JPH0395632U - - Google Patents
Info
- Publication number
- JPH0395632U JPH0395632U JP203090U JP203090U JPH0395632U JP H0395632 U JPH0395632 U JP H0395632U JP 203090 U JP203090 U JP 203090U JP 203090 U JP203090 U JP 203090U JP H0395632 U JPH0395632 U JP H0395632U
- Authority
- JP
- Japan
- Prior art keywords
- core tube
- mixed gas
- intermediate product
- semiconductor intermediate
- furnace core
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims description 5
- 239000013067 intermediate product Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000002347 injection Methods 0.000 claims description 2
- 239000007924 injection Substances 0.000 claims description 2
- 238000007664 blowing Methods 0.000 claims 1
- 238000007599 discharging Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP203090U JPH0395632U (sk) | 1990-01-11 | 1990-01-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP203090U JPH0395632U (sk) | 1990-01-11 | 1990-01-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0395632U true JPH0395632U (sk) | 1991-09-30 |
Family
ID=31505912
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP203090U Pending JPH0395632U (sk) | 1990-01-11 | 1990-01-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0395632U (sk) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005150573A (ja) * | 2003-11-19 | 2005-06-09 | Kyocera Corp | 不純物拡散装置 |
| JP2012009641A (ja) * | 2010-06-25 | 2012-01-12 | Koyo Thermo System Kk | 連続拡散処理装置 |
| JP2013182916A (ja) * | 2012-02-29 | 2013-09-12 | Mitsubishi Electric Corp | 熱拡散装置 |
| JP2015188095A (ja) * | 2015-05-20 | 2015-10-29 | 光洋サーモシステム株式会社 | 連続拡散処理装置 |
| JP2015201650A (ja) * | 2015-05-20 | 2015-11-12 | 光洋サーモシステム株式会社 | 連続拡散処理装置 |
| JP2015201651A (ja) * | 2015-05-20 | 2015-11-12 | 光洋サーモシステム株式会社 | 連続拡散処理装置 |
-
1990
- 1990-01-11 JP JP203090U patent/JPH0395632U/ja active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005150573A (ja) * | 2003-11-19 | 2005-06-09 | Kyocera Corp | 不純物拡散装置 |
| JP2012009641A (ja) * | 2010-06-25 | 2012-01-12 | Koyo Thermo System Kk | 連続拡散処理装置 |
| JP2013182916A (ja) * | 2012-02-29 | 2013-09-12 | Mitsubishi Electric Corp | 熱拡散装置 |
| JP2015188095A (ja) * | 2015-05-20 | 2015-10-29 | 光洋サーモシステム株式会社 | 連続拡散処理装置 |
| JP2015201650A (ja) * | 2015-05-20 | 2015-11-12 | 光洋サーモシステム株式会社 | 連続拡散処理装置 |
| JP2015201651A (ja) * | 2015-05-20 | 2015-11-12 | 光洋サーモシステム株式会社 | 連続拡散処理装置 |