JPH04112489A - Manufacture of electroluminescence phosphor - Google Patents

Manufacture of electroluminescence phosphor

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Publication number
JPH04112489A
JPH04112489A JP2232058A JP23205890A JPH04112489A JP H04112489 A JPH04112489 A JP H04112489A JP 2232058 A JP2232058 A JP 2232058A JP 23205890 A JP23205890 A JP 23205890A JP H04112489 A JPH04112489 A JP H04112489A
Authority
JP
Japan
Prior art keywords
activator
phosphor
zinc sulfide
plasma
oxygen gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2232058A
Other languages
Japanese (ja)
Inventor
Takeshi Yoshida
健 吉田
Naoki Fukutomi
直樹 福富
Hiroshi Narisawa
成沢 浩
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Corp
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP2232058A priority Critical patent/JPH04112489A/en
Publication of JPH04112489A publication Critical patent/JPH04112489A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To obtain an electroluminescence(EL) phosphor having high luminance and a long lifetime by treating the EL phosphor of a specific zinc sulfide type in a plasma including oxygen gas as an essential component. CONSTITUTION:A zinc sulfide type electroluminescence phosphor, where an activator including an additive activator and an additive co-activator is added into a base material, followed by baking, is treated in a plasma incorporating oxygen gas as an essential component. The plasma incorporating oxygen gas as an essential component may be diluted with inactive gas such as argon, neon and helium, and in this case, it is desirable that the oxygen gas should be more than 8mol%. As the additive activator, a substance incorporating an element capable of forming an acceptor level of zinc sulfide such as copper and silver, for example, copper acetate, silver nitrate or the like is used. As the additive co-activator, a substance incorporating an element capable of forming a donor level of zinc sulfide such as chlorine, bromine and aluminum, e.g. ammonium chloride, bromine chloride, ammonium acetate or the like is used. Therefore, the treatment in the plasma including oxygen gas can remarkably enhance a lifetime without deteriorating luminance.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明はエレクトロルミネッセンス(以下ELという)
螢光体の製造法に関する。
[Detailed Description of the Invention] (Industrial Application Field) The present invention relates to electroluminescence (hereinafter referred to as EL).
Concerning a method for manufacturing a phosphor.

(従来の技術) 従来、EL螢光体は硫化亜鉛を主原料とし、これに活性
剤として、硫化亜鉛のアクセプター準位を形成する銅、
銀等の元素を含む物質である付活剤と、硫化亜鉛のドナ
ー準位を形成する塩素、臭素、アルミニウム等の元素を
含む物質である供付活剤とを添加し、融剤(フラックス
)であるアルカリ金属、アルカリ土類金属のハロゲン化
物、アンモニウムハライド等とともに焼成した後、表面
の過剰の銅等を除去するためシアンを含む溶液で処理し
、更に適宜表面改質処理を行って製造していた。
(Prior art) Conventionally, EL phosphors have been made using zinc sulfide as the main raw material, and copper, which forms an acceptor level for zinc sulfide, as an activator.
Adding an activator, which is a substance containing elements such as silver, and a donor activator, which is a substance containing elements such as chlorine, bromine, and aluminum, which form the donor level of zinc sulfide, creates a flux. After firing with alkali metal, alkaline earth metal halide, ammonium halide, etc., it is treated with a solution containing cyanide to remove excess copper on the surface, and then subjected to appropriate surface modification treatment. was.

表面改質法としては、時開57−96494号公報に見
られるように蛍光体をエツチングする方法、時開1−1
38287号公報に示されるように再焼成する方法があ
る。ガスを使った表面改質法としては米国特許第308
2344号公報に示されるように空気、NH3、N2、
Co、SO2等のガス中で再焼成すると寿命が長くなる
という報告がある。一方プラズマ処理については時開6
3−278990号公報、時開1−129090号公報
に窒素ガス、ふっ素化合物ガスを含むプラズマ中で処理
する方法が示されている。
Surface modification methods include a method of etching a phosphor as seen in Jikai No. 57-96494, and Jikai 1-1.
There is a method of re-firing as shown in Japanese Patent No. 38287. US Patent No. 308 is a surface modification method using gas.
As shown in Publication No. 2344, air, NH3, N2,
There are reports that re-firing in a gas such as Co or SO2 increases the lifespan. On the other hand, regarding plasma processing,
No. 3-278990 and Jikai No. 1-129090 disclose a method of processing in a plasma containing nitrogen gas and fluorine compound gas.

(発明が解決しようとする課題) しかしながら上記方法では、そのEL素子の寿命はまだ
十分とは言えず、特に液晶バックライト用背面光源とし
て用いる場合には、更に高い信頼性と、長い寿命のEL
素子が求められている。
(Problem to be Solved by the Invention) However, with the above method, the life of the EL element is still not sufficient.Especially when used as a backlight source for a liquid crystal backlight, it is necessary to use an EL element with higher reliability and a longer life.
elements are in demand.

