JPH0257722A - Method of connecting linear gas bearing - Google Patents

Method of connecting linear gas bearing

Info

Publication number
JPH0257722A
JPH0257722A JP63206260A JP20626088A JPH0257722A JP H0257722 A JPH0257722 A JP H0257722A JP 63206260 A JP63206260 A JP 63206260A JP 20626088 A JP20626088 A JP 20626088A JP H0257722 A JPH0257722 A JP H0257722A
Authority
JP
Japan
Prior art keywords
bearing
linear gas
gas
gas bearing
stepped part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP63206260A
Other languages
Japanese (ja)
Inventor
Eiji Miyata
宮田　英二
Koichi Matsushita
松下　光一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP63206260A priority Critical patent/JPH0257722A/en
Publication of JPH0257722A publication Critical patent/JPH0257722A/en
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F16C29/025—Hydrostatic or aerostatic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
    • F16C32/0618—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via porous material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2300/00—Application independent of particular apparatuses
    • F16C2300/40—Application independent of particular apparatuses related to environment, i.e. operating conditions
    • F16C2300/62—Application independent of particular apparatuses related to environment, i.e. operating conditions low pressure, e.g. elements operating under vacuum conditions

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

PURPOSE:To prevent a gas from being generated from a connecting surface, when a plurality of linear gas bearings used in a vacuum are to be connected, by providing a stepped part to the outer part of the bearing at a mating face of each linear gas bearing and filling this stepped part with a sealant after each linear gas bearing is connected, thereby improving flatness and parallelism of the outer surface of the bearing. CONSTITUTION:A stepped part A is provided to an end surface of each connecting surface of housings 2 and 3, which constitute a plurality of linear gas bearings. After the housing 2 and the housing 3 are connected, the outer surface is machined to the predetermined accuracy. After this machining work, this stepped part A is filled with a sealant 8. Owing to this sealant 8 used for filling, the gas is prevented from being generated from the connecting surface, thereby enabling this bearing to be used in a vacuum. With this contrivance, since the outer surface can be machined after the housings are connected, flatness and parallelism of the outer surface of the bearing can be improved.

Description

【発明の詳細な説明】 ［産業上の利用分野］ 本発明は、真空内で使用する直進型気体軸受の接続方法
に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for connecting linear gas bearings used in a vacuum.

［従来の技術］ 従来、真空内で直進型気体軸受を使用する場合には、例
えばモーメント剛性を向上させるために直進型気体軸受
を複数接続して用いる場合があった。[Prior Art] Conventionally, when using a linear gas bearing in a vacuum, a plurality of linear gas bearings may be connected in order to improve moment rigidity, for example.

［発明が解決しようとする課題］ しかしながら、直進型気体軸受を用いる際に外周面の平
面度または平行度等の点で精度が必要な場合には、その
外周面を切削、研削あるいはラップ加工等により加工す
ることが通常行なわれているが、上述の従来例のように
直進型気体軸受を複数接続して用いる場合には、かかる
加工を行なうことができないという不都合があった。す
なわち、切削、研削あるいはラップ加工等による微少な
ラップ材、研磨材や研削液が軸受を接続した合せ面に入
り込み、真空内で使用する場合、これらによってガスが
発生し悪影響を及ぼすからである。[Problems to be Solved by the Invention] However, when precision is required in terms of flatness or parallelism of the outer circumferential surface when using a linear gas bearing, the outer circumferential surface may be processed by cutting, grinding, lapping, etc. However, when a plurality of linear gas bearings are connected and used as in the conventional example described above, there is an inconvenience that such processing cannot be performed. That is, minute amounts of lapping material, abrasive material, and grinding fluid from cutting, grinding, lapping, etc. enter the mating surfaces to which the bearings are connected, and when used in a vacuum, gas is generated by these materials and has an adverse effect.

本発明の目的は、上述の従来例における問題点に鑑み、
軸受接続後に外周面を加工して平面度等の精度を上げる
ことができ、また接続面からのガスの発生を防ぐことが
できる直進型気体軸受の接続方法を提供することにある
。The purpose of the present invention is to solve the problems in the conventional example described above.
It is an object of the present invention to provide a method for connecting a linear type gas bearing, in which the outer circumferential surface can be processed to improve accuracy such as flatness after the bearing is connected, and gas generation from the connecting surface can be prevented.

［課題を解決するための手段および作用］上記の目的を
達成するため、本発明に係る直進型気体軸受の接続方法
は、接続すべき各軸受の合せ面の軸受外周部分に段差部
を設け、各軸受を接続した後、段差部にシール材を充填
することを特徴としている。[Means and effects for solving the problem] In order to achieve the above object, the method for connecting linear gas bearings according to the present invention includes providing a stepped portion on the outer peripheral portion of the mating surface of each bearing to be connected; The feature is that after each bearing is connected, the stepped portion is filled with a sealing material.

外周面の切削、研削およびラップ加工等の加工は、各軸
受部材の合せ面を接続した後行なう。そして、外周面の
加工後、この段差の全周にシール材を充填する。これに
より、合わせ面に入り込んだ微少なラップ材、研磨材お
よび研削液による発生ガスが防止される。Machining such as cutting, grinding, and lapping of the outer peripheral surface is performed after the mating surfaces of each bearing member are connected. After processing the outer peripheral surface, the entire circumference of this step is filled with a sealing material. This prevents gases from being generated due to minute amounts of lapping material, abrasive material, and grinding fluid that have entered the mating surfaces.

