JPH0396145U - - Google Patents
Info
- Publication number
- JPH0396145U JPH0396145U JP532490U JP532490U JPH0396145U JP H0396145 U JPH0396145 U JP H0396145U JP 532490 U JP532490 U JP 532490U JP 532490 U JP532490 U JP 532490U JP H0396145 U JPH0396145 U JP H0396145U
- Authority
- JP
- Japan
- Prior art keywords
- rotation axis
- radius
- chuck
- wafer
- rotation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
Description
第１図は本考案の一実施例のチヤツクの平面図
、第２図は切断面線−から見た断面図、第３
図はスピンナーの斜視図、第４図は従来のチヤツ
クを説明するための図である。
２……チヤツク、１８……回転軸、２４……ウ
エハ、３２……長径周縁部、３４……凹縁部。
Fig. 1 is a plan view of a chuck according to an embodiment of the present invention, Fig. 2 is a sectional view taken from the cutting plane line, and Fig. 3
The figure is a perspective view of a spinner, and FIG. 4 is a diagram for explaining a conventional chuck. 2...Chuck, 18...Rotation shaft, 24...Wafer, 32...Longer diameter peripheral portion, 34...Concave edge.
Claims (1)
圧で固定し、鉛直な回転軸回りに回転可能なチヤ
ツクであつて、 ウエハの半径とほぼ同一半径で回転軸から水平
方向外方に延び、回転軸回りに所定の角度の範囲
にわたる円弧状の長径周縁部と、 ウエハの半径より回転軸方向内方に後退し、回
転軸回りに所定の角度の範囲にわたる凹縁部と を回転軸回りに交互に形成したことを特徴とする
チヤツク。[Scope of Claim for Utility Model Registration] A chuck on which a disk-shaped wafer is placed horizontally, fixed under negative pressure, and rotatable around a vertical axis of rotation, with a radius that is approximately the same as the radius of the wafer. an arcuate long-diameter periphery extending horizontally outward from the rotation axis and spanning a predetermined angular range around the rotation axis; A chuck characterized in that concave edges extending over the entire length are alternately formed around the rotation axis.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990005324U JPH0724187Y2 (en) | 1990-01-23 | 1990-01-23 | Chuck |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990005324U JPH0724187Y2 (en) | 1990-01-23 | 1990-01-23 | Chuck |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0396145U true JPH0396145U (en) | 1991-10-01 |
| JPH0724187Y2 JPH0724187Y2 (en) | 1995-06-05 |
Family
ID=31509039
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990005324U Expired - Fee Related JPH0724187Y2 (en) | 1990-01-23 | 1990-01-23 | Chuck |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0724187Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101375144B1 (en) * | 2013-02-22 | 2014-03-17 | 호서대학교 산학협력단 | Wafer-holder apparatus for spin coater |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0235636U (en) * | 1988-08-31 | 1990-03-07 |
-
1990
- 1990-01-23 JP JP1990005324U patent/JPH0724187Y2/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0235636U (en) * | 1988-08-31 | 1990-03-07 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101375144B1 (en) * | 2013-02-22 | 2014-03-17 | 호서대학교 산학협력단 | Wafer-holder apparatus for spin coater |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0724187Y2 (en) | 1995-06-05 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |