JPH0411359Y2 - - Google Patents

Description

[Detailed description of the invention] [Industrial application field] This invention is a thermocompression bonding method in which the connection terminal of an electronic circuit is thermocompression bonded to a flexible printed circuit board, etc. via an anisotropic conductive film, etc. This relates to a heater pedestal for use.

[Conventional technology]

With the advancement of high-density packaging technology that is associated with the miniaturization, weight, and thinness of electronic devices, terminals for connection with external circuits are required to have terminal spacing of 0.2 to 0.5 m/m. Anisotropic conductive films have come to be used to connect lead wires.

This anisotropic conductive film is made of a polymer film in which conductive particles are uniformly dispersed in an adhesive, and by thermocompression bonding, it is possible to obtain conductivity only in the thickness direction of the film, and in other directions. has electrical anisotropy indicating insulating properties. When performing thermocompression bonding of terminals and lead wires using an anisotropic conductive film having such characteristics, in order to obtain stable electrical characteristics and adhesive strength, a pressure of 10 to 50 kg/cm ² and a pressure of 130 to 50 kg/cm 2 are required. 170
It is important that the heating temperature of °C etc. is applied uniformly to the connection surface. Therefore, the heater of the thermocompression bonding apparatus must have sufficient parallelism with the table on which the connection terminals of the electronic circuits, which are the members to be thermocompressed, are placed.

For this reason, conventional thermocompression bonding equipment of this type uses a pedestal that supports the table with four screws and ensures parallelism between the heater and the table by adjusting these screws. .

[Problem that the invention attempts to solve]

However, when such a pedestal is used repeatedly, the parallelism becomes inconsistent due to loosening of the screws, and the pedestal must be adjusted to maintain parallelism each time the heater is replaced. .

[Means for solving problems]

In order to solve such problems, this idea is
The table is pivotally supported on a fixed base with opposing sides of the table rotating by the same amount.

[Operation] When the heater presses the thermocompression bonded member placed on the table, the table rotates until the heater and the thermocompression bonded member become parallel.

〔Example〕

FIG. 1 is a front view showing an embodiment of this invention, FIG. 2 is a cross-sectional view taken from FIG. 1, and FIG. 3 is a right side view of FIG. 1. In the figure, 1 is a fixed stand,
Bearings 2 and 3 are provided near the center of the upper surface of this fixed base, and a shaft 4 is inserted into these bearings 2 and 3.
It is fixed by set screws 5 and 6. A table support 7 is loosely inserted into the shaft 4, and flange-shaped drive elements 8, 9 inserted into the shaft 4 are fitted to both ends of the table support 7. The drive element is a component made of synthetic resin and has a low coefficient of friction, and therefore the table support 7 is designed to rotate slightly around the shaft 4 in the front or back direction of the paper in FIG. Reference numeral 10 denotes a table provided above the table holder 7, and a heat-bonded member (not shown) is placed on the upper surface of this table.

At least two parts are placed at the target position sandwiching the shaft 4 of the fixed base 1.
A set of supports 11, 12 is provided. Reference numeral 13 denotes an elastic body made of relatively hard synthetic rubber, etc., and has a semicircular upper part and a support member 1 at the lower part.
The structure is such that it is inserted into a cylindrical body 14 provided at 1 and 12. A bolt 15 is fixed to the bottom of the cylindrical body 14, which is screwed into the fixing base 1 and can be fixed at a desired height with a nut 16.

The device configured in this way is arranged directly below the heater 20 so that the axis 4 is perpendicular to the longitudinal direction of the heater. And supports 11, 12
The table 10 is maintained approximately horizontally by adjusting the height of the table 10. Thereafter, a member to be thermocompressed, such as a substrate having a terminal portion and a flexible printed circuit board on which a pattern for connecting to the terminal is formed, is placed on the table 10, and an anisotropic conductive film is sandwiched between them. At this time, the terminal and the flexible printed circuit board are accurately positioned. Then, the heater 20 is lowered to apply pressure. At this time table 1
Even if there is a slight deviation in parallelism between the table 10 and the heater 20, the table 10 is pressed against the heater 20. Since this table 10 is designed to rotate around the shaft 4, the table 10 rotates while pressing the elastic body 13, and stops rotating when the table 10 and the heater 20 become parallel. do.

Incidentally, in the above embodiment, there was one axis for rotation, but if this device is stacked in two stages, the direction of rotation can be made freely. In addition, synthetic rubber elastic bodies are embedded in the supports 11 and 12, but as an alternative, one end of a compression coil spring may be fixed to the fixed base 1, and the other end may be set as a free end to support the table 10. Also good.

[Effect of idea]

As explained above, this invention has a structure in which the table facing the heater can be rotated around an axis perpendicular to the longitudinal direction of the pressing part of the heater, making it highly durable and capable of repeated thermocompression bonding under high pressure. Even if this is done, the parallelism between the heater and the table will not be distorted. It is particularly effective when used in thermocompression bonding using anisotropic conductive films, which requires uniform application of pressure, heating temperature, etc. to the connection surface. Further, when replacing the heater, it is not necessary to strictly ensure parallelism with the table, which has the effect of improving work efficiency.

[Brief explanation of the drawing]

FIG. 1 is a front view showing an embodiment of a device to which this invention is applied, FIG. 2 is a cross-sectional view taken from FIG. 1, and FIG. 3 is a right side view of FIG. 1. 1... Fixed base, 2, 3... Bearing, 4... Shaft,
8, 9...Drive child, 10...Table, 1
1, 12...support body, 13...elastic body.

Claims (1)

[Scope of Claim for Utility Model Registration] A thermocompression heater that presses and heats thermocompression components placed on a table on a fixed base using a movable plate heater that presses and heats the thermocompression components together. a pedestal, the table being rotatably supported on a fixed base so as to be orthogonal to the longitudinal direction of the pressing length of the heater; and a support for supporting the lower surface of the table using an elastic body.