JPH04131961U - Monitor structure in solid-state laser equipment - Google Patents

Abstract

(57) [Summary] [Purpose] To establish a proportional relationship between the photodiode signal and the actual laser power. [Structure] This monitor structure includes a half mirror 1 that partially reflects a laser beam 10 emitted from an oscillator (not shown).
1 and a laser beam 12 reflected by this half mirror 11
a non-flat diffuser plate 14 that reflects light toward the photodiode 13 and has a grained white plate; and a filter 15 disposed on the side of the photodiode 13 closer to the diffuser plate 14.
It is composed of.

Description

[Detailed explanation of the idea]

0001

[Industrial application field]

The present invention relates to a monitor structure in a solid-state laser device, and particularly to a monitor structure in an Nd:YAG laser device using YAG containing trivalent rare earth element ions Nd ³⁺ as a laser rod.

0002

[Conventional technology]

The monitor structure in a conventional solid-state laser device is configured as shown in Figure 3. . In FIG. 3, a laser beam 1 emitted from an oscillator (not shown) is in a first half. The laser beam 3, which is reflected by a few percent by the mirror 2 and travels straight, is used for actual processing. on the other hand, The reflected laser beam 4 is further reflected by a few percent at the second half mirror 5 and Then, the light is diffused by the diffusion plate 6. After that, it is attenuated by filter 7, and the photodiode The light is received by the card 8. This received light then becomes a photo It is converted into a signal by diode 8 and used as a monitor display of laser power. . Note that the first half mirror 2 and the second half mirror 5 are made by depositing a dielectric multilayer film. The distribution ratio of reflected light and transmitted light can be freely selected depending on the thickness of the multilayer film. It is now possible to

0003

[Problem that the idea aims to solve]

However, in the monitor structure of conventional solid-state laser devices, the diffuser plate 6 is placed near the photodiode 8, so the laser beam 4 is sufficiently diffused. The light enters the photodiode 8 in a state where it is not detected. Therefore, the photodiode When monitoring the signal with 8, the signal of this photodiode 8 and the actual laser There was a problem in that there were cases where the proportional relationship with The Power could not be established. Also, simple Even if the laser beam 4 to be monitored is simply transmitted through the diffuser plate 6, a similar problem occurs. there were.

0004 The purpose of this invention was made in view of the above-mentioned problems. In a solid-state laser device that has a proportional relationship between Provides a monitor structure.

[0005]

[Means to solve the problem]

In order to achieve the above object, the present invention combines laser light emitted from an oscillator. A half mirror that partially reflects the laser beam and a photo of the laser beam reflected by this half mirror. For the monitor structure in a solid-state laser device equipped with a diffuser plate that reflects back to the diode side. In this case, the above-mentioned diffusion plate has a non-flat configuration.

[0006]

[Effect]

In this way, according to the present invention, the laser light emitted from the oscillator is reflected by the diffuser plate. After the light is diffused, the light enters the photodiode, so there is sufficient The laser light enters the photodiode in a diffused state, and the signal from the photodiode is and the actual laser power. Also, the distance from the laser beam emission position is Compared to using a diffuser plate for transmission diffusion at the same distance to the photodiode position. Therefore, when using reflection diffusion, it is better to separate the photodiode signal from the actual laser beam. A proportional relationship can be established with wa.

[0007]

【Example】

Next, the present invention will be explained with reference to the drawings.

[0008] Figure 1 shows a schematic diagram of an embodiment of a monitor structure in a solid-state laser device according to the present invention. It is a schematic configuration diagram. This monitor structure uses laser light emitted from an oscillator (not shown). A half mirror 11 that partially reflects 10, and the reflected light from this half mirror 11 In this embodiment, the laser beam 12 is reflected toward the photodiode 13 side and has a non-flat surface. The diffusion plate 14 is formed by applying a grain treatment to a white plate so that the plate surface has an uneven shape. and a filter 15 arranged on the side closer to the diffusion plate 14 of this photodiode 13. It consists of The diffusion plate 14 is arranged at a predetermined distance from the photodiode 13. It is placed.

[0009] Next, the effect will be explained. First, the laser beam 1 emitted from the laser oscillator 0 is reflected by a few percent by the half mirror 11, passes through the half mirror 11, and travels straight. Almost 100% of the laser beam 16 is used for actual processing. On the other hand, half mirror 11 The laser beam 12 reflected by It is reflected and diffused and made uniform. Then, this reflected and diffused laser beam 1 7 is attenuated by a filter 15 and received by a photodiode 13. and , this received laser light is converted into a signal by the photodiode 13, and the laser beam is converted into a signal by the photodiode 13. Used as a power monitor display.

0010 FIG. 2 shows another embodiment of the monitor structure in the solid-state laser device according to the present invention. It is a diagram. In this embodiment, a half mirror is provided between the half mirror 11 and the diffuser plate 14. A structure including a diffuser plate 18 that transmits and diffuses the laser beam 12 reflected by the mirror 11. It was completed. The configuration of the photodiode 13, filter 15, etc. is as above. Since the configuration is similar to that of the first embodiment described above, the explanation thereof will be omitted.

[0011] In this embodiment, the laser beam 10 emitted from the laser oscillator is a half mirror. A few percent is reflected at -11. And the laser reflected by this half mirror 11 The light 12 is first transmitted and diffused by the diffuser plate 18, and then this diffused light is passed through a white plate with grains. The light is reflected and diffused by a treated non-flat diffuser plate 14. With this kind of configuration, This allows the photodiode 13 to receive a more uniform laser beam 17. It becomes possible.

0012

[Effect of the idea]

As explained above, due to the monitor structure in the solid-state laser device related to the present invention, For example, the laser beam emitted from the oscillator can be placed on a white board with sand for monitoring. It is reflected and diffused by a non-flat diffuser plate that has undergone eye treatment, and is transmitted to the photodiode. Since the configuration is such that the laser light enters the photodiode in a sufficiently diffused state, Therefore, the photodiode signal and the actual laser beam are It is said that the laser power can be displayed in good proportion to the laser power on the monitor. be effective. Also, the distance from the laser beam emission position to the photodiode position is At one distance, when using a diffuser for reflective diffusion compared to when using it for transmission diffusion It is better to have a proportional relationship between the photodiode signal and the actual laser power. It also has the effect of

[Brief explanation of drawings]

FIG. 1 is a schematic configuration diagram showing an embodiment of a monitor structure in a solid-state laser device according to the present invention.

FIG. 2 is a schematic configuration diagram showing another embodiment of the same monitor structure.

FIG. 3 is a schematic configuration diagram showing an example of a conventional monitor structure.

[Explanation of symbols]

10, 12, 16, 17 Laser light 11 Half mirror 13 Photodiode 14, 18 Diffusion plate

Claims (1)

[Scope of utility model registration request] 1. A monitor structure in a solid-state laser device comprising a half mirror that partially reflects a laser beam emitted from an oscillator, and a diffuser plate that reflects the laser beam reflected by the half mirror toward a photodiode. A monitor structure in a solid-state laser device, wherein the diffuser plate is formed into a non-flat surface.