JPH03122533U - - Google Patents
Info
- Publication number
- JPH03122533U JPH03122533U JP3217590U JP3217590U JPH03122533U JP H03122533 U JPH03122533 U JP H03122533U JP 3217590 U JP3217590 U JP 3217590U JP 3217590 U JP3217590 U JP 3217590U JP H03122533 U JPH03122533 U JP H03122533U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- tray
- dry etching
- placement part
- wafer tray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004809 Teflon Substances 0.000 claims description 3
- 229920006362 TeflonĀ® Polymers 0.000 claims description 3
- 238000001312 dry etching Methods 0.000 claims description 3
- 239000004642 Polyimide Substances 0.000 claims 1
- 229920001721 polyimide Polymers 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3217590U JPH03122533U (un) | 1990-03-28 | 1990-03-28 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3217590U JPH03122533U (un) | 1990-03-28 | 1990-03-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH03122533U true JPH03122533U (un) | 1991-12-13 |
Family
ID=31535094
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3217590U Pending JPH03122533U (un) | 1990-03-28 | 1990-03-28 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH03122533U (un) |
-
1990
- 1990-03-28 JP JP3217590U patent/JPH03122533U/ja active Pending