JPH04109313U - Laser interferometer measurement object adjustment table - Google Patents

Abstract

(57) [Summary] [Purpose] To improve operability and make the system more compact for testing test objects of the same size one after another. [Structure] A standing wall (6) that rises along the pillar (2) is provided on the base (5) that is attached to the stand (1). A pedestal (7) is provided so as to be movable up and down along the protruding vertical wall, and a slide pedestal (19) that slides from side to side is provided on the upper surface of the pedestal (7). X on this slide stand (19)
An XY stage (8) is attached for adjustment in each direction of the axis and the Y axis.

Description

[Detailed explanation of the idea]

0001

[Industrial application field]

This invention relates to a measuring object adjustment table for a laser interferometer.

0002

[Conventional technology]

In the conventional DUT adjustment stand, the interferometer body is attached to a support that rises from the stand. In a laser interferometer that emits the laser beam of the interferometer downward, as shown in Figure 8, An XY stage 100 for adjustment in each direction of the X axis and Y axis is installed on a base 101. A vertical wall 102 is provided on the XY stage 100 for adjustment in the Z-axis direction (vertical direction). A mounting table 103 for mounting an object to be measured was provided on this vertical wall 102.

0003

[Problem that the idea aims to solve]

Conventional workpiece adjustment tables align the workpiece in the direction of its optical axis when replacing the workpiece. As the object was being moved, the object to be measured and the reference lens may come into contact and cause one or both of them to It could get damaged. Therefore, this idea was developed to prevent contact with the reference lens when replacing the measured object. Both improve operability when measuring objects to be measured, especially when measuring the same type of object next time. A laser interferometer with improved operability and compactness for various measurements The purpose is to provide a fixed object adjustment table.

0004

[Means to solve the problem]

To achieve the above objectives, this invention uses at least a laser and a laser light guide. The interferometer body equipped with the optical system is attached to a support that rises from the stand, and the laser guide A laser with a mounting table for placing the object to be measured in the laser beam emitted from the optical optical system. A measurement object adjustment stand for a laser interferometer, which is mounted on a base that is attached to the stand. A standing wall rising along the pillar is provided, and the laser light guiding optical system is connected from the standing wall. A pedestal is provided that protrudes beyond the optical axis and is movable up and down along the vertical wall, and the top surface of the pedestal is A slide stand that slides left and right is provided on the slide stand, and each of the X-axis and Y-axis It is equipped with an XY stage for directional adjustment.

[0005]

[Effect]

In this idea, if you first adjust the inclination of the base and attach it to the stand, The optical axis of the laser guiding optical system is parallel to the vertical wall, and in this state, place the base on the stand. Fixed to. Movement in the Z-axis direction is performed by moving the pedestal attached to the vertical wall up and down, and Movement in each direction of the Y axis is performed by an XY stage. Next, place the object to be measured on the XY stay. Place the measured object on the mounting table (or the top surface of the 2-axis adjustment table) on the camera, and place it on the focal point of the reference lens. Bring the center of things. This allows the reflected light from the reference surface of the reference lens and the measured Interference fringes occur due to reflected light from the surface to be measured of the object. The diagram shows this interference pattern. Once the object is confirmed through the monitor, move the object to be measured using the Z stage that adjusts the vertical direction. Move it in the direction of the optical axis. To prevent small interference fringes from escaping the screen, While adjusting the stage, if the interference fringes start to appear large again, adjust the coarse movement of the Z stage. Lock the fixing knob. Next, adjust the knobs for fine adjustment of the Z stage and the XY stage. Make the interference fringes easier to see with the stage adjustment knob. Measure the same type of object and If the object to be measured is close to the reference lens, move the slide table in the X direction (left and right). direction) to move the object to be measured out of the optical axis of the reference lens. The object to be measured After confirming that the object is at a sufficient distance from the reference lens, move the object to the next object. Replace it with the object to be measured. After replacing, move the slide stand in the opposite direction and adjust the light from the reference lens. Position the next object to be measured on the axis.

[0006]

