JPH04124462U - Acceleration detection device - Google Patents

Abstract

(57) [Summary] [Purpose] To improve the reliability of the electrical connection between the strain gauge of the strain body and the substrate on the side on which the strain body is fixed in a cantilever type acceleration detection device. [Structure] The electrode lead portion 13 connected to the strain gauge 12 formed on the surface of the substrate 11 of the strain-generating body and the electrode pad portion 21 formed on the substrate 2 are connected face-to-face to support the strain-generating body in a cantilever manner. .

Description

[Detailed explanation of the idea]

0001

[Industrial application field]

The present invention relates to a cantilever type acceleration detection device.

0002

[Problems to be solved by conventional techniques and ideas]

A cantilever type acceleration detection device uses a cantilever-supported flexure element on the surface of the measurement part. , a strain gauge that has a strain resistance effect is attached, and fluctuations in the strain body are measured by electrical resistance in a predetermined circuit. It is detected as a change in resistance, and the stress applied to the strain body is measured based on this change in resistance. This is to detect acceleration, which is a non-measurable object.

0003 The strain gauge mentioned above may be one made of metal foil or single crystal and glued onto a strain body. , one in which the semiconductor wafer itself is used as a strain-generating body, and one in which a semiconductor thin film is formed on the surface of the strain-generating body. Some things are known. This acceleration detection device using strain gauges uses minute resistance changes. It is necessary to add a processing circuit to amplify the change value, or is set up separately. For this reason, the strain gauge of the strain body and the processing circuit section can be connected directly or with a conductive member. The electrical connection from the strain gauge should be made to the electrode lead on the surface of the strain body. A wire is connected to this, and this is used as the output of the strain gauge.

0004 However, when using wires, there is always a risk of disconnection, which hinders the improvement of device reliability. Moreover, since the wire occupies space, it is disadvantageous to downsizing the entire device.

[0005] In addition, in conventional acceleration detection devices, the processing circuit section is provided separately from the strain body. In addition, as shown in Japanese Patent Application Laid-Open No. 63-8565, At the same time, the base end of the strain-generating body is fixed to a pedestal protruding from the circuit board. Therefore times After mounting the strain-generating body protrudingly on the circuit board and further protecting it with a case body, various electronic parts are attached to the circuit board. Because the parts are assembled, the part where the flexure element is installed becomes a hindrance, making the manufacturing of the device complicated. On the other hand, when electronic components are installed on a circuit board, a case is placed on the strain-generating body. However, electronic parts can get in the way. Therefore, this invention eliminates the need for wire connections, increases the reliability of the device, and This paper proposes an acceleration detection device that is easy to use.

[0006]

[Means to solve the problem]

The acceleration detection device according to the present invention is a cantilever type starter equipped with a strain gauge. In an acceleration detection device in which the base end of the strain body is fixed to a predetermined substrate, the strain The electrode lead part formed on the surface of the body and the electrode pad part formed on the substrate are matched. It is characterized in that it is surface-connected and the flexure element is supported in a cantilever manner.

[0007] In particular, the accelerator is equipped with a strain body and a processing circuit section that detects and processes changes in the strain gauge. In the temperature detection device, if a hole is provided in a part of the circuit board that incorporates the processing circuit, An electrode pad is formed on the upper surface of the edge of the hole, and the free end of the strain-generating body is made to protrude into the hole. The electrode lead part at the proximal end and the electrode pad part are connected face-to-face and fixed to the circuit board. and the circuit board is housed in a predetermined protective case. It is.

[0008]

[Effect]

The face-to-face connection between the electrode lead part on the surface of the flexure element and the electrode pad part on the board is different from the conventional wire. This is an alternative to ear connections, and the resistance change of the strain gauge is made via the electrode leads and pads. and is transmitted to the processing circuit section. In addition, holes are prepared in advance on the circuit board, and the holes are placed in the same place as the electronic components that make up the processing circuit. Also, when incorporating a strain-generating body into a circuit board, the electrode lead portion at the proximal end and the electrode pad This eliminates the need for wires by connecting the two parts face-to-face, and the vibration area of the strain body is limited to the hole part. It can be secured by

[0009]

【Example】

Next, embodiments of the present invention will be described. 1 and 2 show a first embodiment, and the acceleration detection device of this embodiment is Consists of a body 1, a substrate 2, a base case 3, a can case 4, and a lead pin 5. The body 1 is formed by forming an insulating film on the surface of a substrate 11 made of, for example, stainless steel. , a strain gauge 12 and an electrode lead part 13 are attached to the base using well-known semiconductor thin film manufacturing technology. Each is formed. The substrate 2 has an electrode pad portion 21 formed on its surface, and the above-mentioned The strain body 1 is turned upside down, and the electrode lead part 13 at the base end is connected to the electrode pad at the peripheral part of the substrate 2. The base end of the strain body is made to face the contact part 21 and electrically connected, and the base end of the strain body is bonded with resin or the like. It is fixed to the substrate 2 with an agent 22. Protect the board 2 on which the strain element 1 is attached with a case. The base case 3 serving as the case member is made of resin or ceramics, and is The board 2 is placed, and the lead pins 5 are provided protrudingly so that the tops of the lead pins 5 and the board 2 The electrode pad part 21 is connected to the base case 3, and the can case 4 covers the top of the base case 3. be.

