JPH08130158A - High voltage capacitor - Google Patents

Abstract

PURPOSE: To avoid the contamination of atmospheric gas and the deterioration even if a capacitor is used in an atmosphere containing halogen gas. CONSTITUTION: The dielectric ceramic element 1 of a capacitor main part 6 and the part of electrode terminals 4 and 5 are molded in an insulating protective unit 11 and the molded unit is housed in an airtight case 12 made of alumina. The outer surfaces of the electrode terminals 4 and 5 are plated with nickel. Sealing members 13, 14 and 15 are provided at the mating part of the case 12 and at the piercing parts of the electrode terminals 4 and 5. With this constitution, the deterioration caused by an ultraviolet radiation and a plasma which are produced by the discharge of a laser apparatus can be avoided and the contamination of atmospheric gas can be avoided.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high voltage capacitor, and more particularly to a high voltage capacitor suitable for use in an atmosphere containing a halogen gas in an excimer laser device or the like.

[0002]

2. Description of the Related Art Conventionally, since a discharge excitation high voltage capacitor in an excimer laser device is used in an atmosphere containing a halogen gas, electrodes 2, 3 provided on both surfaces of a dielectric ceramic body 1 as shown in FIG. A high-voltage capacitor having a structure in which a capacitor body 6 having electrode terminals 4 and 5 fixed thereto is covered with an electrical insulator 7 having high halogen resistance is actually developed.
Proposed in 193754.

Further, as shown in FIG. 4, the outer periphery of the capacitor body 6 is covered with an insulating protection part 8 such as epoxy resin, and the protection part 8 is housed in a sealed case 9.
A high-voltage capacitor formed of Teflon resin or the like having high halogen gas resistance is proposed in Japanese Utility Model Publication No. 4-130422.

Incidentally, the excimer laser device is a kind of pulse gas laser, and discharges repeatedly in gas to cause laser oscillation. Therefore, the high-voltage capacitor is used under severe conditions where it is exposed to halogen gas, ultraviolet rays due to discharge, and discharge plasma.

[0005]

However, the conventional high-voltage capacitor has a problem only in the reaction with the halogen gas, and does not consider the deterioration due to the ultraviolet ray and the discharge plasma due to the discharge. There were the problems listed below.

(1) Since the material for covering the capacitor body is selected only for halogen gas resistance, some materials may be deteriorated by ultraviolet rays generated by discharge or discharge plasma.

In particular, when the surface of the material covering the capacitor body is decomposed by discharge plasma, the decomposed material is scattered as gas and dust, polluting atmospheric gas and reducing the efficiency and life of the laser device. become.

(2) Since the portion covering the capacitor body does not have a seal portion, atmospheric gas may enter the inside of the sealed case during use.

When the atmospheric gas enters the inside of the sealed case,
There is a problem that the insulation property is reduced by reacting with the insulation protection part, the withstand voltage performance is reduced, and gas and dust are generated due to the reaction to pollute the atmospheric gas, which shortens the life of the laser device. appear.

(3) As for the material of the electrode terminal, since it is formed exclusively of brass, there is a problem that it reacts with the halogen gas or ultraviolet rays generated by discharge or discharge plasma to contaminate the gas atmosphere.

Therefore, an object of the present invention is not only resistance to halogen gas, but also deterioration due to ultraviolet rays and discharge plasma, and further, penetration of atmospheric gas into the sealed case, ultraviolet rays and discharge plasma of electrode terminals. The purpose of the present invention is to provide a high-voltage capacitor in which no reaction due to

[0012]

In order to solve the above problems, the present invention provides a high voltage capacitor having at least two electrode terminals, the surface of the capacitor body of which has halogen gas resistance and ultraviolet light resistance. It is the one that is covered with the material.

Alumina can be used as the material having the halogen gas resistance and the ultraviolet resistance, and the alumina used in the present invention preferably has a silicon content of 5 wt% or less.

In the present invention, the surface of the electrode terminal of the capacitor may be made of a material having resistance to halogen gas and resistance to ultraviolet rays, and the exterior of the capacitor body may be formed into a case shape capable of sealing the electrode terminal. It is also possible to adopt a configuration in which a seal portion is provided at a portion that penetrates through and a fitting portion of the case.

[0015]

[Function] The surface of the capacitor body is protected against halogen gas,
If the exterior is made of alumina that has UV resistance, the performance of the capacitor can be maintained without deterioration of the exterior due to ultraviolet rays and discharge plasma even when used in an atmosphere containing a halogen gas of an excimer laser device, and the atmosphere gas is not contaminated. The atmosphere gas is kept clean and the efficiency of the laser device is not lowered.

Further, the seal portion can prevent the atmospheric gas from entering the sealed case, and the plated electrode terminal surface does not pollute the gas atmosphere.

[0017]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT An embodiment of the present invention will be described below with reference to FIGS. 1 and 2 of the accompanying drawings.

As shown in FIG. 1, the high voltage capacitor comprises a capacitor body 6, an insulating protection portion 11 which entirely covers the outer periphery thereof, and a sealed case 12 which houses these.
Sealing portions 13, 14, and 15 are provided at each joint of the case 12 and a portion through which the capacitor body 6 penetrates.

The capacitor body 6 is provided with baked surface electrodes 2 and 3 coated with silver paste or the like on both end surfaces of the dielectric ceramic body 1, and the electrode terminals 4 are provided on the surface electrodes 2 and 3, respectively. 5 are fixed by soldering or the like.

The insulation protection portion 11 is made of epoxy resin,
A part of both electrode terminals 4 and 5 is integrally molded and covered from the dielectric ceramic body 1.

