JP3336718B2 - Manufacturing method of high voltage capacitor and high voltage capacitor - Google Patents
Manufacturing method of high voltage capacitor and high voltage capacitorInfo
- Publication number
- JP3336718B2 JP3336718B2 JP02053894A JP2053894A JP3336718B2 JP 3336718 B2 JP3336718 B2 JP 3336718B2 JP 02053894 A JP02053894 A JP 02053894A JP 2053894 A JP2053894 A JP 2053894A JP 3336718 B2 JP3336718 B2 JP 3336718B2
- Authority
- JP
- Japan
- Prior art keywords
- sealed case
- voltage capacitor
- resin
- case
- insulating protective
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Description
【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION
【０００１】[0001]
【産業上の利用分野】この発明は、フッ素や塩素などの
ような活性ガスを含む雰囲気中で使用される高圧コンデ
ンサの製造方法と高圧コンデンサに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a high-voltage capacitor used in an atmosphere containing an active gas such as fluorine or chlorine, and a high-pressure capacitor.
【０００２】[0002]
【従来の技術】従来から、炭酸ガスレーザやエキシマレ
ーザなどにおける放電励起用としては、図６に示す高圧
コンデンサが用いられている。この高圧コンデンサ１７
は、誘電体セラミックスからなるコンデンサ素体１の両
端面それぞれに電極２が形成され、電極２のそれぞれに
取り付けられた外部端子３とによって構成されている。
そして、この高圧コンデンサ１７においては、外部端子
３の外端部を除くコンデンサ本体の外周囲をエポキシ系
樹脂などのモールド樹脂からなる絶縁保護材１５によっ
て全面的に覆ってなる絶縁保護構造となっている。2. Description of the Related Art Conventionally, a high-voltage capacitor shown in FIG. 6 has been used for discharge excitation in a carbon dioxide gas laser, an excimer laser, or the like. This high voltage condenser 17
The electrode 2 is formed on each of both end surfaces of a capacitor body 1 made of dielectric ceramics, and is constituted by external terminals 3 attached to each of the electrodes 2.
The high-voltage capacitor 17 has an insulation protection structure in which the outer periphery of the capacitor body except the outer end of the external terminal 3 is entirely covered with an insulation protection material 15 made of a mold resin such as an epoxy resin. I have.
【０００３】この高圧コンデンサは一般には大気中で使
用されるが、エキシマレーザでは、発振効率を向上させ
るため、ＸｅＣｌやＫｒＦなどを主成分とするレーザ媒
質ガスが充填されたレーザチャンバー内に、高圧コンデ
ンサを設置するようになってきている。[0003] This high-voltage capacitor is generally used in the atmosphere. In the case of an excimer laser, in order to improve the oscillation efficiency, a high-pressure capacitor is placed in a laser chamber filled with a laser medium gas mainly composed of XeCl, KrF or the like. Capacitors are being installed.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、従来の
高圧コンデンサ１７ではレーザ媒質ガス中に生じるＣｌ
2やＦ2などの活性ガスと絶縁保護材１５とが反応を起こ
し、雰囲気としてのレーザ媒質ガスの劣化や絶縁保護材
１５の絶縁劣化などが生じている。これらの対策として
本件出願人は実願平０３−３４９５７号の高圧コンデン
サを提案した。この高圧コンデンサは図７で示すよう
に、コンデンサ本体５ｃの外周囲を耐蝕性の高いフッ素
樹脂やアルミナセラミックス等の材料でできたケース６
で囲み、エポキシ樹脂などのモールド樹脂からなる絶縁
保護材１５を内部の隙間に充填し、ケース６から外部端
子３を導出して高圧コンデンサ１８を構成したものであ
る。However, in the conventional high-voltage condenser 17, Cl generated in the laser medium gas is not used.
An active gas such as 2 or F 2 reacts with the insulating protective material 15, causing deterioration of the laser medium gas as an atmosphere and insulation deterioration of the insulating protective material 15. As a countermeasure against these problems, the present applicant has proposed a high-voltage capacitor disclosed in Japanese Utility Model Application No. 03-34957. As shown in FIG. 7, in this high-voltage capacitor, a case 6 made of a highly corrosion-resistant material such as fluororesin or alumina ceramics is used around the outside of the capacitor body 5c.
