JPH0398731A - Permanent electromagnetic chuck - Google Patents
Permanent electromagnetic chuckInfo
- Publication number
- JPH0398731A JPH0398731A JP23120389A JP23120389A JPH0398731A JP H0398731 A JPH0398731 A JP H0398731A JP 23120389 A JP23120389 A JP 23120389A JP 23120389 A JP23120389 A JP 23120389A JP H0398731 A JPH0398731 A JP H0398731A
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- electromagnet
- permanent magnet
- work
- polarity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000013016 damping Methods 0.000 claims abstract description 11
- 230000005389 magnetism Effects 0.000 abstract description 15
- 238000003754 machining Methods 0.000 abstract description 6
- BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical compound N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 description 9
- 238000010586 diagram Methods 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 235000010627 Phaseolus vulgaris Nutrition 0.000 description 1
- 244000046052 Phaseolus vulgaris Species 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 229910000828 alnico Inorganic materials 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 230000005347 demagnetization Effects 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は永久磁石を用いてワークの吸着を行う永電磁式
チャックに関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a permanent electromagnetic chuck that uses a permanent magnet to attract a workpiece.
切削、研削等の機械加工をワークに対して行うため、磁
力によりワークを保持するチャックとして、電磁チャッ
クと、永電磁式チャックとがある。BACKGROUND ART In order to perform machining such as cutting and grinding on a workpiece, there are two types of chucks that hold the workpiece using magnetic force: an electromagnetic chuck and a permanent electromagnetic chuck.
前者は、永久磁石を用いずに、コイルの通電による磁力
のみでワークを吸着しようとするもので、吸着動作中は
コイルが通電され続けた状態になる。The former method attempts to attract a workpiece only by the magnetic force generated by energizing a coil without using a permanent magnet, and the coil remains energized during the attraction operation.
これに対し、後者は、永久磁石と電磁石の双方を用い、
電磁石の極性を変換させることによりワークの吸着及び
保持を行うもので、電磁石のコイルが通電されるのはそ
の極性が変化される瞬時のみである。On the other hand, the latter uses both permanent magnets and electromagnets,
The workpiece is attracted and held by changing the polarity of the electromagnet, and the coil of the electromagnet is energized only at the moment when the polarity is changed.
第５図及び第６図は、このような永電磁式チャックの構
成及び動作を説明するための概略図である。なお、この
第５図及び６図は、第７図の形状の永電磁式チャック１
の一部を断面にして示したものである。FIGS. 5 and 6 are schematic diagrams for explaining the configuration and operation of such a permanent electromagnetic chuck. Note that FIGS. 5 and 6 show the permanent electromagnetic chuck 1 having the shape shown in FIG.
This is a cross-sectional view of a part of the figure.
永久電磁式チャック１の上面には、ワーク２を吸着する
ための吸着面Ｐが形成されている。この吸着面Ｐの下方
には、磁極性部材３を挟んで一対の極性固定永久磁石（
以下、永久磁石と略す）４，４が取付けられている。A suction surface P for suctioning a workpiece 2 is formed on the upper surface of the permanent electromagnetic chuck 1 . Below this attraction surface P, a pair of fixed polarity permanent magnets (
(hereinafter abbreviated as permanent magnets) 4, 4 are attached.
そして、これらの永久磁石４，４の下方には極性可変永
電磁石（以下、永電磁石と略す）５が配設されている。A variable polarity permanent electromagnet (hereinafter abbreviated as permanent electromagnet) 5 is disposed below these permanent magnets 4, 4.
この永電磁石５は、アルニコＷの材質で形成された永久
磁石６と、永久磁石６の周囲に巻回されたコイル７とに
より横成されている。The permanent magnet 5 includes a permanent magnet 6 made of Alnico W material and a coil 7 wound around the permanent magnet 6.
また、これら永久磁石４，４及び永電磁石５の回りには
、フレーム部材及び磁極部材の双方の部材として機能す
るヨーク（！ｌ鉄）８が取付けられている。Further, a yoke (1 iron) 8 is attached around the permanent magnets 4, 4 and the permanent magnet 5, which functions as both a frame member and a magnetic pole member.
次に、このような従来の永電磁式チャック１の動作につ
き説明する。Next, the operation of such a conventional permanent electromagnetic chuck 1 will be explained.
第５図または第６図に示すように、永久磁石４の周囲に
は常時一定方向の向きの磁力線９が発生している。そこ
で、ワーク２を吸着面Ｐに吸着させる場合は、コイル７
を通電し、第５図に示すように、永電磁石５に、磁力線
９と同し方向の磁力線１０ａを発生させるようにする。As shown in FIG. 5 or 6, lines of magnetic force 9 always oriented in a fixed direction are generated around the permanent magnet 4. Therefore, when the workpiece 2 is attracted to the attraction surface P, the coil 7
Electricity is applied to cause the permanent magnet 5 to generate magnetic lines of force 10a in the same direction as the lines of magnetic force 9, as shown in FIG.
すると、磁力線９，１０ａの各磁力が相まって、ワーク
２は強い力で吸着面Ｐに吸着された状態となる。これに
より、ワーク２に対する機械加工が可能となる。Then, the magnetic forces of the lines of magnetic force 9 and 10a combine, and the workpiece 2 is attracted to the attraction surface P with a strong force. This allows machining of the workpiece 2.
そして、ワーク２に対する機械加工が終了し、ワーク２
の吸着を解除する場合は、吸着時の場合と逆向きの通電
をコイル７に行うようにする。すると、第６図に示すよ
うに、永電磁石５の回りに、磁力線つと逆方向の磁力線
１０ａが発生する。これら、磁力線９，１０ｂによる各
磁力は互いに″．べしく直結するように働き、ワーク２
を吸着する力は非常に弱いものとなる。したがって、ワ
ーク２を吸着面Ｐから取外すことができる。Then, machining for work 2 is completed, and work 2
When canceling the attraction, the coil 7 is energized in the opposite direction to that during attraction. Then, as shown in FIG. 6, lines of magnetic force 10a are generated around the permanent magnet 5 in the opposite direction to the lines of magnetic force. The magnetic forces caused by these lines of magnetic force 9 and 10b work to be directly connected to each other, and the workpiece 2
The adsorption power is very weak. Therefore, the workpiece 2 can be removed from the suction surface P.
なお、第５図，第６図においては説明を簡０１にするた
め、永電磁石５を１個のみ図示しているが、実際には、
第８図または第９図に示すように、永電磁石５は複数個
が隣接するように配設されている。ここで、第８図は主
として切削加工用、第９図は主として研削加工用に用い
られるものであり、第８図の方が吸着力が強くなってい
る。In addition, in FIG. 5 and FIG. 6, in order to simplify the explanation, only one permanent magnet 5 is shown, but in reality,
As shown in FIG. 8 or 9, a plurality of permanent magnets 5 are arranged adjacent to each other. Here, FIG. 8 is mainly used for cutting, and FIG. 9 is mainly used for grinding, and the suction force in FIG. 8 is stronger.
上記のように、ワーク２の吸着を解除するにあたっては
、永電磁石５の極性を変換することにより、ワーク２を
通過する磁力線の数を減少させるようにしている。As described above, when releasing the attraction of the workpiece 2, the number of magnetic lines of force passing through the workpiece 2 is reduced by changing the polarity of the permanent magnet 5.
ここで、ワーク２が軟鉄のような残留磁気の残りにくい
材質である場合には、第６図の状態において、ワーク２
に発生している残留磁気はさして問題となる量ではない
。Here, if the workpiece 2 is made of a material such as soft iron that does not easily retain residual magnetism, the workpiece 2
The amount of residual magnetism generated is not particularly problematic.
しかし、ワーク２が焼入れを必要とするような硬い材質
の材料（例えばダイス鋼等）である場合には、第６図の
状態において、ワーク２に少からず残留磁気が発生する
ことになる。However, if the workpiece 2 is made of a hard material that requires hardening (such as die steel), a considerable amount of residual magnetism will be generated in the workpiece 2 in the state shown in FIG.
そのため、ワーク２を吸着而Ｐから取外す作業を円滑に
行うことができないという問題を有していた。また、こ
のような残留磁気のため、ワーク２の後工程に悪影響を
与えるおそれがあり、さらに、最終製品仕様として、残
留磁気の完全な消滅が要求されるという問題もある。Therefore, there was a problem in that the work to remove the workpiece 2 from the suction member P could not be performed smoothly. In addition, such residual magnetism may have a negative effect on the post-processing of the workpiece 2, and there is also the problem that complete disappearance of residual magnetism is required as a final product specification.
本発明は上記事情に鑑みてなされたものであり、ワーク
の機械加工終了後に、このワークの残留磁気を完全に消
滅させることができる永電磁式チャックを提供しようと
するものである。The present invention has been made in view of the above circumstances, and it is an object of the present invention to provide a permanent electromagnetic chuck that can completely eliminate the residual magnetism of a workpiece after machining the workpiece.
本発明は上記課題を解決するための手段としてワーク吸
着面の下方に極性固定永久磁石を設けると共に、この極
性固定永久磁石の下方に極性可変永電磁石を配設し、前
記ワークの吸着時には前記極性固定永久磁石及び前記極
性可変永電磁石の各磁力線の向きが一致するようにこの
極性”Ｊｔ永電磁石のコイルを通電し、前記ワークの吸
着解除時には前記極性固定永久磁石及び前記極性可変永
化磁石の各磁力線の向きが互いに逆方向になるようにこ
の極性可変永電磁石のコ，イルを通屯する永電磁式チャ
ックにおいて、前記ワーク吸着面と前記極性固定永久磁
石との間に、さらにワーク脱磁用電磁石を形成し、前記
ワークの吸着解除後にこのワーク脱磁用電磁石のコイル
へ交番型減衰電流を流すようにした構成としてある。As a means for solving the above-mentioned problems, the present invention provides a fixed polarity permanent magnet below the workpiece attracting surface, and a variable polarity permanent electromagnet below the fixed polarity permanent magnet. The coil of this polarity Jt permanent magnet is energized so that the directions of the magnetic lines of force of the fixed permanent magnet and the variable polarity permanent magnet match, and when the workpiece is released, the fixed permanent magnet and the variable polarity permanent magnet are energized. In a permanent electromagnetic chuck that passes through the coils and coils of variable polarity permanent electromagnets so that the directions of the lines of magnetic force are opposite to each other, the workpiece is further demagnetized between the workpiece attracting surface and the fixed polarity permanent magnet. A demagnetizing electromagnet is formed, and after the workpiece is released from attraction, an alternating damping current is passed through the coil of the workpiece demagnetizing electromagnet.
上記構成において、ワークの吸着が解除された時点で、
ワークの材質如何によっては、このワークに多量の残留
磁気が発生している場合がある。In the above configuration, when the workpiece is released from suction,
Depending on the material of the workpiece, a large amount of residual magnetism may be generated in the workpiece.
しかし、そのような場合でも、ワーク脱磁用電磁石のコ
イルに交番型減衰電流を流すようにしてあるので、ワー
ク内には交番型減衰磁昇が允生じ、これにより残留磁気
が殆ど消滅する。However, even in such a case, since an alternating damping current is caused to flow through the coil of the workpiece demagnetizing electromagnet, an alternating damping magnetic rise occurs within the workpiece, thereby almost eliminating residual magnetism.
以下、本発明の実施例を第１図乃至第４図に基いて説明
する。但し、第５図乃至第９図と同様の構成要素には同
一符号を付して重複した説明を省略することとする。Embodiments of the present invention will be described below with reference to FIGS. 1 to 4. However, the same components as in FIGS. 5 to 9 will be given the same reference numerals and redundant explanation will be omitted.
第１図における磁極性部材３及びヨーク８は、第５図乃
至第８図におけるものよりも、さらに上方に伸びて形成
されている。そして、この磁極性部材３において、永久
磁石４よりも高い位置にはコイル１１が巻回されており
、さらに、このコイル１１には交番型減衰電流供給回路
（図示せず）が接続されている。すなわち、吸着而Ｐと
永久磁石４との間には、磁極性部材３とコイル１１とで
形成されるワーク脱磁用電磁石１２が形成された状態と
なっている。The magnetic polarity member 3 and yoke 8 in FIG. 1 are formed to extend further upwards than those in FIGS. 5 to 8. In this magnetic polarity member 3, a coil 11 is wound at a higher position than the permanent magnet 4, and an alternating damping current supply circuit (not shown) is connected to this coil 11. . That is, a workpiece demagnetizing electromagnet 12 formed of the magnetic polarity member 3 and the coil 11 is formed between the attracting member P and the permanent magnet 4.
次に、このように構成される本実施例の動作を第２図乃
至第４図に話いて説明する。Next, the operation of this embodiment configured as described above will be explained with reference to FIGS. 2 to 4.
まず、ワーク２を吸着面Ｐに吸着させる場合は、コイル
７を通電して、磁極性部材３に対する磁力線９．１０ａ
の向きが同極になり（第２図）、ワーク２の吸着を解除
する場合は、コイル７の通電を逆にして、磁力線９，１
０ｂの向きが昇極で豆いに等しく直結するようになる（
第３図）。これらの場合の動作は、第５図及び第６図の
場合の動作とほぼ同様である。なお、いずれの場合もコ
イル７に対する通電は短時間でよく、通電を継続させて
おく必要はない。First, when the workpiece 2 is to be attracted to the attraction surface P, the coil 7 is energized and the magnetic force lines 9.10a against the magnetic polarity member 3 are
become the same polarity (Fig. 2), and if you want to release the adsorption of the workpiece 2, reverse the energization of the coil 7 so that the lines of magnetic force 9, 1
The direction of 0b becomes ascending and is directly connected to the beans (
Figure 3). The operations in these cases are almost the same as those in FIGS. 5 and 6. In any case, the coil 7 only needs to be energized for a short time, and there is no need to keep it energized.
そして、第３図の状態では前述のように、ワーク２内に
残留磁気（９）が発生しているが、この残留磁気（９）
を除去するため、ワーク脱磁用電磁石１２に脱磁動作を
行なわせるようにする。すなわち、コイル１１に交番型
減衰電流（極性を交互に変化させながら漸次減衰してい
く電流）を流すと、第４図に示すように、この交番型減
衰電流によって、互いに向きの異なる磁力線１３ａ，１
３ｂが交互に発生する。したがって、この磁力線１３ａ
，１３ｂにより、ワーク２には交番型減衰磁界が印加さ
れることとなり、これによりそれまでワーク２に残存し
ていた残留磁気（９）が除去されることになる。In the state shown in Fig. 3, as mentioned above, residual magnetism (9) is generated within the workpiece 2, but this residual magnetism (9)
In order to remove this, the workpiece demagnetizing electromagnet 12 is caused to perform a demagnetizing operation. That is, when an alternating attenuating current (a current that gradually attenuates while changing its polarity alternately) is passed through the coil 11, as shown in FIG. 1
3b occur alternately. Therefore, this line of magnetic force 13a
, 13b, an alternating damping magnetic field is applied to the workpiece 2, thereby removing the residual magnetism (9) remaining in the workpiece 2 until then.
なお、上記実施例では、従来例における磁極性部材３の
高さを高くし、この磁極性部材３をそのまま利用してワ
ーク脱磁用電磁石１２を形成するようにしているが、別
の材料の磁極性部材を用いてワーク脱磁用電磁石を形或
するようにしてもよい。In the above embodiment, the height of the magnetic polarity member 3 in the conventional example is increased and the magnetic polarity member 3 is used as it is to form the electromagnet 12 for demagnetizing the workpiece. The electromagnet for demagnetizing the workpiece may be formed using a magnetic polarity member.
また、ワーク脱磁用電磁石の部分を別体購成とし、従来
例のものに、このワーク脱磁用電磁石を取付け取外しす
る構或とすることも可能である。It is also possible to purchase the workpiece demagnetizing electromagnet separately, and to attach and remove the workpiece demagnetizing electromagnet from the conventional example.
そして、本発明は、第８図及び第９図に示すような、切
削用、研削用のいずれの永電磁式チャックに対しても適
用可能なことはいうまでもない。It goes without saying that the present invention is applicable to both permanent electromagnetic chucks for cutting and grinding as shown in FIGS. 8 and 9.
以上説叩したように、本発叩によれば、ワーク吸着面と
極性固定永久磁石との間にワーク脱磁用電磁石を形成し
、ワークの吸着解除後にこのワーク脱磁用電磁石のコイ
ルへ交番型減衰電流を流すように構成したので、機械加
工終了後のワークの残留磁気を充分に除去することが可
能となる。As explained above, according to this hammering method, a workpiece demagnetizing electromagnet is formed between the workpiece attraction surface and a fixed polarity permanent magnet, and after the workpiece is released from attraction, the workpiece demagnetizing electromagnet's coil is alternately connected. Since the mold damping current is configured to flow, residual magnetism in the workpiece after machining can be sufficiently removed.
第１図は本発明の実施例の要部を示す概略｛１１１成図
、第２図乃至第４図は第１図の動作説明図、第５図及び
第６図は従来例の要部のｆｌ！Ｅ ＩＩｔ３ ｔＭ成図
、第７図は従来例の全体の外蜆を示す斜呪園、第８図及
び第９図は従来例の構成要素の配列例を用途別に示した
概略図である。
２・・・ワーク、４・・・極性同定永久磁石、５・・・
陽性可変永電磁石、７・・・コイル、１１・・・コイル
、１２・・・ワーク脱磁用電磁石、
Ｐ・・・吸着面。Figure 1 is a schematic diagram showing the main parts of the embodiment of the present invention, Figures 2 to 4 are explanatory diagrams of the operation of Figure 1, and Figures 5 and 6 are the main parts of the conventional example. Fl! FIG. 7 is a diagram showing the entire outline of the conventional example, and FIGS. 8 and 9 are schematic diagrams showing examples of the arrangement of the components of the conventional example according to their uses. 2...Workpiece, 4...Polarity identification permanent magnet, 5...
Positive variable permanent electromagnet, 7...Coil, 11...Coil, 12...Work demagnetization electromagnet, P...Adsorption surface.
Claims (1)
、この極性固定永久磁石の下方に極性可変永電磁石を配
設し、前記ワークの吸着時には前記極性固定永久磁石及
び前記極性可変永電磁石の各磁力線の向きが一致するよ
うにこの極性可変永電磁石のコイルを通電し、前記ワー
クの吸着解除時には前記極性固定永久磁石及び前記極性
可変永電磁石の各磁力線の向きが互いに逆方向になるよ
うにこの極性可変永電磁石のコイルを通電する永電磁式
チャックにおいて、 前記ワーク吸着面と前記極性固定永久磁石との間に、さ
らにワーク脱磁用電磁石を形成し、前記ワークの吸着解
除後にこのワーク脱磁用電磁石のコイルへ交番型減衰電
流を流すようにしたことを特徴とする永電磁式チャック
。[Scope of Claims] A fixed polarity permanent magnet is provided below the workpiece attracting surface, and a variable polarity permanent electromagnet is provided below the fixed polarity permanent magnet, and when the workpiece is attracted, the fixed polarity permanent magnet and the polarity fixed permanent magnet are disposed below the fixed polarity permanent magnet. The coil of the variable polarity permanent electromagnet is energized so that the directions of the lines of magnetic force of the variable permanent electromagnet match, and when the workpiece is released, the lines of magnetic force of the fixed polarity permanent magnet and the variable polarity permanent electromagnet are opposite to each other. In this permanent electromagnetic chuck, in which the coil of the variable polarity permanent electromagnet is energized, an electromagnet for demagnetizing the workpiece is further formed between the workpiece attraction surface and the fixed polarity permanent magnet to release the attraction of the workpiece. Later, a permanent electromagnetic chuck was developed in which an alternating damping current was passed through the coil of the electromagnet for demagnetizing the workpiece.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1231203A JP2974694B2 (en) | 1989-09-06 | 1989-09-06 | Permanent electromagnetic chuck |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1231203A JP2974694B2 (en) | 1989-09-06 | 1989-09-06 | Permanent electromagnetic chuck |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0398731A true JPH0398731A (en) | 1991-04-24 |
| JP2974694B2 JP2974694B2 (en) | 1999-11-10 |
Family
ID=16919957
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1231203A Expired - Fee Related JP2974694B2 (en) | 1989-09-06 | 1989-09-06 | Permanent electromagnetic chuck |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2974694B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5270678A (en) * | 1992-03-06 | 1993-12-14 | Walker Magnetics Group, Inc. | Magnetic rail chuck |
| JPH06134637A (en) * | 1992-10-23 | 1994-05-17 | Fuji Jikou Kk | Control device for permanent magnet chuck |
| WO2009118888A1 (en) * | 2008-03-28 | 2009-10-01 | キヤノンアネルバ株式会社 | Vacuum treatment device, method for manufacturing image display device using the vacuum treatment device, and electronic device manufactured by use of vacuum treatment device |
| JP2013537712A (en) * | 2010-09-20 | 2013-10-03 | グァン チェ，テ | Magnetic material holding device combining permanent magnet and electromagnet |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60186339A (en) * | 1984-03-02 | 1985-09-21 | Fuji Jikou Kk | Exciting method for demagnetizing electro permanent magnetic chuck |
| JPS62208844A (en) * | 1986-03-11 | 1987-09-14 | Kanetsuu Kogyo Kk | Excitation of magnetic chuck |
-
1989
- 1989-09-06 JP JP1231203A patent/JP2974694B2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60186339A (en) * | 1984-03-02 | 1985-09-21 | Fuji Jikou Kk | Exciting method for demagnetizing electro permanent magnetic chuck |
| JPS62208844A (en) * | 1986-03-11 | 1987-09-14 | Kanetsuu Kogyo Kk | Excitation of magnetic chuck |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5270678A (en) * | 1992-03-06 | 1993-12-14 | Walker Magnetics Group, Inc. | Magnetic rail chuck |
| JPH06134637A (en) * | 1992-10-23 | 1994-05-17 | Fuji Jikou Kk | Control device for permanent magnet chuck |
| WO2009118888A1 (en) * | 2008-03-28 | 2009-10-01 | キヤノンアネルバ株式会社 | Vacuum treatment device, method for manufacturing image display device using the vacuum treatment device, and electronic device manufactured by use of vacuum treatment device |
| JP5192492B2 (en) * | 2008-03-28 | 2013-05-08 | キヤノンアネルバ株式会社 | Vacuum processing apparatus, method for manufacturing image display apparatus using the vacuum processing apparatus, and electronic device manufactured by the vacuum processing apparatus |
| JP2013537712A (en) * | 2010-09-20 | 2013-10-03 | グァン チェ，テ | Magnetic material holding device combining permanent magnet and electromagnet |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2974694B2 (en) | 1999-11-10 |
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