JPH0394133A - Differential pressure measuring device - Google Patents

Abstract

PURPOSE:To reduce the cost of the device by providing a microvalve on a measuring pressure introducing path and a connecting path, respectively, and also, providing a controller for bringing this microvalve to opening/closing operation. CONSTITUTION:A microvalve 20 is provided on measuring pressure introducing paths 16, 17 and a connecting path 18, respectively of a differential pressure sensor body 10, and also, a microvalve controller 40 for instructing an opening/ closing operation to the valve 20 is provided. Usually the introducing paths 16, 17 are communicating, therefore, measuring pressure is applied from the right and the left of the body 10, a measuring diaphragm 13 is displaced by differential pressure of the measuring pressure, and an electric signal output corresponding to the differential pressure can be obtained. In the case of adjusting a zero point of the device, the zero point can be adjusted by driving the controller 40, closing the introducing paths 16, 17 and opening the connecting path 18. Accordingly, a three-way valve becomes unnecessary, the device is made small in size and light in weight, and the cost of the device can be reduced.

Description

[Detailed description of the invention] Industrial application field> The present invention is a differential pressure measuring device that can reduce costs by being smaller and lighter and eliminates the need for parts such as piping, and can perform zero point calibration by the differential pressure measuring device itself. This relates to pressure measuring devices. BACKGROUND ART FIG. 6 is a diagram illustrating the configuration of a conventional example of a flow rate measurement system using an orifice that has been commonly used in the past.

In the figure, A is the conduit through which the measurement fluid flows. B is an orifice provided in conduit A.

C is a conduit attached to conduit A upstream or downstream of orifice B. C1 is a main valve that opens and closes the conduit.

D is a Sanki well connected to conduit C. DI is Saegusaben D
D2 is a pressure equalizing valve.

E is a differential pressure measuring device connected to the three-way valve D.

Problems to be Solved by the Invention> However, in such a device, the three-way valve D and the differential pressure measuring device JE are separate bodies, and require mutual piping. Further, the device becomes complicated, and it is difficult to reduce the size and weight of the device and reduce the cost.

When equalizing the pressures of both measurement inputs of the device and adjusting the cello point of the device, the stop valve D1 is closed and the pressure equalization valve D2 is opened or manually operated, so that operational errors are likely to occur.

The present invention solves this problem.

An object of the present invention is to provide a differential pressure measuring device that can reduce costs by being smaller and lighter and eliminates the need for parts such as piping, and can perform zero point calibration by itself. Means for Solving the Problems> In order to achieve this object, the present invention provides a main body made of a block-shaped metal material, an internal chamber provided inside the main body, and a measuring pressure introduced into the internal chamber. A pressure differential comprising a measurement diaphragm that divides into two measurement chambers, two measurement pressure introduction paths that introduce measurement pressure into the two measurement chambers, and a communication path that connects the measurement pressure introduction paths midway. A sensor body, a silicon substrate, an input hole provided in the silicon substrate, an output hole communicating with the input hole, a silicon tire phragm provided opposite to the input hole for opening and closing the input hole, and provided in the silicon substrate. an excitation coil provided on the silicon diaphragm and a magnetic film that is attracted when the excitation coil is excited; This is a differential pressure measurement device comprising three microvalves that open and close the microvalves, respectively, and a microvalve control device that is provided on the main body and instructs the microvalves to perform the required opening and closing operations.

<Function> In the above configuration, the measurement pressure introduction paths are usually communicated with each other, so measurement pressure is applied from the left and right sides of the main body, and the measurement tire flammable is displaced by the differential pressure between the measurement pressures. The displacement of the measuring diaphragm provides an electrical signal output corresponding to the differential pressure.

When equalizing the pressure of both measuring inputs of the device and adjusting the seven points of the device, drive the microvalve control device, close the measuring pressure introduction path with the microvalve, open the communication path, and then turn the device on. Normally, the microvalve is open, and when necessary, by applying an electric signal to the excitation coil, the magnetic field generated in the excitation coil attracts the silicon diaphragm provided with the magnetic film, and the input Close the hole.

Hereinafter, a detailed explanation will be given based on examples.

Embodiment> FIG. 1 is an explanatory view of the main part structure of an embodiment of the present invention, and FIG. 2 is an explanatory view of the main parts of FIG. 1.

In the figure, 10 indicates a main body 11, an internal chamber 12, a measuring diaphragm 13, a piezoresistive element 131, and a measuring chamber 14, 15.
, measurement pressure introduction paths j6 and 17, pressure receiving chambers 161 and 171, and communication path 18.

The main body 11 is made of a block-shaped metal material.

Internal chamber 12 is provided inside main body 11 .

The measuring diaphragm 13 divides the internal chamber 12 into two measuring chambers 14,15 into which the measuring pressure is introduced.

A piezoresistive element 131 is provided on the measurement diaphragm 13.

The measurement pressure introduction paths 16.17 introduce measurement pressure from the pressure receiving chambers 161 and 171 into the two measurement chambers 14.15, respectively.

The communication path 18 connects the measurement pressure introduction path 16.17.

Reference numeral 20 denotes three microvalves that are provided in the measurement pressure introduction path 16.17 and the communication path 18 and open and close the measurement pressure introduction path 16.17 and the connection path 18, respectively.

