JPH0411919U - - Google Patents

Info

Publication number
JPH0411919U
JPH0411919U JP5331490U JP5331490U JPH0411919U JP H0411919 U JPH0411919 U JP H0411919U JP 5331490 U JP5331490 U JP 5331490U JP 5331490 U JP5331490 U JP 5331490U JP H0411919 U JPH0411919 U JP H0411919U
Authority
JP
Japan
Prior art keywords
porous
guide portion
base member
fitting
movably supported
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5331490U
Other languages
English (en)
Japanese (ja)
Other versions
JP2576284Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990053314U priority Critical patent/JP2576284Y2/ja
Publication of JPH0411919U publication Critical patent/JPH0411919U/ja
Application granted granted Critical
Publication of JP2576284Y2 publication Critical patent/JP2576284Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Machine Tool Units (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Details Of Measuring And Other Instruments (AREA)
JP1990053314U 1990-05-22 1990-05-22 静圧気体スライドテーブル Expired - Fee Related JP2576284Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990053314U JP2576284Y2 (ja) 1990-05-22 1990-05-22 静圧気体スライドテーブル

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990053314U JP2576284Y2 (ja) 1990-05-22 1990-05-22 静圧気体スライドテーブル

Publications (2)

Publication Number Publication Date
JPH0411919U true JPH0411919U (no) 1992-01-30
JP2576284Y2 JP2576284Y2 (ja) 1998-07-09

Family

ID=31574394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990053314U Expired - Fee Related JP2576284Y2 (ja) 1990-05-22 1990-05-22 静圧気体スライドテーブル

Country Status (1)

Country Link
JP (1) JP2576284Y2 (no)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100966131B1 (ko) * 2003-04-14 2010-06-25 가부시키가이샤 다이후쿠 판형체 반송 장치

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2981459B2 (ja) 1998-05-01 1999-11-22 株式会社日本マクシス 水晶基板傷検査装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0257722A (ja) * 1988-08-22 1990-02-27 Canon Inc 直進型気体軸受の接続方法
JPH0243133U (no) * 1988-09-14 1990-03-26

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0257722A (ja) * 1988-08-22 1990-02-27 Canon Inc 直進型気体軸受の接続方法
JPH0243133U (no) * 1988-09-14 1990-03-26

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100966131B1 (ko) * 2003-04-14 2010-06-25 가부시키가이샤 다이후쿠 판형체 반송 장치

Also Published As

Publication number Publication date
JP2576284Y2 (ja) 1998-07-09

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees