JPH04102461U - gas concentration sensor - Google Patents
gas concentration sensorInfo
- Publication number
- JPH04102461U JPH04102461U JP2176891U JP2176891U JPH04102461U JP H04102461 U JPH04102461 U JP H04102461U JP 2176891 U JP2176891 U JP 2176891U JP 2176891 U JP2176891 U JP 2176891U JP H04102461 U JPH04102461 U JP H04102461U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- electrodes
- oxygen
- gas concentration
- solid electrolyte
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000001301 oxygen Substances 0.000 claims abstract description 26
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 26
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 20
- 239000007784 solid electrolyte Substances 0.000 claims abstract description 15
- 239000007789 gas Substances 0.000 claims abstract description 11
- -1 oxygen ions Chemical class 0.000 claims abstract description 5
- 230000035945 sensitivity Effects 0.000 abstract description 2
- 238000012986 modification Methods 0.000 abstract 1
- 230000004048 modification Effects 0.000 abstract 1
- 238000005259 measurement Methods 0.000 description 6
- 238000000605 extraction Methods 0.000 description 4
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 3
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- 229910001882 dioxygen Inorganic materials 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 1
- 150000002926 oxygen Chemical class 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Landscapes
- Measuring Oxygen Concentration In Cells (AREA)
Abstract
(57)【要約】 （修正有）
【目的】簡単な構成で、感度良く、酸素または湿度等の
検出ができるガス濃度センサを提供することである。
【構成】酸素イオンを透過する固体電解質の一方の側に
第１の電極２１およびその外側に第２の電極２２を設
け、第２の電極２２の一部を切り欠いて第１の電極２１
の取出部を設けるようにし、電極間に電圧を印加し、両
電極間を流れる電流値から酸素濃度または湿度等のガス
濃度を検出するようにしたガス濃度センサ。
(57) [Summary] (with modifications) [Purpose] The purpose is to provide a gas concentration sensor that has a simple configuration and is capable of detecting oxygen, humidity, etc. with high sensitivity. [Structure] A first electrode 21 is provided on one side of a solid electrolyte that transmits oxygen ions, and a second electrode 22 is provided on the outside thereof. A part of the second electrode 22 is cut out and the first electrode 21
A gas concentration sensor is provided with a take-out part, a voltage is applied between the electrodes, and the concentration of a gas such as oxygen concentration or humidity is detected from the value of the current flowing between both electrodes.
Description
【０００１】0001
この考案は、固体電解質を利用した、酸素ガスまたは湿度等のガス濃度を測定 するガス濃度センサに関するものである。 This idea uses a solid electrolyte to measure the concentration of gases such as oxygen gas or humidity. The present invention relates to a gas concentration sensor.
【０００２】0002
従来、たとえば固体電解質を利用した酸素センサは、出願人が特開昭６３−２ ６５６８号公報で示すように、板状の固体電解質の一方の側に平行電極を形成し 、電極間に電圧を印加するとともに、電極間を流れる電流値から酸素濃度を測定 している。 Conventionally, for example, an oxygen sensor using a solid electrolyte was developed by the applicant in Japanese Patent Laid-Open No. 63-2 As shown in Publication No. 6568, parallel electrodes are formed on one side of a plate-shaped solid electrolyte. , while applying a voltage between the electrodes, the oxygen concentration is measured from the current flowing between the electrodes. are doing.
【０００３】0003
このように、固体電解質に平行電極を設けた構造では、電極間の電界強度が不 均一となり、高精度測定が困難である面がある。 In this way, in a structure in which parallel electrodes are provided on a solid electrolyte, the electric field strength between the electrodes is unstable. This results in uniformity, which makes high-precision measurement difficult.
【０００４】 この考案の目的は、以上の点に鑑み、簡単な構成で、感度良く、酸素その他の ガス濃度の検出ができるガス濃度センサを提供することである。0004 In view of the above points, the purpose of this invention is to have a simple structure, high sensitivity, and to absorb oxygen and other substances. An object of the present invention is to provide a gas concentration sensor capable of detecting gas concentration.
【０００５】[0005]
この考案は、酸素イオンを透過する固体電解質の一方の側に第１の電極および その外周に第２の電極を設け、この１対の電極の一方に律速手段を設け、第２の 電極の一部を切り欠いて第１の電極の取出部を設けるようにし、電極間に電圧を 印加し、電極間を流れる電流値から酸素濃度または湿度等のガス濃度を検出する ようにしたガス濃度センサである。 This idea consists of a first electrode and a A second electrode is provided on the outer periphery, a rate controlling means is provided on one of the pair of electrodes, and a second electrode is provided on the outer periphery. A part of the electrode is cut out to provide an extraction part for the first electrode, and a voltage is applied between the electrodes. The concentration of gas such as oxygen or humidity is detected from the current value flowing between the electrodes. This is a gas concentration sensor.
【０００６】[0006]
図１は、この考案の一実施例を示す平面説明図、図２は断面説明図である。 FIG. 1 is an explanatory plan view showing an embodiment of this invention, and FIG. 2 is an explanatory cross-sectional view.
【０００７】 図において、１は、酸化ジルコニウム等に酸化イットリウムＹ2 Ｏ3 等を固溶 させた酸素イオンを透過する基板状の固体電解質で、この固体電解質１の一方の 側にＰｔ、Ａｇ等よりなる円状の第１の電極２１、およびその外周に円環状の第 ２の電極２２が互いに等間隔とされ、蒸着、スパッタリングその他で形成され、 この一方の電極２１には、内部に空間を有し適当な穴径の拡散孔が設けられた有 孔キャップまたは多孔質材等よりなる律速手段３が設けられている。In the figure, reference numeral 1 denotes a solid electrolyte in the form of a substrate that allows oxygen ions to pass through, which is made by dissolving yttrium oxide Y 2 O 3 in zirconium oxide, etc. On one side of this solid electrolyte 1, Pt, Ag, etc. A first electrode 21 having a circular shape and a second electrode 22 having an annular shape around its outer periphery are spaced equally apart from each other and formed by vapor deposition, sputtering or other methods. One electrode 21 has a space inside. A rate controlling means 3 made of a porous material or a perforated cap provided with diffusion holes of a suitable diameter is provided.
【０００８】 また、円環状の第２の電極２２は一部が切り欠かれており、第１の電極２１の 取出部２１０が外側に延出し、この取出部２１０および第２の電極２２の一端の 取出部２２０にリード線４１、４２が接続されている。また、たとえば固体電解 質１の他方の側には、絶縁層５０を介してＰｔ等のヒータ５が形成されている。 また、第１、第２の電極２１、２２の円環状の間隔よりも、取出部２１０、２２ ０の間隔の方が広くなっているので、取出部での測定誤差の発生は少い。また、 ガラス質の気密層６で取出部２１０をおおって酸素を流入をなくすとともに、補 強を兼ねている。[0008] Further, a part of the annular second electrode 22 is cut out, and the first electrode 21 is The take-out portion 210 extends outward, and the take-out portion 210 and one end of the second electrode 22 are connected to each other. Lead wires 41 and 42 are connected to the extraction portion 220. Also, for example, solid electrolyte A heater 5 made of Pt or the like is formed on the other side of the plate 1 with an insulating layer 50 interposed therebetween. Furthermore, the take-out portions 210 and 22 Since the interval at 0 is wider, measurement errors at the extraction section are less likely to occur. Also, The take-out part 210 is covered with a glass airtight layer 6 to prevent oxygen from flowing in and to supplement it. It also serves as strength.
【０００９】 そして、内側の第１の電極２１、外側の第２の電極２２間には回示しない直流 の電圧源から電極２１を陰極、電極２２を陽極として所定の電圧が印加され、電 流測定手段で電極２１、２２間を流れる電流値が測定される。また、ヒータ５に は、たとえば定電流源より電流が供給され、必要に応じ電圧測定手段でヒータ５ の抵抗値を測定する。[0009] A direct current is not circulated between the inner first electrode 21 and the outer second electrode 22. A predetermined voltage is applied from a voltage source with electrode 21 as a cathode and electrode 22 as an anode, and the voltage is The current value flowing between the electrodes 21 and 22 is measured by the current measuring means. Also, heater 5 For example, a current is supplied from a constant current source, and if necessary, the heater 5 is Measure the resistance value.
【００１０】 つまり、酸素ガス濃度を測定する場合、ヒータ５に通電加熱する等して固体電 解質１をたとえば約３５０℃以上に加熱し、そのイオン導電率を高める。そして 、電圧源より電極２１、２２に電圧を印加し、固体電解質１を酸素ポンプとして 機能させる。0010 In other words, when measuring the oxygen gas concentration, the heater 5 is heated by applying electricity to the solid state. The solute 1 is heated to, for example, about 350° C. or higher to increase its ionic conductivity. and , a voltage is applied to the electrodes 21 and 22 from a voltage source, and the solid electrolyte 1 is used as an oxygen pump. Make it work.
【００１１】 酸素Ｏ2 は電極２１で電子を受けとってＯ2-とイオン化し、この酸素イオンＯ 2- が固体電解質１を透過して電極２２に達し、再び酸素Ｏ2 となって外気へ排出 される。このとき律速手段３を介して酸素Ｏ2 等を含む外気が固体電解質１の酸 素ポンプの酸素送出能力を越えない程度に拡散・流入し、この酸素分圧に応じ電 流が電極２１、２２間に流れ、この電流値を電流測定手段で測定することにより 、空気中の酸素濃度を検出できる。[0011] oxygen O2receives electrons at the electrode 21 and becomes O2-and this oxygen ion O 2- passes through the solid electrolyte 1 and reaches the electrode 22, where oxygen O2and is discharged to the outside air. be done. At this time, oxygen O2The outside air containing the acid of solid electrolyte 1 The oxygen diffuses and flows in to an extent that does not exceed the oxygen delivery capacity of the oxygen pump, and the voltage is increased according to this oxygen partial pressure. A current flows between the electrodes 21 and 22, and by measuring this current value with a current measuring means, , can detect oxygen concentration in the air.
