JPH04125259U - Substrate adsorption device - Google Patents

Abstract

(57) [Summary] (with amendments) [Purpose] When adsorbing a substrate with the suction pad of a substrate suction device, remove dust and dirt from the suction surface of the substrate in advance to improve the adhesion between the substrate suction pad and the substrate surface. Make sure that the board is properly absorbed. [Structure] An air blow nozzle that blows air onto the suction surface of the substrate is provided near the suction pad that suctions the substrate. This air blow nozzle is attached perpendicularly or at a predetermined angle to the substrate and blows air.

Description

[Detailed explanation of the idea]

0001

[Industrial application field]

The present invention is particularly useful in a loader that picks up workpieces such as substrates, in particular to ensure that the substrates are This invention relates to an adsorption device capable of adsorption.

0002

[Conventional technology]

For example, in the process of installing electronic components, when transporting a board to the work position. In such a case, move the substrate using, for example, a suction device as shown in Figure 2. was going on. In Fig. 2, 4 is a cylinder, and 2 is a cylinder that moves the suction device and performs suction. 6 is the piping to the suction head 8, 18 is the sliding arrangement to the suction pad 10. The pipe portion is connected to the pad 10 via a connecting portion 20. by cylinder 4 Move the arm 2 in the direction of arrow U or D, that is, in the up and down direction, and move the suction head 8. A suction pad 10 attached to the substrate is brought into contact with the substrate and the same substrate is suctioned. FIG. 3 is a plan view of the arm portion 2 of FIG. 2, and the arm 2 is provided with a groove 14. The part fixed with the hexagonal nut 12 moves in the direction of arrow R or L, and is attracted Adjust the mounting position of the head.

0003 Further, FIG. 4 is a plan view of the suction pad 10 portion. Here are 4 suction pads 10a, 10b, 10c, and 10d are arranged; The opening angle α between 10b or the angle β between 10c and 10d is the size of the substrate. It can be changed arbitrarily by etc. Furthermore, Figure 5 shows the entire adsorption device. , where 30a represents the adsorbed substrate, 24, 24, A rail for transporting the board 30a, 23 is a manual rail for adjusting the interval between the rails 24, 24. It shows the handle.

0004

[Problem that the idea aims to solve]

In the prior art, when suctioning the substrate 30a, the suction pad 10 and the substrate If a foreign object is caught between the suction pad 10 and the surface, the suction power of the suction pad 10 will decrease. It is. Then, the board 30a is tilted and lifted, causing it to fall on the board. If the board 30a does not rest on the rails 24, 24, or if the board 30a is dropped while being lifted, The problem is that you end up doing it. In addition, even if the board 30a does not tilt, The suction force of the suction pad 10 may decrease due to dirt, dust, etc., making it difficult to hold the substrate 30a. Stability is inevitable. Furthermore, the dust sucked from the suction pad 10 This can lead to failure of other parts of the equipment.

[0005] The purpose of this invention is to solve these problems and to securely and safely attract and hold the board. An object of the present invention is to provide a substrate suction device that can be lifted up.

[0006]

[Means to solve the problem]

In order to solve the above problems, the present invention uses a suction device that suctions and transports the substrate. at least one suction pad for suctioning the substrate; is placed nearby and blows air to the substrate to remove dirt, dust, etc. from the surface of the substrate. and at least one air blow nozzle for blowing The present invention provides a suction device for a substrate. In this case, a plurality of the substrate suction pads are arranged, and the air blow nozzle is It is preferable to provide at least one between the plurality of substrate suction pads.

[0007]

[Effect]

In the device according to the present invention, air is blown from an air blow nozzle. This removes dust on the board surface and cleans it, so the suction pad's suction A stable adsorption force is always obtained without any decrease in force. In other words, the suction pad and base To prevent dust from interfering with the adhesion to the board surface, make sure to It can actually be absorbed. This will trap foreign objects and suspend the board diagonally. or dropping the board while lifting it due to a decrease in adsorption force. disappears. Furthermore, it also prevents you from inhaling dust and dust from the suction pad. Therefore, failures on the vacuum piping side can be prevented.

[0008]

【Example】

Embodiments of the present invention will be described in detail with reference to the drawings. Figure 1 shows the suction of the board according to the present invention. shows the mounting device. In FIG. 1, 21a and 21b are stays for fixing the board, and 22 is the main body. Further, 30 is a stack of substrates, of which a substrate 30a is held by a suction device. This is the topmost substrate that is about to be sucked. Figure 1 is a front view of the suction pad 10a. , 10b is a side view of the visible side, and the suction pads 10a and 10 are visible, respectively. There are suction pads 10c and 10d on the back side of b, which are shown in parentheses in the figure. Ta.