本発明は、高輝度で長寿命なEL螢光体の製造法を提供
するものである。
The present invention provides a method for manufacturing an EL phosphor with high brightness and long life.

(課題を解決するための手段) 本発明は、母体原料に付活剤と機付活剤とよりなる活性
剤を添加し焼成した硫化亜鉛型のEL蛍光体を酸素ガス
を必須成分とするプラズマ中で処理することを特徴とす
るものである。
(Means for Solving the Problems) The present invention provides a zinc sulfide type EL phosphor, which is produced by adding an activator consisting of an activator and an activator to a base material and firing the zinc sulfide type EL phosphor. It is characterized by processing inside.

本発明は、硫化亜鉛型のEL螢光体の表面処理方法につ
いて種々のガス中でのプラズマ処理を検討した結果、酸
素を成分に含むプラズマ中で処理し、更に必要に応じ表
面をエツチングすることにより、寿命が著しく延長され
ることを見出したことによりなされたものである。
As a result of studying plasma treatment in various gases as a surface treatment method for zinc sulfide type EL phosphor, the present invention proposes a method for treating the surface in a plasma containing oxygen as a component, and further etching the surface as necessary. This was based on the discovery that the lifespan was significantly extended.

本発明において用いられるプラズマとしては、酸素ガス
を必須成分として、アルゴン、ネオン、ヘリウム等の不
活性ガスで希釈してもよく、この際酸素ガスは8モル%
以上であることが望ましい。
The plasma used in the present invention contains oxygen gas as an essential component and may be diluted with an inert gas such as argon, neon, helium, etc. In this case, the oxygen gas is 8 mol%.
The above is desirable.

プラズマ発生装置内に導入されるガス圧は0.01〜2
0TOrrが好ましく、0.05〜5T o r rに
するのが更に好ましい。又プラズマ発生電源は電圧io
o〜10000 V 、好ましくは500〜3000 
Vの高周波電源が用いられる。
The gas pressure introduced into the plasma generator is 0.01 to 2.
0 TOrr is preferable, and 0.05 to 5 Torr is more preferable. Also, the plasma generation power source is voltage io
o~10000V, preferably 500~3000
A high frequency power source of V is used.

本発明においては、プラズマ処理をした後、プラズマ条
件が過度な場合には、表面に硫化亜鉛が生成してしまう
ためエツチング処理を施し、酸化層を除去するのが好ま
しい。エツチング法としては、酢酸水溶液に浸漬する等
により行う。
In the present invention, after plasma treatment, if the plasma conditions are excessive, zinc sulfide will be generated on the surface, so it is preferable to perform etching treatment to remove the oxide layer. The etching method is carried out by immersion in an acetic acid aqueous solution or the like.

本発明の処理が施される硫化亜鉛型のEL螢光体として
は、硫化亜鉛に活性剤と機付活剤とを添加し融剤ととも
に焼成して得られる硫化亜鉛型EL螢光体、酸化亜鉛に
活性剤を添加した混合物を硫化水素ガス雰囲気中で焼成
して得られる硫化亜鉛型EL螢光体等がある。
Zinc sulfide EL phosphors to which the treatment of the present invention is applied include zinc sulfide EL phosphors obtained by adding an activator and an activator to zinc sulfide and firing them together with a flux; There is a zinc sulfide type EL phosphor obtained by firing a mixture of zinc and an activator in a hydrogen sulfide gas atmosphere.

酸化亜鉛に活性剤を添加した混合物を硫化水素ガス雰囲
気中で焼成して得られる硫化亜鉛型EL螢光体は、酸化
亜鉛に活性剤を加えて混合した混合物に硫化水素ガスを
通し加熱することによって酸化亜鉛の硫化反応と、その
反応と同時に活性剤の拡散を行い、効率的に短時間で活
性剤を硫化亜鉛中に拡散させようとしたものである。
A zinc sulfide type EL phosphor obtained by firing a mixture of zinc oxide and an activator in a hydrogen sulfide gas atmosphere can be obtained by heating a mixture of zinc oxide and an activator by passing hydrogen sulfide gas through the mixture. In this method, the sulfidation reaction of zinc oxide and the diffusion of the activator were carried out simultaneously with the reaction, thereby attempting to efficiently diffuse the activator into the zinc sulfide in a short period of time.

