JPH0412647U - - Google Patents

Info

Publication number
JPH0412647U
JPH0412647U JP5345590U JP5345590U JPH0412647U JP H0412647 U JPH0412647 U JP H0412647U JP 5345590 U JP5345590 U JP 5345590U JP 5345590 U JP5345590 U JP 5345590U JP H0412647 U JPH0412647 U JP H0412647U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
fixing
semiconductor
fixing jig
device manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5345590U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5345590U priority Critical patent/JPH0412647U/ja
Publication of JPH0412647U publication Critical patent/JPH0412647U/ja
Pending legal-status Critical Current

Links

JP5345590U 1990-05-22 1990-05-22 Pending JPH0412647U (me)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5345590U JPH0412647U (me) 1990-05-22 1990-05-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5345590U JPH0412647U (me) 1990-05-22 1990-05-22

Publications (1)

Publication Number Publication Date
JPH0412647U true JPH0412647U (me) 1992-01-31

Family

ID=31574654

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5345590U Pending JPH0412647U (me) 1990-05-22 1990-05-22

Country Status (1)

Country Link
JP (1) JPH0412647U (me)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53126589U (me) * 1977-03-17 1978-10-07

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0160539B2 (me) * 1981-04-15 1989-12-22 Ebara Mfg

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0160539B2 (me) * 1981-04-15 1989-12-22 Ebara Mfg

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53126589U (me) * 1977-03-17 1978-10-07

Similar Documents

Publication Publication Date Title
JPH0371641U (me)
JPH0412647U (me)
JPH03128943U (me)
JPS63121443U (me)
JPH0423140U (me)
JPH0236043U (me)
JPS6331535U (me)
JPS60927U (ja) 半導体ウエハ貼付装置
JPH0193736U (me)
JPH0363937U (me)
JPS6294627U (me)
JPH01173931U (me)
JPH01173940U (me)
JPS6395239U (me)
JPS6373930U (me)
JPS59104533U (ja) レジスト処理装置
JPH0189744U (me)
JPS60169838U (ja) 半導体製造装置
JPS59136615U (ja) Ｉｃ検査顕微鏡
JPS60158736U (ja) 半導体製造装置
JPH0160534U (me)
JPS6331536U (me)
JPH04123542U (ja) ウエ−ハハンドリング治具
JPS63178330U (me)
JPH0371632U (me)