A high-voltage capacitor 18 is formed by filling an inner gap with an insulating protective material 15 made of a mold resin such as an epoxy resin and leading out the external terminal 3 from the case 6.
【０００５】しかし、エポキシ系樹脂などの充填に際し
て、モールド樹脂の注入の際に、樹脂の気泡の発生、樹
脂のケース外へのはみ出し、ケース内部の未充填部の発
生等、不完全な充填となり易い。そのため、レーザチャ
ンバー内に高圧コンデンサ１８を設置したとき、レーザ
チャンバー内を真空脱気後加圧して活性ガス雰囲気にす
ると、活性ガスが高圧コンデンサ１８のケース６内部へ
侵入したり、ケース６外にはみ出した樹脂を腐食したり
して、高圧コンデンサ１８の電気特性が急激に劣化した
り、また、腐食と同時にガスや粉末を発生して、レーザ
媒質ガスが汚染されることになり、レーザ機器の寿命を
低下させるなど問題となっていた。[0005] However, when filling with an epoxy resin or the like, incomplete filling such as generation of air bubbles of the resin, protrusion of the resin to the outside of the case, and generation of an unfilled portion inside the case occurs when the mold resin is injected. easy. Therefore, when the high-pressure condenser 18 is installed in the laser chamber and the inside of the laser chamber is evacuated and then pressurized to form an active gas atmosphere, the active gas enters the inside of the case 6 of the high-pressure condenser 18 or goes out of the case 6. The electrical properties of the high-voltage capacitor 18 are rapidly deteriorated by corroding the protruding resin, and the gas and the powder are generated at the same time as the corrosion, thereby contaminating the laser medium gas. There have been problems such as shortening the service life.
【０００６】この発明の目的は、密封ケースの内部に絶
縁保護材の未充填部のない高圧コンデンサの製造方法を
提供することにある。また、この発明の目的は、密封ケ
ースの内部に充填される絶縁保護材が密封ケースからは
み出さない高圧コンデンサの製造方法を提供することに
ある。さらに、この発明の目的は、密封ケースの中に絶
縁保護材の未充填部がなく、また密封ケースから絶縁保
護材がはみ出さないことにより、Ｆ2やＣｌ2などの活性
ガスを含む雰囲気に対して安定な高圧コンデンサを提供
することにある。An object of the present invention is to provide a method of manufacturing a high-voltage capacitor in which a sealed case has no unfilled portion with an insulating protective material. Another object of the present invention is to provide a method of manufacturing a high-voltage capacitor in which an insulating protective material filled in a sealed case does not protrude from the sealed case. Further, an object of the present invention is to provide an unfilled portion of the insulating protective material in the sealed case and prevent the insulating protective material from protruding from the sealed case, so that an atmosphere containing an active gas such as F 2 or Cl 2 can be obtained. An object of the present invention is to provide a stable high-voltage capacitor.
【０００７】[0007]
【課題を解決するための手段】請求項１に係る発明は、
密封ケースの内部に、密封ケースの内部と外部とが通じ
る孔を有する外部端子を電極に接続したコンデンサ本体
を収納するとともに密封ケースから外部端子を導出し、
外部端子の孔を介して密封ケース内部のガスを排気して
減圧状態にしたのち、密封ケースの内部に絶縁保護材を
充填する高圧コンデンサの製造方法である。The invention according to claim 1 is
Inside the sealed case, house the capacitor body connected to the electrode with an external terminal having a hole through which the inside and the outside of the sealed case communicate with each other, and derive the external terminal from the sealed case,
This is a method for manufacturing a high-voltage capacitor in which gas inside the sealed case is exhausted through a hole of an external terminal to reduce the pressure, and then the inside of the sealed case is filled with an insulating protective material.
【０００８】請求項２に係る発明は、密封ケースのケイ
素の含有量が５wt％以下のセラミックスである高圧コン
デンサの製造方法である。The invention according to claim 2 is a method for manufacturing a high-voltage capacitor in which the silicon content of the sealed case is a ceramic having a content of 5 wt% or less.
【０００９】請求項３に係る発明は、絶縁保護材が、エ
ポキシ系樹脂、シリコン系樹脂、ウレタン系樹脂、フッ
素系樹脂、シリコンオイルのいずれかの高圧コンデンサ
の製造方法である。According to a third aspect of the present invention, there is provided a method for manufacturing a high-voltage capacitor in which the insulating protective material is any of an epoxy resin, a silicon resin, a urethane resin, a fluorine resin, and a silicone oil.
【００１０】請求項４に係る発明は、密封ケースと、そ
の内部に収納されているコンデンサ本体と、コンデンサ
本体の電極に電気的に接続され、密封ケースから外部に
導出されている外部端子と、コンデンサ本体を収納して
いる密封ケースの中の空間に充填された絶縁保護材とか
らなり、外部端子の少なくとも一方に密封ケースの内部
と外部とが通じる孔が設けられている高圧コンデンサで
ある。According to a fourth aspect of the invention, there is provided a sealed case, a capacitor body housed in the sealed case, and an external terminal electrically connected to an electrode of the capacitor body and led out of the sealed case. A high-voltage capacitor comprising an insulating protective material filled in a space inside a sealed case accommodating a capacitor body, and having at least one of external terminals provided with a hole communicating between the inside and the outside of the sealed case.
【００１１】請求項５に係る発明は、密封ケースのケイ
素の含有量が５wt％以下のセラミックスである高圧コン
デンサである。According to a fifth aspect of the present invention, there is provided a high-voltage capacitor comprising a ceramic having a sealed case having a silicon content of 5 wt% or less.
【００１２】請求項６に係る発明は、絶縁保護材が、エ
ポキシ系樹脂、シリコン系樹脂、ウレタン系樹脂、フッ
素系樹脂、シリコンオイルのいずれかである高圧コンデ
ンサである。The invention according to claim 6 is a high-voltage capacitor in which the insulating protective material is any one of an epoxy resin, a silicon resin, a urethane resin, a fluorine resin, and a silicone oil.
【００１３】密封ケースのケイ素の含有量を５wt％以下
に限定しているのは、ケイ素の含有量が５wt％を越える
と、この密封ケースと活性ガスの反応が避けられなくな
るためである。The reason why the content of silicon in the sealed case is limited to 5 wt% or less is that if the silicon content exceeds 5 wt%, the reaction between the sealed case and the active gas cannot be avoided.
【００１４】[0014]
【作用】この発明の製造方法によれば、外部端子にケー
ス内部と通じる孔を設け、外部端子の孔を介して密封ケ
ース内部のガスを排気して減圧状態にしたのち、密封ケ
ースの内部に絶縁保護材を充填することにより、ケース
内にモールド樹脂を隙間なく充填でき、ケース外部への
はみ出しもなく、高圧コンデンサを製造できる。According to the manufacturing method of the present invention, the external terminal is provided with a hole communicating with the inside of the case, the gas inside the sealed case is exhausted through the hole of the external terminal to reduce the pressure, and then the inside of the sealed case is removed. By filling the insulating protection material, the case can be filled with the mold resin without any gap, and the high-voltage capacitor can be manufactured without protruding outside the case.
【００１５】また、この発明の高圧コンデンサは、最も
外側に位置する密封ケースと雰囲気とが接触することに
なり、この密封ケースに収納されてコンデンサ本体の外
周囲を取り囲む絶縁保護部と雰囲気中の活性ガスとが直
接的に接触することはなくなる。また、ケース外の樹脂
のはみ出しによる活性ガスとの反応や密封ケース内の未
充填部による密封ケース内への活性ガスの侵入もない。
そして、この密封ケースをケイ素の含有量が５wt％以下
のセラミックスによって形成すれば、ケースが活性ガス
と反応することはなくなり、反応による劣化が抑えられ
る。Further, in the high-voltage capacitor according to the present invention, the atmosphere comes into contact with the outermost sealed case, and the insulating protection portion which is housed in the sealed case and surrounds the outer periphery of the capacitor main body is provided with the atmosphere. There is no direct contact with the active gas. In addition, there is no reaction with the active gas due to the protrusion of the resin outside the case, and no entry of the active gas into the sealed case due to the unfilled portion in the sealed case.
If the sealed case is formed of a ceramic having a silicon content of 5 wt% or less, the case does not react with the active gas, and deterioration due to the reaction is suppressed.
【００１６】[0016]
（実施例１）図１で示すように、この発明の第１実施例
の高圧コンデンサは、円板状の誘電体セラミックスから
なるコンデンサ素体１の両端面に、銀を主体とする電極
２を塗布し、７５０℃で焼き付ける。次に電極２のそれ
ぞれに外部端子３、３ａを取り付ける。外部端子３ａに
は孔４ａが設けられており、外部端子３ａの先端と基部
側面とが通じるようにしている。このような高圧コンデ
ンサ本体５に高純度アルミナセラミックスよりなる密封
ケース６に装着されている。(Embodiment 1) As shown in FIG. 1, a high-voltage capacitor according to a first embodiment of the present invention has an electrode 2 mainly composed of silver on both end surfaces of a capacitor body 1 made of a disk-shaped dielectric ceramic. Apply and bake at 750 ° C. Next, external terminals 3 and 3a are attached to each of the electrodes 2. The external terminal 3a is provided with a hole 4a so that the front end of the external terminal 3a and the side surface of the base can communicate with each other. The high-pressure capacitor body 5 is mounted on a sealed case 6 made of high-purity alumina ceramics.
【００１７】密封ケース６はコンデンサ本体５および絶
縁保護材１５を収納する筒型部６ａと、その開口部を密
閉する蓋６ｂとから構成されており、これらの筒型部６
ａおよび蓋６ｂはともにケイ素の含有量を５wt％以下と
したアルミナやジルコニアなどのセラミックスによって
形成されている。なお、このとき、蓋６ｂには外部端子
３、３ａの外端部が貫通して外部に突出する貫通孔が形
成されている。The sealed case 6 is composed of a cylindrical portion 6a for accommodating the capacitor body 5 and the insulating protection material 15, and a lid 6b for sealing the opening thereof.
Both a and lid 6b are formed of ceramics such as alumina or zirconia having a silicon content of 5 wt% or less. At this time, a through hole is formed in the lid 6b so that the outer ends of the external terminals 3 and 3a penetrate and project to the outside.
【００１８】また、密封ケース６を密閉するには、筒型
部６ａと蓋６ｂとが接するところにゴムのような弾性体
のＯリング７を配し、蓋６ｂと外部端子３、３ａとが接
するところにも同じ材質のＯリング７を配して、内部が
密閉される構造となっている。密封ケース６内に絶縁保
護材１５を充填して高圧コンデンサ８が得られる。外部
端子３ａの孔４ａにより、密封ケース６で内部を密閉し
たとき、密封ケース６の内外が通じることになる。To seal the sealed case 6, an O-ring 7 made of an elastic material such as rubber is disposed where the cylindrical portion 6a and the lid 6b are in contact with each other, and the lid 6b and the external terminals 3, 3a are connected to each other. An O-ring 7 of the same material is also arranged at the place where it is in contact, and the inside is sealed. By filling the insulating protective material 15 in the sealed case 6, the high-voltage capacitor 8 is obtained. When the inside is sealed with the sealed case 6 by the hole 4a of the external terminal 3a, the inside and the outside of the sealed case 6 communicate.
【００１９】高圧コンデンサ８の密封ケース６内への絶
縁保護材１５の充填方法を、図２の絶縁保護材充填配管
図に示す。まず、端子３ａに設けた孔４ａにパイプを接
続し、バルブ９，１２を閉じバルブ１０，１１を開け、
密封ケース６内のガスを充分排気する。これと同時に絶
縁保護材１５のモールド樹脂としてエポキシ系樹脂の入
った樹脂槽１３内の樹脂の脱泡を行う。次に、バルブ１
０を閉じバルブ１２を開け、その後、密封ケース６の内
部を真空に保ったまま、真空排気装置１４を止め、バル
ブ９を開け、樹脂槽１３を大気圧に開放することによ
り、絶縁保護材１５を密封ケース６内に充填した。次い
で、１５０℃で３時間保持し、絶縁保護材１５を硬化さ
せ高圧コンデンサ８を得た。A method of filling the insulating protective material 15 into the sealed case 6 of the high-voltage capacitor 8 is shown in FIG. First, a pipe is connected to a hole 4a provided in the terminal 3a, valves 9 and 12 are closed, and valves 10 and 11 are opened.
The gas in the sealed case 6 is sufficiently exhausted. At the same time, the resin in the resin tank 13 containing the epoxy resin as the molding resin of the insulating protective material 15 is defoamed. Next, valve 1
0, and the valve 12 is opened. Thereafter, while the inside of the sealed case 6 is kept at a vacuum, the vacuum exhaust device 14 is stopped, the valve 9 is opened, and the resin tank 13 is opened to the atmospheric pressure. Was filled in the sealed case 6. Next, it was kept at 150 ° C. for 3 hours, and the insulating protective material 15 was cured to obtain a high-voltage capacitor 8.
【００２０】（実施例２）図３はこの発明の第２実施例
を示している。この実施例の高圧コンデンサ８ａの特徴
は、外部端子３ａ、３ｂの両方に孔４ａ、４ｂを設けた
点にある。この高圧コンデンサ８ａのその他の構成は、
図１に示した実施例と同じであるので同じ図番を付して
詳細な説明は省略する。(Embodiment 2) FIG. 3 shows a second embodiment of the present invention. The feature of the high-voltage capacitor 8a of this embodiment is that holes 4a and 4b are provided in both the external terminals 3a and 3b. Other configurations of the high-voltage capacitor 8a are as follows.
Since this embodiment is the same as the embodiment shown in FIG. 1, the same reference numerals are given and the detailed description is omitted.
【００２１】図３に示す高圧コンデンサ８ａの製造方法
を図４にもとづいて説明する。まず、一方の端子３ａに
設けた孔４ａを真空排気装置１４とつながるパイプと接
続し、もう一方の孔４ｂに樹脂槽１３とつながるパイプ
を接続する。そして、バルブ９，１２を閉じバルブ１
０，１１を開け、密封ケース６内のガスを充分排気し、
同時に絶縁保護材１５のモールド樹脂としてエポキシ系
樹脂の入った樹脂槽１３の樹脂の脱泡を行った。次に、
バルブ１０を閉じバルブ１２を開け、その後、密封ケー
ス６の内部を真空に保ったまま、真空排気装置１４を止
め、バルブ９を開け、樹脂槽１３を大気圧に開放するこ
とにより、絶縁保護材１５を密封ケース６内に充填し
た。次に、１５０℃で３時間保持し、絶縁保護材１５を
硬化させ高圧コンデンサ８ａを得た。A method of manufacturing the high-voltage capacitor 8a shown in FIG. 3 will be described with reference to FIG. First, a hole 4a provided in one terminal 3a is connected to a pipe connected to the vacuum evacuation device 14, and a pipe connected to the resin tank 13 is connected to the other hole 4b. Then, the valves 9 and 12 are closed and the valve 1 is closed.
Open 0, 11 and exhaust the gas inside the sealed case 6 sufficiently,
At the same time, the resin in the resin tank 13 containing the epoxy resin as the molding resin for the insulating protection material 15 was defoamed. next,
The valve 10 is closed and the valve 12 is opened. Then, while the inside of the sealed case 6 is maintained at a vacuum, the evacuation device 14 is stopped, the valve 9 is opened, and the resin tank 13 is opened to the atmospheric pressure. 15 was filled in the sealed case 6. Next, it was kept at 150 ° C. for 3 hours, and the insulating protective material 15 was cured to obtain a high-voltage capacitor 8a.
【００２２】実施例では外部端子３ａ、３ｂに設けた孔
４ａ、４ｂは一つであるが、孔の数は任意である。ただ
し、複数の孔を設けた場合、樹脂１５を密封ケース６の
内部に充填するときは、パイプに接続している孔４ａや
４ｂ以外の孔は予めなくすか、閉じておく必要がある。
また、外部端子３の数も二つに限らない。さらに、誘電
体セラミック素体１の形状も円板状に限らず、角板状で
も柱状でもよい。絶縁保護材１５はエポキシ系樹脂以外
に、シリコン系樹脂、ウレタン系樹脂、フッ素系樹脂、
シリコンオイル等で注入時に液状の絶縁保護材を使用し
ても良い。この場合、エポキシ系樹脂、シリコン系樹
脂、ウレタン系樹脂、フッ素系樹脂としては、シリカな
どの無機質充填剤を添加したものも含むことを意味す
る。また、絶縁性を完全にするために、図５に示すよう
に、予めエポキシ系樹脂等の絶縁保護材１６で樹脂モー
ルドを施したコンデンサ本体５ｂを使用しても良い。In the embodiment, the number of holes 4a and 4b provided in the external terminals 3a and 3b is one, but the number of holes is arbitrary. However, when a plurality of holes are provided, when filling the inside of the sealed case 6 with the resin 15, holes other than the holes 4a and 4b connected to the pipe need to be eliminated or closed in advance.
