JPH039532B2 - - Google Patents
Info
- Publication number
- JPH039532B2 JPH039532B2 JP58003815A JP381583A JPH039532B2 JP H039532 B2 JPH039532 B2 JP H039532B2 JP 58003815 A JP58003815 A JP 58003815A JP 381583 A JP381583 A JP 381583A JP H039532 B2 JPH039532 B2 JP H039532B2
- Authority
- JP
- Japan
- Prior art keywords
- chromium
- cobalt
- film
- carbon
- recording medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910000684 Cobalt-chrome Inorganic materials 0.000 claims description 15
- 239000010952 cobalt-chrome Substances 0.000 claims description 15
- WAIPAZQMEIHHTJ-UHFFFAOYSA-N [Cr].[Co] Chemical compound [Cr].[Co] WAIPAZQMEIHHTJ-UHFFFAOYSA-N 0.000 claims description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 9
- 229910052799 carbon Inorganic materials 0.000 claims description 9
- 239000011651 chromium Substances 0.000 description 7
- 230000005415 magnetization Effects 0.000 description 7
- ULORNNZYVOQJFU-UHFFFAOYSA-N [C].[Cr].[Co] Chemical compound [C].[Cr].[Co] ULORNNZYVOQJFU-UHFFFAOYSA-N 0.000 description 5
- 239000013078 crystal Substances 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 229910017052 cobalt Inorganic materials 0.000 description 3
- 239000010941 cobalt Substances 0.000 description 3
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 239000008188 pellet Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- ZGDWHDKHJKZZIQ-UHFFFAOYSA-N cobalt nickel Chemical compound [Co].[Ni].[Ni].[Ni] ZGDWHDKHJKZZIQ-UHFFFAOYSA-N 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- FXNGWBDIVIGISM-UHFFFAOYSA-N methylidynechromium Chemical compound [Cr]#[C] FXNGWBDIVIGISM-UHFFFAOYSA-N 0.000 description 1
- AJCDFVKYMIUXCR-UHFFFAOYSA-N oxobarium;oxo(oxoferriooxy)iron Chemical compound [Ba]=O.O=[Fe]O[Fe]=O.O=[Fe]O[Fe]=O.O=[Fe]O[Fe]=O.O=[Fe]O[Fe]=O.O=[Fe]O[Fe]=O.O=[Fe]O[Fe]=O AJCDFVKYMIUXCR-UHFFFAOYSA-N 0.000 description 1
- MQMHJMFHCMWGNS-UHFFFAOYSA-N phosphanylidynemanganese Chemical compound [Mn]#P MQMHJMFHCMWGNS-UHFFFAOYSA-N 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/65—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition
- G11B5/657—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition containing inorganic, non-oxide compound of Si, N, P, B, H or C, e.g. in metal alloy or compound
Landscapes
- Engineering & Computer Science (AREA)
- Metallurgy (AREA)
- Magnetic Record Carriers (AREA)
Description
本発明はコバルト・クロム系垂直磁気記録媒体
に関するものである。
磁気記録媒体に高記録密度（短波長）の信号を
記録する場合、記録媒体の面内方向の磁化によつ
て記録を行なう方法よりも、記録媒体の厚さ方
向、すなわち垂直磁化によつて記録を行なう方法
の方が有利であることが知られている。
この垂直磁気記録に用いる記録媒体としては、
膜面に垂直な方向に残留磁化を有する垂直磁化膜
を必要とし、コバルト・クロム（Co−Cr）膜、
バリウムフエライト塗膜、コバルト・ニツケル・
マンガン・リン（Oo−Ni−Mn−Ｐ）膜などが
知られている。なかでも、コバルト・クロム
（Co−Cr）膜は、六方晶の結晶構造を有し、その
Ｃ軸が膜面に垂直に配向した垂直磁化膜が、スパ
ツタリングや蒸着によつて容易に作成できること
から注目されている。この膜では大きい結晶異方
性エネルギーをもつコバルト（Co）の六方晶形
の結晶構造を基本とし、非磁性のクロム（Cr）
を10〜30at％添加することによつて飽和磁化Ms
を低下させ、垂直磁化膜を実現している。
垂直磁化膜としては、コバルト・クロム（Co
−Cr）六方晶のＣ軸が膜面に垂直な方向に揃つ
ているほどすぐれており、それは、Ｃ面のＸ線回
折強度が強く、ロツキング・カーブの分散角
Δθ50が小さい、ことにおいて判定できる。
理想的な垂直磁化膜ではΔθ50＝0゜のはずである
が、現実にはＣ軸が垂直方向からずれるため、
Δθ50は、ある大きさ（例えば７〜10゜）をもつも
のが一般である。
これまでの検討により、Ｃ軸の配向性がすぐれ
ているほど、記録密度特性も向上することが明ら
かになつており、より配向性の良いコバルト・ク
ロム（Co−Cr）垂直磁化膜が求められている。
本発明の目的はＣ軸の配向性を、さらに高めた
コバルト・クロム垂直磁化膜を提供することにあ
る。
本発明の垂直磁気記録媒体は、コバルト・クロ
ム垂直磁気記録媒体において、第３の構成元素と
して、カーボンを含有していることを特徴とす
る。
次に、本発明の実施例について説明する。
スパツタ装置内に配置する４インチのコバルト
（Co）ターゲツト上に５mm角・厚さ１mmのクロム
（Cr）ペレツトを面積比で17％、置き、さらに直
径５mm・厚さ１mmのカーボン（Ｃ）ペレツトを面
積比で６％置いた。そして、このターゲツトを下
記条件でスパツタリングして、ガラス基板上にカ
ーボンを含有するコバルト・クロム・カーボン
（Co−Cr−Ｃ）膜を0.5〜1μm厚で形成した。
スパツタパワ 300W
アルゴンガス圧 ２×10-2Torr
基板温度 50℃
この試料のカーボン含有量は0.5〜0.6％の範囲
であつた。以上の条件で得られたコバルト・クロ
ム・カーボン（CoCrC）膜の磁気特性を図に示
す。図において、１，２はそれぞれ膜面に垂直方
向及び面内方向に磁界を印加した場合のヒステリ
シス曲線である。また、Ｘ線回折により結晶性を
調べた結果、得られたコバルト・クロム・カーボ
