JPH0410401Y2 - - Google Patents

Info

Publication number
JPH0410401Y2
JPH0410401Y2 JP3482285U JP3482285U JPH0410401Y2 JP H0410401 Y2 JPH0410401 Y2 JP H0410401Y2 JP 3482285 U JP3482285 U JP 3482285U JP 3482285 U JP3482285 U JP 3482285U JP H0410401 Y2 JPH0410401 Y2 JP H0410401Y2
Authority
JP
Japan
Prior art keywords
pressure
processing container
exhaust pipe
vacuum processing
exhaust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3482285U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61150501U (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3482285U priority Critical patent/JPH0410401Y2/ja
Publication of JPS61150501U publication Critical patent/JPS61150501U/ja
Application granted granted Critical
Publication of JPH0410401Y2 publication Critical patent/JPH0410401Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Supply Devices, Intensifiers, Converters, And Telemotors (AREA)
JP3482285U 1985-03-12 1985-03-12 Expired JPH0410401Y2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3482285U JPH0410401Y2 (ko) 1985-03-12 1985-03-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3482285U JPH0410401Y2 (ko) 1985-03-12 1985-03-12

Publications (2)

Publication Number Publication Date
JPS61150501U JPS61150501U (ko) 1986-09-17
JPH0410401Y2 true JPH0410401Y2 (ko) 1992-03-16

Family

ID=30538551

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3482285U Expired JPH0410401Y2 (ko) 1985-03-12 1985-03-12

Country Status (1)

Country Link
JP (1) JPH0410401Y2 (ko)

Also Published As

Publication number Publication date
JPS61150501U (ko) 1986-09-17

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