JPH04126534A - Method and apparatus for producing inorganic sphered particles - Google Patents
Method and apparatus for producing inorganic sphered particlesInfo
- Publication number
- JPH04126534A JPH04126534A JP24730390A JP24730390A JPH04126534A JP H04126534 A JPH04126534 A JP H04126534A JP 24730390 A JP24730390 A JP 24730390A JP 24730390 A JP24730390 A JP 24730390A JP H04126534 A JPH04126534 A JP H04126534A
- Authority
- JP
- Japan
- Prior art keywords
- burner
- raw material
- material powder
- combustible gas
- combustion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 title claims description 11
- 238000000034 method Methods 0.000 title claims description 6
- 238000002485 combustion reaction Methods 0.000 claims abstract description 19
- 239000002994 raw material Substances 0.000 claims description 42
- 239000000843 powder Substances 0.000 claims description 40
- 239000010954 inorganic particle Substances 0.000 claims description 9
- 238000002844 melting Methods 0.000 claims description 9
- 230000008018 melting Effects 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 239000007858 starting material Substances 0.000 abstract 6
- 239000007789 gas Substances 0.000 description 49
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 238000001816 cooling Methods 0.000 description 6
- 239000000567 combustion gas Substances 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000000446 fuel Substances 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 239000004215 Carbon black (E152) Substances 0.000 description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 238000001000 micrograph Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- WWYNJERNGUHSAO-XUDSTZEESA-N (+)-Norgestrel Chemical compound O=C1CC[C@@H]2[C@H]3CC[C@](CC)([C@](CC4)(O)C#C)[C@@H]4[C@@H]3CCC2=C1 WWYNJERNGUHSAO-XUDSTZEESA-N 0.000 description 1
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 239000001273 butane Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002283 diesel fuel Substances 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 239000008393 encapsulating agent Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 239000003502 gasoline Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000003350 kerosene Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 description 1
- OFBQJSOFQDEBGM-UHFFFAOYSA-N n-pentane Natural products CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000011027 product recovery Methods 0.000 description 1
- -1 propeller Chemical compound 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 239000012798 spherical particle Substances 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
Landscapes
- Glanulating (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、例えばＩＣの封止材料として用いられる溶
融球状化した無機質粒子の製造方法及びそれに利用され
る装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for producing molten spheroidal inorganic particles used, for example, as a sealing material for ICs, and an apparatus used therefor.
ＩＣの封止剤には、電気絶縁性、低熱膨張率等の機能が
要求される。そこで、一般には溶融処理したアモルファ
ス状のシリカ粒子などの無機質粒子にエポキシ樹脂など
の熱硬化性樹脂を混ぜて、この混合物を用いて封止を行
なっている。近年、この無機質粒子として球形状の粒子
を用いると、流動性に優れ樹脂封止を行ないやすいとい
う長所があることがわかり、球形状の溶融無機質粒子が
多く用いられるに至っている。この球形状の無機質粒子
の製造方法は、例えば特開昭５８−１４５６１３号公報
等に開示されている。この従来の方法においては、炉は
球状化室とその下部に接続された冷却室により構成され
、炉の頂部より原料粉末と共に火炎を噴射して原料粉末
の表面もしくは全体を溶融し、その表面張力で原料粉末
を球状化させている。このようにして球状化処理された
原料粉末を冷却室で冷却固化されて、後続の捕集系に導
かれる。上記捕集系には例えばサイクロン、バグフィル
タ−等の捕集機が設置されている。IC encapsulants are required to have functions such as electrical insulation and low coefficient of thermal expansion. Therefore, in general, a thermosetting resin such as an epoxy resin is mixed with melt-treated inorganic particles such as amorphous silica particles, and this mixture is used for sealing. In recent years, it has been found that the use of spherical particles as the inorganic particles has the advantage of superior fluidity and ease of resin sealing, and spherical molten inorganic particles have come to be widely used. A method for producing spherical inorganic particles is disclosed, for example, in Japanese Patent Application Laid-Open No. 145613/1983. In this conventional method, the furnace consists of a spheroidizing chamber and a cooling chamber connected to the bottom of the spheroidizing chamber, and a flame is injected from the top of the furnace along with the raw material powder to melt the surface or the entire raw material powder, and the surface tension The raw material powder is spheroidized. The raw material powder thus spheroidized is cooled and solidified in a cooling chamber, and then guided to a subsequent collection system. The collection system is equipped with a collection device such as a cyclone or a bag filter.
従来のバーナーの一例を第６図及び第７図に示す。この
バーナーは円柱状ブロックの内部がテーパ状に割数され
て燃焼部が形成され、該テーパ面の上部には８個の可燃
ガス吐出孔１５が、そして真中のやや下にはやはり８個
の助燃ガス吐出孔１６が形成されている。原料の無機質
粒子は燃焼部の上部に連接された原料供給管１７から供
給される。An example of a conventional burner is shown in FIGS. 6 and 7. This burner has a combustion section formed by dividing the inside of a cylindrical block into a tapered shape, with eight combustible gas discharge holes 15 at the top of the tapered surface, and eight combustible gas discharge holes 15 located slightly below the center. A combustion assisting gas discharge hole 16 is formed. Inorganic particles as a raw material are supplied from a raw material supply pipe 17 connected to the upper part of the combustion section.
しかし、以上の様な従来の方法においては、第６図に示
すように、可燃ガスと助燃ガスを平行にあるいは対向さ
せて中心に向けて噴射し、その下流に火炎を形成するタ
イプのバーナーを用いており、さらに原料粉末は可燃ガ
ス吐出孔の中心から火炎中に供給される。このバーナー
では原料粉末を溶融球状化処理するのに有効な高温の火
炎領域はバーナー直下のごく限られた狭い範囲である。However, in the conventional method described above, as shown in Fig. 6, a type of burner is used that injects combustible gas and auxiliary gas toward the center in parallel or facing each other, and forms a flame downstream. The raw material powder is supplied into the flame from the center of the combustible gas discharge hole. In this burner, the high-temperature flame region effective for melting and spheroidizing the raw material powder is a very limited and narrow area directly below the burner.
そのため原料粉末が高温の火炎部を通過する時間が非常
に短く、その結果原料粉末の完全な溶融球状化が行われ
ず、球状化率（球状化した粉末の重量／回収した製品粉
末の重量）が低い。また球状化率を上げるためには、使
用する可燃ガスの量を増やす必要があり、製品球状体当
りの可燃ガスの使用量が多くなって燃料原単位が大きく
なるといった問題点もあった。さらに、このような方式
のバーナーでは原料粉末を大量に連続供給すると原料粉
末が凝集しやすく、その結果、凝集した原料粉末が溶融
球状化されず、球状化率が低くなるといった問題点もあ
った。Therefore, the time for the raw material powder to pass through the high-temperature flame section is very short, and as a result, the raw material powder is not completely melted and spheroidized, and the spheroidization rate (weight of spheroidized powder/weight of collected product powder) is reduced. low. In addition, in order to increase the spheroidization rate, it is necessary to increase the amount of combustible gas used, and there is also a problem that the amount of combustible gas used per product spherical body increases, resulting in a large fuel consumption rate. Furthermore, with this type of burner, if a large amount of raw material powder is continuously supplied, the raw material powder tends to agglomerate, and as a result, the agglomerated raw material powder is not melted and spheroidized, resulting in a low spheroidization rate. .
本発明は上記課題を解決して少ない可燃ガス量で効率よ
く、高い球状化率で無機質原料粉末を球状化しうる手段
を提供するものである。The present invention solves the above problems and provides a means for efficiently spheroidizing inorganic raw material powder with a high spheroidization rate using a small amount of combustible gas.
