JPH04102769U - Recess formation jig for wrapping surface plate - Google Patents

Abstract

(57) [Summary] [Purpose] The purpose is to provide a processing jig for forming recesses on the upper surface of a lapping surface plate in a short time and easily with little variation. [Structure] Consists of a rotating piece for forming a recess and a support holder for supporting the rotating piece and attaching it to the cutting mechanism. [Effect] Many recesses of various shapes can be easily formed on the surface plate in a short time.

Description

[Detailed explanation of the idea]

0001

[Industrial application field]

This invention is a wrapper for realizing high-flat lapping processing of optical elements, magnetic heads, etc. Regarding the lapping surface plate.

0002

[Conventional technology]

The problem that occurs when using conventional lapping surface plates is the transfer effect of surface plate grooves. In order to prevent minute undulations that occur on the machining surface, the machining surface of the surface plate (hereinafter referred to as the top surface) is The lapping surface plate is characterized by having a large number of recesses that do not overlap. Although I filed a Utility Application No. 2-106555 (filed on Oct. and Dec. 1999), the present invention was not approved. The above application relates to the formation of recesses in a lapping surface plate. Regarding conventional technology, This will be explained using FIGS. 3 and 4. FIG. 3 is a schematic diagram showing a wrapping surface plate. 1 is A lapping surface plate whose upper surface is a relatively soft material made of tin, copper, lead, or an alloy thereof. Made of quality metal. 2 is a concave part, which is shown as a circle in the figure, but it can also be an ellipse or a polygon. I don't really care about the shape, etc. The cross-sectional shape of the recess (not shown) may be spherical, conical, or There are U-shaped, angular, etc. FIG. 4 shows a punching jig for forming the recess 2. It is a schematic diagram. 3 is the main body, 4 is a pin for forming a recess made of hard metal, and one end is the main body. It is fixed to the body 3, and the other end is molded to match the desired shape of the bottom of the recess. Pin 4 is The heights from the main body 3 are the same and they are arranged at equal intervals. Said wrapping Place the jig shown in Fig. 4 on the upper surface of the surface plate 1 with the pin 4 facing downward, and By applying a load to the pin 4, the tip of the pin 4 is transferred and the recess 2 is formed. At this time The depth of the recess increases in proportion to the amount of load applied, so select an appropriate load. Ru. Change the position of the jig shown in Fig. 4 on the upper surface of the lapping surface plate 1 (with the recess 2 formed previously). Place the pins so that they do not overlap) and apply the load in the same way as before. this Repeat this over the entire upper surface of the lapping surface plate 1. When lapping, the concave part The raised part on the top surface of the lapping surface plate 1 that occurred when forming the lapping surface plate 2 was removed by cutting. , used after obtaining a flat surface.

0003

[Problem that the idea aims to solve]

However, forming recesses using these methods is 1) time consuming and 2) repetitive. 3) Depth of recesses on inner and outer circumferential sides; There were problems such as variations in size.

0004 In order to solve this problem, the purpose of the present invention is to quickly apply a Moreover, it is an object of the present invention to provide a processing jig for forming recesses easily and with little variation.

[0005]

[Means to solve the problem]

In order to achieve the above purpose, a rotary piece having a protrusion for forming a concave portion on the outer periphery and a rotating piece are used. Consists of a holder part that supports the rolling piece and is attached to the surface plate correction device. Using a concave forming jig, cut the top surface of the lapping surface plate in the same manner as cutting the top surface of the lapping surface plate. Provide several recesses.

[0006]

[Effect]

Fasten the recess forming jig to the tool holder fixed to the surface plate correction device and rotate it. Position the piece in the height direction so that the protruding part of the piece digs into the top surface of the lapping surface plate by a predetermined amount. By doing the same operation as when cutting with a surface plate, the protrusion of the rotating piece will be lapping. The image is transferred to the upper surface of the surface plate to form a recess.

[0007]

【Example】

Embodiments of the present invention will be described below with reference to the drawings. Figure 1 shows a concave part according to the present invention. In the forming jig, 5 indicates a rotating piece, which is made of metal and hardened, but is not made of ceramic. You may also use a box or the like. The outer periphery has a protrusion 5a for forming a recess on the surface plate surface. It is shaped. The protrusions 5a were made separately and embedded radially in the rotating piece 5. type (not shown) may be used. Usually a specific rotating piece 5 is used, but , by changing the shape and pitch interval of the projection 5a, the shape and pitch of the recess, and the recess You can change the area occupied by the unit. The rotating piece 5 is connected to the holder 6 via the shaft 6a. The rigidity and backlash of each part are fixed to ensure accurate recess formation. The accommodations are well thought out.

Using FIG. 2, the method of use and operation of the recess forming jig according to the present invention will be explained. A slide head 8 is attached to a slide 7 provided in a wrapping machine (not shown), and has the function of moving left and right with high precision by an external command device (not shown). Moreover, it also has the ability to move up and down. The recess forming jig shown in FIG. 1 is fixed to a tool holder 9 fixed to a slide head 8 with screws 10. The height of the protrusion 5a of the rotary piece 5 is determined in the height direction so that it bites into the upper surface of the lapping platen 1 by a predetermined amount. In this state, by rotating the lapping surface plate 1 in the same procedure as when cutting the surface plate and giving continuous feed to the slide head 8 at a predetermined speed, the rotary piece 5 bites into the upper surface of the lapping surface plate 1 while rotating, and is kept constant. Recesses of a certain size are uniformly formed over the entire surface at predetermined intervals. Note that the recess occupancy rate, which affects the lapping performance, can be controlled by adjusting the amount of bite of the rotary piece 5 and the feed speed of the slide head 8. By replacing the rotary piece 5, it is also possible to obtain various concave shapes similar to the conventional method. Table 1 shows the optimum conditions for forming the recesses, which were obtained through experiments. Table 1 If the rotary piece diameter a) in Table 1 exceeds this range, for example if the diameter is too small, the protrusion 5a will bite into the wrapping surface plate 1 while rotating when forming the recess, and when it comes out, it will be scratched by the tip and the recess will be shaped. I end up ruining it. On the other hand, if it is too large, the number of protrusions 5a that bite into the lapping surface plate 1 will increase, resulting in a line-contact condition, and the concave shape cannot be formed neatly. As for the rotational speed of the surface plate a), the lower the speed, the less force is lost and the projection 5a can be accurately transferred. The number of rotations of the rotary piece 5 increases in proportion to the surface plate speed, but if forming work is performed at high rotation speed, a force in the escape direction acts, reducing the transfer accuracy (especially in the depth direction), that is, the rotation speed of the rotary piece increases. The best condition was 350 rpm or less. The depth of cut c) and slide head e) depend on the capabilities of the equipment and jig used in this experiment, and are not particularly limited.

[0009]

[Effect of the idea]

The concave forming jig for the lapping surface plate according to the present invention can easily and quickly form various parts. A large number of seed-shaped recesses can be formed on the surface plate.

0010 Furthermore, the occupation rate of the recesses on the surface plate can be easily controlled.

[0011] It also made it possible to form uniform recesses over the entire surface of the surface plate.

[Brief explanation of drawings]

FIG. 1 is a schematic diagram of a recess forming jig according to the present invention.

FIG. 2 is an explanatory diagram of the usage and operation of the recess forming jig according to the book and invention.

[Fig. 3] An overview diagram of the wrapping surface plate.

FIG. 4 is an overview diagram showing a conventional recess forming jig (punching jig).

[Explanation of symbols]

1 Wrapping surface plate 2 recess 3 Main body 4 pins 5 Rotating piece 5a Protrusion 6 Holder 6a axis 7 Slide 8 Slad head 9 Bit holder 10 screws

Claims (2)

[Scope of utility model registration request] [Claim 1] In a metal lapping surface plate used in a lapping device for hard and brittle materials such as glass and ceramics, a large number of recesses that do not overlap with each other are formed on the processed surface of the lapping surface plate. It is characterized by
A recess forming jig for a lapping surface plate, comprising a rotary piece for forming the recess and a support holder for supporting the rotary piece and attaching it to a cutting mechanism. 2. The recess forming jig for a lapping surface plate according to claim 1, wherein the recess is formed in the same process as conventional surface plate cutting or groove forming.