The sealed case 12 is composed of a bottomed case body 16 in which the insulation protection part 1 is housed, and a lid 17 which closes the upper end opening of the case body 16. The case 12 is made of halogen-proof gas. It is formed by using alumina, which has heat resistance and ultraviolet resistance, as a material.

This alumina has a silicon content of 5 w
It is effective to use ceramics made of high-purity aluminum oxide of t% or less. If alumina containing silicon in an amount of more than 5 wt% is used, the reaction between the halogen gas and the case 12 cannot be avoided. In addition,
The material used for the case 12 is not limited as long as it is functionally similar to alumina.

The above-mentioned electrode terminals 4 and 5 are formed by using brass, and the surfaces thereof are plated with, for example, nickel having halogen gas resistance and ultraviolet resistance. The material of the surface of the electrode terminal is C, which has the same function as nickel.
You may make it use materials, such as u and Al.

In addition to the plating, the surface of the electrode terminal is
A material having halogen gas resistance and ultraviolet light resistance may be formed by sputtering, vapor deposition, or the like, and the electrode terminals may be made of a material having halogen gas resistance and ultraviolet light resistance.

In the sealed case 12, the portions where the electrode terminals 4 and 5 penetrate the bottom portion of the case body 16 and the lid 17 and the sealing portions 13, 14, 15 provided at the fitting portions of the case body 16 and the lid 17 are It is formed of an O-ring, sheet, packing, gasket or the like using fluororubber, and the fluororubber has a function of withstanding halogen gas.

The high-voltage capacitor of the present invention is constructed as described above, and is made of high-purity alumina ceramics having a silicon content of 5 wt% or less.
7, the case body 16 and the lid 17, the seal portion 13,
Set O-rings 14 and 15 in advance.

A capacitor body 6 consisting of a dielectric ceramic body 1 and both electrode terminals is inserted into a case body 16, an insulation protection portion 11 is cast, and a lid 1 is provided at the upper end opening of the case body 16.
7 is fitted and fixed. In this state, the outer ends of both the electrode terminals 4 and 5 penetrate the bottom of the case body 16 and the lid 17 and project to the outside.

Insulation protection portion 11 cast in the above state is
A high voltage capacitor is completed by curing at 50 ° C. for 1 hour.

Further, as shown in FIG. 2, the insulation protection part may be composed of two layers as the insulation protection parts 18 and 19. In this case, the capacitor body 6 molded in advance with the insulation protection portion 18 is used as the case body 16
, The insulation protection part 19 is cast, the lid 17 is fitted,
It is manufactured by curing the insulation protection portion 19. Insulation protection part 1
8 is made of an epoxy resin, and the insulation protection portion 19 may be a flexible insulating resin such as a silicone resin, an epoxy resin, or a urethane resin.

In the high voltage capacitor of the present invention, the case 12 is formed of alumina having halogen gas resistance and ultraviolet light resistance even when used in an atmosphere containing a halogen gas such as in an excimer laser device. Since the outer surfaces of the protruding electrode terminals 4 and 5 are nickel-plated,
Case 1 due to ultraviolet rays generated by discharge and discharge plasma
2 does not deteriorate, and Case 1
Since 2 and the electrode terminals 4 and 5 do not pollute the gas atmosphere, the efficiency of the laser device is not reduced.

Further, the seal portions 13, 14, 1 provided in the fitting portion of the case 12 and the portion through which the electrode terminals 4, 5 penetrate.
5 can prevent atmospheric gas from entering the inside of the case 12.

Of course, the high voltage capacitor of the present invention is
It should be added that it does not necessarily have to be used in an excimer laser device.

[0033]

As described above, according to the present invention, the reaction and deterioration of the case and the electrode terminals can be prevented even when the case and the electrode terminals are exposed to the ultraviolet ray and the discharge plasma due to the discharge in the atmosphere gas containing the halogen gas. Since the atmospheric gas does not enter the inside, deterioration of the inside of the capacitor is eliminated, contamination of the atmospheric gas is prevented, and the efficiency of the laser device is not lowered.

[Brief description of drawings]

FIG. 1 is a vertical sectional front view showing a high voltage capacitor of the present invention.

FIG. 2 is a vertical sectional front view showing another example of the high voltage capacitor of the present invention.

FIG. 3 is a vertical sectional front view showing a conventional high voltage condenser.

FIG. 4 is a vertical sectional front view showing another example of a conventional high-voltage capacitor.

[Explanation of symbols]

 1 Dielectric ceramic body 2, 3 Electrode 4, 5 Electrode terminal 6 Capacitor body 11, 18, 19 Insulation protection part 12 Case 13, 14, 15 Seal part 16 Case body 17 Lid

Claims (5)

[Claims] 1. A high voltage capacitor having at least two electrode terminals, wherein the surface of the capacitor body is covered with a material having halogen gas resistance and ultraviolet light resistance. 2. The high voltage capacitor according to claim 1, wherein the material having halogen gas resistance and ultraviolet light resistance is alumina. 3. The high-voltage capacitor according to claim 2, wherein the silicon content of alumina is 5 wt% or less. 4. The high-voltage capacitor according to claim 1, wherein the surface of the electrode terminal of the capacitor is made of a material having halogen gas resistance and ultraviolet resistance. 5. The capacitor body has a case shape capable of being hermetically sealed, and a seal portion is provided at a portion where the electrode terminal penetrates the case and a fitting portion of the case. The high-voltage capacitor according to claim 2, claim 3, or claim 4.