かかる本発明は、炉内に高温火炎および無機質原料粉末
を噴射し、原料粉末を溶融球状化する方法において、可
燃ガスをバーナー内に設けられたノズルから放射状に噴
射し、助燃ガスはバーナー内壁から旋回流を生じるよう
に噴射し、バーナー内の燃焼部後方から無機質原料粉末
を噴射することを特徴とする無機質球状化粒子の製造方
法とその方法に用いられる装置に関するものである。The present invention is a method for melting and spheroidizing raw material powder by injecting a high-temperature flame and inorganic raw material powder into a furnace, in which combustible gas is radially injected from a nozzle provided in a burner, and auxiliary gas is radially injected from a burner inner wall. The present invention relates to a method for producing spheroidized inorganic particles, which is characterized by injecting inorganic raw material powder from behind a combustion section in a burner, and an apparatus used in the method.
高温火炎は無機質原料粉末を熔融して球状化しうる温度
と熱量を有するものであればよく、例えば水素ガス、メ
タン、エタン、プロペラ、ブタン、エチレン、アセチレ
ン、ＬＮＧ、ＬＰＧ等の炭化水素ガス、ベンゼン、トル
エン、ガソリン、軽油、灯油等の常温では液状の炭化水
素等の可燃ガスに酸素等の助燃ガスを混合し燃焼させて
形成する。The high-temperature flame may be any flame that has the temperature and heat to melt the inorganic raw material powder and make it spherical, such as hydrogen gas, methane, ethane, propeller, butane, hydrocarbon gas such as ethylene, acetylene, LNG, LPG, benzene, etc. It is formed by mixing a combustible gas such as a hydrocarbon that is liquid at room temperature, such as toluene, gasoline, diesel oil, or kerosene, with an auxiliary gas such as oxygen and burning the mixture.
無機質原料粉末はシリカ、アルミナ、マグネシア等であ
り、粒径は０．１〜５００ｎ程度、好ましくは３〜４０
ｎ程度のものが適当である。The inorganic raw material powder is silica, alumina, magnesia, etc., and the particle size is about 0.1 to 500 nm, preferably 3 to 40 nm.
A value of about n is appropriate.
可燃ガスと無機質原料粉末の使用割合は可燃ガス種類、
無機質原料粉末の種類、粒径等によって異なるが通常１
〜１００ （ｋｇ原料／Ｎ−３燃料）程度の範囲から適
宜選択される。The usage ratio of combustible gas and inorganic raw material powder depends on the type of combustible gas,
It varies depending on the type of inorganic raw material powder, particle size, etc., but usually 1
-100 (kg raw material/N-3 fuel).
本発明の無機質球状化粒子の製造方法に使用される装置
は炉に高温火炎を噴射するバーナーが付設されたもので
ある。The apparatus used in the method for producing spheroidized inorganic particles of the present invention is a furnace equipped with a burner that injects high-temperature flame.
バーナーには可燃ガスを噴射するノズルと助燃ガス吐出
孔と無機質原料粉末供給口を設ける。The burner is provided with a nozzle for injecting combustible gas, an auxiliary gas discharge hole, and an inorganic raw material powder supply port.
可燃ガスを噴射するノズルは可燃ガスを放射状に噴射し
うるように構成する。このため可燃ガスの吐出孔をノズ
ルに複数、例えば３個以上の吐出孔を周方向に略等間隔
に設けてもよく、あるいは全周にスリットを形成しても
よい。The nozzle for injecting combustible gas is configured to inject combustible gas radially. For this reason, a plurality of combustible gas discharge holes may be provided in the nozzle, for example, three or more discharge holes may be provided at approximately equal intervals in the circumferential direction, or slits may be formed all around the circumference.
可燃ガスの吐出角度（第１図におけるθ）はバーナー本
体内壁の溶損を防止し、一方、広い燃焼領域を確保する
ため、バーナー中心軸とノズル中心軸が一致している場
合には、バーナー中心軸に対して２０”〜８０°、特に
３０°〜５０°の範囲一設定するのが望ましい。各吐出
孔の吐出角度は一定でなくてもよい。The discharge angle of combustible gas (θ in Figure 1) prevents erosion of the inner wall of the burner body, and on the other hand, in order to ensure a wide combustion area, if the burner center axis and nozzle center axis are aligned, the burner It is desirable to set the discharge angle in the range of 20" to 80 degrees, particularly 30 degrees to 50 degrees with respect to the central axis. The discharge angle of each discharge hole does not need to be constant.
