JPH0411312A - Thin-film magnetic head - Google Patents

Abstract

PURPOSE:To prevent the electrostatic breakdown in the production process of the magnetic head by forming an interlayer insulating film for insulating upper and lower cores and a thin-film coil of inorg. insulating films and directly forming the lower core of an electromagnetic converting element on a conduc tive nonmagnetic substrate. CONSTITUTION:An electromagnetic converting element part 2 is constituted by forming the film of a lower core 4 directly on a slider 3 consisting of Al2O3, TiC, forming the inorg. insulating film 5 on the upper surface of the lower core 4 and the circumference thereof, successively forming the films of the thin-film coil 6 on the inorg. insulating film 5, the inorg. insulating film 7 on this thin-film coil 6 and the upper core 8 on the 2nd inorg. insulating film 7, disposing the front part of the upper core 8 opposite to the lower core 4 via a gap layer 9, and magnetically coupling the rear part to the lower core 4. A protective film 10 consisting of the nonmagnetic inorg. insulating film protect ing the upper core 8 on the upper core 8. The possibility that the electrostatic breakdown is generated between the magnetic cores and the conductive substrates by the static electricity generated in the production process of the magnetic head is eliminated in this way.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a thin film magnetic head used in hard disk drives and the like.

(Conventional technology) As a floating magnetic head using a thin film magnetic head, as shown in FIG. 4, a thin film coil 104 is interposed between a lower core 101 and an upper core 102 via an interlayer insulating film 103,
There is one in which an electromagnetic transducer 100 with an upper core 102 protected by a protective film 105 is laminated on a substrate 106 with an insulating film 107 interposed therebetween.

In this case, an organic insulating film is used as the interlayer insulating film 103, but since this organic insulating film has low heat resistance, it is suitable as a material for the cores 101 and 102 because it can be formed at a low temperature and after the film is formed. An electrolytically plated permalloy film is used because it is easy to obtain the desired magnetic properties without heat treatment. On the other hand, the substrate 106 is made of Al, which has high hardness and good workability.
Although zOsTiC is used, AI20. Ti
The C substrate is a conductive substrate.

Therefore, when forming the lower core 101 and the upper core 102 by electrolytic plating, a layer of a non-magnetic insulating film 107 is formed on the A120sTiC substrate 106, and the lower core 101 is formed on the non-magnetic insulating film 107. That's what I do.

(Problem to be Solved by the Invention) However, in the thin-film magnetic head described above, the lower core and the conductive substrate are separated by an insulating film, so the magnetic head is subject to static electricity generated during the manufacturing process of the magnetic head. May cause destruction. In order to solve this problem, Japanese Patent Application Laid-Open No. 1-116910 proposes electrically connecting the conductive substrate and the core with a conductor, but this increases the number of man-hours and takes time to manufacture. Furthermore, the insulating film between the lower core and the conductive electrostatic substrate is usually formed to a thickness of 20 to 30 μm.
Since it takes a long time to form an insulating film, the cost becomes high.

(Means for Solving the Problems) In order to solve the above problems, the present invention forms an interlayer insulating film that insulates the upper and lower cores and the thin film coil with an inorganic insulating film, and the lower core of the electromagnetic transducer is made of a conductive non-magnetic material. Formed directly on the substrate.

(Function) Since the interlayer insulating film that insulates the upper and lower cores and the thin film coil is formed using an inorganic insulating film, the magnetic properties of the magnetic core can be restored by heat treatment after forming the thin film, and the magnetic core can be sputtered or vapor-deposited. The lower core can be formed directly on the conductive nonmagnetic substrate.

(Example) Embodiments of the present invention will be described below with reference to the accompanying drawings.

FIG. 1 is an enlarged sectional view of a main part of a thin film magnetic head according to the present invention, FIG. 2 is an overall sectional view of the same thin film magnetic head, and FIG. 3 is a perspective view of an electromagnetic transducer section viewed from below.

The thin film magnetic head 1 includes an electromagnetic transducer section 2 formed on a slider 3 made of a conductive nonmagnetic substrate.

The electromagnetic transducer section 2 is formed by forming a lower core 4 directly on a slider 3 made of AI 20 sT iC by sputtering or vapor deposition, and then coating a first inorganic insulating film 5 on and around the upper surface of the lower core 4. This first inorganic insulating film 5
A thin film coil 6 is formed on top of the thin film coil 6, a second inorganic insulating film 7 is formed on this thin film coil 6, and an upper core 8 is formed on this second inorganic insulating film 7 by sputtering or vapor deposition. 8 has a front portion facing the lower core 4 via a gap layer 9, and a rear portion thereof is magnetically coupled to the lower core 4. and,
A protective film 10 made of a non-magnetic inorganic insulating film is deposited on the upper core 8 to protect the upper core 8.

In this way, since the interlayer insulating film that insulates the upper core 8 and lower core 4 from the thin film coil 6 is formed of the inorganic insulating films 5 and 7, the magnetic properties of the magnetic core can be restored by heat treatment after forming the thin film. Therefore, sputtering or vapor deposition can be used as a method for forming the soft magnetic film for the magnetic core, and a soft magnetic film other than Permalloy that has excellent magnetic properties such as high Bs and high μ can be used as the core material.
The lower core can be formed directly on a conductive nonmagnetic substrate, and a thin film magnetic head suitable for high-density recording can be obtained.

By forming the lower core directly on the conductive non-magnetic substrate, there is no risk of electrostatic damage occurring between the magnetic core and the conductive substrate due to static electricity generated during the manufacturing process of the magnetic head. The process of forming a film becomes unnecessary.

(Effects of the Invention) As explained above, according to the present invention, since the interlayer insulating film that insulates the upper and lower cores and the thin film coil is formed of an inorganic insulating film, the magnetic core can be formed by sputtering or vapor deposition. This allows the lower core to be formed directly on the conductive non-magnetic substrate, preventing electrostatic damage during the manufacturing process of magnetic heads, and eliminating the need for the process of forming an insulating film, which reduces costs. become.

[Brief explanation of the drawing]

FIG. 1 is an enlarged sectional view of essential parts of a thin film magnetic head according to the present invention, FIG. 2 is an overall sectional view of the same thin film magnetic head, FIG. 3 is a perspective view of the electromagnetic transducer section viewed from below, and FIG. 4 1 is an enlarged sectional view of a main part of a conventional thin film magnetic head. DESCRIPTION OF SYMBOLS 1... Thin film magnetic head, 2... Head, 3... Slider (conductive non-magnetic substrate), 4... Lower core, 5...
...First inorganic insulating film, 6... Thin film coil, 7...
Second inorganic insulating film, 8... Upper core, 9... Gap layer. Patent applicant: Victor Japan Co., Ltd. Thin film magnetic head Head slider (conductive non-magnetic substrate) Lower core 1st inorganic insulating film thin film coil 2nd inorganic insulating film Upper core gap layer 1 Fig. 2

Claims (1)

[Claims] In a thin-film magnetic head in which an electromagnetic transducer section formed by interposing a thin film coil between upper and lower cores made of soft magnetic films via an interlayer insulating film is laminated on a conductive nonmagnetic substrate, the interlayer insulating film is an inorganic insulating film. 1. A thin-film magnetic head, characterized in that the lower core is formed of a film, and the lower core is formed on the conductive non-magnetic substrate by a film-forming method.