【００１２】 つまり、電圧源の電圧を所定の値とし、酸素濃度が変わると電流値が変化し、 この電流値から酸素濃度を検出できる。0012 In other words, if the voltage of the voltage source is set to a predetermined value, and the oxygen concentration changes, the current value changes, Oxygen concentration can be detected from this current value.
【００１３】 また、空気中に水分が存在すると、ある電圧範囲では電極２１で水分Ｈ2 Ｏは 電気分解して酸素イオンができ、この酸素イオンが電極２２に移動し、電流が発 生する。これにより水分率を検出することができる。Further, when moisture is present in the air, the moisture H 2 O is electrolyzed at the electrode 21 in a certain voltage range to produce oxygen ions, which move to the electrode 22 and generate electric current. This allows the moisture content to be detected.
【００１４】 なお、測定系、特性等は、出願人が提案の特開昭６３−２６５６８号公報と同 様である。[0014] The measurement system, characteristics, etc. are the same as those in Japanese Patent Application Laid-open No. 63-26568 proposed by the applicant. It's like that.
【００１５】[0015]
以上述べたように、この発明は、固体電解質の一方の側に１対の電極を円環状 に設けるようにしたので、両電極の距離は等しく、高精度測定ができる。外側の 電極を切って内側の電極を取り出しているので、リード線等の配線処理が容易な ものとなる。さらに、取出部の間隔を電極間の間隔より広くすると、イオンに対 する抵抗が大きくなり、測定精度が向上し、高精度測定が可能となる。そして気 密層でおおうようにすれば、リード線取出部からの酸素の流入はなくなるととも に、リード線の接続の補強にも良好となる。このように、この考案では、簡単な 構成で、酸素、または湿度等の検出が可能となる。 As described above, the present invention provides a method in which a pair of electrodes are arranged on one side of a solid electrolyte in an annular shape. Since the distance between the two electrodes is the same, high precision measurement can be achieved. outside Since the electrodes are cut and the inner electrodes are taken out, wiring such as lead wires is easy. Become something. Furthermore, if the interval between the extraction parts is wider than the interval between the electrodes, the ion This increases the resistance, improves measurement accuracy, and enables high-precision measurements. and mind If you cover it with a dense layer, the inflow of oxygen from the lead wire outlet will be eliminated. In addition, it is also good for reinforcing lead wire connections. In this way, this idea uses a simple Depending on the configuration, it is possible to detect oxygen, humidity, etc.
【図面の簡単な説明】[Brief explanation of drawings]
【図１】この考案の一実施例を示す平面説明図である。FIG. 1 is an explanatory plan view showing one embodiment of this invention.
【図２】この考案の一実施例を示す断面説明図である。FIG. 2 is an explanatory cross-sectional view showing one embodiment of the invention.
１ 固体電解質 ２１、２２ 電極 ３ 律速手段 ４１、４２ リード線 ５ ヒータ ６ 気密層 ２１０、２２０ 取出部 1 Solid electrolyte 21, 22 electrode 3 Rate-limiting means 41, 42 Lead wire 5 Heater 6 Airtight layer 210, 220 Removal part
Claims (1)
固体電解質の一方の側に設けられた第１の電極および第
１の電極の外周に設けられた第２の電極と、各電極のい
ずれか一方に設けられた律速手段と、第２の電極の一部
を切り欠いて第１の電極から延出する取出部とを備え、
各電極間に電圧を印加して電極間を流れる電流値から酸
素濃度または湿度等のガス濃度を測定するガス濃度セン
サ。Claim 1: A solid electrolyte that transmits oxygen ions, a first electrode provided on one side of the solid electrolyte, a second electrode provided on the outer periphery of the first electrode, and any of the electrodes. a rate-limiting means provided on one side, and a take-out portion extending from the first electrode by cutting out a part of the second electrode,
A gas concentration sensor that measures gas concentration such as oxygen concentration or humidity from the value of the current flowing between the electrodes by applying a voltage between the electrodes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2176891U JPH04102461U (en) | 1991-01-21 | 1991-01-21 | gas concentration sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2176891U JPH04102461U (en) | 1991-01-21 | 1991-01-21 | gas concentration sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04102461U true JPH04102461U (en) | 1992-09-03 |
Family
ID=31756717
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2176891U Pending JPH04102461U (en) | 1991-01-21 | 1991-01-21 | gas concentration sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04102461U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016125888A (en) * | 2014-12-26 | 2016-07-11 | 日本特殊陶業株式会社 | Gas sensor element and gas sensor |
-
1991
- 1991-01-21 JP JP2176891U patent/JPH04102461U/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016125888A (en) * | 2014-12-26 | 2016-07-11 | 日本特殊陶業株式会社 | Gas sensor element and gas sensor |
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