JPH0396350U - - Google Patents

Info

Publication number
JPH0396350U
JPH0396350U JP588590U JP588590U JPH0396350U JP H0396350 U JPH0396350 U JP H0396350U JP 588590 U JP588590 U JP 588590U JP 588590 U JP588590 U JP 588590U JP H0396350 U JPH0396350 U JP H0396350U
Authority
JP
Japan
Prior art keywords
output
furnace
temperature
circuit
diffusion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP588590U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP588590U priority Critical patent/JPH0396350U/ja
Publication of JPH0396350U publication Critical patent/JPH0396350U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第1図は本考案回路の一実施例の構成を示すブ
ロツク図、第2図a,bは本考案回路の作用説明
図、第3図は従来の温度制御回路の一例の構成を
示すブロツク図、第4図a,bは第3図示の従来
回路の作用説明図である。 1……拡散・CVD炉、2……温度検出素子(
熱電対)、4……設定回路、5……比較回路、6
……出力回路、7……ヒータ、8……出力補正回
路。

Claims (1)

    【実用新案登録請求の範囲】
  1. 炉1内に設けられた温度検出素子2より出力す
    る炉内温度信号と設定温度信号とを比較し、その
    差信号を出力回路6に入力しその出力によりヒー
    タ7を加熱制御する拡散・CVD炉の温度制御回
    路において、炉内温度がある温度範囲内で設定温
    度に近づいた時、出力回路6の出力をある一定量
    あるいはある一定の割合に低減する出力補正回路
    8を設けてなる拡散・CVD炉の温度制御回路。
JP588590U 1990-01-24 1990-01-24 Pending JPH0396350U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP588590U JPH0396350U (ja) 1990-01-24 1990-01-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP588590U JPH0396350U (ja) 1990-01-24 1990-01-24

Publications (1)

Publication Number Publication Date
JPH0396350U true JPH0396350U (ja) 1991-10-02

Family

ID=31509575

Family Applications (1)

Application Number Title Priority Date Filing Date
JP588590U Pending JPH0396350U (ja) 1990-01-24 1990-01-24

Country Status (1)

Country Link
JP (1) JPH0396350U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR200476787Y1 (ko) * 2014-10-17 2015-04-14 이준수 자동차 범퍼 보호구

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56124920A (en) * 1980-03-07 1981-09-30 Hitachi Ltd Temperature controlling circuit
JPS58197524A (ja) * 1982-05-14 1983-11-17 Ricoh Co Ltd 温度制御装置
JPS6298380A (ja) * 1985-10-24 1987-05-07 Toshiba Corp 画像形成装置のヒ−タ制御方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56124920A (en) * 1980-03-07 1981-09-30 Hitachi Ltd Temperature controlling circuit
JPS58197524A (ja) * 1982-05-14 1983-11-17 Ricoh Co Ltd 温度制御装置
JPS6298380A (ja) * 1985-10-24 1987-05-07 Toshiba Corp 画像形成装置のヒ−タ制御方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR200476787Y1 (ko) * 2014-10-17 2015-04-14 이준수 자동차 범퍼 보호구

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