JPH0413665U - - Google Patents

Info

Publication number
JPH0413665U
JPH0413665U JP5221990U JP5221990U JPH0413665U JP H0413665 U JPH0413665 U JP H0413665U JP 5221990 U JP5221990 U JP 5221990U JP 5221990 U JP5221990 U JP 5221990U JP H0413665 U JPH0413665 U JP H0413665U
Authority
JP
Japan
Prior art keywords
temperature
molecular beam
beam epitaxy
epitaxy apparatus
high temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5221990U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5221990U priority Critical patent/JPH0413665U/ja
Publication of JPH0413665U publication Critical patent/JPH0413665U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP5221990U 1990-05-21 1990-05-21 Pending JPH0413665U (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5221990U JPH0413665U (OSRAM) 1990-05-21 1990-05-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5221990U JPH0413665U (OSRAM) 1990-05-21 1990-05-21

Publications (1)

Publication Number Publication Date
JPH0413665U true JPH0413665U (OSRAM) 1992-02-04

Family

ID=31572342

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5221990U Pending JPH0413665U (OSRAM) 1990-05-21 1990-05-21

Country Status (1)

Country Link
JP (1) JPH0413665U (OSRAM)

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