JPH0396176U - - Google Patents

Info

Publication number
JPH0396176U
JPH0396176U JP404890U JP404890U JPH0396176U JP H0396176 U JPH0396176 U JP H0396176U JP 404890 U JP404890 U JP 404890U JP 404890 U JP404890 U JP 404890U JP H0396176 U JPH0396176 U JP H0396176U
Authority
JP
Japan
Prior art keywords
elastic member
polishing
hard
plate
polished
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP404890U
Other languages
Japanese (ja)
Other versions
JP2504485Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990004048U priority Critical patent/JP2504485Y2/en
Publication of JPH0396176U publication Critical patent/JPH0396176U/ja
Application granted granted Critical
Publication of JP2504485Y2 publication Critical patent/JP2504485Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図ないし第３図は本考案の一実施例を示す
ものである。第１図は研磨時の研磨装置を示す矢
視断面図である。第２図は弾性部材を示す縦断面
図である。第３図は保護マスクを示す縦断面図で
ある。第４図は従来例を示すものであつて、テー
プマスクを備えた研磨装置を示す矢視断面図であ
る。第５図は他の従来例を示すものであつて、平
板マスクを備えた研磨装置を示す矢視断面図であ
る。 １……弾性部材、１ｃ……突起部、２……上面
硬質板、３……下面硬質板、４……固定部材、７
……被研磨物、８……噴射ノズル（研磨手段）、
９……研磨剤、１０……保護マスク、１２……押
圧力、２０……研磨装置である。 1 to 3 show an embodiment of the present invention. FIG. 1 is a sectional view taken along arrows showing a polishing apparatus during polishing. FIG. 2 is a longitudinal sectional view showing the elastic member. FIG. 3 is a longitudinal sectional view showing the protective mask. FIG. 4 shows a conventional example, and is a sectional view taken in the direction of arrows, showing a polishing apparatus equipped with a tape mask. FIG. 5 shows another conventional example, and is a sectional view taken in the direction of arrows, showing a polishing apparatus equipped with a flat mask. DESCRIPTION OF SYMBOLS 1...Elastic member, 1c...Protrusion, 2...Upper surface hard plate, 3...Lower surface hard plate, 4...Fixing member, 7
...Object to be polished, 8...Spray nozzle (polishing means),
9... Polishing agent, 10... Protective mask, 12... Pressing force, 20... Polishing device.

Claims (1)

【実用新案登録請求の範囲】 被研磨物を研磨剤により研磨する研磨手段と、
被研磨物の研磨を必要としない部分に配される保
護マスクとを備え、研磨手段が被研磨物を研磨す
るときに、保護マスクが押圧されて、被研磨物の
研磨を必要としない部分を研磨から保護する研磨
装置において、 上記保護マスクは、下面のエツジ部の全周に提
状の突起部が形成された弾性部材と、 弾性部材の上面部と略同形状に形成されて、上
記上面部に配される上面硬質板と、 弾性部材の突起部に包囲された弾性部材の下面
部と略同形状に形成されて、上記下面部に配され
る下面硬質板と、 弾性部材と上面硬質板と下面硬質板とを一体に
固定する固定部材とを備えていることを特徴とす
る研磨装置。[Claims for Utility Model Registration] Polishing means for polishing an object to be polished with an abrasive;
and a protective mask placed on a part of the object to be polished that does not require polishing. In a polishing device that protects from polishing, the protective mask includes an elastic member in which a strip-shaped protrusion is formed around the entire circumference of the edge portion of the lower surface, and an elastic member formed in approximately the same shape as the upper surface of the elastic member. a hard upper plate disposed on the lower surface of the elastic member; a hard lower plate formed in substantially the same shape as the lower surface of the elastic member surrounded by the protrusions of the elastic member and disposed on the lower surface; A polishing device characterized by comprising a fixing member that fixes the plate and the lower hard plate together.
JP1990004048U 1990-01-19 1990-01-19 Polishing equipment Expired - Lifetime JP2504485Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990004048U JP2504485Y2 (en) 1990-01-19 1990-01-19 Polishing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990004048U JP2504485Y2 (en) 1990-01-19 1990-01-19 Polishing equipment

Publications (2)

Publication Number Publication Date
JPH0396176U true JPH0396176U (en) 1991-10-01
JP2504485Y2 JP2504485Y2 (en) 1996-07-10

Family

ID=31507817

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990004048U Expired - Lifetime JP2504485Y2 (en) 1990-01-19 1990-01-19 Polishing equipment

Country Status (1)

Country Link
JP (1) JP2504485Y2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007181904A (en) * 2006-01-10 2007-07-19 Mitsubishi Heavy Ind Ltd Mask for blast polishing, automatic blast polishing device, and manufacturing method for solar cell panel
JP2022521936A (en) * 2019-02-27 2022-04-13 キャタピラー インコーポレイテッド Methods and tools for making isotropically finished seal rings for mechanical seal assemblies

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53140366U (en) * 1977-04-13 1978-11-06
JPS6029050U (en) * 1983-03-08 1985-02-27 日東電工株式会社 Masking sheet for machining stone etc.

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53140366U (en) * 1977-04-13 1978-11-06
JPS6029050U (en) * 1983-03-08 1985-02-27 日東電工株式会社 Masking sheet for machining stone etc.

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007181904A (en) * 2006-01-10 2007-07-19 Mitsubishi Heavy Ind Ltd Mask for blast polishing, automatic blast polishing device, and manufacturing method for solar cell panel
JP4690896B2 (en) * 2006-01-10 2011-06-01 三菱重工業株式会社 Blast polishing mask, automatic blast polishing apparatus, and solar cell panel manufacturing method
JP2022521936A (en) * 2019-02-27 2022-04-13 キャタピラー インコーポレイテッド Methods and tools for making isotropically finished seal rings for mechanical seal assemblies

Also Published As

Publication number Publication date
JP2504485Y2 (en) 1996-07-10

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term