［実施例］ 以下、図面を用いて本発明の詳細な説明する。[Example] Hereinafter, the present invention will be explained in detail using the drawings.

第１図は、本発明の一実施例に係る軸受の接続方法を適
用して接続した直進型気体軸受の断面図である。第２図
は、第１図の合せ面の部分の詳細な断面図である。FIG. 1 is a sectional view of a linear gas bearing connected using a bearing connecting method according to an embodiment of the present invention. FIG. 2 is a detailed sectional view of the mating surface portion of FIG. 1.

第１．２図において、１はガイドバー　２゜３．４は軸
受を構成するハウジング、５は多孔質材で構成されたパ
ッド、６は給気用通路、７は空気を大気圧下に排出する
ための通路である。また、Ａは各軸受の端面に付された
段差部、８は段差部Ａの全周に充填されたシール材であ
る。In Figure 1.2, 1 is a guide bar, 2゜3.4 is a housing that constitutes a bearing, 5 is a pad made of porous material, 6 is an air supply passage, and 7 is an air exhaust to atmospheric pressure. It is a passageway for Further, A is a stepped portion attached to the end face of each bearing, and 8 is a sealing material filled around the entire circumference of the stepped portion A.

かかる構成の直進型気体軸受は、複数個の直進型気体軸
受を以下のように接続することにより得られる。すなわ
ち、先ずハウジング２とハウジング３の接続面（合せ面
）の端面に段差部Ａを設ける。そして、ハウジング２と
ハウジング３を接続し、外周面を所定の精度まで加工す
る。加工後、この段差部Ａにシール材８を充填する。こ
の充填したシール材によって、接続面から発生するガス
を防止することができ真空内での使用が可能となる。A linear gas bearing having such a configuration can be obtained by connecting a plurality of linear gas bearings in the following manner. That is, first, a stepped portion A is provided on the end surface of the connecting surface (mating surface) between the housing 2 and the housing 3. Then, the housing 2 and the housing 3 are connected, and the outer peripheral surface is processed to a predetermined accuracy. After processing, this stepped portion A is filled with a sealing material 8. This filled sealing material prevents gas from being generated from the connection surface, making it possible to use it in a vacuum.

なお、上記実施例においては接続面の端面に５字型の段
差部を設けた例をあげたが、段差部の形状はこれに限ら
ない。例えば第３図（ａ）または（ｂ）に示すように、
面取り形状あるいはＲ形状としてもよい。In addition, in the above embodiment, an example was given in which a five-shaped step portion was provided on the end face of the connection surface, but the shape of the step portion is not limited to this. For example, as shown in FIG. 3(a) or (b),
It may be chamfered or rounded.

［発明の効果］ 以上説明したように、本発明は、真空内で使用する直進
型気体軸受のように、高精度な外周面を必要とする部材
の接続に有効である。すなわち、接続後に外周面の加工
ができるので、外周面の平面度および平行度等の精度向
上を図ることができ、また加工あるいは組立の効率を上
げることができる。また、゛加工後、接続面外周をシー
ル材で埋めているので、接続面から発生するガスを完全
に防ぐことがで仕る。[Effects of the Invention] As explained above, the present invention is effective for connecting members that require highly accurate outer circumferential surfaces, such as linear gas bearings used in vacuum. That is, since the outer circumferential surface can be processed after connection, it is possible to improve the accuracy of the flatness and parallelism of the outer circumferential surface, and it is also possible to increase the efficiency of processing or assembly. In addition, after processing, the outer periphery of the connection surface is filled with a sealant, which completely prevents gas from being generated from the connection surface.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は、本発明の一実施例に係る軸受の接続方法を適
用して接続した直進型気体軸受の断面図、 第２図は、第１図の合せ面の部分の詳細な断面図、 第３図は、接続面を他の形状とした場合の例である。 ：給気用通路、 ：排気用通路、 ：シール材、 ：段差部。FIG. 1 is a sectional view of a linear gas bearing connected using a bearing connection method according to an embodiment of the present invention; FIG. 2 is a detailed sectional view of the mating surface portion of FIG. 1; FIG. 3 is an example in which the connecting surface has a different shape. : Air supply passage, : Exhaust passage, : Seal material, : Step part.

Claims (1)

【特許請求の範囲】[Claims] （１）真空内で使用する直進型気体軸受を複数接続する
方法であって、上記各直進型気体軸受の合せ面の軸受外
周部分に段差部を設け、各直進型気体軸受を接続した後
、該段差部にシール材を充填することを特徴とした直進
型気体軸受の接続方法。(1) A method of connecting a plurality of linear gas bearings for use in a vacuum, in which a stepped portion is provided on the outer peripheral portion of the mating surface of each of the linear gas bearings, and after connecting each linear gas bearing, A method for connecting a linear gas bearing, characterized in that the stepped portion is filled with a sealing material.
JP63206260A 1988-08-22 1988-08-22 Method of connecting linear gas bearing Pending JPH0257722A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63206260A JPH0257722A (en) 1988-08-22 1988-08-22 Method of connecting linear gas bearing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63206260A JPH0257722A (en) 1988-08-22 1988-08-22 Method of connecting linear gas bearing

Publications (1)

Publication Number Publication Date
JPH0257722A true JPH0257722A (en) 1990-02-27

Family

ID=16520387

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63206260A Pending JPH0257722A (en) 1988-08-22 1988-08-22 Method of connecting linear gas bearing

Country Status (1)

Country Link
JP (1) JPH0257722A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0411919U (en) * 1990-05-22 1992-01-30

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0411919U (en) * 1990-05-22 1992-01-30

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