JPH0410952U - - Google Patents
Info
- Publication number
- JPH0410952U JPH0410952U JP5010290U JP5010290U JPH0410952U JP H0410952 U JPH0410952 U JP H0410952U JP 5010290 U JP5010290 U JP 5010290U JP 5010290 U JP5010290 U JP 5010290U JP H0410952 U JPH0410952 U JP H0410952U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- belt
- support base
- inclined portion
- holding mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図はこの考案の実施例を示す部分断面図、
第２図は同平面図、第３図はベルトの正面図、第
４図はイオン注入装置の回転盤の平面図、第５図
は同正面図、第６図は従来構成の部分断面図であ
る。
１……盤、３……保持部、４……ウエーハ、６
……支持台、１０……ベルト、１４……傾斜部。
FIG. 1 is a partial sectional view showing an embodiment of this invention.
Fig. 2 is a plan view of the same, Fig. 3 is a front view of the belt, Fig. 4 is a plan view of the rotary disk of the ion implanter, Fig. 5 is a front view of the same, and Fig. 6 is a partial sectional view of the conventional configuration. be. 1... Board, 3... Holding section, 4... Wafer, 6
... Support stand, 10 ... Belt, 14 ... Inclined part.
Claims (1)
する複数の保持部を設けてなるウエーハ保持機構
において、 前記保持部に、ウエーハを表面に載せる支持台
と、前記支持台の外周を添纏するように配置され
てあり、両端に傾斜部が設けてあるベルトと、前
記支持台の表面に対して傾斜している軸を中心と
して回転自在の回転ローラとを具備せしめ、前記
回転ローラに、前記ベルトの傾斜部を巻取自在と
してなる ウエーハ保持機構。[Claims for Utility Model Registration] A wafer holding mechanism in which a rotating disk is provided with a plurality of holding parts that hold a wafer along the circumferential direction, the holding part having a support base on which the wafer is placed; The belt is disposed so as to wrap around the outer periphery of the support base, and includes a belt provided with an inclined portion at both ends, and a rotary roller rotatable about an axis inclined with respect to the surface of the support base. and a wafer holding mechanism that allows the rotating roller to freely wind up the inclined portion of the belt.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5010290U JPH0410952U (en) | 1990-05-14 | 1990-05-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5010290U JPH0410952U (en) | 1990-05-14 | 1990-05-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0410952U true JPH0410952U (en) | 1992-01-29 |
Family
ID=31568364
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5010290U Pending JPH0410952U (en) | 1990-05-14 | 1990-05-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0410952U (en) |
-
1990
- 1990-05-14 JP JP5010290U patent/JPH0410952U/ja active Pending