JPH0410333A - Cathode structural body of magnetron - Google Patents
Cathode structural body of magnetronInfo
- Publication number
- JPH0410333A JPH0410333A JP11004990A JP11004990A JPH0410333A JP H0410333 A JPH0410333 A JP H0410333A JP 11004990 A JP11004990 A JP 11004990A JP 11004990 A JP11004990 A JP 11004990A JP H0410333 A JPH0410333 A JP H0410333A
- Authority
- JP
- Japan
- Prior art keywords
- stem
- lead
- choke
- cathode
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012212 insulator Substances 0.000 claims abstract description 21
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims abstract description 10
- 238000007789 sealing Methods 0.000 claims abstract description 5
- 239000000463 material Substances 0.000 claims description 12
- 238000010438 heat treatment Methods 0.000 claims description 4
- 229910000679 solder Inorganic materials 0.000 abstract description 9
- 229910052751 metal Inorganic materials 0.000 abstract description 6
- 239000002184 metal Substances 0.000 abstract description 6
- 230000008646 thermal stress Effects 0.000 abstract description 6
- 238000002844 melting Methods 0.000 abstract description 3
- 230000008018 melting Effects 0.000 abstract description 3
- 238000000034 method Methods 0.000 abstract description 3
- 230000035882 stress Effects 0.000 abstract description 3
- 238000005476 soldering Methods 0.000 abstract description 2
- 230000000149 penetrating effect Effects 0.000 abstract 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 10
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 6
- 239000000919 ceramic Substances 0.000 description 5
- 229910052742 iron Inorganic materials 0.000 description 5
- 229910052750 molybdenum Inorganic materials 0.000 description 5
- 239000011733 molybdenum Substances 0.000 description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 238000005336 cracking Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 101150061972 zur gene Proteins 0.000 description 1
Landscapes
- Microwave Tubes (AREA)
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野コ
本発明は、陰極のリード線の材料として管内側には融点
の高いモリブデンなどを管外側には安価な鉄などを用い
、陰極ステムM!、縁体の管内側の面をメタライズして
、此処に上記リード線の異種材料部分の中継用端子板を
ろう付は固着させ、更に陰極ステムの管内側に、マイク
ロ波の基本波の漏洩伝播を抑制するため、深さが1/4
波長の有底円筒状ステムチョークを、上記ステム絶縁体
の端子板固着面に熱応力がかからないように取付けたマ
グネトロン陰極構体に関する。[Detailed Description of the Invention] [Industrial Field of Application] The present invention uses materials such as molybdenum with a high melting point for the inside of the tube and inexpensive iron for the outside of the tube as materials for the cathode lead wire, and the cathode stem M! , metallize the inside surface of the tube of the edge body, and braze and secure the relay terminal plate of the dissimilar material part of the lead wire here, and furthermore, prevent the leakage propagation of the microwave fundamental wave on the inside of the tube of the cathode stem. The depth is 1/4 to suppress
The present invention relates to a magnetron cathode assembly in which a bottomed cylindrical stem choke of wavelength is attached so as not to apply thermal stress to the terminal plate fixing surface of the stem insulator.
[従来の技術]
近年、マグネトロンを用いてマイクロ波を発振させ、そ
の電力で食品を誘電加熱する電子レンジが広く用いられ
ているが、家庭用電子機器の場合、単に性能良好である
だけでなく、価格を極力低廉にすることが強く求められ
る。そのため、マグネトロンの陰極を支持し、且つ加熱
電流を通電するリード線を、当初は全部モリブデン線で
作っていたが、現在は高温となる管内真空側にだけモリ
ブデンを用い、管外大気側には安価な鉄などの線または
パイプを用い、これら異種の材料のリードを、陰極ステ
ム絶縁体の管内真空側の面にメタライズ処理を施し、此
処にろう付は固着した中継用端子板またはフランジ付き
パイプを介して接続することが行われている。[Prior Art] In recent years, microwave ovens have been widely used that use a magnetron to oscillate microwaves and use the power to dielectrically heat food, but in the case of household electronics, they not only have good performance but There is a strong need to keep the price as low as possible. For this reason, the lead wires that support the magnetron's cathode and conduct heating current were initially made entirely of molybdenum wire, but now molybdenum is used only on the vacuum side inside the tube, where the temperature is high, and on the atmosphere side outside the tube. Using inexpensive wires or pipes such as iron, these leads made of different materials are metallized on the vacuum side of the tube inside the cathode stem insulator, and the relay terminal board or flanged pipe is soldered here. It is being done to connect via.
第2図は異種材料のリードを中継用端子板を介して接続
している例を示す図で、図中、1はモリブデン等で作ら
れている管内リード、2は中継用端子板、3は鉄線で作
られた外部導出用リード、5はアルミナセラミックス等
よりなる陰極ステム絶縁体、6は上部が図示してない陽
極部に接続され下端はステム絶縁体5の周縁部に硬ろう
で突き合わせ接合されている金属製の封止円筒の断面を
示す。端子板2はステム絶縁体5の管内真空側の面のメ
タライズした個所に硬ろう付けされている。Figure 2 is a diagram showing an example in which leads made of different materials are connected via a relay terminal board. In the figure, 1 is an in-pipe lead made of molybdenum, etc., 2 is a relay terminal board, and 3 is a relay terminal board. An external lead made of iron wire, 5 a cathode stem insulator made of alumina ceramics, etc., 6 an upper part connected to an anode part (not shown), and a lower end butt-jointed to the periphery of the stem insulator 5 with hard solder. The cross-section of the metal sealed cylinder shown in Fig. The terminal plate 2 is hard-soldered to a metallized portion of the stem insulator 5 on the vacuum side of the tube.
但し、中継用端子板2は通常セラミックス製ステム絶縁
体5の低い熱膨張係数に合わせるようにいわゆる封着用
金属ファー二(鉄ニツケル合金)で製作するが、僅かで
はあるが熱膨張係数の相違は存在するから、ステム絶縁
体5の中継端子板2との接合面(ここをメタライズする
)の面積は必要最低限に止め、メタライズしない個所に
は溝を彫って低くしておく。なお、5aは沿面距離を長
くして耐電圧特性を向上させるためにステムII@縁体
5の管内真空側の面に刻設した上記の溝である5また、
多くの種類の電子機器の使用が普及するのに伴って、マ
グネトロンから、其の陰極に加熱電力を供給するリード
線を通してマイクロ波が電源側に漏洩伝播して来ること
に対する法律的な規制が次第に強められており、現在で
は、陰極ステムの内側にマイクロ波の基本波を抑制する
ため、深さ1/4波長の有底円筒状のステムチョークを
設けることが行われるようになった。However, the relay terminal board 2 is usually made of so-called sealing metal furni (iron-nickel alloy) to match the low coefficient of thermal expansion of the ceramic stem insulator 5, but there is a slight difference in the coefficient of thermal expansion. Therefore, the area of the joint surface of the stem insulator 5 with the relay terminal plate 2 (which is metalized) is kept to the minimum necessary, and grooves are carved in the areas not to be metalized to make it lower. In addition, 5a is the above-mentioned groove carved in the surface of the stem II @ edge body 5 on the vacuum side in the tube in order to increase the creepage distance and improve the withstand voltage characteristics.
As the use of many types of electronic devices has become widespread, legal restrictions have gradually been put in place to prevent microwaves from leaking and propagating from the magnetron to the power source through the lead wire that supplies heating power to the magnetron's cathode. Currently, in order to suppress the fundamental wave of microwaves, a cylindrical stem choke with a bottom and a depth of 1/4 wavelength is provided inside the cathode stem.
ステムチョークを用いた従来のマグネトロン陰極構体の
構造例は特開昭63−216243号公報に開示されて
いるが、第3図に示すように、ステムチョーク4は陰極
に向かって開口した有底円筒状に形成され、この底面に
電気的に接続されて貫通する側のり−ド1の貫通部の周
囲のステムチョーク4の底面に更にカップ状突呂部7を
形成させ、このカップ状突呂部7の底面を、上記異種リ
ードを接続するため、ステムM!、S体5の貫通孔に嵌
合され、この貫通孔の周囲のステム絶縁体の真空倒の面
に其のフランジが真空気密にろう付けされているフラン
ジ付きパイプのフランジ面3aに。An example of the structure of a conventional magnetron cathode structure using a stem choke is disclosed in JP-A-63-216243, but as shown in FIG. 3, the stem choke 4 is a cylinder with a bottom that opens toward the cathode. A cup-shaped groove part 7 is further formed on the bottom surface of the stem choke 4 around the penetration part of the side beam 1 which is electrically connected to and penetrates the bottom surface. In order to connect the above-mentioned dissimilar leads to the bottom of the stem M! , to the flange surface 3a of a flanged pipe that is fitted into a through hole of the S body 5 and whose flange is vacuum-tightly brazed to the vacuum-inverted surface of the stem insulator around the through hole.
硬ろうで面付は固着して支持させている。The surface is fixed and supported with hard solder.
なお、第3図において、1はモリブデン等で作られてい
る管内リード、3は鉄パイプで作られている外部導出リ
ード、3aは内部で異種リードが接続され外部がステム
絶縁体に真空気密に硬ろう付けされているフランジ付き
パイプ、4はステムチョーク、5はアルミナセラミック
ス等で作られたステム絶縁体、6は上端は図示してない
陽極部に接続され下端はステム絶縁体周縁部に硬ろうで
突き合わせ接合されている金属製の封止円筒である。In Fig. 3, 1 is an inner pipe lead made of molybdenum, etc., 3 is an external lead made of iron pipe, and 3a is a lead of a different type connected inside, and the outside is vacuum-tightly connected to the stem insulator. 4 is a stem choke, 5 is a stem insulator made of alumina ceramics, etc., the upper end is connected to an anode part (not shown), and the lower end is connected to the peripheral edge of the stem insulator. It is a metal sealed cylinder that is butt-jointed with solder.
第4図は異種リードの接続を端子板で行い、かつステム
チョークを取付けた従来例の要部断面図で、図中、lは
管内リード、2は端子板、3は鉄線で作られた外部導出
リード、4はステムチョークで、ステムチョーク4の底
面の一方のり−トに接続される貫通部の周囲がステム側
へ突出させてあり、ここで端子板2に面ろう付けしであ
る。Figure 4 is a cross-sectional view of the main parts of a conventional example in which different types of leads are connected using a terminal board and a stem choke is attached. The lead-out lead 4 is a stem choke, and the periphery of the through-hole connected to one of the glues on the bottom of the stem choke 4 protrudes toward the stem side, and is surface-brazed to the terminal plate 2 here.
[発明が解決しようとする課題]
しかし、上記ステムチョークの支持法はステムチョーク
を安定に支持するために支持部の面積を大きくするよう
に考えられたものであるが、高温の陰極に面し、かつ並
列共振回路となって大きな電流が流れて高温に加熱され
たステムチョークの熱や熱膨張が、面積の大きい面付は
硬ろう着は部を経て、第3図に示した従来例では異種リ
ード接続用フランジ付き円筒の面積の広いフランジに伝
わり、また第4図に示した従来例ではステムチョークの
熱や熱膨張が中継用端子板に伝わり、熱応力集中により
アルミナセラミックス等よりなるステム絶縁体をクラッ
クさせるという問題が生じた。[Problems to be Solved by the Invention] However, the above method of supporting the stem choke was designed to increase the area of the support part in order to stably support the stem choke, but it , and the heat and thermal expansion of the stem choke, which becomes a parallel resonant circuit and is heated to a high temperature due to the flow of a large current, passes through the hard soldering part of the large-area surface mounting, and in the conventional example shown in Figure 3, The heat and thermal expansion of the stem choke is transmitted to the wide flange of the flanged cylinder for connecting dissimilar leads, and in the conventional example shown in Figure 4, the heat and thermal expansion of the stem choke is transmitted to the relay terminal plate, causing stress concentration on the stem made of alumina ceramics, etc. The problem arose of cracking the insulation.
なお、従来もステム絶縁体に直接ろう付は固着されるフ
ランジ付き円筒や中継端子板は比較的膨張係数の低いフ
ァー二等の鉄−ニッケル合金等で作っていたが、大面積
の材料を用いるステムチョークは安価に作るために鋼板
で作らざるを得ない。Note that in the past, flanged cylinders and relay terminal plates that were directly brazed to the stem insulator were made of iron-nickel alloys such as Fur 2, which had a relatively low coefficient of expansion, but materials with large areas were used. Stem chokes have no choice but to be made from steel plates in order to be made inexpensively.
鋼板製のステムチョークが高温になれば大きく熱膨張す
るので、広い固着部を介して、ステム絶縁体の大きな伸
びはフランジや端子板に直接機械的な力も及ぼすことに
なるのである。When a stem choke made of a steel plate becomes hot, it thermally expands significantly, so the large elongation of the stem insulator directly applies mechanical force to the flange and terminal plate via the wide fixed area.
本発明は上記のように、異種リード接続中継用のフラン
ジ付きパイプや中継端子板が、ステムチョークの影響で
高温になり、またステムチョークの大きな伸びに引っ張
られて、ステム絶縁体のセラミックス表面にクラックが
生ずるような事態を防止できるようにしたマグネトロン
の陰極構体を提供することを目的とする。As described above, the present invention is designed to prevent the flanged pipe and relay terminal board for relaying dissimilar lead connections from becoming hot due to the influence of the stem choke, and being pulled by the large elongation of the stem choke, causing the ceramic surface of the stem insulator to It is an object of the present invention to provide a cathode structure for a magnetron that can prevent the occurrence of cracks.
[課題を解決するための手段] 上記目的を達成するために本発明においては。[Means to solve the problem] In order to achieve the above object, the present invention.
陰極を支持し且つ加熱電流を通電するリード線を介して
陰極を支持する陰極ステム絶縁体の管内真空側の面をメ
タライズして、此処に管内真空側と管外大気側とに夫々
異なる材料を用いたリード線の異種材料部分を夫々別個
所に接続固着させて中継する端子板をろう付けし、陰極
支持と真空気密封止を行わせるようにしたマグネトロン
において、2本のリード線を囲う円筒が陰極に向かって
開口し、其の底面をリード線が貫通する有底円筒状のマ
イクロ波漏洩抑制用のステムチョークを設け、其の底面
に電気的に接続する便のリード線の底面貫通孔にステム
側へ突出するバーリング加工を施し、バーリング部先端
と上記中継端子板を突き合わせ、硬ろう付けしてステム
チョークを支持させるようにした。The surface of the vacuum side inside the tube of the cathode stem insulator that supports the cathode and supports the cathode via the lead wire through which the heating current is applied is metalized, and different materials are applied here to the vacuum side inside the tube and the atmosphere side outside the tube. In a magnetron, the parts of different materials of the lead wires used are connected and fixed in separate locations, and the relay terminal plate is brazed to support the cathode and seal the vacuum. A bottomed cylindrical stem choke for suppressing microwave leakage is provided, which opens toward the cathode, and a lead wire passes through its bottom surface, and a bottom through hole for the stool lead wire is electrically connected to the bottom surface. A burring process was applied to the burring part to protrude toward the stem side, and the tip of the burring part and the above-mentioned relay terminal plate were butted together and hard soldered to support the stem choke.
[作用]
薄いバーリング部先端が突き合わせ接合されているだけ
であるから、中継端子板はステムチョークから熱応力を
受けることはない。また、ステムチョークが陰極リード
と接続されている場合は、端子板への熱応力の影響は殆
ど無視できる程度となる。なお、異種リードを中継端子
板を用いて接続する方が、フランジ付きパイプの内部で
接続するよりも作業が確実で容易に行える。[Function] Since the tips of the thin burring portions are only butt-jointed, the relay terminal board is not subjected to thermal stress from the stem choke. Further, when the stem choke is connected to the cathode lead, the influence of thermal stress on the terminal board is almost negligible. Note that connecting different types of leads using a relay terminal board is more reliable and easier than connecting them inside a flanged pipe.
[実施例コ
第1図(a)は本発明一実施例の要部の縦断面図、第1
図(b)は第1図(a)中の○−O″線断面図で、であ
る。陰極フィラメントを支持するモリブデン等の高融点
金属製の管内リード1は、ステム絶縁体5の管内真空側
の面にメタライズした個所に硬ろう付けされた端子板2
を介して鉄で作られた外部導出リード3に中継接続され
、同時に此処で管内が真空気密に封止されている。一方
、リード1を伝って2450MHz帯の基本波が漏洩す
るのを抑制するためのステムチョーク4は管内リードl
の片方だけに接続することになるが、この接続を行うた
めに、ステムチョ〜り4の底面を上記リード1が貫通す
る孔にステム側へ突出するように0.3〜0.5mmの
バーリング部4aを設け、その先端部を端子板2と突き
合わせ接合させている。[Embodiment Fig. 1(a) is a vertical sectional view of the main part of an embodiment of the present invention.
Figure (b) is a cross-sectional view taken along the line ○-O'' in Figure 1 (a).The tube lead 1 made of a high melting point metal such as molybdenum that supports the cathode filament is connected to the tube inside the stem insulator 5. Terminal board 2 hard-soldered to the metalized part on the side surface
It is relay-connected to the external lead-out lead 3 made of iron through the pipe, and at the same time, the inside of the pipe is vacuum-tightly sealed here. On the other hand, the stem choke 4 for suppressing the leakage of the fundamental wave in the 2450 MHz band through the lead 1 is connected to the pipe lead l.
In order to make this connection, insert a burring part of 0.3 to 0.5 mm into the hole through which the lead 1 passes through the bottom of the stem choke 4 so that it protrudes toward the stem side. 4a is provided, and its tip portion is butted and joined to the terminal plate 2.
接合手段は、銀ろう接続により、突き合わせ部で接合さ
れるが、バーリング部4aの内径とリード1の径を軽く
嵌合させる程度にしておくと、銀ろうが融ける際、毛細
管現象によりリードとバーリング内径面の間に銀ろうが
溜り、リード1とステムチョーク4が電気的に接続され
ることになる。The joining means is a silver solder connection at the butt portion, but if the inner diameter of the burring part 4a and the diameter of the lead 1 are made to fit lightly, when the silver solder melts, the lead and the burring will separate due to capillary action. Silver solder accumulates between the inner diameter surfaces, and the lead 1 and stem choke 4 are electrically connected.
[発明の効果]
以上説明したように本発明によれば、ステムチョークは
端子板に対し突き合わせ接合であること、及び、ステム
チョークのバーリング部とリードが銀ろう接続されるこ
とから、ステムチョークの熱応力が端子板およびステム
M縁体との封着部に加わるのを軽減できるので、熱応力
による封着部の応力破壊を防止することが出来る。[Effects of the Invention] As explained above, according to the present invention, the stem choke is butt-jointed to the terminal board, and the burring part of the stem choke and the lead are connected with silver solder. Since thermal stress applied to the sealed portion between the terminal plate and the edge of the stem M can be reduced, it is possible to prevent stress failure of the sealed portion due to thermal stress.
第1図(a)は本発明一実施例の要部の縦断面図、第1
図(b)は第1図(a)中の0−o′線断面図、第2図
は異種材料のリードを中継用端子板を介して接続してい
る従来例を示す図、第3図は異種材料のリードをフラン
ジ付きパイプの内部で接続し且つステムチョークを取付
けた従来例を示す図、第4図は異種リードの接続を中継
用端子板で行い旦つステムチョークを取付けた従来例の
要部断面図である。
1・・・管内リード、 2・・・端子板、 3・・・外
部導圧リード、 3a・・・フランジ付きパイプ、
4・・・ステムチョーク、 4a・・・バーリング部、
5・・・ステム絶縁体、 5a・・・ステム絶縁体の
真空側の面に刻設された溝、 6・・・金属製封止円筒
、 7・・・ステムチョーク底面リード貫通部周囲のカ
ップ状突出部。FIG. 1(a) is a longitudinal cross-sectional view of the main part of one embodiment of the present invention.