Also, the number of external terminals 3 is not limited to two. Further, the shape of the dielectric ceramic body 1 is not limited to a disk shape, but may be a square plate shape or a column shape. Insulating protective material 15 is made of a silicone resin, a urethane resin, a fluorine resin,
A liquid insulating protective material may be used at the time of injection with silicon oil or the like. In this case, the epoxy-based resin, the silicon-based resin, the urethane-based resin, and the fluorine-based resin include those to which an inorganic filler such as silica is added. In addition, as shown in FIG. 5, a capacitor main body 5b which has been previously resin-molded with an insulating protective material 16 such as an epoxy resin may be used to complete the insulation.
【００２３】[0023]
【発明の効果】上記で説明したように、この発明の製造
方法では、高圧コンデンサの密封ケース内に充填する絶
縁保護材が密封ケースの外にはみ出したり、密封ケース
内での未充填部がなくなり、信頼性のある高圧コンデン
サが得られる。As described above, in the manufacturing method of the present invention, the insulating protective material filled in the sealed case of the high-voltage capacitor does not protrude outside the sealed case, and the unfilled portion in the sealed case is eliminated. Thus, a reliable high-voltage capacitor can be obtained.
【００２４】また、この発明の高圧コンデンサは、端子
から絶縁保護材を封入して密封ケースで密閉することに
より、絶縁保護材のはみ出しによる活性ガスとの反応が
抑えられ、レーザチャンバー内の雰囲気汚染を防げ、レ
ーザ機器の劣化を防げる。また、密封ケース内に未充填
部がなくなり、加圧雰囲気中で密封ケース内部に活性ガ
スが侵入することなく、高圧コンデンサの電気的特性の
劣化が抑えられ、耐久性に優れた高圧コンデンサが得ら
れる。In the high-voltage capacitor according to the present invention, by enclosing the insulating protective material from the terminal and sealing it with a sealed case, the reaction with the active gas due to the protrusion of the insulating protective material is suppressed, and the atmosphere in the laser chamber is contaminated. And prevent deterioration of laser equipment. In addition, there is no unfilled part in the sealed case, no active gas enters the sealed case in a pressurized atmosphere, and deterioration of the electrical characteristics of the high-voltage capacitor is suppressed. Can be
【図面の簡単な説明】[Brief description of the drawings]
【図１】この発明の第１の実施例の高圧コンデンサの断
面図である。FIG. 1 is a sectional view of a high-voltage capacitor according to a first embodiment of the present invention.
【図２】この発明の第１の実施例の高圧コンデンサの密
封ケースに絶縁保護材を充填するための絶縁保護材注入
配管図である。FIG. 2 is an insulation protection material injection piping for filling an insulation protection material into a sealed case of the high-voltage capacitor according to the first embodiment of the present invention.
【図３】この発明の第２の実施例の高圧コンデンサの断
面図である。FIG. 3 is a sectional view of a high-voltage capacitor according to a second embodiment of the present invention.
【図４】この発明の第２の実施例の高圧コンデンサの密
封ケースに絶縁保護材を充填するための絶縁保護材注入
配管図である。FIG. 4 is an insulation protection material injection piping diagram for filling an insulation protection material into a sealed case of a high-voltage capacitor according to a second embodiment of the present invention.
【図５】この発明の第３の実施例の高圧コンデンサの断
面図である。FIG. 5 is a sectional view of a high-voltage capacitor according to a third embodiment of the present invention.
【図６】従来例にかかる高圧コンデンサの断面図であ
る。FIG. 6 is a sectional view of a high-voltage capacitor according to a conventional example.
【図７】従来例にかかるもう一つの高圧コンデンサの断
面図である。FIG. 7 is a cross-sectional view of another conventional high-voltage capacitor.