助燃ガス吐出孔はバーナー本体内壁から旋回流を住じる
ように形成する。助燃ガス吐出角度（第２図におけるφ
）は旋回流による効果の確保のため２０＠以上がよく、
一方、旋回流が強くなりすぎると原料粉末の炉内壁への
付着量が増加し、製品の回収率が低下するので６０°以
下が適当である。The auxiliary combustion gas discharge hole is formed so as to generate a swirling flow from the inner wall of the burner main body. Assisting gas discharge angle (φ in Fig. 2
) is preferably 20＠ or more to ensure the effect of swirling flow.
On the other hand, if the swirling flow becomes too strong, the amount of raw material powder adhering to the inner wall of the furnace will increase and the product recovery rate will decrease.
助燃ガスのバーナー軸方向に対する吐出角度は直角に限
定されない。The discharge angle of the auxiliary gas with respect to the burner axis direction is not limited to a right angle.
可燃ガス吐出孔と助燃ガス吐出孔との軸方向の距離Ｌ（
第１図参照）については、可燃ガス吐出孔が助燃ガス吐
出孔よりもバーナー開口側にある場合を（＋）、その逆
を（−）とすると、Ｌが（−）となる場合には燃料ガス
ノズルの先端が溶損する可能性があり、また、（＋）側
０．２５Ｄ （Ｄ ：バーナー本体内径、第１図参照）
を越える範囲では燃焼が不安定となる場合があるので、
０〜０．２５Ｄの範囲に設定することが望ましい。The axial distance L between the combustible gas discharge hole and the auxiliary gas discharge hole (
(see Figure 1), if the case where the combustible gas discharge hole is closer to the burner opening than the auxiliary gas discharge hole is (+), and the opposite is (-), then if L is (-), then the fuel The tip of the gas nozzle may be damaged by melting, and the (+) side 0.25D (D: burner body inner diameter, see Figure 1)
Combustion may become unstable in the range exceeding
It is desirable to set it in the range of 0 to 0.25D.
無機質原料粉末供給口は助燃ガス吐出孔よりバーナー開
口端から奥方に設ける。この供給口は無機質原料粉末を
均一に供給できるようにすることが好ましく、そのため
に例えば複数の供給口を対称に設けるなどする。The inorganic raw material powder supply port is provided further back from the burner opening end than the auxiliary gas discharge hole. It is preferable that this supply port is capable of uniformly supplying the inorganic raw material powder, and for this purpose, for example, a plurality of supply ports are provided symmetrically.
炉におけるバーナーの取付位置は通常は炉の上部である
が、それに限定されるものではなく、炉の構造等に応じ
側壁部又は底部に設けてもよい。The burner in the furnace is usually installed at the top of the furnace, but is not limited thereto, and may be installed at the side wall or bottom depending on the structure of the furnace.
装置の他の設備としては、炉から排出された溶融球状化
粒子の冷却器、捕集器、分級器等を適宜膜ければよい。Other equipment of the apparatus may include a cooler, a collector, a classifier, etc. for the molten spheroidized particles discharged from the furnace.
