JPH04124878A - Light driving semiconductor device - Google Patents

Abstract

PURPOSE:To get a light driving type thyristor that the work such as assembling, inspection, etc., can be done easily by putting the inside diameter of an inner metallic tube in two stages, and making the inside diameter of the part to be fused with an phototransmissive path by glass small, and making the inside diameter of other part large. CONSTITUTION:An inner metallic tube 82 is made of the two parts of a part 82a small in diameter and a part 82b large in diameter, and with a phototransmissive path 9, it is fused at the part 82a small in diameter by low melting point glass. Hereupon, it is made coaxial with the phototransmissive path 9 and an outer metallic tube 81, on the other hand, the outer metallic tube 81 and the inner metallic tube 82 are welded with an envelop uniformly in the positions separate in outside diameter direction, so the inside of the outer metallic tube 81 and the outside of the inner metallic tube 82 can be set with each other without backlash.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an optically driven semiconductor device, and particularly to a structure of an airtight sealing part in a structure in which an optical transmission line for introducing an optical signal penetrates the surrounding air.

[Conventional technology]

Patent application 1987-977 regarding conventional light-driven thyristor
An example of No. 23 will be explained using figures. FIG. 2 shows the overall structure of the optical thyristor element. The optical thyristor element 2 is sandwiched between an anode electrode 4 and a cathode electrode 5 with electrodes 3 interposed on both sides. These electrodes 4 and 5 constitute an envelope together with a cylindrical insulator 7 which is hermetically connected by a metal flange 6. An optical fiber bundle 11 that transmits optical signals from a light emitting element (not shown) is attached to an optical transmission line 9 fixed in an airtight part 8 that penetrates a part of an insulator 7 using, for example, a cap nut 12. are optically coupled. Furthermore, the optical signal is fixed in the airtight part 8.

The signal is transmitted to the optically coupled second optical transmission line 10.

The optical transmission line 10 is curved at a position corresponding to the light receiving section of the optical thyristor element, and guides the optical signal to the light receiving section of the optical thyristor element. FIG. 3 shows the detailed structure of the airtight part 8 in the conventional structure. The outer metal cylinder 81 has a metallized layer 13 in the through hole in the insulator 7.
It is airtightly fixed by a metal adhesive layer 14 such as silver solder. Further, the optical transmission line 9 is fixed to the inner metal cylinder 82 by a low melting point glass 15. Outer metal tube 81
and the inner metal tube 82 are welded and sealed on the outside of the envelope.

Here, in order to optically couple the optical fiber bundle 11 and the optical transmission line 9, it is necessary to align the center of the optical fiber bundle 11 with the center of the optical transmission line 9. Since these cannot be directly aligned, the centers of the optical fiber bundle 11 and the cap nut 12 are indirectly aligned, and the centers of each are aligned by fixing the screws of the cap nut 12 and the outer metal tube 82. In order to align the centers of the outer metal tube 81 and the optical transmission line 9, the outer metal tube 81 and the inner metal tube 82 are fitted together without play, and the fit between the inner metal tube 82 and the optical transmission line 9 is also made without play. There are no dimensions. For this reason, the outer metal tube 81 and the inner metal tube 82
The welded part is the outer end of the envelope 7, and the inner metal cylinder 82
Even if the glass welded portion 15 between the optical transmission line 9 and the optical transmission line 9 is located at the inner end of the envelope 7, concentricity can be obtained.

[Problem to be solved by the invention]

In the conventional structure described above, there is no gap between the outer metal tube 81 and the inner metal tube 82 and between the inner metal tube 82 and the optical transmission path 9, so the outer metal tube is When external force is applied, the outer metal cylinder 81 and the inner metal cylinder 8
2 are deformed together, and external force is transmitted to the optical transmission line 9. Since the optical transmission line 9 uses glass to increase the optical transmission efficiency, there is a problem that the low melting point glass welded part of the optical transmission line 9 breaks when the outer end of the envelope 7 of the optical transmission line 9 is displaced by 10 μm. was there. For this reason, in the light-driven thyristor of the conventional structure, the airtight part 8 is
It was necessary to pay close attention to the protection, assembly, and inspection work.

The present invention aims to provide a structure in which the optical transmission line 9 does not break even if an external force is applied to the airtight portion 8, thereby making it possible to provide an optically driven thyristor that can be easily assembled, inspected, etc.

[Means to solve the problem]

In order to solve the above problems, the present invention provides an airtight structure with a sufficient gap between the inner metal tube and the optical transmission path.
The structure has been designed so that the optical transmission path will not be displaced even if an external force is applied to the outer metal cylinder. Furthermore, since the inner metal tube and the optical transmission path are welded to low-melting glass, it is necessary to reduce the gap between the inner metal tube and the optical transmission path. In order to achieve the above two objectives, the inner diameter of the inner metal cylinder is made into two stages, and the inner diameter is made smaller in the part where glass is welded, and the inner diameter is made larger in other parts.

〔Example〕

FIG. 1 is an enlarged sectional view of a hermetic part of a light-driven thyristor according to an embodiment of the present invention. In the figure, the same reference numerals as in the conventional structure example shown in FIG. 3 indicate equivalent parts.

