系重合体は水酸基や
カルボキシル基等の官能基を有していてもよい。
次に、該液状ジエン系重合体に配合する化合物
のうち液状オレフイン系重合体としてはポリエチ
レン、ポリプロピレン、ポリブテン、ポリイソブ
チレンなどがあり、分子量500〜20000のものが好
ましい。液状飽和炭化水素としては各種のものを
使用しうるが、ペンタン、ヘキサン、ヘブタン、
オクタン、ノナン、流動パラフインなどが好まし
い。また、脂肪族飽和アルコールとしてはメタノ
ール、エタノール、プロパノール、ブタノール、
ペンタノール、ヘキサノール、ヘプタノール、オ
クタノールなどが好適に用いられる。脂肪族環式
アルコールとしてはシクロブタノール、シクロペ
ンタノール、シクロヘキサノール、シクロヘプタ
ノール、シクロオクタノール、シクロブテノー
ル、シクロペンテノール、シクロヘキセノール、
シクロヘプテノール、シクロオクテノール、ジシ
クロペンタノール、ジシクロヘキサノール、ジシ
クロペンテノール、ジシクロヘキセノールなどが
ある。本発明ではこれらの化合物は単独で使用し
てもよく、２種以上を組合せて使用してもよい。
また、所望成分として、これらの化合物の他に、
エステルを使用することもでき、具体的には飽和
もしくは不飽和カルボン酸エステル（たとえば酢
酸メチル、酢酸エチル、酢酸ジシクロペンチル、
マレイン酸メチル、マレイン酸エチル、フマル酸
メチル、フマル酸エチルなど）やグリセリンエス
テル（トリエステル、ジエステル、モノエステ
ル）等がある。
液状ジエン系重合体と上記化合物を配合するに
あたつては、光の分散性、屈折率、粘度などの性
質が液浸油として適正なものとなるように配慮す
るべきである。まず、アツベ数で示される光の分
散性については40乃至58の範囲が適当であり、屈
折率は1.4乃至1.6が適当である。さらに、粘度に
ついては10〜50000cSt（37.8℃）、好ましくは20〜
10000cSt（37.8℃）とすべきである。そのほか不
乾性、低螢光性、耐候性、耐食性、透明性、解像
力、色収差などが良好であることも液浸油に要求
される性質である。
上記要求性能を満足させるため、液状ジエン系
重合体10〜97重量部、好ましくは30〜95重量部と
前記化合物３〜90重量部、好ましくは５〜70重量
部の割合で配合する。
本発明の顕微鏡用液浸油を調製するには、上記
成分を配合し、10〜100℃の温度で撹拌しながら
十分に混合すればよい。
本発明の液浸油は前記した要求性能のすべてを
満足するものであり、人体に対する毒性もない。
また、従来の液浸油と比較して螢光の発生量が少
ないので、螢光顕微鏡用に適している。
次に、本発明の実施例を示す。
実施例 １〜７
液状ジエン系重合体と所定の化合物をそれぞれ
所定の割合（重量部）で配合し、撹拌槽にて50℃
にて４時間撹拌し十分に混合した。その後、室温
まで冷却して液浸油を得た。この液浸油について
各種性能の評価をした。結果を第１表に示す。
比較例 １、２
液浸油としてPCB油（比較例１）またはシリ
コン油（信越化学工業(株)製、KF−96H）（比較例
２）を用い、それぞれの性能を評価した。結果を
第１表に示す。
The present invention relates to an immersion oil for microscopes, and more particularly to an immersion oil that is sometimes suitable as an immersion oil for fluorescence microscopes. One method of increasing the magnification of a microscope is the immersion method, which increases the numerical aperture of an objective lens. Immersion oils used in this case include glycerin, silicone oil, and polychlorinated biphenyl (PCB).