このような高温の火炎中に直接原料粉末を吹込んで溶融
球状化するプロセスにおいては、いかに高温火炎領域を
広範囲に、かつ、安定して形成するか、また、形成され
た高温火炎中にいかに原料粉末を均一に吹込むかという
ことが重要な技術となる。本発明においては、原料粉末
を高温の火炎中に均一に吹込むために、あらかじめ可燃
ガス中に原料粉末を混入させて、原料粉末が可燃ガス中
に十分に混合された状態にしてバーナーに供給すること
で、前記バーナーによる原料粉末の均−分散吹き込みの
効果をより一層高めている。また、助燃ｊス吐出孔に旋
回角度φを持たせているのは、バーナー本体内で助燃ガ
スに旋回流を生じさせるためで、この旋回流によりバー
ナー内側に負圧領域が形成され、この負圧によりガスが
再循環するために燃焼が促進され急速燃焼が実現し、高
温火炎領域を広範囲にしかも安定して形成する。さらに
、この旋回流によりバーナー上部から可燃ガス吐出孔と
助燃ガス吐出孔との間の空間へ供給された原料粉末は高
温の燃焼ガス中に均一分散する。In the process of melting and spheroidizing raw material powder by directly blowing it into a high-temperature flame, it is important to know how to form a high-temperature flame region over a wide range and stably. An important technique is how to inject the powder evenly. In the present invention, in order to uniformly blow the raw material powder into a high-temperature flame, the raw material powder is mixed into combustible gas in advance, and the raw material powder is supplied to the burner in a sufficiently mixed state in the combustible gas. This further enhances the effect of uniformly dispersing the raw material powder by the burner. Furthermore, the reason why the auxiliary combustion gas discharge hole has a swirling angle φ is to generate a swirling flow in the auxiliary combustion gas within the burner body.This swirling flow forms a negative pressure region inside the burner, and this Gas recirculation due to pressure promotes combustion and achieves rapid combustion, creating a wide and stable high-temperature flame region. Further, due to this swirling flow, the raw material powder supplied from the upper part of the burner to the space between the combustible gas discharge hole and the auxiliary gas discharge hole is uniformly dispersed in the high-temperature combustion gas.
〔実施例〕
第１図及び第２図に示すバーナーを装着した第３図に示
す装置を用いた。[Example] The apparatus shown in FIG. 3 equipped with the burner shown in FIGS. 1 and 2 was used.
バーナー１は、２重管状のバーナー本体の内管にあたる
バーナータイル内壁５の閉止端から管状のノズル４が内
方に同軸に突設されている。ノズルの先端は閉止されて
その内面は円錐状に突出しており、先端近傍の側部には
８個の可燃ガス吐出孔３がノズルの軸方向と４５°の角
度で等間隔に穿設されている。バーナータイル内壁５に
は、１６個の助燃ガス吐出孔２が同方向に等間隔をおい
てそれぞれ法線方向と４５＠の角度で穿設されている。In the burner 1, a tubular nozzle 4 coaxially protrudes inward from a closed end of a burner tile inner wall 5, which is an inner tube of a double-tubular burner main body. The tip of the nozzle is closed and its inner surface protrudes conically, and eight combustible gas discharge holes 3 are bored at equal intervals at an angle of 45° with respect to the axial direction of the nozzle on the side near the tip. There is. In the burner tile inner wall 5, 16 combustion auxiliary gas discharge holes 2 are bored in the same direction at equal intervals and at an angle of 45@ with respect to the normal direction.
助燃ガス吐出孔２の位置は可燃ガス吐出孔３より０．１
Ｄ後退している。バーナータイル内壁５の閉止端には２
個所に無機質原料粉末供給口６が対称に設けられ、そこ
に原料供給管７が接続している。The position of the auxiliary gas discharge hole 2 is 0.1 from the combustible gas discharge hole 3.
D is retreating. 2 at the closed end of the burner tile inner wall 5
Inorganic raw material powder supply ports 6 are symmetrically provided at the locations, and raw material supply pipes 7 are connected thereto.
このバーナー１は底部が拡径された２段筒状の炉本体ｌ
Ｏの頂部に取付けられている。ノズルには可燃ガス供給
管８が接続され、一方、助燃ガス吐出孔２には助燃ガス
供給管９が接続されている。This burner 1 has a two-stage cylindrical furnace body with an enlarged bottom.
It is attached to the top of O. A combustible gas supply pipe 8 is connected to the nozzle, and a combustion auxiliary gas supply pipe 9 is connected to the combustion auxiliary gas discharge hole 2.
炉本体ｌＯは溶融球状化を行う溶融帯と、その下部に接
続された冷却帯により構成され、さらに該冷却帯から冷
却室１２を介してサイクロン１３が設置されている。１
４はブロワ−である。The furnace main body 1O is composed of a melting zone for forming melt into spheroids and a cooling zone connected to the lower part of the melting zone, and a cyclone 13 is installed via a cooling chamber 12 from the cooling zone. 1
4 is a blower.