活性剤とは付活剤と機付活剤をいう。付活剤とは銅、銀
等の硫化亜鉛のアクセプター準位を形成する元素を含む
物質であり、酢酸銅、硝酸銀等がある。機付活剤とは塩
素、臭素、アルミニウム等硫化亜鉛のドナー準位を形成
する元素を含む物質であり塩化アンモニウム、塩化臭素
、酢酸アンモニウム等がある。
Activator refers to activator and activator. The activator is a substance containing an element such as copper or silver that forms an acceptor level of zinc sulfide, and examples include copper acetate and silver nitrate. The activator is a substance containing an element that forms a donor level of zinc sulfide, such as chlorine, bromine, and aluminum, and includes ammonium chloride, bromine chloride, ammonium acetate, and the like.

以上説明した本発明の蛍光体は、分散型EL素子等の製
造に使用される。分散型EL素子は、ガラス板等の透明
基板にI T O(Indium Tin 0xide
)等の透明電極を形成させ、透明電極の上に樹脂に蛍光
体が分散している発光層層を形成させ、樹脂に絶縁体粒
子が分散している絶縁層を形成してアルミニウム等の電
極を形成させたものである。
The phosphor of the present invention described above is used for manufacturing a distributed EL element and the like. Dispersion type EL elements are made of ITO (Indium Tin Oxide) on a transparent substrate such as a glass plate.
), a light-emitting layer is formed on the transparent electrode with phosphor dispersed in a resin, an insulating layer is formed with insulator particles dispersed in the resin, and an electrode such as aluminum is formed. is formed.

(作用) 文献では、S%空気、アンモニア、S02、CO中での
再焼成することによって、寿命が伸びることが報告され
ているが、その原因については不明な点が多い。プラズ
マ中で処理することにより、より活性な酸素原子が作用
したと考えられるが、その理由は不明である。しかし処
理時間を長くするとX線回折で、ZnO層の形成が認め
られるようになる。このZnOは導電性があるため酸で
エツチングすることが必要であると考えられる。
(Effect) It has been reported in the literature that re-firing in S% air, ammonia, S02, and CO increases the lifespan, but there are many unknowns about the cause. It is thought that more active oxygen atoms acted upon the treatment in plasma, but the reason for this is unknown. However, when the treatment time is increased, the formation of a ZnO layer becomes visible by X-ray diffraction. Since this ZnO is electrically conductive, it is thought that etching with acid is necessary.

蛍光体で酸素雰囲気で再焼成する文献はあるが、この方
法ではガスに触れている表層と、充填された蛍光体群の
内部とで発光特性が大きく異なるがプラズマを用いた本
発明の方法では、このような差はない。
There is a literature on re-firing phosphors in an oxygen atmosphere, but in this method, the luminescence characteristics differ greatly between the surface layer that is in contact with the gas and the inside of the filled phosphor group, but in the method of the present invention using plasma, , there is no such difference.

(実施例1) 02とArの混合比を1:1とした混合ガスを0.2T
orrにし、投入電力0.2W/cm2.13.56M
Hzの高周波電圧を印加し、酸素プラズマを発生させた
。プラズマ中の電極板上に、分散型EL用の硫化亜鉛型
の蛍光体を20g均一に分散させて、基板温度200℃
にして5分処理した。この螢光体をシアノエチルプルラ
ンのジメチルホルムアミド溶液に分散させて透明電極を
形成しであるガラス基板上に塗布し発光層とした。螢光
体と樹脂との体積比は1:1とした。更にシアノエチル
プルランのジメチルホルムアミド溶液に酸化チタン粉末
を分散させた混合物の絶縁層を形成した後、金属電極を
蒸着してEL素子とした。発光層と絶縁層の膜厚はそれ
ぞれ50μm120μmとした。
(Example 1) 0.2T of mixed gas with a mixing ratio of 02 and Ar of 1:1
orr, input power 0.2W/cm2.13.56M
A high frequency voltage of Hz was applied to generate oxygen plasma. 20g of zinc sulfide type phosphor for distributed EL is uniformly dispersed on the electrode plate in plasma, and the substrate temperature is 200℃.
and processed for 5 minutes. This phosphor was dispersed in a dimethylformamide solution of cyanoethyl pullulan to form a transparent electrode and coated on a glass substrate to form a light-emitting layer. The volume ratio of the phosphor to the resin was 1:1. Furthermore, after forming an insulating layer of a mixture of titanium oxide powder dispersed in a dimethylformamide solution of cyanoethyl pullulan, metal electrodes were deposited to obtain an EL element. The film thicknesses of the light emitting layer and the insulating layer were 50 μm and 120 μm, respectively.

このEL素子に400Hz、115Vの交流電界を印加
し輝度、寿命を測定した。結果を表1に示す。
An alternating current electric field of 400 Hz and 115 V was applied to this EL element to measure its brightness and life. The results are shown in Table 1.