0010 Therefore, the free end of the strain-generating body 1 protrudes from the substrate 2 and can vibrate, The resistance change of the strain gauge 12 due to this vibration is caused by the electrode lead portion 13 and the electrode pad portion 21. , is taken out to the outside via the lead pin 5 and the acceleration is detected.

[0011] 3 and 4 show a second embodiment, in which a processing circuit section 6 is used as a substrate. 1 is adopted. That is, electronic components 61 are placed on the circuit board 3. 1,612 and provide lead wiring 613 to provide a processing circuit section 61, This processing circuit section 61 detects the change in the resistance value of the strain gauge 12, amplifies it, and outputs it. Furthermore, the circuit board 6 incorporates the processing circuit section 61 and also has holes pre-drilled therein. A portion 62 is formed in advance, and an electrode pad portion (lead wiring 613) is formed on the upper surface of the edge of the hole portion 62. The free end of the flexure element 1 is made to protrude into the hole 62, and the electrode lead part at the base end thereof is formed. 13 and the electrode pad portion 613 are connected face-to-face and fixed to the circuit board 6. Ru. The strain body 1 and the circuit board 6 have lead pins 5 protruding from them as in the first embodiment. , which is covered by a base case 3 and a can case 5.

0012 Therefore, the free end of the strain-generating body 1 can vibrate in the hole 62. The resistance change of the strain gauge 12 due to vibration is amplified by the processing circuit section 61 and It outputs a predetermined signal. Furthermore, the strain body and the processing circuit section 61 are electrically heated. It does not require ears.

[0013] It should be noted that the present invention is not limited to the above-mentioned embodiments, but may be If the electrical connection with the plate uses face-to-face connection of the electrode surfaces, the type of strain body and The material and sealing structure of the base case and can case are also arbitrary. Also, especially for circuit boards. A hole is provided to secure the vibration area of the strain body 1 and to provide a processing area for the circuit board. If electronic components for the logic circuit section are to be installed, the hole and the location where the electronic components will be installed. The type of strain body is arbitrary.

[0014]

[Effect of the idea]

As described above, this proposal uses an electrode surface for electrical connection between a strain-generating body and a substrate or circuit board. Since it uses a face-to-face connection, no wires are used for electrical connection. There is no occurrence of disconnection of the connecting portion, and the device can be easily miniaturized.

[Brief explanation of drawings]

FIG. 1 is an enlarged sectional view of main parts of a first embodiment.

FIG. 2 is an overall sectional view of the first embodiment.

FIG. 3 is a perspective view of the second embodiment with the can case removed.

FIG. 4 is a sectional view of the second embodiment.

[Explanation of symbols]

1 Strain body 11 Board 12 Strain gauge 13 Electrode lead part 2 Board 21 Electrode pad part 22 Connecting agent 3 Base case 4 Can case 5 Lead pin 6 Circuit board 61 Processing circuit section 611,612 Electronic parts 613 Lead wiring (electrode pad part) 62 Hole

Claims (2)

[Scope of utility model registration request] Claim 1: In an acceleration detection device in which the proximal end of a cantilever-type strain-generating body equipped with a strain gauge is fixed to a predetermined substrate, an electrode lead portion formed on the surface of the strain-generating body and an electrode lead portion formed on the surface of the strain-generating body. . An acceleration detection device, characterized in that the strain-generating body is cantilever-supported by connecting the electrode pad portions formed on the substrate face-to-face. 2. In an acceleration detection device equipped with a cantilever-type strain-generating body equipped with a strain gauge and a processing circuit section for detecting and processing changes in the strain gauge, a part of the circuit board incorporating the processing circuit section is provided. A hole is provided in the hole, an electrode pad is formed on the upper surface of the edge of the hole, the free end of the flexure element is made to protrude above the hole, and the electrode lead at the base end is connected face-to-face with the electrode pad. What is claimed is: 1. An acceleration detection device comprising: a circuit board, and a circuit board that is housed in a predetermined protective case.