JPH04130422U - high voltage capacitor - Google Patents

Abstract

(57) [Summary] [Purpose] To provide a high-voltage capacitor in which an active gas in the atmosphere does not come into direct contact with an insulation protection part, and deterioration caused by these reactions can be effectively prevented. [Structure] The high-voltage capacitor 1 according to the present invention includes a sealed case 4 that houses a capacitor body 2 and an insulating protection part 3 surrounding the outer periphery of the capacitor body 2. It is characterized by being formed from ceramics containing 5% by weight or less.

Description

[Detailed explanation of the idea]

0001

[Industrial application field]

This invention is suitable for use in high-performance gases used in atmospheres containing active gases such as fluorine and chlorine. The present invention relates to high voltage capacitors, and in particular to insulation protection structures for high voltage capacitors.

0002

[Conventional technology]

Traditionally, it has been used for discharge excitation in carbon dioxide lasers, excimer lasers, etc. , a high-voltage capacitor 20 having a structure as shown in Fig. 3 is used. The main body 21 is made of dielectric ceramic with electrodes 22 formed on each end face. The workpiece 23 and the external terminals 24 attached to each of the electrodes 22 It is structured as follows. In this high voltage capacitor 20, the external terminal 2 The outer periphery of the capacitor body 21 except for the outer end of 4 is covered with an exterior molding such as epoxy resin. Generally, an insulation protection structure is completely covered with an insulation protection part 25 made of resin. has been adopted. Note that when forming the insulation protection part 25, a separate Position the capacitor body 21 in the intended mold (not shown). After installation, the well-known method of pouring epoxy resin around the capacitor body 21 is performed. Needless to say, the method will be adopted.

0003

[Problem that the idea aims to solve]

By the way, recently, laser headers have been developed to improve the oscillation efficiency of lasers. and is filled with a laser medium whose main components are K・Cl, Kr・F, etc. A high-voltage capacitor 20 is also placed inside the laser chamber (none of which is shown). The discharge path is shortened by installing such a device. however, In such a configuration, the atmosphere in the laser chamber is Because the laser medium contains active gases such as fluorine and chlorine, The active gas and the insulation protection part 25 of the high voltage capacitor 20 cause a reaction, and the active gas becomes active gas. Therefore, the insulation protection part 25 will be attacked, so the atmosphere of the laser medium will be As a result, the lifespan of these parts will be extremely shortened as a result of deterioration of the insulation of the insulation protection part 25, etc. It was supposed to decline at the end.

0004 Therefore, in order to avoid such inconvenience, for example, the high voltage capacitor 20 is configured The outer circumferential surface of the insulation protection part 25 is completely coated with tetrafluoroethylene, so-called Teflon. The capacitor covered by the insulation protection part 25 may be such as storing the main body 21 in a Teflon case (none of which is shown). Measures have been taken, but the reality is that they have not been sufficiently effective.

[0005] The present invention was devised in view of these circumstances, and is a high-voltage capacitor. There is no direct contact between the insulating protection part and the active gas in the atmosphere; The aim is to provide a high-voltage capacitor that can effectively prevent deterioration caused by reactions. ing.

[0006]

[Means to solve the problem]

The high voltage capacitor according to the present invention is designed to achieve this purpose. Equipped with a sealed case that houses the sensor body and an insulating protection section surrounding the outer periphery. This sealed case is made of ceramic with a silicon content of 5% by weight or less. It is characterized by the fact that it has been formed.

[0007]

[Effect]

According to the above configuration, the outermost sealed case of the high voltage capacitor and the atmosphere The outer periphery of the capacitor body is housed in this sealed case. The active gas in the atmosphere no longer comes into direct contact with the insulating protection surrounding the Ru. This sealed case is made of ceramic with a silicon content of 5% by weight or less. Therefore, if formed, it will no longer react with the active gas, and these will not be involved in the reaction. Therefore, deterioration cannot occur.

[0008]

【Example】

Hereinafter, embodiments of the present invention will be described based on the drawings.

[0009] Figure 1 is a sectional view showing the schematic structure of the high voltage capacitor according to this embodiment, and Figure 2 is its sectional view. It is a sectional view showing a modification, and the reference numeral 1 in FIG. 1 indicates a high-voltage capacitor. .

0010 As shown in FIG. 1, the high voltage capacitor 1 according to this embodiment has a capacitor main body 2 , an insulating protection part 3 that completely surrounds its outer periphery, and a sealed case that houses them. The capacitor body 2 has electrodes 5 formed on both end faces. A workpiece 6 made of dielectric ceramics and an electrode 5 are each attached to the workpiece 6. and an external terminal 7. The insulation protection part 3 is made of epoxy resin. It is formed by molding an exterior molding resin such as oil.

[0011] On the other hand, the sealed case 4 is a cylindrical part that houses the capacitor body 2 and the insulation protection part 3. 8 and a lid 9 that seals the opening of the cylindrical portion 8 and the lid. 9 are made of materials such as alumina and zirconia with a silicon content of 5% by weight or less. It is formed by using Lamix. Note that at this time, the cylindrical portion 8 A through hole is formed in each of the bottom surface and the lid 9 through which the outer end of the external terminal 7 penetrates and projects to the outside. Needless to say, holes (not shown) are formed. Also, here, The silicon content in the ceramics forming these cylindrical part 8 and lid 9 is 5. The reason why the silicon content is limited to less than 5% by weight is that if the silicon content exceeds 5% by weight, this density This is because the reaction between the sealed case 4 and the active gas becomes unavoidable.

0012 By the way, when forming the insulation protection part 2 in this high voltage capacitor 1, the cylindrical After positioning and installing the capacitor main body 2 at a predetermined position within the shaped part 8, this cylindrical Exterior mold resin such as epoxy resin was injected into part 8 and sealed with lid 9. Since it is possible to use a method of curing the product at The labor and cost during production can be reduced as there is no need to prepare molds etc. It has the advantage of being able to

[0013] Furthermore, in the high voltage capacitor 1 shown in FIG. 1 described above, the capacitor Thick insulation protection made of epoxy resin etc. is provided between the server body 2 and the sealed case 4. A structure in which a portion 3 is provided is adopted, but since such an insulation protection portion 3 is formed, If there is a risk of inconveniences such as excessive hardening stress, , it is also possible to adopt a structure as shown in FIG. In other words, in this figure 2, as a modified example In the high voltage capacitor 10 shown in FIG. Only the edge protection part 11 is formed, and between this insulation protection part 11 and the sealed case 4 A secondary insulation protection part 12 made of a more flexible epoxy resin or silicone resin formed by a mold. Note that in this Figure 2, the same elements as in Figure 1 are shown. The same parts and parts are given the same reference numerals.

[0014] Furthermore, the insulation protection part 12 of the high voltage capacitor 10 in FIG. A device that is filled with insulating oil such as oil or insulating gas such as hexafluoride gas. Needless to say, the insulation protection of the high voltage capacitor 1 in FIG. It is possible that all of the protection part 3 is filled with insulating oil or insulating gas. Of course.

[0015]

[Effect of the idea]

As explained above, the high-pressure capacitor according to the present invention uses active gas. Consists of an atmosphere containing ceramics and a silicon content of 5% by weight or less. Since the sealed case and the sealed case come into contact with each other, the The insulation protection part surrounding the outer periphery of the capacitor body is directly connected to the active gas in the atmosphere. There will be no more contact. Therefore, active gas separated by a sealed case This means that no reaction will occur with the insulation protection part, and deterioration due to these reactions will occur. As a result, the lifespan of these products can be significantly extended. This effect can be obtained.

[Brief explanation of drawings]

FIG. 1 is a cross-sectional view showing a schematic structure of a high-voltage capacitor according to an embodiment.

FIG. 2 is a sectional view showing a modification thereof.

FIG. 3 is a cross-sectional view showing a schematic structure of a high-voltage capacitor according to a conventional example.

[Explanation of symbols]

1 High voltage capacitor 2 Capacitor body 3 Insulation protection part 4 Sealed case

Claims (1)

[Scope of utility model registration request] Claim 1: A sealed case (4) that houses a capacitor main body (2) and an insulating protection part (3) surrounding the outer periphery of the capacitor body, the sealed case (4) having a silicon content of 5. A high-voltage capacitor characterized in that it is formed of ceramics with a weight percentage of less than %.