JPH0413050U - - Google Patents

Info

Publication number
JPH0413050U
JPH0413050U JP5051190U JP5051190U JPH0413050U JP H0413050 U JPH0413050 U JP H0413050U JP 5051190 U JP5051190 U JP 5051190U JP 5051190 U JP5051190 U JP 5051190U JP H0413050 U JPH0413050 U JP H0413050U
Authority
JP
Japan
Prior art keywords
high frequency
electrodes
electrode
electrostatic chuck
power source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5051190U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5051190U priority Critical patent/JPH0413050U/ja
Publication of JPH0413050U publication Critical patent/JPH0413050U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
JP5051190U 1990-05-14 1990-05-14 Pending JPH0413050U (US06521211-20030218-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5051190U JPH0413050U (US06521211-20030218-C00004.png) 1990-05-14 1990-05-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5051190U JPH0413050U (US06521211-20030218-C00004.png) 1990-05-14 1990-05-14

Publications (1)

Publication Number Publication Date
JPH0413050U true JPH0413050U (US06521211-20030218-C00004.png) 1992-02-03

Family

ID=31569121

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5051190U Pending JPH0413050U (US06521211-20030218-C00004.png) 1990-05-14 1990-05-14

Country Status (1)

Country Link
JP (1) JPH0413050U (US06521211-20030218-C00004.png)

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