(hereinafter referred to as PCB oil) are known. However, glycerin is hygroscopic and has a low refractive index, while silicone oil has a high viscosity and a low refractive index. Additionally, PCB oil has the serious drawback of being harmful to the human body. The applicant has developed a mixture of a specific chain hydrocarbon and diphenylmethane as an immersion oil for microscopes that does not have the above-mentioned drawbacks. It is unsuitable as an immersion oil. Therefore, the present inventor has proposed that there is no drawback as mentioned above,
Moreover, as a result of repeated studies to develop an immersion oil that suppresses the generation of fluorescence as much as possible, we discovered that it is effective to use a liquid diene polymer as a base oil and blend a specific compound with it. The present invention was completed based on this knowledge. That is, the present invention provides a microscope comprising a liquid diene polymer mixed with at least one compound selected from a liquid olefin polymer, a liquid saturated hydrocarbon, an aliphatic saturated alcohol, and an alicyclic alcohol. It provides immersion oil for use. The liquid diene polymer used in the present invention includes polybutadiene, polyisoprene, polychloroprene, etc., and those having a molecular weight of about 500 to 20,000 are preferable. Among these, polybutadiene is particularly preferred. These liquid diene polymers may have functional groups such as hydroxyl groups and carboxyl groups. Next, among the compounds to be added to the liquid diene polymer, liquid olefin polymers include polyethylene, polypropylene, polybutene, polyisobutylene, etc., and those having a molecular weight of 500 to 20,000 are preferred. Various liquid saturated hydrocarbons can be used, including pentane, hexane, hebutane,
Preferred are octane, nonane, liquid paraffin, and the like. In addition, aliphatic saturated alcohols include methanol, ethanol, propanol, butanol,
Pentanol, hexanol, heptanol, octanol, etc. are preferably used. Aliphatic cyclic alcohols include cyclobutanol, cyclopentanol, cyclohexanol, cycloheptanol, cyclooctanol, cyclobutenol, cyclopentenol, cyclohexenol,
Examples include cycloheptenol, cyclooctenol, dicyclopentanol, dicyclohexanol, dicyclopentenol, and dicyclohexenol. In the present invention, these compounds may be used alone or in combination of two or more.
In addition to these compounds, as desired components,
Esters may also be used, in particular saturated or unsaturated carboxylic acid esters (e.g. methyl acetate, ethyl acetate, dicyclopentyl acetate,
methyl maleate, ethyl maleate, methyl fumarate, ethyl fumarate, etc.) and glycerin esters (triesters, diesters, monoesters), etc. When blending the liquid diene polymer with the above-mentioned compounds, care should be taken so that properties such as light dispersibility, refractive index, and viscosity are appropriate for an immersion oil. First, the appropriate range of light dispersion indicated by the Atsube number is 40 to 58, and the appropriate refractive index is 1.4 to 1.6. Furthermore, the viscosity is 10~50000cSt (37.8℃), preferably 20~
It should be 10000cSt (37.8℃). Other properties required of immersion oil include good non-drying properties, low fluorescence, weather resistance, corrosion resistance, transparency, resolution, and chromatic aberration. In order to satisfy the above required performance, 10 to 97 parts by weight of the liquid diene polymer, preferably 30 to 95 parts by weight, and 3 to 90 parts by weight, preferably 5 to 70 parts by weight of the above compound are blended. In order to prepare the immersion oil for microscopes of the present invention, the above components may be blended and thoroughly mixed while stirring at a temperature of 10 to 100°C. The immersion oil of the present invention satisfies all of the above-mentioned required performances and is not toxic to the human body.
Furthermore, since it generates less fluorescence than conventional immersion oil, it is suitable for use in a fluorescence microscope. Next, examples of the present invention will be shown. Examples 1 to 7 A liquid diene polymer and a specified compound were blended in a specified ratio (parts by weight), and the mixture was heated at 50°C in a stirring tank.