【Example】

A preferred embodiment of this invention will be described below with reference to the drawings. In Figure 1, at least a laser and a laser Attach the interferometer body 3 (see Figure 2) equipped with a light guide optical system, and The emitted laser light is guided downward through a laser light guide optical system. Stand 1 top A standing wall 6 is provided along the pillar 2 and perpendicular to the base 5, which is attached to the base 5. Ru. A pedestal 7 is provided on this standing wall 6 and extends parallel to the base 5 so as to be movable up and down. This pedestal A two-axis adjustment table 9 is attached to the XY stage 8 provided in the XY stage 7 for adjustment in each direction of the will be established. In some cases, the upper surface 9A of this two-axis adjustment table 9 also serves as the mounting surface for the object to be measured S. Yes (see Figure 6), if the object to be measured is small, place the mounting table 4 on the upper surface 9A. do. In this case, the mounting table 4 is positioned in the optical path of the laser light guiding optical system. do. Reference numeral 10 indicates an adjustment knob of the XY stage 8, and reference numeral 11 indicates a two-axis adjustment table 9. The adjustment knobs are shown respectively. Moreover, the code 3A is on the optical axis of the laser light guiding optical system. A reference lens provided at the laser beam exit of the interferometer main body 3 is shown. pedestal 7 A moving block 13 is attached via a rod 12 to the base end 7A attached to the vertical wall 6. There is. A knob 14 for fine adjustment is provided at the lower end of the rod 12. moving block The lock 13 is also attached to the vertical wall 6 so that it can move up and down, and is roughly adjusted by a fixing knob 15. Adjustments can be made. By releasing this fixing knob 15, Make rough adjustments to the pedestal 7 and fix it in a predetermined position, then use the adjustment knob 14 to finely adjust the pedestal 7. I do. Further, the vertical wall 6 is provided with a stopper 16 for positioning. In this example , to prevent the pedestal 7 from rising too high and damaging the reference lens 3A. The rising height is regulated by this stopper 16. The vertical movement of the interferometer body 3 is mounted on the pillar 2. An adjustment knob 17 is provided for this purpose. A balancer is installed between the standing wall 6 and the pedestal 7. -18 is provided to prevent the pedestal 7 from falling suddenly. This balun The steel plate 18B is made of a thin steel plate 18B. It is wound into a coil, and has a similar structure to a steel tape measure. Before The XY stage 8 mentioned above is attached to a slide stand 19, and the slide stand 19 is The ride is designed to be locked by a lock knob 20.

[0007] FIG. 3 is a partial sectional view seen from the front, and fine adjustment is made to the lower end of the rod 12 mentioned above. The upper half 12A of this rod 12 is threaded. , the threaded portion of this upper half 12A is screwed into the sleeve 24. moving block Since the lock 13 is fixed to the fixing knob 15, the lock 13 is fixed to the fixing knob 15. The rotation pushes the pedestal 7 downward. This causes the 2-axis adjustment table 9 to be lowered downward. The wavefront transmitted through the reference lens 3A and the object to be measured S placed on the mounting surface 9A. Match the wavefront of the reflected light from the surface to be measured. As a result, the standard of the standard lens 3A is Interference fringes caused by the light reflected from the surface and the light reflected from the surface to be measured can be observed. Also, the reception A cushioning leg 7B made of rubber or the like is provided on the lower surface of the table 7. The slide table 19 is shown in Fig. 3. As shown in ~5, it is regulated by the platform part 7C of the pedestal 7 so as not to shake in the vertical direction, It is attached so as to slide along the longitudinal direction of the platform 7C.

[0008] FIG. 6 is a side view, in which a spherical bush 21 is provided at one of the four corners of the base 5. The inclination of the base 5 can be adjusted using the spherical bush 21 as a fulcrum. The sea urchin is turning. Three locations other than the location where the spherical bush 21 is provided are for tilt adjustment. Screws 22 are provided at the four outer corners of the spherical bushing 21 and the tilt adjustment screws 22. A fixing screw 23 is provided for fixing the base 5 to the stand 1 after adjustment. To adjust the inclination of the base 5, rotate the three screws 22 and remove it from the stand 1. Finely adjust the height of each. At this time, the laser interferometer is activated to emit laser light. Find a position parallel to the standing wall 6. After finding such a position, tighten the base with screw 23. Fix the table 5 to the stand 1. Here, the screw 22 and the spherical bush 21 are adjusted. constitute means. Adjustment of the inclination of the base 5 is provided in the interferometer body 3, and the collimator so that the optical axis of the laser light guiding optical system consisting of a mirror lens etc. and the vertical wall 6 are parallel to each other. After adjusting in this way, the base 5 is fixed to the stand 1 with the fixing screws 23.

[0009] The top surface (mounting surface) 9A of the two-axis adjustment table (mounting table) 9 is coaxial with the laser light guiding optical system. The adjustment method for adjusting the reference lens 3A so that it is perpendicular to the optical axis shown in Before installing 3A, the parallel light beam is irradiated from the interferometer body 3, so this optical axis and the Z stage of the object adjustment table (vertical movement by moving block 13 and knob 14) (fine adjustment) so that the movement of the object to be measured is parallel. The procedure and First, make sure that neither the reference plate nor the reference lens 3A is attached to the interferometer body 3. Make it. The light emitted from the interferometer body 3 hits the top surface 9A. Darken the room to the extent that you can clearly see the periphery of the light beam. interferometer Rotate the light intensity adjustment knob on the main body 3 with your finger to adjust the laser beam emitted from the interferometer main body 3. make it the brightest. After that, on the top surface 9A of the two-axis adjustment table (mounting table) 9, Place a piece of paper with a pattern of crosses drawn inside the circle. Next, Z stage Coarsely move the 2-axis adjustment table (mounting table) 9 to the bottom, and adjust the diameter of the laser beam to φ6. Match the outer circumference of No. 4 with the circular pattern of the board paper (move the paper). Z-s The stage is roughly moved to move the two-axis adjustment table (mounting table) 9 to the top. At this time If the outer circumference of the laser beam and the circular pattern of the paperboard are misaligned, Adjust using the adjusting means of the base 5 so that the values match. Move the Z stage to the top and Coarsely move it to the bottom and make sure that the outer circumference of the laser beam and the circular pattern above match in both positions. Repeat the above operations until the Next, the base 5 is fixed to the stand 1. That is, The screw 22 and the screw 23 have a relationship of a push screw and a pull screw, and force is applied to each other. This means that the base 5 and stand 1 are firmly fixed. There is a screw 23 for fixing. Gently turn the fixing screw 23 until it exerts sufficient force, that is, until the fixing screw 23 is just before pulling the base 5. Continue to turn each fixing screw 23 within the specified range. Rotate the fixing screw 23. When the force starts to apply, move the Z stage to the top and Alternately tighten the fixing screws 23 one by one while observing the circular pattern. Tighten one by one. If you tighten only one screw 23 strongly at a time, the base 5 will tilt. Since it will be stored away, tighten one screw 2 while making sure that the above luminous flux and circular pattern do not deviate. Tighten 3 about 1/10 turn at a time, and rotate it many times in order until it is fixed evenly. make it possible to do so. In this way, the vertical wall 6 and the optical axis of the laser light guide optical system are made parallel to each other. Become.

0010 When using the mounting table 4 shown in Fig. 1, the object to be measured is small, such as a small-diameter lens. In this case, such a small diameter lens is placed on the mounting table 4, and the reference lens 3 is placed on the mounting table 4. Bring the center of the object to be measured to the focal point of A. Reflected light from reference lens 3A and measured object Once the interference fringes due to the reflected light from the fixed surface are confirmed, move the object to be measured on the Z stage along the optical axis. move in the direction. XY stage 8 to prevent small interference fringes from escaping the screen If the interference fringes start to appear large again, turn the fixing knob for coarse adjustment. Lock 15. Z-axis fine adjustment knob 14 and XY stage 8 adjustment knob 10 to make the interference fringes easier to see. When measuring the same type of object to be measured, The above operations can be easily accomplished by simply replacing the object to be measured without changing its position. can. If the object to be measured is close to the reference lens 3A, use the slide stand 19. However, when the object to be measured is inside the reference lens 3A, the object to be measured and the reference lens 3A are In order to prevent one or both from coming into contact and being damaged, Use the stopper 16.

[0011] FIG. 7 shows the location of the balancer 18, and the roller 18A provided at the base end 7A has a thin A steel plate 18B is wrapped around it to prevent the pedestal 7 from falling suddenly and to ensure work safety. It has become so. The pedestal 7 appears suspended by a steel plate 18B.

0012

[Effect of the idea]

As explained above, according to this invention, the slider attached to the pedestal can slide left and right. Since the XY stage is attached to the slide table for By moving the lens stand, the object to be measured and the reference lens are prevented from coming into contact with each other. Things can be exchanged safely. In addition, the object to be measured can be moved by sliding the slide table. If you replace the This improves operability.

[Brief explanation of drawings]

FIG. 1 is a perspective view showing a preferred embodiment of this invention.

FIG. 2 is a perspective view showing the interferometer main body.

FIG. 3 is a partially sectional front view.

FIG. 4 is a partially sectional plan view of the XY stage excluding the portion above.

5 is a cross-sectional view taken along the line A-A' in FIG. 4 of the slide base attachment location.

FIG. 6 is a partially sectional side view.

FIG. 7 is a sectional view showing the balancer.

FIG. 8 is a perspective view showing a conventional object adjustment table.

[Explanation of symbols]

1 stand 2 pillars 3 Interferometer body 4 Mounting table 5 Base 6 Standing wall 7 cradle 8 XY stage 9 2-axis adjustment stand (mounting stand) 9A Top surface of 2-axis adjustment table (placement surface) 19 Slide stand

Claims (1)

[Scope of utility model registration request] 1. An interferometer body including at least a laser and a laser light guide optical system is attached to a support that rises from a stand, and a support for placing an object to be measured is placed in the laser beam emitted from the laser light guide optical system. A stand for adjusting an object to be measured for a laser interferometer, which is equipped with a stand, wherein a standing wall rising along the support is provided on the base mounted on the stand, and the optical axis of the laser light guiding optical system is directed from the standing wall. A pedestal is provided that protrudes beyond the wall and is movable up and down along the vertical wall, a slide pedestal that slides left and right is provided on the top surface of the pedestal, and adjustment in each direction of the X-axis and Y-axis is made on the slide pedestal. A laser interferometer measurement object adjustment table that is equipped with a stage.