JPH0412197A - Vacuum pump - Google Patents

Vacuum pump

Info

Publication number
JPH0412197A
JPH0412197A JP2116385A JP11638590A JPH0412197A JP H0412197 A JPH0412197 A JP H0412197A JP 2116385 A JP2116385 A JP 2116385A JP 11638590 A JP11638590 A JP 11638590A JP H0412197 A JPH0412197 A JP H0412197A
Authority
JP
Japan
Prior art keywords
faces
discs
stationary
rotating
rotating disk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2116385A
Other languages
Japanese (ja)
Inventor
Bunichi Taniguchi
谷口　文一
Takao Matsumoto
隆夫 松本
Takashi Yamamoto
隆司 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daikin Industries Ltd
Original Assignee
Daikin Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daikin Industries Ltd filed Critical Daikin Industries Ltd
Priority to JP2116385A priority Critical patent/JPH0412197A/en
Publication of JPH0412197A publication Critical patent/JPH0412197A/en
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

PURPOSE:To avoid contact trouble of both discs and prevent deterioration of performance due to leakage by forming respective faces of rotating discs into flat faces, forming spiral grooves on opposite faces of a stationary disc opposing to rotating discs, and forming exhaust passages between the flat faces and the spiral grooves. CONSTITUTION:In a vacuum pump provided with a pump element 4 in which rotating discs 1 and a stationary disc 2 are oppositely arranged, and spiral exhaust passages extending in the radial direction are formed on the opposing parts of the discs 1, 2, the upper and lower faces of respective rotating discs are formed into flat faces 10, and spiral grooves 5 are formed on the opposing faces of the stationary disc 2 opposite to the rotating discs to form the exhaust passages 3 between the flat faces 10 and the spiral grooves 5. Hereby, at high speed rotation of the rotating disc, deflection is hardly generated on the disc 1, and contact trouble with the stationary dic 2 can be previously avoided. Further, clearance between both discs 1, 2 can be set small and deterioration of performance due to leakage is prevented.

Description

【発明の詳細な説明】 （産業上の利用分野） 本発明は、回転円板と静止円板とをもち、対向部にら旋
状の排気通路を設けたジグバーン形ポンプ要素を備える
真空ポンプに関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a vacuum pump equipped with a jig-burn type pump element having a rotating disk and a stationary disk, and having a spiral exhaust passage provided in opposing parts. .

（従来の技術） 従来、特開昭Ｅｉｌ−２４７８９３号公報等に開示され
、かつ、第５図に示すように、この種ジグバーン形ポン
プ要素（Ｐ）は、回転円板（Ａ）と静止円板（Ｂ）とを
対向状に備え、これら各円板の上面にそれぞれ径方向に
延びるら旋溝（Ｍ）（Ｎ）を形成すると共に、各円板の
下面にそれぞれ平坦面（Ｓ）（Ｔ）を形成して、回転円
板側のら旋溝（Ｍ）とこれに対向する静止円板側の平坦
面（Ｔ）との間並びに静止円板側のら旋溝（Ｎ）とこれ
に対向する回転円板側の平坦面（Ｓ）との間に、各々ら
旋状の排気通路（Ｘ）（Ｙ）を形成し、回転円板（Ａ）
の毎分致方回転程度の高速回転により、図中矢印で示す
ように、前記排気通路（Ｘ）（Ｙ）に沿って気体の排気
を行うようにしている。(Prior Art) Conventionally, as disclosed in Japanese Unexamined Patent Publication No. Sho Eil-247893, etc., and as shown in FIG. A spiral groove (M) (N) extending in the radial direction is formed on the upper surface of each of these disks, and a flat surface (S) ( T) between the spiral groove (M) on the rotating disk side and the flat surface (T) on the stationary disk side opposing this, and between the spiral groove (N) on the stationary disk side and this A spiral exhaust passage (X) (Y) is formed between the flat surface (S) on the rotating disk side facing the rotating disk (A), respectively.
The gas is exhausted along the exhaust passages (X) and (Y), as shown by the arrows in the figure, by rotating at a high speed of approximately one rotation per minute.

（発明が解決しようとする課題） しかし、以上のものでは回転円板（Ａ）の上面にら旋溝
（Ｍ）を設けているため、該回転円板（Ａ）の上下間で
重量アンバランスが生じ、運転時つまり回転円板（Ａ）
の高速回転時に、遠心力により該回転円板（Ａ）が大き
くたわみ、静止円板（Ｂ）側と接触事故を招く問題が起
こる。第６図は、このたわみの様子を図示したもので、
横軸に回転数を、縦軸にたわみ（δ）をとり、ら旋溝（
Ｍ）の溝高さ（ｈ）をパラメータとしたものである。又
、回転円板の半径（Ｒ）は１００　ｍ　ｍ　Ｎ板厚（１
）は６ｍｍとしている。この図から、回転円板（Ａ）の
たわみは、通常の運転範囲で無視できないほどの大きな
値となっている。(Problem to be Solved by the Invention) However, in the above-mentioned device, since the spiral groove (M) is provided on the upper surface of the rotating disk (A), there is a weight imbalance between the upper and lower parts of the rotating disk (A). occurs, and during operation, the rotating disk (A)
When rotating at high speed, the rotating disk (A) is largely deflected due to centrifugal force, causing a problem that it may come into contact with the stationary disk (B). Figure 6 illustrates this deflection.
The rotation speed is plotted on the horizontal axis and the deflection (δ) is plotted on the vertical axis.
The groove height (h) of M) is used as a parameter. Also, the radius (R) of the rotating disk is 100 mm N plate thickness (1
) is set to 6 mm. From this figure, the deflection of the rotating disk (A) is so large that it cannot be ignored in the normal operating range.

従って、この比較的大きなたわみ量を考慮して、第５図
に示すように予め回転円板（Ａ）と静止円板（Ｂ）との
間の隙間（Δ）を大きくせざるを得す、このため、該隙
間（Δ）を介した漏れにより、性能が低下し、真空到達
圧力に悪影響を及ぼす問題が起こるのである。Therefore, in consideration of this relatively large amount of deflection, it is necessary to increase the gap (Δ) between the rotating disk (A) and the stationary disk (B) in advance, as shown in FIG. For this reason, leakage through the gap (Δ) causes a problem in that the performance deteriorates and the ultimate vacuum pressure is adversely affected.

本発明の目的は、回転円板のたわみ量を低減して、該回
転円板と静止円板との接触事故を回避できると共に、こ
れら円板間の隙間を小さく設定できて、性能の改善が図
れる真空ポンプを提供することにある。It is an object of the present invention to reduce the amount of deflection of the rotating disk to avoid contact accidents between the rotating disk and the stationary disk, and to set the gap between these disks small to improve performance. The objective is to provide a vacuum pump that can

（課題を解決するための手段） そこで、本発明では、上記目的を達成するため、回転円
板（１）と静止円板（２）とを対向状に配置し、これら
円板（１）（２）の対向部に、径方向に延びるら旋状の
排気通路（３）を形成したジグバーン形ポンプ要素（４
）を備える真空ポンプにおいて、前記回転円板（１）の
各面を平坦面（１０）に形成すると共に、該回転円板（
１）に対向する前記静止円板（２）の対向面に、ら旋溝
（５）を形成して、前記平坦面（１０）とら旋溝（５）
との間に前記排気通路（３）を形成することにした。(Means for Solving the Problems) Therefore, in the present invention, in order to achieve the above object, a rotating disk (1) and a stationary disk (2) are arranged facing each other, and these disks (1) ( A jig-burn type pump element (4) having a spiral exhaust passageway (3) extending in the radial direction formed in the opposite part of the pump element (2).
), each surface of the rotating disk (1) is formed into a flat surface (10), and the rotating disk (
1), a spiral groove (5) is formed on the opposite surface of the stationary disk (2), and the flat surface (10) and the spiral groove (5)
It was decided to form the exhaust passage (3) between the two.

又、上記構成において、ら旋溝（５）の溝深さを、入口
部（５ａ）では深く、出口部（５ｂ）では浅く形成する
ことにした。Further, in the above configuration, the groove depth of the spiral groove (5) is formed to be deep at the inlet portion (5a) and shallow at the outlet portion (5b).

（作用） 回転円板（１）の各面を平坦面（１０）としたことによ
り、該回転円板（１）の高速回転時、該円板（１）に現
れようとするたわみを殆ど無くすることができ、静止円
板（２）側との接触事故を回避できると共に、回転円板
（１）と静止円板（２）との間の隙間を小さく設定でき
て、漏れによる性能の低下を防止できる。(Function) By making each surface of the rotating disk (1) a flat surface (10), when the rotating disk (1) rotates at high speed, there is almost no deflection that appears on the disk (1). This makes it possible to avoid contact accidents with the stationary disk (2) side, and also allows the gap between the rotating disk (1) and the stationary disk (2) to be set small, reducing performance degradation due to leakage. can be prevented.

又、ら旋溝（５）の溝深さを入口部（５ａ）では深く、
出口部（５ｂ）では浅く形成することにより、たわみに
よる悪影響を受けることなく、気体の排気の進行に伴い
圧縮を適正に行うことができ、更に性能の改善を図るこ
とができる。Moreover, the groove depth of the spiral groove (5) is deep at the entrance part (5a),
By forming the outlet portion (5b) shallowly, compression can be performed appropriately as the gas is exhausted without being adversely affected by deflection, and performance can be further improved.

（実施例） 第３図に示す真空ポンプは、吸気口（６）と排気口（７
）とをもつポンプハウジング（８）の内部に、ジグバー
ン形ポンプ素素（４）と渦流形ポンプ要素（９）とを組
合わせて配設した複合式％式％ ジグバーン形ポンプ要素（４）は、複数の回転円板（１
）と静止円板（２）とを対向状に配置し、これら円板（
１）（２）の対向部に、詳しくは後述するが第２図に示
すように、径方向に延びるら旋状の排気通路（３）を形
成している。(Example) The vacuum pump shown in Fig. 3 has an intake port (6) and an exhaust port (7).
) The jig burn type pump element (4) is a composite type % type % type, in which a jig burn type pump element (4) and a vortex type pump element (9) are arranged in combination inside a pump housing (8) having a , multiple rotating disks (1
) and a stationary disk (2) are arranged facing each other, and these disks (
1) A spiral exhaust passage (3) extending in the radial direction is formed in the opposing portion of (2) as shown in FIG. 2, although the details will be described later.

又、渦流形ポンプ要素（９）は、外周部に多数の羽根（
９ａ）をもち、下段に向けて順次外径を小さくした３段
のロータ（９１，９２，９３）と、ステータ（９４）側
に設けられ、前記各羽根（９ａ）とこれに近接する円環
コア（９ｂ）をそれぞれ配設する環状流路（９５，９６
，９７）とを備えている。In addition, the vortex pump element (9) has a large number of vanes (
9a), with three stages of rotors (91, 92, 93) whose outer diameters are successively smaller toward the bottom, and each blade (9a) and an annular ring adjacent thereto, which are provided on the stator (94) side. Annular channels (95, 96) in which cores (9b) are disposed, respectively.
, 97).

こうして、ロータボス部（１１）に、モータ（１２）に
結合する駆動軸（１３）を固定し、毎分敵方回転程度の
高速度で、前記回転円板（１）及びロータ（９１・・）
を回転し、吸気口（６）に取付ける半導体ウェハチャン
バー等の内部を、第３図中矢印で示すように排気口（７
）に向けて排気するようにしている。In this way, the drive shaft (13) coupled to the motor (12) is fixed to the rotor boss (11), and the rotating disk (1) and the rotor (91...) are rotated at a high speed of approximately one rotation per minute.
The inside of the semiconductor wafer chamber etc. to be attached to the intake port (6) is rotated and the exhaust port (7
).

尚、第３図中、（１４）は油溜、（１５）はオイルピッ
クアップ、（１Ｂ）（１７）は軸受である。In FIG. 3, (14) is an oil sump, (15) is an oil pickup, and (1B) (17) is a bearing.

以上の構成で、第１図に明示するように、前記各回転円
板（１）の上下面を平坦面（１０）に形成すると共に、
該回転円板（１）に対向する前記静止円板（２）の対向
面に、第２図に明示するら旋溝（５）を形成して、前記
平坦面（１０）とら旋溝（５）との間に前記排気通路（
３）を形成する。With the above configuration, as clearly shown in FIG. 1, the upper and lower surfaces of each of the rotating disks (1) are formed into flat surfaces (10), and
A spiral groove (5) as shown in FIG. 2 is formed on the opposite surface of the stationary disk (2) facing the rotating disk (1), so that the flat surface (10) and the spiral groove (5 ) and the exhaust passage (
3) Form.

前記ら旋溝（５）は、実際には、前記静止円板（２）の
平面（２１）に対して円環形に突出させた肉盛部（５１
）（第２図想像線で示す）を、溝深さが前記平面（２１
）に一致するように切削等をすることにより形成してお
り、従って、このら旋溝（５）は、切削後に突出状に残
されるら旋突起（５２）の間に形成される。The spiral groove (5) is actually a built-up part (51) that projects in an annular shape with respect to the plane (21) of the stationary disk (2).
) (shown by imaginary lines in Figure 2), the groove depth is the plane (21
), and therefore, the spiral groove (5) is formed between the spiral protrusions (52) left in a protruding shape after cutting.

以上の構成によれば、回転円板（１）は、その上下面を
平坦面（１０）としたから、該回転円板（１）の高速回
転時、該円板（１）に現れようとするたわみを殆ど無く
することができ、静止円板（２）側との接触事故を未然
に回避することができると共に、回転円板（１）と静止
円板（２）との間の隙間（Δ）を小さく設定できて、漏
れによる性能の低下を防止でき、到達真空圧力を改善す
ることができるのである。According to the above configuration, since the rotating disk (1) has the upper and lower surfaces as flat surfaces (10), when the rotating disk (1) rotates at high speed, what will appear on the disk (1)? It is possible to almost eliminate the deflection caused by the rotating disk (1) and the stationary disk (2), and avoid contact accidents with the stationary disk (2). Δ) can be set small, preventing performance deterioration due to leakage, and improving the ultimate vacuum pressure.

ところで、以上のものでは、ら旋溝（５）の溝深さを入
口部から出口部にかけて均一な深さとしたが、第４図に
示すように、入口部（５ａ）では深く、出口部（５ｂ）
では浅く形成するようにしてもよい。即ち、回転しない
静止円板（２）側にら旋溝（５）を設けるから、このよ
うな不均一な溝を形成しても重量アンバランスによるた
わみは問題とならないのであり、そして、このような溝
を設けることにより、気体の排気の進行に伴い圧縮を適
正に行うことができ、更に性能の改善を図ることができ
るのである。Incidentally, in the above example, the groove depth of the spiral groove (5) is uniform from the inlet part to the outlet part, but as shown in FIG. 5b)
Then, it may be formed shallowly. In other words, since the spiral grooves (5) are provided on the side of the stationary disk (2) that does not rotate, even if such uneven grooves are formed, deflection due to weight imbalance will not be a problem. By providing such grooves, compression can be performed appropriately as gas exhaust progresses, and performance can be further improved.

（発明の効果） 以上のように、回転円板（１）の各面を平坦面（１０）
に形成すると共に、これに対向する静止円板（２）の対
向面に、ら旋溝（５）を形成して、平坦面（１０）とら
旋溝（５）との間に排気通路（３）を形成したから、回
転円板（１）のたわみを殆ど無くすることができ、静止
円板（２）側との接触事故を未然に回避できると共に、
回転円板（１）と静止円板（２）との間の隙間を小さく
設定でき、漏れによる性能の低下を防止できて到達真空
圧力を改善できるのである。(Effect of the invention) As described above, each surface of the rotating disk (1) is formed into a flat surface (10).
At the same time, a spiral groove (5) is formed on the opposite surface of the stationary disk (2), and an exhaust passage (3) is formed between the flat surface (10) and the spiral groove (5). ), it is possible to almost eliminate the deflection of the rotating disk (1), and it is possible to avoid contact accidents with the stationary disk (2) side, as well as
The gap between the rotating disk (1) and the stationary disk (2) can be set small, preventing deterioration in performance due to leakage and improving the ultimate vacuum pressure.

又、ら旋溝（５）の溝深さを入口部（５ａ）では深く、
出口部（５ｂ）では浅く形成すれば、たわみによる悪影
響を受けることなく、気体の排気の進行に伴い圧縮を適
正に行うことができ、更に性能の改善を図ることができ
るのである。Moreover, the groove depth of the spiral groove (5) is deep at the entrance part (5a),
If the outlet portion (5b) is formed shallowly, compression can be performed appropriately as the gas is exhausted without being adversely affected by deflection, and performance can be further improved.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本発明真空ポンプの要部断面図、第２図は同静
止円板の平面図、第３図は同全体の断面図、第４図は他
の実施例の要部断面図、第５図は従来例の要部断面図、
第６図はその問題点を指摘するたわみ特性図である。 （１）・・・・回転円板 （２）・・・・静止円板 （３）・・・・排気通路 （４）・・・・ジグバーン型ポンプ要素（５）・・・・
ら旋溝 （１０）・・・・平坦面 （５ａ）・・・・入口部 （５ｂ）・・・・出口部FIG. 1 is a sectional view of the essential parts of the vacuum pump of the present invention, FIG. 2 is a plan view of the stationary disk, FIG. 3 is a sectional view of the whole, and FIG. 4 is a sectional view of the essential parts of another embodiment. Figure 5 is a sectional view of the main parts of the conventional example.
FIG. 6 is a deflection characteristic diagram that points out the problem. (1) Rotating disc (2) Stationary disc (3) Exhaust passage (4) Jigburn type pump element (5)
Spiral groove (10)...Flat surface (5a)...Inlet part (5b)...Outlet part

Claims (2)

【特許請求の範囲】[Claims] （１）回転円板（１）と静止円板（２）とを対向状に配
置し、これら円板（１）（２）の対向部に、径方向に延
びるら旋状の排気通路（３）を形成したジグバーン形ポ
ンプ要素（４）を備える真空ポンプにおいて、前記回転
円板（１）の各面を平坦面（１０）に形成すると共に、
該回転円板（１）に対向する前記静止円板（２）の対向
面に、ら旋溝（５）を形成して、前記平坦面（１０）と
ら旋溝（５）との間に前記排気通路（３）を形成してい
ることを特徴とする真空ポンプ。(1) A rotating disk (1) and a stationary disk (2) are arranged facing each other, and a spiral exhaust passage (3 ), each surface of the rotating disk (1) is formed into a flat surface (10), and
A spiral groove (5) is formed on the opposing surface of the stationary disk (2) facing the rotating disk (1), and the spiral groove (5) is formed between the flat surface (10) and the spiral groove (5). A vacuum pump characterized by forming an exhaust passage (3). （２）ら旋溝（５）の溝深さを、入口部（５ａ）では深
く、出口部（５ｂ）では浅く形成している請求項１記載
の真空ポンプ。(2) The vacuum pump according to claim 1, wherein the spiral groove (5) is deep at the inlet portion (5a) and shallow at the outlet portion (5b).
JP2116385A 1990-05-01 1990-05-01 Vacuum pump Pending JPH0412197A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2116385A JPH0412197A (en) 1990-05-01 1990-05-01 Vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2116385A JPH0412197A (en) 1990-05-01 1990-05-01 Vacuum pump

Publications (1)

Publication Number Publication Date
JPH0412197A true JPH0412197A (en) 1992-01-16

Family

ID=14685711

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2116385A Pending JPH0412197A (en) 1990-05-01 1990-05-01 Vacuum pump

Country Status (1)

Country Link
JP (1) JPH0412197A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016008611A (en) * 2014-06-26 2016-01-18 プファイファー・ヴァキューム・ゲーエムベーハー Shiegbahn step
JP2016075276A (en) * 2014-10-02 2016-05-12 プファイファー・ヴァキューム・ゲーエムベーハー Method of manufacturing rotor disc or stator disc for vacuum pump, and rotor disc or stator disc for vacuum pump

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016008611A (en) * 2014-06-26 2016-01-18 プファイファー・ヴァキューム・ゲーエムベーハー Shiegbahn step
JP2016075276A (en) * 2014-10-02 2016-05-12 プファイファー・ヴァキューム・ゲーエムベーハー Method of manufacturing rotor disc or stator disc for vacuum pump, and rotor disc or stator disc for vacuum pump

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