以上述べた装置で、バーナーから可燃ガスとしてＬ Ｐ
Ｇ １５Ｎｍ’／ｈｒ、助燃ガスとして酸素７５Ｎｍ
’／ｈｒ、原料粉末として平均粒径 ｐのシリカ粉末
を１８０ ｋｇ ／ ｈ ｒの条件で炉内に噴射し、溶
融球状化試験を行ったところ、球状化率（９５％）で、
しかも不純物混入のない高品位の熔融球状化シリカ粒子
を得た。With the above-described device, L P is released as combustible gas from the burner
G 15Nm'/hr, oxygen 75Nm as auxiliary gas
'/hr, silica powder with an average particle size p was injected into the furnace at 180 kg/hr as a raw material powder, and a melt spheroidization test was performed, with a spheroidization rate (95%).
Moreover, high-quality fused spheroidal silica particles without contamination with impurities were obtained.
尚、比較のために第６図に示すバーナーを用いて球状化
試験を行った結果を比較例として、本実施例の結果と共
に第１表に示す。また、本実施例および比較例により得
られた球状化粒子の顕微鏡写真を第４図及び第５図に示
す。For comparison, the results of a spheroidization test using the burner shown in FIG. 6 are shown in Table 1 as a comparative example together with the results of this example. Furthermore, micrographs of the spheroidized particles obtained in this example and comparative example are shown in FIGS. 4 and 5.
第１表
〔発明の効果〕
本発明によって、高温の溶融可能な火炎領域を広くする
ことが可能になるのと同時に、旋回する高温ガス流によ
って原料粉末が均一分散し、粒子とガスとの熱授受が瞬
時に行われるため、溶融球状化が促進される。その結果
、従来方法よりも球状化率が上がる。また、同じ球状化
率を得る場合にも従来方法よりも少ない可燃ガス量で溶
融可能となり、燃料原単位が小さくなる等のメリットが
ある。Table 1 [Effects of the Invention] According to the present invention, it becomes possible to widen the flame area where high-temperature melting is possible. Since the transfer is instantaneous, molten spheroidization is promoted. As a result, the spheroidization rate is higher than in the conventional method. Further, even when obtaining the same spheroidization rate, melting can be performed with a smaller amount of combustible gas than in the conventional method, and there are advantages such as a reduction in fuel consumption.
本発明によれば、高純度の無機質球状化粒子を非常に効
率良く安定して得られる利点がある。According to the present invention, there is an advantage that highly pure inorganic spheroidized particles can be obtained very efficiently and stably.
第１図は本発明の実施例で使用されたノく−ナーの要部
縦断面図であり、第２図は両畦出孔を通るように切断し
た横断面図である。第３図は本発明の実施例で使用され
た装置の概略図である。第４図は実施例で得られた溶融
球状化粒子のそして第５図は比較例で得られた溶融球状
化粒子の構造を示す図面代用の顕微鏡写真である。第６
図は従来のバーナーの一例の断面図であり、第７図はそ
の平面図である。
１・・・バーナー
２・・・助燃ガス吐出孔
３・・・可燃ガス吐出孔
４・・・ノズル
５・・・バーナータイル内壁
６・・・無機質原料粉末供給口
ア・・・原料供給管
８・・・可燃ガス供給管
９・・・助燃ガス供給管
１０・・・炉本体
１１・・・原料ホッパー
１２・・・冷却室
１３・・・サイクロン
１４・・・ブロワ−FIG. 1 is a longitudinal cross-sectional view of a main part of a nozzle used in an embodiment of the present invention, and FIG. 2 is a cross-sectional view taken through both ridge holes. FIG. 3 is a schematic diagram of the apparatus used in the embodiment of the invention. FIG. 4 is a micrograph showing the structure of the molten spheroidized particles obtained in the Examples, and FIG. 5 is a photomicrograph substituted for a drawing showing the structure of the molten spheroidized particles obtained in the Comparative Example. 6th
The figure is a sectional view of an example of a conventional burner, and FIG. 7 is a plan view thereof. 1... Burner 2... Combustible gas discharge hole 3... Combustible gas discharge hole 4... Nozzle 5... Burner tile inner wall 6... Inorganic raw material powder supply port a... Raw material supply pipe 8 ... Combustible gas supply pipe 9 ... Combustible gas supply pipe 10 ... Furnace body 11 ... Raw material hopper 12 ... Cooling chamber 13 ... Cyclone 14 ... Blower
Claims (2)
原料粉末を溶融球状化する方法において、可燃ガスをバ
ーナー内に設けられたノズルから放射状に噴射し、助燃
ガスはバーナー内壁から旋回流を生じるように噴射し、
バーナー内の燃焼部後方から無機質原料粉末を噴射する
ことを特徴とする無機質球状化粒子の製造方法(1) Inject high temperature flame and inorganic raw material powder into the furnace,
In the method of melting and spheroidizing raw material powder, combustible gas is injected radially from a nozzle provided in a burner, auxiliary gas is injected from the inner wall of the burner so as to generate a swirling flow,
A method for producing spheroidized inorganic particles characterized by injecting inorganic raw material powder from behind a combustion section in a burner.
おいて、該バーナーの中央部に可燃ガスを放射状に噴射
するノズルを設け、バーナーにはその内壁から助燃ガス
の旋回流を生じるように形成した助燃ガス吐出孔を設け
、前記ノズルの開口端を助燃ガス吐出孔よりもバーナー
開口端側に設け、無機質原料粉末供給口を助燃ガス吐出
孔よりバーナー開口端から奥方に設けたことを特徴とす
る無機質球状化粒子製造装置(2) In a device equipped with a burner that injects high-temperature flame into a furnace, a nozzle that injects combustible gas radially is provided in the center of the burner, and the burner is formed to generate a swirling flow of combustion-assisting gas from its inner wall. The combustion auxiliary gas discharge hole is provided, the opening end of the nozzle is provided closer to the burner opening end than the combustion auxiliary gas discharge hole, and the inorganic raw material powder supply port is provided further back from the burner opening end than the combustion auxiliary gas discharge hole. Inorganic spheroidized particle manufacturing equipment
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24730390A JPH04126534A (en) | 1990-09-19 | 1990-09-19 | Method and apparatus for producing inorganic sphered particles |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24730390A JPH04126534A (en) | 1990-09-19 | 1990-09-19 | Method and apparatus for producing inorganic sphered particles |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04126534A true JPH04126534A (en) | 1992-04-27 |
Family
ID=17161412
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24730390A Pending JPH04126534A (en) | 1990-09-19 | 1990-09-19 | Method and apparatus for producing inorganic sphered particles |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04126534A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012114854A1 (en) * | 2011-02-21 | 2012-08-30 | Canon Kabushiki Kaisha | Heat treatment apparatus and method for manufacturing toner |
| WO2012173264A1 (en) * | 2011-06-13 | 2012-12-20 | Canon Kabushiki Kaisha | Heat treating apparatus for powder particles and method of producing toner |
| WO2012173165A1 (en) * | 2011-06-13 | 2012-12-20 | Canon Kabushiki Kaisha | Apparatus for heat-treating powder particles and method of producing toner |
| WO2012173263A1 (en) * | 2011-06-13 | 2012-12-20 | Canon Kabushiki Kaisha | Heat treating apparatus for powder particles and method of producing toner |
| WO2012173164A1 (en) * | 2011-06-13 | 2012-12-20 | Canon Kabushiki Kaisha | Heat treatment apparatus and method of obtaining toner |
-
1990
- 1990-09-19 JP JP24730390A patent/JPH04126534A/en active Pending
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012114854A1 (en) * | 2011-02-21 | 2012-08-30 | Canon Kabushiki Kaisha | Heat treatment apparatus and method for manufacturing toner |
| US9075328B2 (en) | 2011-02-21 | 2015-07-07 | Canon Kabushiki Kaisha | Heat treatment apparatus and method for manufacturing toner |
| WO2012173263A1 (en) * | 2011-06-13 | 2012-12-20 | Canon Kabushiki Kaisha | Heat treating apparatus for powder particles and method of producing toner |
| WO2012173165A1 (en) * | 2011-06-13 | 2012-12-20 | Canon Kabushiki Kaisha | Apparatus for heat-treating powder particles and method of producing toner |
