JPH0412630U - - Google Patents
Info
- Publication number
- JPH0412630U JPH0412630U JP5401590U JP5401590U JPH0412630U JP H0412630 U JPH0412630 U JP H0412630U JP 5401590 U JP5401590 U JP 5401590U JP 5401590 U JP5401590 U JP 5401590U JP H0412630 U JPH0412630 U JP H0412630U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- hot plate
- wafer
- baking
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 239000010409 thin film Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5401590U JPH0412630U (un) | 1990-05-22 | 1990-05-22 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5401590U JPH0412630U (un) | 1990-05-22 | 1990-05-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0412630U true JPH0412630U (un) | 1992-01-31 |
Family
ID=31575703
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5401590U Pending JPH0412630U (un) | 1990-05-22 | 1990-05-22 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0412630U (un) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS48113900U (un) * | 1972-03-29 | 1973-12-26 |
-
1990
- 1990-05-22 JP JP5401590U patent/JPH0412630U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS48113900U (un) * | 1972-03-29 | 1973-12-26 |