JPH0410546Y2 - - Google Patents
Info
- Publication number
- JPH0410546Y2 JPH0410546Y2 JP16542987U JP16542987U JPH0410546Y2 JP H0410546 Y2 JPH0410546 Y2 JP H0410546Y2 JP 16542987 U JP16542987 U JP 16542987U JP 16542987 U JP16542987 U JP 16542987U JP H0410546 Y2 JPH0410546 Y2 JP H0410546Y2
- Authority
- JP
- Japan
- Prior art keywords
- nitrogen
- gas
- liquid
- column
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 90
- 229910052757 nitrogen Inorganic materials 0.000 claims description 37
- 239000007788 liquid Substances 0.000 claims description 23
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 19
- 239000007789 gas Substances 0.000 claims description 16
- 238000004519 manufacturing process Methods 0.000 claims description 7
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 6
- 238000009833 condensation Methods 0.000 claims description 5
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 3
- 239000001569 carbon dioxide Substances 0.000 claims description 3
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims description 3
- 238000010926 purge Methods 0.000 claims description 2
- 238000010992 reflux Methods 0.000 claims 1
- 238000009835 boiling Methods 0.000 description 14
- 230000005494 condensation Effects 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 238000005219 brazing Methods 0.000 description 3
- 239000001307 helium Substances 0.000 description 3
- 229910052734 helium Inorganic materials 0.000 description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
- 229910052754 neon Inorganic materials 0.000 description 3
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 238000009834 vaporization Methods 0.000 description 3
- 230000008016 vaporization Effects 0.000 description 3
- 239000002912 waste gas Substances 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000004821 distillation Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Landscapes
- Separation By Low-Temperature Treatments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16542987U JPH0410546Y2 (enrdf_load_stackoverflow) | 1987-10-30 | 1987-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16542987U JPH0410546Y2 (enrdf_load_stackoverflow) | 1987-10-30 | 1987-10-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0170087U JPH0170087U (enrdf_load_stackoverflow) | 1989-05-10 |
| JPH0410546Y2 true JPH0410546Y2 (enrdf_load_stackoverflow) | 1992-03-16 |
Family
ID=31451906
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16542987U Expired JPH0410546Y2 (enrdf_load_stackoverflow) | 1987-10-30 | 1987-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0410546Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5170630A (en) * | 1991-06-24 | 1992-12-15 | The Boc Group, Inc. | Process and apparatus for producing nitrogen of ultra-high purity |
-
1987
- 1987-10-30 JP JP16542987U patent/JPH0410546Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0170087U (enrdf_load_stackoverflow) | 1989-05-10 |
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