| WO2012173164A1 (en) * | 2011-06-13 | 2012-12-20 | Canon Kabushiki Kaisha | Heat treatment apparatus and method of obtaining toner |
| JP2013020245A (en) * | 2011-06-13 | 2013-01-31 | Canon Inc | Heat treatment device of powdery particle and toner production method |
| JP2013020244A (en) * | 2011-06-13 | 2013-01-31 | Canon Inc | Powder particle thermal treatment apparatus and toner manufacturing method |
| CN103620503A (en) * | 2011-06-13 | 2014-03-05 | 佳能株式会社 | Heat treating apparatus for powder particles and method of producing toner |
| CN103620504A (en) * | 2011-06-13 | 2014-03-05 | 佳能株式会社 | Apparatus for heat-treating powder particles and method of producing toner |
| WO2012173264A1 (en) * | 2011-06-13 | 2012-12-20 | Canon Kabushiki Kaisha | Heat treating apparatus for powder particles and method of producing toner |
| US9372420B2 (en) | 2011-06-13 | 2016-06-21 | Canon Kabushiki Kaisha | Heat treating apparatus for powder particles and method of producing toner |
| US9665021B2 (en) | 2011-06-13 | 2017-05-30 | Canon Kabushiki Kaisha | Heat treating apparatus for powder particles and method of producing toner |
| US9671707B2 (en) | 2011-06-13 | 2017-06-06 | Canon Kabushiki Kaisha | Apparatus for heat-treating powder particles and method of producing toner |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4769276B2 (en) | Burner for producing inorganic spheroidized particles | |
| JP4922400B2 (en) | Burner for producing inorganic spheroidized particles | |
| JP4864053B2 (en) | Method for producing inorganic spheroidized particles | |
| JP3501631B2 (en) | Method and apparatus for producing inorganic spherical particles | |
| JP5074094B2 (en) | Burner for producing inorganic spheroidized particles | |
| JPH04126534A (en) | Method and apparatus for producing inorganic sphered particles | |
| JPH04126533A (en) | Method and apparatus for producing inorganic sphered particles | |
| JP4330298B2 (en) | Method for producing spherical inorganic powder | |
| CN205472697U (en) | Oxygen hot method calcium carbide synthesis reactor | |
| JP3957581B2 (en) | Method for producing spherical silica powder | |
| TWM608559U (en) | Equipment for producing spherical particles | |
| JP4230554B2 (en) | Method for producing spherical particles | |
| JP4318288B2 (en) | Spherical powder production apparatus, powder processing burner, and spherical powder production method | |
| JPH09313918A (en) | Manufacture of inorganic spherical granule | |
| JPH04126537A (en) | Production of inorganic sphered particles | |
| JP2005288399A (en) | Method of producing spherical inorganic powder | |
| JP4294604B2 (en) | Method for producing spherical inorganic powder | |
| TWI744067B (en) | Equipment for producing spherical particles | |
| JPH0639785Y2 (en) | Equipment for producing inorganic spheroidized particles | |
| JPH11199249A (en) | Production of spheroidized particle | |
| JP5367471B2 (en) | Burner for producing inorganic spheroidized particles, inorganic spheroidized particle producing apparatus, and method for producing inorganic spheroidized particles | |
| JP2010058059A (en) | Method of manufacturing spherical particle | |
| JPH04126539A (en) | Production of inorganic sphered particles | |
| JP2000346318A (en) | Burner for manufacturing spherical particle | |
| JPH0442843A (en) | Production of cement and apparatus therefor |