(実施例2) 0.15T o r rの02ガス雰囲気下、投入電力
0.1W / Cm 2.13.56MHzの高周波電
圧を印加し、酸素プラズマを発生させた。プラズマ中の
電極板上に、分散型EL用の硫化亜鉛型の蛍光体を20
g均一に分散させて、基板温度200℃にして5分処理
した。更にその蛍光体を80℃湯浴中で酢酸を用いて3
0分間エツチングし、その後水洗、乾燥した。この螢光
体をシアノエチルプルランのジメチルホルムアミド溶液
に分散させて透明電極を形成しであるガラス基板上に塗
布し発光層とした。
(Example 2) Oxygen plasma was generated by applying a high frequency voltage of 2.13.56 MHz and an input power of 0.1 W/cm in an 0.2 gas atmosphere of 0.15 Torr. 20% of zinc sulfide type phosphor for distributed EL is placed on the electrode plate in the plasma.
g It was uniformly dispersed and treated at a substrate temperature of 200° C. for 5 minutes. Furthermore, the phosphor was dissolved in a water bath at 80°C using acetic acid.
It was etched for 0 minutes, then washed with water and dried. This phosphor was dispersed in a dimethylformamide solution of cyanoethyl pullulan to form a transparent electrode and coated on a glass substrate to form a light-emitting layer.

螢光体と樹脂との体積比は1:1とした。更にシアノエ
チルプルランのジメチルホルムアミド溶液に酸化チタン
粉末を分散させた混合物の絶縁層を形成した後、金属電
極を蒸着してEL素子とした。
The volume ratio of the phosphor to the resin was 1:1. Furthermore, after forming an insulating layer of a mixture of titanium oxide powder dispersed in a dimethylformamide solution of cyanoethyl pullulan, metal electrodes were deposited to obtain an EL element.

発光層と絶縁層の膜厚はそれぞれ50μm120μmと
した。このEL素子に400Hz、115Vの交流電界
を印加し輝度、寿命を測定した。結果を表1に示す。
The film thicknesses of the light emitting layer and the insulating layer were 50 μm and 120 μm, respectively. An alternating current electric field of 400 Hz and 115 V was applied to this EL element to measure its brightness and life. The results are shown in Table 1.

(比較例) 実施例に用いた蛍光体を前記の処理を行わないで、実施
例と同様にEL素子とし、特性評価を行った。
(Comparative Example) The phosphor used in the example was used as an EL element in the same manner as in the example without undergoing the above treatment, and its characteristics were evaluated.

表1 但し、デシケータ中50℃で寿命試験を行った。Table 1 However, the life test was conducted at 50°C in a desiccator.

(効果) 本発明のように酸素ガスを含むプラズマ中で処理するこ
とにより、輝度を低下させずに寿命を著しく向上させる
ことができる。また処理した蛍光体粒子間で特性のバラ
ツキがない。
(Effects) By processing in a plasma containing oxygen gas as in the present invention, the lifetime can be significantly improved without reducing brightness. Furthermore, there is no variation in characteristics among the treated phosphor particles.

手続補正帯(自発) 平4 凭 予2日Procedure correction band (voluntary) Heisei April 2nd

Claims (1)

【特許請求の範囲】[Claims] 1.母体原料に付活剤と供付活剤とよりなる活性剤を添
加し焼成した硫化亜鉛型のエレクトロルミネッセンス螢
光体を、酸素ガスを必須成分とするプラズマ中で処理す
ることを特徴とするエレクトロルミネッセンス螢光体の
製造法。
1. An electroluminescent phosphor characterized by processing a zinc sulfide type electroluminescent phosphor obtained by adding an activator and a donor activator to a base material and firing it in a plasma containing oxygen gas as an essential component. Method for manufacturing luminescent phosphors.
JP2232058A 1990-08-31 1990-08-31 Manufacture of electroluminescence phosphor Pending JPH04112489A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2232058A JPH04112489A (en) 1990-08-31 1990-08-31 Manufacture of electroluminescence phosphor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2232058A JPH04112489A (en) 1990-08-31 1990-08-31 Manufacture of electroluminescence phosphor

Publications (1)

Publication Number Publication Date
JPH04112489A true JPH04112489A (en) 1992-04-14

Family

ID=16933318

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2232058A Pending JPH04112489A (en) 1990-08-31 1990-08-31 Manufacture of electroluminescence phosphor

Country Status (1)

Country Link
JP (1) JPH04112489A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100326442B1 (en) * 1994-12-09 2002-07-02 김순택 Fluorescent slurry composition
RU2672708C2 (en) * 2013-12-19 2018-11-19 Бундесдруккерай Гмбх Zinc-sulphide phosphor having photo- and electroluminescent properties, process for producing same, and security document, security feature and method for detecting same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100326442B1 (en) * 1994-12-09 2002-07-02 김순택 Fluorescent slurry composition
RU2672708C2 (en) * 2013-12-19 2018-11-19 Бундесдруккерай Гмбх Zinc-sulphide phosphor having photo- and electroluminescent properties, process for producing same, and security document, security feature and method for detecting same

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