JPH0413614Y2 - - Google Patents
Info
- Publication number
- JPH0413614Y2 JPH0413614Y2 JP13862886U JP13862886U JPH0413614Y2 JP H0413614 Y2 JPH0413614 Y2 JP H0413614Y2 JP 13862886 U JP13862886 U JP 13862886U JP 13862886 U JP13862886 U JP 13862886U JP H0413614 Y2 JPH0413614 Y2 JP H0413614Y2
- Authority
- JP
- Japan
- Prior art keywords
- glass
- light
- pressurized gas
- air
- detection device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011521 glass Substances 0.000 claims description 34
- 238000010926 purge Methods 0.000 claims description 16
- 238000001514 detection method Methods 0.000 claims description 13
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 239000007789 gas Substances 0.000 description 12
- 230000000694 effects Effects 0.000 description 9
- 239000000428 dust Substances 0.000 description 8
- 230000001681 protective effect Effects 0.000 description 6
- 239000000779 smoke Substances 0.000 description 6
- 238000004140 cleaning Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 241000030366 Scorpidinae Species 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
Description
【考案の詳細な説明】
［産業上の利用分野］
本発明は、投受光手段を用いて物体の位置検出
を行う光学的位置検出装置に関し、特に霧滴、粉
塵、煤煙、飛散物等が存在する雰囲気中で被検出
板の縁辺位置を検出するように構成された縁辺位
置検出装置に係わるものである。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an optical position detection device that detects the position of an object using a light emitting/receiving means. The present invention relates to an edge position detection device configured to detect the edge position of a detection target board in an atmosphere where the detected edge position is detected.
［従来の技術］
従来、ウエブ、薄板等を扱う処理工程内等を移
動する板の位置検出を投受光手段によつて行なう
縁辺位置検出装置は、例えば次のように構成され
ていた。すなわち、投光部と受光部とを各々透明
板を介して互いに対向させて被検出板の移動通路
に設置しておき、被検出板が移動することにより
光が遮られたときの受光量変化を検出するように
構成されていた。このように構成された装置にお
いては、雰囲気内の粉塵等の異物がガスにより送
られて前記投光部および受光部に設けられた透明
板に付着してしまう。この為投光部から発射され
た光は異物によつて遮られてしまうので、被検出
板の位置検出を正確に行なうことができなくなつ
てしまう。[Prior Art] Conventionally, an edge position detection device for detecting the position of a plate moving in a processing process for handling webs, thin plates, etc. using light emitting/receiving means has been configured as follows, for example. In other words, the light emitting part and the light receiving part are placed in the movement path of the detection plate so as to face each other through a transparent plate, and the amount of received light changes when the light is blocked by the movement of the detection plate. was configured to detect. In a device configured in this manner, foreign matter such as dust in the atmosphere is transported by the gas and adheres to the transparent plates provided in the light projecting section and the light receiving section. For this reason, the light emitted from the light projecting section is blocked by the foreign matter, making it impossible to accurately detect the position of the detection target plate.
上記の問題点を解決する為に、前記透明板の周
囲にダストパージ用のガス（例えば空気や窒素ガ
ス）を吹きつけたり、透明板の表面に水を流すか
又は高圧洗浄液を噴出する等の手段を講じて透明
板の表面に異物が付着しないようにしていた。 In order to solve the above problems, measures such as blowing dust purging gas (for example, air or nitrogen gas) around the transparent plate, flowing water over the surface of the transparent plate, or jetting high-pressure cleaning liquid are used. Measures were taken to prevent foreign matter from adhering to the surface of the transparent plate.
水流を透光板前面に流してガラス面の汚れを防
止する装置としては、例えば、実開昭60−109000
号、特願昭60−32474号等が開示提案されている。
このような高価複雑な構造を使用するほどの悪影
響ではないが、雰囲気粉塵による汚損が生ずる場
合に、構造簡単で廉価であり、防塵効果の高いも
のが要望される。 For example, as a device for preventing stains on the glass surface by flowing a water stream in front of the transparent plate, there is an example of
No. 60-32474, etc. have been proposed for disclosure.
Although the adverse effects are not as great as the use of such an expensive and complicated structure, when contamination due to atmospheric dust occurs, a structure that is simple, inexpensive, and has a high dustproof effect is desired.
第４，５図は既知のエアパージ式透光ガラス面
清掃装置を示し、光源又は光電素子１を取付けた
中空本体２の光路３の端部を透光ガラス４で覆
う。ガラス４をガラス押え５で押える。本体２を
覆うカバー６に入口７から加圧気体、例えば空気
又は窒素を導入し、本体２の流路８を経て前カバ
ー９とガラス４との間のパージ室１０に吹出し、
前カバー８の孔１１から排出する。これによつ
て、パージ室１０は外気より高圧になり、外気内
の粉塵の浸入を防ぐ。 4 and 5 show a known air purge type transparent glass surface cleaning device, in which the end of the optical path 3 of a hollow body 2 to which a light source or photoelectric element 1 is attached is covered with a transparent glass 4. Hold the glass 4 with the glass presser foot 5. Pressurized gas, such as air or nitrogen, is introduced into the cover 6 that covers the main body 2 from the inlet 7 and is blown out through the flow path 8 of the main body 2 into the purge chamber 10 between the front cover 9 and the glass 4.
It is discharged from the hole 11 of the front cover 8. As a result, the pressure in the purge chamber 10 is higher than that of the outside air, thereby preventing dust from entering the outside air.
［考案が解決しようとする問題点］
しかし、この構成ではパージ室１０内に渦流が
生じ、保護ガラス４の前面に低圧部が形成され、
孔１１の中心から外気を導入してガラス４の面を
導入外気が通過する傾向を生ずる。実験のため
に、第４図に示す構造のものを発煙筒の煙の充備
した約0.2m3の容器内に設置し、0.5Kg／cm2の圧縮
空気を入口７に供給して空気を噴出させた場合の
汚れを参考写真Ｃ，Ｄに示し、煙の粉末がガラス
面に付着し、防塵効果は著しく少ないことを示
す。[Problems to be solved by the invention] However, in this configuration, a vortex is generated in the purge chamber 10, and a low pressure part is formed in front of the protective glass 4.
The outside air is introduced from the center of the hole 11 and tends to pass through the surface of the glass 4. For the experiment, the structure shown in Figure 4 was installed in a container of approximately 0.2 m 3 filled with smoke from a smoke cylinder, and 0.5 kg/cm 2 of compressed air was supplied to the inlet 7 to blow the air out. Reference photos C and D show the stains caused by the ejection, and show that smoke powder adheres to the glass surface and the dust-proofing effect is extremely low.
そこで本考案は上記従来のエアパージ機構の問
題点に鑑みなされたもので、気流による清掃効果
を大にし、雰囲気内の粉塵のガラス面への付着を
防止しうる縁辺位置検出装置のエアパージ機構の
提供を目的とする。 Therefore, the present invention was devised in view of the problems of the conventional air purge mechanism described above, and provides an air purge mechanism for an edge position detection device that can increase the cleaning effect of airflow and prevent dust in the atmosphere from adhering to the glass surface. With the goal.
［問題点を解決するための手段］
本考案は、縁辺装置検出装置の投光器の光源及
び受光器の受光素子を保護するための光路内と投
光ガラス外面とカバーとの間に加圧気体を噴出さ
せるパージ室を形成するものにおいて、上記加圧
気体の流路８の一部をガラス４の外面に沿うよう
に曲げる偏流板１２、流路の他部をガラス４に垂
直に噴出させて上記曲げられた圧気流を誘導する
手段とを備えて縁辺位置検出装置のエアパージ機
構を構成したものである。[Means for solving the problem] The present invention provides pressurized gas in the optical path and between the outer surface of the light emitting glass and the cover to protect the light source of the light emitter and the light receiving element of the light receiver of the edge device detection device. In the device forming the purge chamber for ejecting the pressurized gas, a deflection plate 12 bends a part of the pressurized gas flow path 8 along the outer surface of the glass 4, and the other part of the flow path is used to eject the pressurized gas perpendicularly to the glass 4. The air purge mechanism of the edge position detection device includes means for inducing a curved pressure air flow.
［作用］
上記構成のエアパージ機構においては、加圧気
体を保護ガラス表面に沿つて噴出させることがで
きるとともに、上記保護ガラス表面近傍における
低圧部の発生を防止することができ、上記保護ガ
ラス表面への塵埃等の付着を防止し、また上記保
護ガラス表面に付着した塵埃の清掃効果を高め得
るものである。[Function] In the air purge mechanism configured as described above, the pressurized gas can be jetted out along the surface of the protective glass, and the generation of a low-pressure area near the surface of the protective glass can be prevented. This prevents dust and the like from adhering to the surface of the protective glass, and improves the cleaning effect of dust adhering to the surface of the protective glass.
［実施例］
本考案を例示とした実施例並びに図面について
説明する。[Examples] Examples and drawings illustrating the present invention will be described.
第１〜３図は本考案による投光器の光源又は受
光器を示し、本考案の理解を容易にするために、
第４，５図に示す既知の装置と同じ符号によつて
同様の部分又は部品を示し、基本構成を同様と
し、再述しない。 1 to 3 show the light source or receiver of the projector according to the present invention, and in order to facilitate understanding of the present invention,
Similar parts or parts are designated by the same reference numerals as the known device shown in FIGS. 4 and 5, and the basic construction is the same and will not be described again.
本考案によつて、第４図に示す平板のガラス押
え５に代えて、本体２と前カバー９との間の偏流
板１２とガラス押え１３とを並列させて介挿す
る。偏流板１２は第３図に示す皿型部材１４の一
部を切断（第３図Ｃ−Ｃ線で切断）して逆向けと
した形状であり、第１図に示す通り、左側流路８
からの加圧気体の向きを変えて右向きにガラス４
の面に沿つて流させる。 According to the present invention, instead of the flat glass holder 5 shown in FIG. 4, a drift plate 12 and a glass holder 13 are inserted in parallel between the main body 2 and the front cover 9. The deflection plate 12 has a shape in which a part of the dish-shaped member 14 shown in FIG.
Change the direction of the pressurized gas from the glass 4 to the right.
Let it flow along the surface.
ガラス押え１３は第３図の皿１４の一部から形
成（第３図Ｄ−Ｄに沿つて切断）して第２図に示
す形状とし、皿の底がガラス４を押えるように取
付ける。第１，２図の右側流路８からの加圧気体
がガラス押え１３の孔を通つて吹出し、左側流路
８からの右向き気流を誘導してガラス４の面を確
実に通らせ合流して前カバーの孔１１から吹出
す。 The glass presser 13 is formed from a part of the plate 14 shown in FIG. 3 (cut along the line DD in FIG. 3) to have the shape shown in FIG. 2, and is attached so that the bottom of the plate presses the glass 4. The pressurized gas from the right flow path 8 in FIGS. 1 and 2 is blown out through the hole in the glass holder 13, and guides the rightward air flow from the left flow path 8 to ensure that it passes through the surface of the glass 4 and merges with it. It blows out from the hole 11 in the front cover.
上述の構成によつて、パージ室１０内とは乱流
が生ずるが、外界からの空気を導入するこなく、
パージ室内の乱流がガラス４の面上を流れる右向
き流にはほとんど影響を及ぼさない。従つて、前
述の発煙筒の煙内での同様の実験に際して、ガラ
ス面には煙が付着せず、著しく良好な粉塵付着防
止効果が得られることを参考写真Ａ，Ｂに示す。 With the above configuration, turbulent flow occurs inside the purge chamber 10, but air from the outside world is not introduced.
