JPH0396043U - - Google Patents
Info
- Publication number
- JPH0396043U JPH0396043U JP398090U JP398090U JPH0396043U JP H0396043 U JPH0396043 U JP H0396043U JP 398090 U JP398090 U JP 398090U JP 398090 U JP398090 U JP 398090U JP H0396043 U JPH0396043 U JP H0396043U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- mechanical pressure
- performs
- quality
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000012360 testing method Methods 0.000 claims description 4
- 238000011156 evaluation Methods 0.000 claims 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図はこの考案の一実施例である半導体装置
の試験装置の断面図、第２図はこの考案の他の実
施例を示す半導体装置の試験装置の断面図である
。
図において、１は評価を行なう対象となる半導
体装置、２は機械的圧力を加える加圧治具、３は
半導体装置を保持する保持治具を示す。なお、図
中、同一符号は同一、または相当部分を示す。
FIG. 1 is a cross-sectional view of a semiconductor device testing apparatus which is one embodiment of this invention, and FIG. 2 is a cross-sectional view of a semiconductor device testing apparatus which is another embodiment of this invention. In the figure, 1 is a semiconductor device to be evaluated, 2 is a pressure jig that applies mechanical pressure, and 3 is a holding jig that holds the semiconductor device. In addition, in the figures, the same reference numerals indicate the same or equivalent parts.
Claims (1)
導体装置の試験装置において、半導体装置に機械
的圧力を加えるようにしたことを特徴とする半導
体装置の試験装置。 1. A semiconductor device testing device that performs a quality and reliability evaluation test of a semiconductor device, the device being characterized in that it applies mechanical pressure to the semiconductor device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP398090U JPH0396043U (en) | 1990-01-19 | 1990-01-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP398090U JPH0396043U (en) | 1990-01-19 | 1990-01-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0396043U true JPH0396043U (en) | 1991-10-01 |
Family
ID=31507754
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP398090U Pending JPH0396043U (en) | 1990-01-19 | 1990-01-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0396043U (en) |
-
1990
- 1990-01-19 JP JP398090U patent/JPH0396043U/ja active Pending