Figure (b) is a sectional view taken along the line 0-o' in Figure 1 (a), Figure 2 is a diagram showing a conventional example in which leads of different materials are connected via a relay terminal plate, and Figure 3. Figure 4 shows a conventional example in which leads of different materials are connected inside a flanged pipe and a stem choke is attached. Figure 4 is a conventional example in which leads of different materials are connected with a relay terminal board and a stem choke is attached. FIG. 1...Inner pipe lead, 2...Terminal board, 3...External impulse lead, 3a...Flanged pipe,
4... Stem choke, 4a... Burring part,
5... Stem insulator, 5a... Groove carved on the vacuum side surface of the stem insulator, 6... Metal sealing cylinder, 7... Cup around the lead penetration part on the bottom of the stem choke. shaped protrusion.
Claims (1)
して陰極を支持する陰極ステム絶縁体の管内真空側の面
をメタライズして、此処に管内真空側と管外大気側とに
夫々異なる材料を用いたリード線の異種材料部分を夫々
別個所に接続固着させて中継する端子板をろう付けし、
陰極支持と真空気密封止を行わせるようにしたマグネト
ロンにおいて、2本のリード線を囲う円筒が陰極に向か
って開口し、其の底面をリード線が貫通する有底円筒状
のマイクロ波漏洩抑制用のステムチヨークを設け、其の
底面に電気的に接続する側のリード線の底面貫通孔にス
テム側へ突出するバーリング加工を施し、バーリング部
先端と上記端子板を突き合わせ、硬ろう付けしてステム
チヨークを支持させるようにしたことを特徴とするマグ
ネトロン陰極構体。1. Metalize the surface of the vacuum side inside the tube of the cathode stem insulator that supports the cathode and supports the cathode via the lead wire through which the heating current is applied, so that different parts are formed on the vacuum side inside the tube and the atmosphere side outside the tube. The different material parts of the lead wire are connected and fixed to different parts, and the relay terminal plate is brazed.
In a magnetron with cathode support and vacuum sealing, a cylinder surrounding two lead wires opens toward the cathode, and the lead wires penetrate through the bottom of the cylinder to suppress microwave leakage. A stem yoke is provided for the stem yoke, and the bottom through hole of the electrically connected lead wire is burred to protrude toward the stem side, and the tip of the burred portion is butted against the terminal plate and hard soldered to form the stem yoke. A magnetron cathode structure characterized in that it supports a magnetron cathode structure.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2110049A JP3039956B2 (en) | 1990-04-27 | 1990-04-27 | Magnetron cathode assembly |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2110049A JP3039956B2 (en) | 1990-04-27 | 1990-04-27 | Magnetron cathode assembly |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0410333A true JPH0410333A (en) | 1992-01-14 |
JP3039956B2 JP3039956B2 (en) | 2000-05-08 |
Family
ID=14525807
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2110049A Expired - Lifetime JP3039956B2 (en) | 1990-04-27 | 1990-04-27 | Magnetron cathode assembly |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3039956B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10584417B2 (en) | 2014-07-24 | 2020-03-10 | Nuflare Technology, Inc. | Film forming apparatus, susceptor, and film forming method |
-
1990
- 1990-04-27 JP JP2110049A patent/JP3039956B2/en not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10584417B2 (en) | 2014-07-24 | 2020-03-10 | Nuflare Technology, Inc. | Film forming apparatus, susceptor, and film forming method |
Also Published As
Publication number | Publication date |
---|---|
JP3039956B2 (en) | 2000-05-08 |
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