The turbulent flow in the purge chamber has little effect on the rightward flow flowing on the surface of the glass 4. Therefore, reference photos A and B show that in a similar experiment in the smoke of the smoke cylinder described above, no smoke adhered to the glass surface, and an extremely good dust adhesion prevention effect was obtained.
［考案の効果］
従来のガラス押えの代りに皿型の金具を半月に
割り、一つのガラス表面に圧力気体を噴出させる
噴流部とし、他の一つの表裏反対に取り付けてガ
ラス押えとすることにより簡単な構造で廉価で防
塵効果は大である。[Effects of the invention] Instead of the conventional glass holder, a dish-shaped metal fitting is split into half moons, and one piece of the glass is used as a jet part that blows out pressurized gas onto the surface, and the other glass is attached with the front and back reversed to form a glass holder. It has a simple structure, is inexpensive, and has a high dustproof effect.
第１図は本考案に係る縁辺位置検出装置の縦断
正面図、第２図は第１図のＡ−Ａ線に沿う断面
図、第３図は皿型部材の斜視図、第４図は従来装
置を説明するための縦断正面図、第５図は第４図
のＢ−Ｂ線に沿う断面図である。
１……光源又は光電素子、２……本体、３……
光路、４……保護ガラス、５，１３……ガラス押
え、６，９……カバー、７……加圧気体入口、８
……流路、１０……パージ室、１２……偏流板、
１４……皿型部材。
Fig. 1 is a longitudinal sectional front view of the edge position detection device according to the present invention, Fig. 2 is a sectional view taken along line A-A in Fig. 1, Fig. 3 is a perspective view of the dish-shaped member, and Fig. 4 is a conventional FIG. 5 is a longitudinal sectional front view for explaining the apparatus, and FIG. 5 is a sectional view taken along line BB in FIG. 4. 1...Light source or photoelectric element, 2...Main body, 3...
Optical path, 4... Protective glass, 5, 13... Glass holder, 6, 9... Cover, 7... Pressurized gas inlet, 8
...flow path, 10 ... purge chamber, 12 ... drift plate,
14...Dish-shaped member.
Claims (1)
受光素子を保護するための光路内と投光ガラス外
面とカバーとの間に加圧気体を噴出させるパージ
室を形成するものにおいて、 上記加圧気体の流路８の一部をガラス４の外面
に沿うように曲げる偏流板１２と、流路の他部を
ガラス４に垂直に噴出させて上記曲げられた圧気
流を誘導する手段とを備えることを特徴とする縁
辺位置検出装置のエアパージ機構。[Claim for Utility Model Registration] Formation of a purge chamber in which pressurized gas is ejected between the light path, the outer surface of the light emitting glass, and the cover to protect the light source of the light emitter and the light receiving element of the light receiver of the edge device detection device. The deflection plate 12 bends a part of the pressurized gas flow path 8 along the outer surface of the glass 4, and the other part of the flow path is ejected perpendicularly to the glass 4 to form the bent pressurized air flow. An air purge mechanism for an edge position detection device, characterized in that the air purge mechanism is provided with means for guiding.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13862886U JPH0413614Y2 (en) | 1986-09-10 | 1986-09-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13862886U JPH0413614Y2 (en) | 1986-09-10 | 1986-09-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6347217U JPS6347217U (en) | 1988-03-30 |
| JPH0413614Y2 true JPH0413614Y2 (en) | 1992-03-30 |
Family
ID=31043788
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13862886U Expired JPH0413614Y2 (en) | 1986-09-10 | 1986-09-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0413614Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2502443B2 (en) * | 1991-01-30 | 1996-05-29 | 日本鋼管株式会社 | Ellipsometer and coating thickness control method using the same |
-
1986
- 1986-09-10 JP JP13862886U patent/JPH0413614Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6347217U (en) | 1988-03-30 |
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