ン（Co−Cr−Ｃ）膜は稠密六方晶構造を有し、
そのＣ軸は膜面に垂直方向に配向していた。この
配向の程度をクロム（Cr）を、同じ量だけ含有
するがカーボン（Ｃ）を含有しない従来のコバル
ト・クロム（Co−Cr）膜と比較した結果を、表
に示す。
The present invention relates to a cobalt-chromium based perpendicular magnetic recording medium. When recording high recording density (short wavelength) signals on a magnetic recording medium, recording is performed in the thickness direction of the recording medium, that is, perpendicular magnetization, rather than recording by magnetization in the in-plane direction of the recording medium. It is known that this method is more advantageous. The recording medium used for this perpendicular magnetic recording is
A perpendicularly magnetized film with residual magnetization in the direction perpendicular to the film surface is required, and cobalt-chromium (Co-Cr) films,
Barium ferrite coating, cobalt nickel,
Manganese-phosphorus (Oo-Ni-Mn-P) films are known. Among these, cobalt-chromium (Co-Cr) films have a hexagonal crystal structure, and a perpendicularly magnetized film in which the C-axis is oriented perpendicular to the film surface can be easily created by sputtering or vapor deposition. Attention has been paid. This film is based on the hexagonal crystal structure of cobalt (Co), which has a large crystal anisotropy energy, and the non-magnetic chromium (Cr).
Saturation magnetization Ms by adding 10~30at% of
This results in a perpendicularly magnetized film. Cobalt chromium (Co) is used as the perpendicular magnetization film.
-Cr) The more the C-axis of the hexagonal crystal is aligned in the direction perpendicular to the film surface, the better.This can be determined by the fact that the X-ray diffraction intensity of the C-plane is strong and the dispersion angle Δθ 50 of the rocking curve is small. can. In an ideal perpendicularly magnetized film, Δθ 50 = 0°, but in reality the C-axis deviates from the perpendicular direction, so
Generally, Δθ 50 has a certain magnitude (for example, 7 to 10 degrees). Studies to date have revealed that the better the orientation of the C-axis, the better the recording density characteristics, and there is a need for a cobalt-chromium (Co-Cr) perpendicular magnetization film with better orientation. ing. An object of the present invention is to provide a perpendicularly magnetized cobalt-chromium film with further enhanced C-axis orientation. The perpendicular magnetic recording medium of the present invention is a cobalt-chromium perpendicular magnetic recording medium characterized by containing carbon as a third constituent element. Next, examples of the present invention will be described. A chromium (Cr) pellet of 5 mm square and 1 mm thick is placed on a 4 inch cobalt (Co) target placed in the sputtering device, with an area ratio of 17%, and then a carbon (C) pellet of 5 mm in diameter and 1 mm thick is placed. was placed at 6% of the area ratio. This target was sputtered under the following conditions to form a carbon-containing cobalt-chromium-carbon (Co-Cr-C) film with a thickness of 0.5 to 1 μm on a glass substrate. Spatsuta Power 300W Argon gas pressure 2×10 -2 Torr Substrate temperature 50°C The carbon content of this sample was in the range of 0.5 to 0.6%. The magnetic properties of the cobalt chromium carbon (CoCrC) film obtained under the above conditions are shown in the figure. In the figure, hysteresis curves 1 and 2 are obtained when a magnetic field is applied in the direction perpendicular to the film surface and in the in-plane direction, respectively. In addition, as a result of examining the crystallinity by X-ray diffraction, the obtained cobalt-chromium-carbon (Co-Cr-C) film has a close-packed hexagonal structure.
The C axis was oriented perpendicular to the film surface. The table shows the results of comparing the degree of orientation with a conventional cobalt-chromium (Co-Cr) film containing the same amount of chromium (Cr) but no carbon (C).
【表】
カーボン（Ｃ）を添加することにより、Ｘ線に
よるＣ軸の回折強度は1.5〜２倍になり、しかも、
このＣ軸の配向性を示すＸ線によるロツキングカ
ーブの分散角Δθ50は、7゜から5゜へと小さくなつて
おり、Ｃ軸の配向性が向上している。これと同様
の傾向が、ポリイミド基板を用いた時にも見られ
た。
以上述べた様に、本発明に係るコバルト・クロ
ム・カーボン（Co−Cr−Ｃ）膜は、従来のコバ
ルト・クロム（Co−Cr）膜よりも磁化容易軸で
あるＣ軸の配向性が良いので、高密度記録用垂直
磁気記録媒体として適している。なおコバルト・
クロム・カーボン膜におけるカーボン量は膜の
種々の磁的特性や記録媒体として必要な特性を劣
化させない範囲に限定されることは当然である。[Table] By adding carbon (C), the C-axis diffraction intensity by X-rays increases by 1.5 to 2 times, and
The dispersion angle Δθ 50 of the X-ray rocking curve showing the C-axis orientation is reduced from 7° to 5°, and the C-axis orientation is improved. A similar trend was observed when polyimide substrates were used. As described above, the cobalt-chromium-carbon (Co-Cr-C) film according to the present invention has better orientation of the C-axis, which is the axis of easy magnetization, than the conventional cobalt-chromium (Co-Cr) film. Therefore, it is suitable as a perpendicular magnetic recording medium for high-density recording. Furthermore, cobalt
Naturally, the amount of carbon in the chromium-carbon film is limited to a range that does not deteriorate the various magnetic properties of the film or the properties necessary as a recording medium.
図は、本発明に係るコバルト・クロム・カーボ
ン（Co−Cr−Ｃ）膜のヒステリシス特性図。
The figure is a hysteresis characteristic diagram of a cobalt-chromium-carbon (Co-Cr-C) film according to the present invention.
Claims (1)
バルト・クロム系垂直磁気記録媒体。 ２ カーボンの量が0.5％以上である特許請求の
範囲第１項記載の垂直磁気記録媒体。[Claims] 1. A cobalt-chromium-based perpendicular magnetic recording medium characterized by containing carbon. 2. The perpendicular magnetic recording medium according to claim 1, wherein the amount of carbon is 0.5% or more.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58003815A JPS59129934A (en) | 1983-01-13 | 1983-01-13 | Vertical magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58003815A JPS59129934A (en) | 1983-01-13 | 1983-01-13 | Vertical magnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59129934A JPS59129934A (en) | 1984-07-26 |
| JPH039532B2 true JPH039532B2 (en) | 1991-02-08 |
Family
ID=11567679
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58003815A Granted JPS59129934A (en) | 1983-01-13 | 1983-01-13 | Vertical magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59129934A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3781071D1 (en) * | 1986-09-09 | 1992-09-17 | Ube Industries | VERTICAL MAGNETIC RECORD CARRIER AND METHOD FOR THE PRODUCTION THEREOF. |
| CN100336108C (en) * | 2002-03-29 | 2007-09-05 | 希捷科技有限公司 | Multilayer perpendicular media with high-boron or high-carbon additives to cocr films |
-
1983
- 1983-01-13 JP JP58003815A patent/JPS59129934A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59129934A (en) | 1984-07-26 |
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