JPH0411919U - - Google Patents

Info

Publication number
JPH0411919U
JPH0411919U JP5331490U JP5331490U JPH0411919U JP H0411919 U JPH0411919 U JP H0411919U JP 5331490 U JP5331490 U JP 5331490U JP 5331490 U JP5331490 U JP 5331490U JP H0411919 U JPH0411919 U JP H0411919U
Authority
JP
Japan
Prior art keywords
porous
guide portion
base member
fitting
movably supported
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5331490U
Other languages
Japanese (ja)
Other versions
JP2576284Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990053314U priority Critical patent/JP2576284Y2/en
Publication of JPH0411919U publication Critical patent/JPH0411919U/ja
Application granted granted Critical
Publication of JP2576284Y2 publication Critical patent/JP2576284Y2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Delivering By Means Of Belts And Rollers (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Machine Tool Units (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案に係る静圧気体スライドテーブ
ルの一実施例の一部破断斜視図、第２図はその一
部断面平面図、第３図は一部断面正面図、第４図
は側面図である。 １０……ベース（ベース部材）、１２……固定
側ガイドプレート（ガイド部）、１２Ｃ……排気
孔、１２Ｆ……排気溝（排気口）、１３……多孔
質部材、２０……テーブル（テーブル部材）、｛
２１……テーブル板、２２……可動側ガイドプレ
ート、２３……保持板｝（嵌合部）。 Fig. 1 is a partially cutaway perspective view of an embodiment of the hydrostatic gas slide table according to the present invention, Fig. 2 is a partially sectional plan view thereof, Fig. 3 is a partially sectional front view, and Fig. 4 is a side view. It is a diagram. 10... Base (base member), 12... Fixed side guide plate (guide part), 12C... Exhaust hole, 12F... Exhaust groove (exhaust port), 13... Porous member, 20... Table (table Element),{
21... Table plate, 22... Movable side guide plate, 23... Holding plate} (fitting part).

Claims (1)

【実用新案登録請求の範囲】 ガイド部を有するベース部材と、前記ガイド部
と嵌合する嵌合部を有するテーブル部材とにより
構成され、前記ガイド部又は前記嵌合部の何れか
一方を多孔質部材で形成して該多孔質部材から嵌
合面に供給される気体圧力によつて前記嵌合面を
非接触状態とし、前記ベース部材で前記テーブル
部材を移動可能に支持するものであつて、 前記多孔質部材を前記テーブル部材の移動方向
に複数に分割して配置すると共に、該複数の多孔
質部材間に外部に連通する排気孔を配置したこと
、を特徴とする静圧気体スライドテーブル。[Claims for Utility Model Registration] Consisting of a base member having a guide portion and a table member having a fitting portion that fits into the guide portion, either the guide portion or the fitting portion is made of a porous material. The table member is movably supported by the base member, and the fitting surface is brought into a non-contact state by gas pressure supplied from the porous member to the fitting surface, and the table member is movably supported by the base member. A static pressure gas slide table, characterized in that the porous member is divided into a plurality of parts in the moving direction of the table member, and an exhaust hole that communicates with the outside is arranged between the plurality of porous members.
JP1990053314U 1990-05-22 1990-05-22 Static pressure gas slide table Expired - Fee Related JP2576284Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990053314U JP2576284Y2 (en) 1990-05-22 1990-05-22 Static pressure gas slide table

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990053314U JP2576284Y2 (en) 1990-05-22 1990-05-22 Static pressure gas slide table

Publications (2)

Publication Number Publication Date
JPH0411919U true JPH0411919U (en) 1992-01-30
JP2576284Y2 JP2576284Y2 (en) 1998-07-09

Family

ID=31574394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990053314U Expired - Fee Related JP2576284Y2 (en) 1990-05-22 1990-05-22 Static pressure gas slide table

Country Status (1)

Country Link
JP (1) JP2576284Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100966131B1 (en) * 2003-04-14 2010-06-25 가부시키가이샤 다이후쿠 Apparatus for transporting plate-shaped work piece

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2981459B2 (en) 1998-05-01 1999-11-22 株式会社日本マクシス Quartz substrate damage inspection equipment

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0257722A (en) * 1988-08-22 1990-02-27 Canon Inc Method of connecting linear gas bearing
JPH0243133U (en) * 1988-09-14 1990-03-26

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0257722A (en) * 1988-08-22 1990-02-27 Canon Inc Method of connecting linear gas bearing
JPH0243133U (en) * 1988-09-14 1990-03-26

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100966131B1 (en) * 2003-04-14 2010-06-25 가부시키가이샤 다이후쿠 Apparatus for transporting plate-shaped work piece

Also Published As

Publication number Publication date
JP2576284Y2 (en) 1998-07-09

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees