JPH0396349U - - Google Patents

Info

Publication number
JPH0396349U
JPH0396349U JP368590U JP368590U JPH0396349U JP H0396349 U JPH0396349 U JP H0396349U JP 368590 U JP368590 U JP 368590U JP 368590 U JP368590 U JP 368590U JP H0396349 U JPH0396349 U JP H0396349U
Authority
JP
Japan
Prior art keywords
forming apparatus
film forming
ion beam
irradiation direction
parallel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP368590U
Other languages
English (en)
Japanese (ja)
Other versions
JPH089160Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990003685U priority Critical patent/JPH089160Y2/ja
Publication of JPH0396349U publication Critical patent/JPH0396349U/ja
Application granted granted Critical
Publication of JPH089160Y2 publication Critical patent/JPH089160Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1990003685U 1990-01-18 1990-01-18 成膜装置 Expired - Fee Related JPH089160Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990003685U JPH089160Y2 (ja) 1990-01-18 1990-01-18 成膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990003685U JPH089160Y2 (ja) 1990-01-18 1990-01-18 成膜装置

Publications (2)

Publication Number Publication Date
JPH0396349U true JPH0396349U (OSRAM) 1991-10-02
JPH089160Y2 JPH089160Y2 (ja) 1996-03-13

Family

ID=31507492

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990003685U Expired - Fee Related JPH089160Y2 (ja) 1990-01-18 1990-01-18 成膜装置

Country Status (1)

Country Link
JP (1) JPH089160Y2 (OSRAM)

Also Published As

Publication number Publication date
JPH089160Y2 (ja) 1996-03-13

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees