JPH0394184A - Sealing type magnetic sensor - Google Patents
Sealing type magnetic sensorInfo
- Publication number
- JPH0394184A JPH0394184A JP23215889A JP23215889A JPH0394184A JP H0394184 A JPH0394184 A JP H0394184A JP 23215889 A JP23215889 A JP 23215889A JP 23215889 A JP23215889 A JP 23215889A JP H0394184 A JPH0394184 A JP H0394184A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- circular cross
- section
- magnetic core
- resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007789 sealing Methods 0.000 title description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims abstract description 12
- 239000000463 material Substances 0.000 claims abstract description 12
- 239000000835 fiber Substances 0.000 claims abstract description 11
- 229920005989 resin Polymers 0.000 claims abstract description 10
- 239000011347 resin Substances 0.000 claims abstract description 10
- 229910052742 iron Inorganic materials 0.000 claims abstract description 6
- 239000011796 hollow space material Substances 0.000 claims abstract description 3
- 239000002184 metal Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 229910045601 alloy Inorganic materials 0.000 abstract description 5
- 239000000956 alloy Substances 0.000 abstract description 5
- 239000011521 glass Substances 0.000 abstract description 3
- 239000007788 liquid Substances 0.000 abstract description 3
- 229910017082 Fe-Si Inorganic materials 0.000 abstract description 2
- 229910017133 Fe—Si Inorganic materials 0.000 abstract description 2
- 239000000919 ceramic Substances 0.000 abstract description 2
- 229910001004 magnetic alloy Inorganic materials 0.000 abstract description 2
- 238000000034 method Methods 0.000 abstract description 2
- 238000010791 quenching Methods 0.000 abstract description 2
- 230000000171 quenching effect Effects 0.000 abstract description 2
- 229920000914 Metallic fiber Polymers 0.000 abstract 4
- 230000006835 compression Effects 0.000 abstract 2
- 238000007906 compression Methods 0.000 abstract 2
- -1 for instance Substances 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 238000004804 winding Methods 0.000 abstract 1
- 239000011162 core material Substances 0.000 description 19
- 238000010586 diagram Methods 0.000 description 3
- 230000005284 excitation Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229920002050 silicone resin Polymers 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 229910000676 Si alloy Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は測定対象物体に例えば永久磁石のような磁界発
生素子を固定し、測定対象物体の位置変動や回転数を検
出する耐熱性の優れた小形状の磁気センサーに関するも
のである。Detailed Description of the Invention (Industrial Field of Application) The present invention is a highly heat-resistant device that fixes a magnetic field generating element such as a permanent magnet to an object to be measured, and detects positional fluctuations and rotational speed of the object to be measured. This invention relates to a small-sized magnetic sensor.
（従来の技術）
近年、工作機械や自動車などのいわゆるメカトロニクス
分野や電子電気光学分野など多岐の分野にわたって信頼
性の高い小形状の位置決めや回転数を検出するセンサー
が求められている。(Prior Art) In recent years, there has been a demand for highly reliable sensors that detect the positioning and rotational speed of small shapes in a wide variety of fields, including the so-called mechatronics field of machine tools and automobiles, and the electronic electro-optical field.
従来、非接触式センサーとして磁気を応用して位置を決
めたり、回転数を検出する磁気センサーはいくつか提案
されている。Several magnetic sensors have been proposed as non-contact sensors that use magnetism to determine position or detect rotational speed.
例えば、■フエライトを磁心として、それに巻線を施し
た構造としたもの、■同じくパーマロイ糸を磁心として
、巻線を施した構造の素子、さらに■アモルファスワイ
ヤーを磁心とした素子等がある。For example, there are (1) an element with a structure in which a ferrite core is wound with a wire, (2) an element with a structure in which a permalloy thread is also used as a magnetic core and a wire is wound therein, and (3) an element with an amorphous wire as a magnetic core.
（発明が解決しようとする課題）
前述のアモルファスワイヤーを磁心に用いた変位センサ
ーは、磁心材料が高磁歪材料であるため、素子を構成す
るうえで磁心の固定が非常に困難である。さらに、磁心
を腐食から守る構造にするのにも、技術を要する。(Problems to be Solved by the Invention) In the displacement sensor using the above-mentioned amorphous wire as a magnetic core, the magnetic core material is a high magnetostrictive material, so it is very difficult to fix the magnetic core when constructing the element. Furthermore, creating a structure that protects the magnetic core from corrosion requires technology.
（課題を解決するための手段）
本発明は、構造が単純でさらに、耐環境性にもすぐれた
磁気センサーである。(Means for Solving the Problems) The present invention is a magnetic sensor having a simple structure and excellent environmental resistance.
すなわち本発明は、軟磁気特性を有する円形断面の鉄を
主体とする結晶質金属繊維を磁心とし、該繊維を硬質中
空材に内在せしめ、硬質材の外面に巻線を施した素子を
少なくとも具備する磁気センサーであって、硬質材内で
磁芯をとりまく空間部が圧縮弾性率が１０２〜１ ０
” ｄｙｎｅ／ ｃｒｌｔの樹脂で満たされていること
を特徴とする封止型磁気センサーである。That is, the present invention includes at least an element in which a magnetic core is a crystalline metal fiber mainly made of iron with a circular cross section having soft magnetic properties, the fiber is embedded in a hard hollow material, and a wire is wound on the outer surface of the hard material. A magnetic sensor in which the space surrounding the magnetic core within the hard material has a compressive modulus of elasticity of 102 to 10.