The inner metal cylinder 82 consists of two parts, a part 82a with a small inner diameter and a part 82b with a large inner diameter, and the optical transmission line 9 is welded to the part 82a with a small inner diameter using a low melting point glass welding agent 15. Here, since the optical transmission line 9 needs to be optically coupled to the optical fiber bundle that transmits the optical signal from the light emitting element, it needs to be concentric with the optical transmission line 9 and the outer metal tube 81. On the other hand, the outer metal tube 81 and the inner metal tube 8
2, the inner diameter of the outer metal tube 81 and the outer diameter of the inner metal tube 82 are fitted together without play in order to uniformly weld the outer metal tube 81 and the outer diameter of the inner metal tube 82 at positions apart from each other in the outer direction with respect to the envelope. Inner metal tube 82 is concentric. The optical transmission line 9 is welded to the inner metal cylinder 82 using the low melting point glass 15, but since the welded part 82a is shorter than the larger inner diameter part 82b, the inner metal cylinder 82 and the outer metal cylinder 81 are used as the optical transmission line. 9
A guide is required to make the optical fibers concentric and enable optical coupling with the optical fiber bundle. FIG. 4 is a diagram showing how to make the inner metal cylinder and the optical transmission line concentric during low-melting glass welding work. In the figure, the same reference numerals as in FIG. 1 indicate the same parts. As shown in the figure, the inner metal tube 82 and the optical transmission line 9 are aligned vertically on the centering tool 101. Since there is no play between the narrow inner diameter portion 82a of the inner metal tube 82 and the optical transmission line 9, the center can be aligned by inserting the tube. On the other hand, the larger diameter portion 8
2b and the optical transmission path 9, the inner metal tube 82 is attached to the annular convex portion 102 provided on the centering tool
The structure is such that the optical transmission line 9 and the optical transmission line 9 fit together.

By applying heat treatment in this state, the low melting point glass 15
dissolves and solidifies. After solidification, even if the centering tool 101 is removed, the optical transmission line 9 is fixed to the inner metal cylinder 82 and the center will not shift.

In the airtight part made with the above structure and manufacturing method, the inner metal tube 8
2 and the optical transmission line 9, even if an external force is applied to the outer metal tube 81, the outer metal tube 81 and the inner metal tube 82 will only deform, and the external force will not be transmitted to the optical transmission line 9. This prevents the optical transmission line 9 from cracking.

FIG. 5 shows an embodiment of a structure in which the ends of the outer metal tube 81 and the inner metal tube 82 extend the outer end of the optical transmission path 9 further outward with respect to the envelope. In the figure, the same reference numerals as in FIG. 1 indicate the same parts. According to this embodiment, the inner metal cylinder 82
By increasing the inner diameter of the optical fiber bundle 11, it becomes possible to insert the optical fiber bundle 11 inside the inner metal tube 82. Therefore, the parts related to optically coupling the optical transmission line 9 and the optical fiber bundle 11 are the optical transmission line 9 and the inner metal tube 82.
and the optical fiber bundle 11, and it is only necessary to align the optical axes of these parts. Therefore, it is not necessary to center the outer metal tube 81 and the inner metal tube 82, to center the outer metal tube 81 and the cap nut 12, and to center the cap nut 12 and the optical fiber bundle 11, so that each Manufacturing becomes easier because the part precision can be made rougher. FIG. 6 shows the structure of the embodiment shown in FIG.
This is a combined view of low melting point glass welding work.

In the centering tool 101, the surface on which the optical transmission line 9 touches is 10
3 is higher than the height of the surface 104 that the inner metal cylinder 82 contacts, a step can be easily provided. Centering can also be easily achieved by increasing the height of the annular protrusion. Therefore, even if the end of the inner metal tube 82 extends outward from the end of the optical transmission line 9 with respect to the envelope 7 as in the embodiment shown in FIG. 5, manufacturing work will not be difficult. .

〔Effect of the invention〕

According to the present invention, even if an external force is applied to the light introduction structure of a light-driven thyristor, cracking of the optical transmission line can be prevented, which improves workability in thyristor assembly and inspection work, and improves reliability. A high introduction area can be obtained.

[Brief explanation of the drawing]

Fig. 1 is a sectional view of the airtight part of an embodiment of the present invention, Fig. 2 is a sectional view of the entire light-driven thyristor, Fig. 3 is a sectional view of the airtight part of a conventional structure, and Fig. 4 shows the structure shown in Fig. 1. FIG. 5 is a sectional view of an airtight portion according to a different embodiment from FIG. 1 according to the present invention, and FIG. 6 is a diagram of parts assembled to obtain the structure of FIG. 5. 2... Optical thyristor element, 7... Insulator, 81...
Outer metal tube, 82... Inner metal tube, 9... Optical transmission line, 1°... L-shaped optical transmission line, 13... Metallized layer,
14... Gold Figure/j Figure 2 Figure 3 Figure 4

Claims (1)

[Claims] 1. A semiconductor element operated by an optical signal, and 1 electrically connected to the semiconductor elements provided on both sides of the semiconductor element.
An envelope that hermetically seals a semiconductor element formed by a pair of external electrodes and an annular insulator whose both ends are connected to the external electrodes, and an envelope that penetrates the insulator of the envelope. It is placed between the optical transmission line that guides optical signals from the outside to the semiconductor element, the part of the surrounding insulator that the optical transmission line penetrates, and the optical transmission line, and is bonded to the insulator via a metal adhesive layer. a second metal tube disposed between the first metal tube and the optical transmission path and bonded to the optical transmission path with an adhesive; and the second metal tube and the welded portion are further away from the envelope in the outward direction than the welded portions of the insulator and the first metal tube and the optical transmission line and the second metal tube. In the apparatus, by making the diameter of the welded part of the second metal cylinder with the optical transmission path smaller than the diameter of the part other than the welded part, the welding material, which is a low melting point glass, becomes the diameter of the second metal cylinder. An optically driven semiconductor device characterized in that it is welded to an optical transmission path only through a thin portion of the device.