１ コンデンサ素体 ２ 電極 ３、３ａ、３ｂ 外部端子 ４ａ、４ｂ 孔 ５、５ａ、５ｂ コンデンサ本体 ６ 密封ケース ６ａ 密封ケースの筒型部 ６ｂ 密封ケースの蓋 ８、８ａ、８ｂ 高圧コンデンサ DESCRIPTION OF SYMBOLS 1 Capacitor body 2 Electrode 3, 3a, 3b External terminal 4a, 4b Hole 5, 5a, 5b Capacitor main body 6 Sealing case 6a Cylindrical part of sealing case 6b Sealing case lid 8, 8a, 8b High-voltage capacitor
Claims (6)
と外部とが通じる孔を有する外部端子を電極に接続した
コンデンサ本体を収納するとともに密封ケースから外部
端子を導出し、外部端子の孔を介して密封ケース内部の
ガスを排気して減圧状態にしたのち、密封ケースの内部
に絶縁保護材を充填することを特徴とする高圧コンデン
サの製造方法。1. A capacitor body in which an external terminal having a hole communicating between the inside and the outside of the sealed case is connected to an electrode inside the sealed case, and the external terminal is led out of the sealed case. A method for manufacturing a high-voltage capacitor, comprising: evacuating a gas inside a sealed case to reduce the pressure therein, and then filling the inside of the sealed case with an insulating protective material.
％以下のセラミックスであることを特徴とする請求項１
に記載の高圧コンデンサの製造方法。2. The sealed case has a silicon content of 5 wt.
% Or less of ceramics.
3. The method for manufacturing a high-voltage capacitor according to claim 1.
リコン系樹脂、ウレタン系樹脂、フッ素系樹脂、シリコ
ンオイルのいずれかである請求項２に記載の高圧コンデ
ンサの製造方法。3. The method for manufacturing a high-voltage capacitor according to claim 2, wherein the insulating protective material is any one of an epoxy resin, a silicon resin, a urethane resin, a fluorine resin, and a silicone oil.
るコンデンサ本体と、コンデンサ本体の電極に電気的に
接続され、密封ケースから外部に導出されている外部端
子と、コンデンサ本体を収納している密封ケースの中の
空間に充填された絶縁保護材とからなり、外部端子の少
なくとも一方に前記密封ケースの内部と外部とが通じる
孔が設けられていることを特徴とする高圧コンデンサ。4. A sealed case, a capacitor body housed in the sealed case, an external terminal electrically connected to an electrode of the capacitor body and led out of the sealed case, and a capacitor body housed therein. A high-voltage capacitor comprising: an insulating protective material filled in a space inside a sealed case, wherein at least one of the external terminals is provided with a hole communicating between the inside and the outside of the sealed case.
wt％以下のセラミックスであることを特徴とする請求項
４に記載の高圧コンデンサ。5. The sealed case has a silicon content of 5%.
The high-voltage capacitor according to claim 4, wherein the ceramic is not more than wt%.
リコン系樹脂、ウレタン系樹脂、フッ素系樹脂、シリコ
ンオイルのいずれかである請求項４に記載の高圧コンデ
ンサ。6. The high-voltage capacitor according to claim 4, wherein the insulating protection material is any one of an epoxy resin, a silicon resin, a urethane resin, a fluorine resin, and a silicone oil.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP02053894A JP3336718B2 (en) | 1994-02-17 | 1994-02-17 | Manufacturing method of high voltage capacitor and high voltage capacitor |
| DE19505081A DE19505081C2 (en) | 1994-02-17 | 1995-02-15 | High voltage capacitor and process for its manufacture |
| US08/390,482 US5587869A (en) | 1994-02-17 | 1995-02-17 | High-voltage capacitor manufacturing method and high-voltage capacitor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP02053894A JP3336718B2 (en) | 1994-02-17 | 1994-02-17 | Manufacturing method of high voltage capacitor and high voltage capacitor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07230933A JPH07230933A (en) | 1995-08-29 |
| JP3336718B2 true JP3336718B2 (en) | 2002-10-21 |
Family
ID=12029941
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP02053894A Expired - Fee Related JP3336718B2 (en) | 1994-02-17 | 1994-02-17 | Manufacturing method of high voltage capacitor and high voltage capacitor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3336718B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3331953B2 (en) * | 1998-03-19 | 2002-10-07 | 株式会社村田製作所 | High voltage condenser |
| JP3497448B2 (en) * | 2000-06-09 | 2004-02-16 | Ｎｅｃトーキン株式会社 | Electric double layer capacitors and batteries |
| US8228660B2 (en) * | 2007-03-08 | 2012-07-24 | Panasonic Corporation | Case-molded capacitor and method for using the same |
-
1994
- 1994-02-17 JP JP02053894A patent/JP3336718B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07230933A (en) | 1995-08-29 |
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