This is a sealed magnetic sensor characterized by being filled with dyne/crlt resin.
すなわち、本発明は、磁心のまわりをすべてゲル状の樹
脂で封Ｉｆ−． Ｌているため、磁心を酸化から守るこ
とが可能となる。さらに、封正に使用する樹脂は、ゲル
状であるため磁心に与える応力が小さい。このため磁歪
による影響で出力が低下するようなことはない。また、
封止で磁心が完全に封＋１−されているため振動等の影
響を低下させることが可能となる。That is, in the present invention, if the entire circumference of the magnetic core is sealed with gel-like resin. Since it is L, it is possible to protect the magnetic core from oxidation. Furthermore, since the resin used for sealing is gel-like, it exerts little stress on the magnetic core. Therefore, the output does not decrease due to the influence of magnetostriction. Also,
Since the magnetic core is completely sealed, it is possible to reduce the influence of vibrations, etc.
本発明に用いられる封止樹脂は、ゲル状物質であれば特
に限定されるものではないが圧縮弾性率が１ ０ ２〜
１ ０ ６ｄｙｎｅ／ ｃｒＬ好ましくはＩＯ３〜１
０ ’ ｄｙｎｅ／ ｃａの樹脂が良い。本発明の硬質
材とは、ガラス、セラミック等の非磁性、非電気伝導性
の材料を示す。The sealing resin used in the present invention is not particularly limited as long as it is a gel-like substance, but has a compressive elastic modulus of 102 to
106dyne/crL preferably IO3~1
0' dyne/ca resin is good. The hard material of the present invention refers to non-magnetic, non-electrically conductive materials such as glass and ceramic.
本発明の磁気センサーの磁心は結晶質材料であるため、
アモルファス材料とは根本的に異なる。Since the magnetic core of the magnetic sensor of the present invention is a crystalline material,
Fundamentally different from amorphous materials.
結品質の磁心材料としては、直径１５０ｐＪｎ以下、好
ましくは１００戸以下の円形断面の鉄を主体とする合金
からなる軟磁気特性を有する金属繊維があげられる。Examples of the magnetic core material include metal fibers having soft magnetic properties made of an iron-based alloy and having a circular cross section of 150 pJn or less in diameter, preferably 100 pJn or less.
鉄を主体とする軟磁性合金としてはＦｅ−Ｓｉ系合金、
Ｆｅ−ＡＱ系合金、Ｆｅ−Ｓｉ−ＡＱ．系合金などがあ
げられ、液体急冷法により円形断面の金属繊維に作製す
ることが好ましい。更に金属繊維は熱処理したものを用
いるのが好ましい。Soft magnetic alloys mainly composed of iron include Fe-Si alloys,
Fe-AQ alloy, Fe-Si-AQ. It is preferable to prepare metal fibers with a circular cross section by a liquid quenching method. Furthermore, it is preferable to use heat-treated metal fibers.
これらの合金には磁心としての性能を発揮できる範囲で
第３又は第４元素および微量の不純物が含まれていても
よい。These alloys may contain a third or fourth element and a trace amount of impurity to the extent that they can exhibit performance as a magnetic core.
また、円形断面繊維の円形とは円断面の最長軸直径Ｄ
ｍａｘと最短軸直径１）ｍｉｎの比Ｄ ｍｉｎ／Ｄ ｍ
ａｘが０．７以Ｌであることを意味する。このＤｍｉｎ
／Ｄｍａｘ比は０．８０以１−のものが好ましい。In addition, the circular cross-section fiber is defined as the longest axis diameter D of the circular cross-section.
The ratio of max to the shortest axis diameter 1) min D min/D m
This means that ax is 0.7 or more. This Dmin
/Dmax ratio is preferably 0.80 or more and 1-.
更に、磁心に用いる円形断面繊維の磁気特性としては、
特に磁歪が小さい、すなわちできるだけ磁歪が零に近い
ものを使用することが好ましい。Furthermore, the magnetic properties of the circular cross-section fiber used in the magnetic core are as follows:
In particular, it is preferable to use a material with low magnetostriction, that is, one with magnetostriction as close to zero as possible.