The mixture was stirred for 4 hours and thoroughly mixed. Thereafter, it was cooled to room temperature to obtain immersion oil. Various performances of this immersion oil were evaluated. The results are shown in Table 1. Comparative Examples 1 and 2 PCB oil (Comparative Example 1) or silicone oil (manufactured by Shin-Etsu Chemical Co., Ltd., KF-96H) (Comparative Example 2) was used as the immersion oil, and the performance of each was evaluated. The results are shown in Table 1.
【表】【table】
【表】
また、通常の場合、螢光顕微鏡は光源として超
高圧水銀ランプなどを使用して螢光を励起させる
紫外線を発する。この場合に用いられる励起光と
してはＵ励起、Ｖ励起、Ｂ励起、Ｇ励起があり、
各励起光において螢光の発生量が少ないことが望
ましい。実施例１〜４および比較例１、２の各励
起光における螢光強度（相対強度）を第２表に示
す。[Table] In addition, a fluorescence microscope normally uses an ultra-high pressure mercury lamp as a light source to emit ultraviolet light to excite fluorescence. The excitation light used in this case includes U excitation, V excitation, B excitation, and G excitation.
It is desirable that the amount of fluorescent light generated in each excitation beam is small. Table 2 shows the fluorescence intensity (relative intensity) in each excitation light of Examples 1 to 4 and Comparative Examples 1 and 2.
Claims (1)
合体、液状飽和炭化水素、脂肪族飽和アルコール
および脂環式アルコールの中から選ばれた少なく
とも１種の化合物を配合してなる顕微鏡用液浸
油。 ２ 液状ジエン系重合体30〜95重量部と液状オレ
フイン系重合体、液状飽和炭化水素、脂肪族飽和
アルコールおよび脂環式アルコールから選ばれた
少なくとも１種の化合物５〜70重量部とを配合し
てなる特許請求の範囲第１項記載の液浸油。[Claims] 1 A liquid diene polymer blended with at least one compound selected from a liquid olefin polymer, a liquid saturated hydrocarbon, an aliphatic saturated alcohol, and an alicyclic alcohol. Immersion oil for microscopes. 2 30 to 95 parts by weight of a liquid diene polymer and 5 to 70 parts by weight of at least one compound selected from a liquid olefin polymer, a liquid saturated hydrocarbon, an aliphatic saturated alcohol, and an alicyclic alcohol; The immersion oil according to claim 1, comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12639284A JPS617438A (en) | 1984-06-21 | 1984-06-21 | Immersion oil for microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12639284A JPS617438A (en) | 1984-06-21 | 1984-06-21 | Immersion oil for microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS617438A JPS617438A (en) | 1986-01-14 |
| JPH0413687B2 true JPH0413687B2 (en) | 1992-03-10 |
Family
ID=14934001
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12639284A Granted JPS617438A (en) | 1984-06-21 | 1984-06-21 | Immersion oil for microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS617438A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6215434A (en) * | 1985-07-15 | 1987-01-23 | Idemitsu Petrochem Co Ltd | Liquid immersion oil for microscope |
| JPH0760215B2 (en) * | 1986-12-16 | 1995-06-28 | 出光石油化学株式会社 | Immersion oil for microscope |
| JPH0334713A (en) * | 1989-06-30 | 1991-02-14 | Nippon Dempa Kogyo Co Ltd | Surface mount type piezoelectric resonator |
| JP4490915B2 (en) * | 2003-04-02 | 2010-06-30 | 出光興産株式会社 | Immersion oil for microscope |
| JPWO2006080250A1 (en) * | 2005-01-25 | 2008-08-07 | Jsr株式会社 | Immersion type exposure system, recycling method and supply method of liquid for immersion type exposure |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50105144A (en) * | 1974-01-28 | 1975-08-19 |
-
1984
- 1984-06-21 JP JP12639284A patent/JPS617438A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50105144A (en) * | 1974-01-28 | 1975-08-19 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS617438A (en) | 1986-01-14 |
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