[0009] In Fig. 1, 35a is an air blow nozzle, and the rear side in the drawing is indicated in parentheses. An air blow nozzle designated 35b is provided. This air blow nozzle Blow out air in the direction of arrow B with 35a and 35b to remove dirt and dust on the board 30a. After blowing away and cleaning the suction surface of the substrate 30a, place the substrate 30a on the suction pad. 10a, 10b, 10c, and 10d are adsorbed. Specifically, the suction pad 10a, 10b, 10c, and 10d descend to suck the substrate 30a, and the substrate 30a is sucked. Adsorption of the substrate 30a from the air blow nozzles 35a and 35b until just before contacting the surface Blow air towards the surface. As a result, the suction pads 10a, 10b, 10c, Prevents foreign objects from getting caught between 10d and the substrate 30a and reducing the adsorption force. be done. In addition, in FIG. 1, 36 indicates a polytube for air blowing.

0010 Figure 6 is a partial view of the suction head 8 and suction pad, showing how the air blow nozzle is installed. shows. This example shows an example in which two air blow nozzles 35a and 35b are installed. ing. FIG. 7 is a schematic plan view of that part. Here, the air blow nozzle 35a between suction pads 10a and 10b, that is, between suction pads 10a and 10b. The air blow nozzle 35b is provided in the area within the opening angle α of the suction pads 10c and 1. It is provided in the area within the opening angle β between the opening angle β and the opening angle β.

[0011] This air blow is not limited to two, but the suction pads 10a and 10c. It may be provided between the suction pads 10b and 10d or between the suction pads 10b and 10d. In that case, 4 pieces Since the air blow nozzles 35a and 35b are installed, the removal efficiency of dust etc. is also high. stomach. Furthermore, in the embodiment shown in Fig. 6, air is blown in a direction perpendicular to the suction surface of the substrate. However, the fixing means of the air blow nozzles 35a and 35b prevent the air from being sprayed. It may also be possible to change the direction in which it is directed. For example, remove dust etc. from the outside of the board 30a. In order to be able to blow it away, air blow nozzles 35a and 35b are used. It is only necessary to attach it by tilting it outward to some extent.

0012

[Effect of the idea]

As explained above, according to the present invention, when suctioning a substrate with a suction pad, The air blow nozzle can remove dirt and dust on the board, The causes of the adhesion between the suction pad and the substrate surface are removed, and the substrate is securely attached. can be adsorbed to.

[Brief explanation of drawings]

FIG. 1 is a side view of a substrate suction device showing an embodiment of the present invention.

FIG. 2 is a side view of main parts of a conventional adsorption device.

FIG. 3 is a partial plan view of a conventional suction device.

FIG. 4 is a plan view of a conventional suction pad arm.

FIG. 5 is a schematic plan view of a conventional adsorption device.

FIG. 6 is a partial side view showing an example of how the air blow nozzle is attached in the embodiment of the present invention.

FIG. 7 is a partial plan view showing an example of the arrangement of suction pads and air blow nozzles in an embodiment of the present invention.

[Explanation of symbols]

2 Arm 4 cylinder 6 Piping 12 nuts, 10a, 10b, 10c, 10d Suction pad 12 nuts, 14 Groove 18 Sliding piping section 30a, 30b board 35a, 35b Air blow nozzle α, β Pad opening angle

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[Procedural amendment]

[Submission date] June 15, 1991

[Procedural amendment 1]

[Name of document to be corrected] Drawing

[Correction target item name] Full map

[Correction method] Change

[Correction details]

[Figure 1]

[Figure 2]

[Figure 3]

[Figure 4]

[Figure 5]

[Figure 6]

[Figure 7]

Claims (2)

[Reference number] 0030038-01 [Scope of utility model registration request] 1. A suction device for suctioning and transporting a substrate, comprising: at least one suction pad for suctioning the substrate; and a suction device disposed near the suction pad to apply air to the surface of the substrate suctioned by the pad. and at least one air blow nozzle for blowing. [Claim 2] Claim 1 of the scope of the utility model registration claims
In the description, the substrate suction device is characterized in that a plurality of the substrate suction pads are arranged, and at least one air blow nozzle is provided between the plurality of substrate suction pads.