（実施例）
磁心としてＦｅ−６．５ｗｔ％Ｓｉ合金からなる直径８
０ｔｍ （Ｄｍｊｎ ／Ｄｍａｘ ＝０． ９６） 、
長さ３ ５ ＩＩ１．の１本の直線状の金属繊維を用い
、この磁心を用い、この磁心を外径１．５−＋ｎのガラ
ス管内に挿入し、ガラス管の外側に直径１２０−のテフ
ロンコート電線を１０００回巻きコイルの長さを３ ０
−ｍとした後、固化後の圧縮弾性率が１０４ｄｙｎｅｓ
／ｃａである液状のシリコン樹脂でガラス管内を全て満
たし磁心を封止固定した。さらにこのような構成にした
コイル全体をステンレスパイプ内に納め、ステンレスパ
イプ中に同様にシリコン樹脂を満たし全体を封山．固定
した。このようにして作製した磁気センサーの構造の略
図を第１図に示す。作製した磁気センサーを外部磁場１
エルステッド、周波数５０Ｈ７．で外部雰囲気（空気中
）の温度を変化させた時の出力特性を第２図に示す。(Example) A magnetic core made of Fe-6.5wt%Si alloy with a diameter of 8
0tm (Dmjn /Dmax =0.96),
Length 3 5 II1. Using one straight metal fiber of The length of the coil is 30
-m, the compressive elastic modulus after solidification is 104dynes
The entire inside of the glass tube was filled with a liquid silicone resin of /ca, and the magnetic core was sealed and fixed. Furthermore, the entire coil configured in this manner was placed inside a stainless steel pipe, and the stainless steel pipe was similarly filled with silicone resin and the entire coil was sealed. Fixed. A schematic diagram of the structure of the magnetic sensor produced in this manner is shown in FIG. The fabricated magnetic sensor is exposed to external magnetic field 1.
Ørsted, frequency 50H7. Figure 2 shows the output characteristics when the temperature of the external atmosphere (in the air) is changed.
−５０℃から２００℃迄安定した出力を得ることができ
た。更に、図示してないが２５０℃で１０００時間の高
温雰囲気下に放置した後も、前記と同一励磁条件で測定
（室温）したところ４３ｍＶと山力は変化がなく安定し
ていた。更に、振幅２０ｍｆｆｌで１２０回／分の振動
を与えながら、前記と同一励磁条件で測定したところ第
２図と同一・の出力特性を示し、耐振動性に優れている
ことが確認できた。Stable output could be obtained from -50°C to 200°C. Further, although not shown, even after being left in a high temperature atmosphere at 250° C. for 1000 hours, measurement (at room temperature) under the same excitation conditions as above showed that the peak force remained stable at 43 mV with no change. Furthermore, when measurements were made under the same excitation conditions as above while applying vibrations at an amplitude of 20 mffl and 120 times/min, it was confirmed that the output characteristics were the same as those shown in FIG. 2, and that the product had excellent vibration resistance.
（発明の効果）
本発明の磁気センザーは従来のセンサーに較べて温度特
性が優れており、従来使用が困難であった高温雰囲気下
でのセンシングが可能であり、耐振動性にも優れている
ので、過酷な条件下での使用ができる。(Effects of the Invention) The magnetic sensor of the present invention has superior temperature characteristics compared to conventional sensors, is capable of sensing in high-temperature atmospheres that were previously difficult to use, and has excellent vibration resistance. Therefore, it can be used under harsh conditions.
第１図は本発明の−・例である磁気センサーの構成概略
図である。第２図は本発明の磁気センサーを用いて測定
した温度と出力の関係を示す図である。
一５−
−６一FIG. 1 is a schematic diagram of the configuration of a magnetic sensor that is an example of the present invention. FIG. 2 is a diagram showing the relationship between temperature and output measured using the magnetic sensor of the present invention. 15--61
Claims (1)
晶質金属繊維を磁芯とし、該繊維を硬質中空材に内在せ
しめ、硬質材の外面に巻線を施した素子を少なくとも具
備する磁気センサーであって、硬質材内で磁芯をとりま
く空間部が圧縮弾性率が１０＾２〜１０＾６ｄｙｎｅ／
ｃｍ＾２の樹脂で満たされていることを特徴とする封止
型磁気センサー。(1) At least an element having a magnetic core made of crystalline metal fibers mainly made of iron with a circular cross section having soft magnetic properties, the fibers being embedded in a hard hollow material, and a wire wound on the outer surface of the hard material. It is a magnetic sensor, and the space surrounding the magnetic core within the hard material has a compressive modulus of elasticity of 10^2 to 10^6 dyne/
A sealed magnetic sensor characterized by being filled with resin of cm^2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23215889A JPH0394184A (en) | 1989-09-06 | 1989-09-06 | Sealing type magnetic sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23215889A JPH0394184A (en) | 1989-09-06 | 1989-09-06 | Sealing type magnetic sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0394184A true JPH0394184A (en) | 1991-04-18 |
Family
ID=16934904
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23215889A Pending JPH0394184A (en) | 1989-09-06 | 1989-09-06 | Sealing type magnetic sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0394184A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002071770A (en) * | 2000-08-31 | 2002-03-12 | Aichi Steel Works Ltd | Magnetic field detector |
| JP2002090432A (en) * | 2000-09-12 | 2002-03-27 | Aichi Steel Works Ltd | Magnetic field detecting device |
-
1989
- 1989-09-06 JP JP23215889A patent/JPH0394184A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002071770A (en) * | 2000-08-31 | 2002-03-12 | Aichi Steel Works Ltd | Magnetic field detector |
| JP2002090432A (en) * | 2000-09-12 | 2002-03-27 | Aichi Steel Works Ltd | Magnetic field detecting device |
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