As shown in FIG. 2, the microvalve 20 includes a first silicon substrate 21, an opening/closing chamber 211, an input hole 22, and a tube 2.
21, second silicon substrate 23, recess 24, diaphragm 25, small protrusion 251, excitation coil 26, aluminum pattern 261, communication hole 27, magnetic film 28, third silicon substrate 29, pressure chamber 31, communication hole 231 , an output hole 32, a tube 321, a spacer 33, and a metal frame 34.

The opening/closing chamber 211 is provided on the first silicon substrate 21 .

The input hole 22 is provided in a tube 221 made of glass whose one end is connected to the first silicon substrate 21 .

The second silicon substrate 23 is in contact with the first silicon substrate 21 on one side. The recess 24 is provided in the second silicon substrate 23 and constitutes a diaphragm 25 in the silicon substrate 23.

The diaphragm 25 is provided facing the input hole 22,
The input hole 22 is opened and closed.

The small protrusion 251 is provided on the diaphragm 25.

The excitation coil 26 is provided on the first silicon substrate 21. In this case, as shown in FIG.
An aluminum pattern 261 is provided on.

The communication hole 27 is provided in the silicon substrate 21 and allows the input hole 22 and the opening/closing chamber 211 to communicate with each other.

The magnetic film 28 is provided on the silicon diaphragm 25 and is attracted to the excitation means 26 . In this case, as shown in FIG. 5, it is made of pure iron or permalloy, is provided on a silicon diaphragm by sputtering or vapor deposition, and is magnetized.

The two third silicon substrates are provided with one side in contact with the second silicon substrate 23, and form the recess 24 and the pressure chamber 31.

The communication hole 211 is provided in the second silicon substrate 23,
The opening/closing chamber 211 and the pressure guiding chamber 31 are communicated with each other.

The output hole 32 is provided in a tube 321 made of glass whose one end is attached to the third silicon substrate 29, and communicates the pressure chamber 3l with the outside.

The spacer 33 is made of a glass material provided between the first silicon substrate 21 or the third silicon substrate 29 and the metal frame 34.

The metal frame 34 is for preventing the silicon substrates 21, 23, 29 from peeling off from each other.

Reference numeral 40 denotes a microvalve control device that is provided in the main body 10 and instructs the microvalve 20 to perform required opening/closing operations.

Reference numerals 101 and 102 denote liquids sealed in the measurement chambers 14 and 1.5, the measurement pressure introduction paths 16 and 17, the pressure receiving chambers 161 and 171, and the communication path 18. In this case, silicone oil is used.

In the above configuration, normally the measurement pressure introduction paths 17, 18
Since these are connected to each other, measurement pressure is applied from the left and right sides of the differential pressure separator main body 10, and the measurement diaphragm 13 is displaced by the difference in the measurement pressures. Measuring diaphragm 1
By the displacement of 3, an electric signal output corresponding to the differential pressure can be obtained.

When equalizing the pressure of both measurement inputs of the device and adjusting the cello point of the device, the microvalve control device 30 is driven to close the measurement pressure introduction paths 16 and 17 using the microvalve 20, and the communication path 18 is closed. Normally, the microvalve 20 is open and then adjusted when necessary.
By applying an electric signal to the excitation coil 26, the magnetic field generated in the excitation coil 26 attracts the silicon diaphragm 25 provided with the magnetic film 28, thereby closing the input hole 22.

As a result, (1) Since there is no need for a three-way valve, bolts, body flanges, mounting brackets, etc. are no longer necessary, making it possible to reduce size, weight, and cost.

(2) There is no need for a three-way valve, and piping between the main body of the differential pressure measuring device and the three-way valve is no longer required, making instrumentation easier.

{3} Functions similar to three-way valves can be automated, eliminating operational errors. (4) Possible by zero adjustment or remote control.

It goes without saying that the microvalve 20 may be placed in any position as long as it can open and close the measurement pressure introduction paths 16, 17 and the communication path 18, respectively.

<Effects of the Invention> As explained above, the present invention has a main body made of a block-shaped metal material, an internal chamber provided inside the main body, and the internal chamber into two measurement chambers into which measurement pressure is introduced. A differential pressure sensor body comprising a measuring tire phragm that separates the measurement chambers, two measuring pressure introducing paths for introducing measuring pressure into the two measuring chambers, and a communication path connecting the measuring pressure introducing paths midway, and a silicon substrate. An input hole provided on the silicon substrate, an output hole communicating with the input hole, a silicon diaphragm provided opposite to the input hole for opening and closing the input hole, an excitation coil provided on the silicon substrate, and the silicon diaphragm. a magnetic film that is provided on the plum and is attracted when the excitation coil is excited; A differential pressure measuring device has been developed which includes a micro-valve and a micro-valve control device provided on the main body and instructing the micro-valve to perform required opening/closing operations.

As a result, (1) Since a three-way valve is not required, bolts, body flanges, mounting bragets, etc. are no longer necessary, making it possible to reduce size, weight, and cost.

(2) There is no need for a three-way valve, and piping between the main body of the differential pressure measuring device and the three-way valve is no longer necessary, making instrumentation easier.

(3) The same functions as the three-way valve can be automated, eliminating operational errors. (4) Zero adjustment is possible by remote control.

Therefore, according to the present invention, it is possible to realize a differential pressure measuring device that can reduce costs by reducing size and weight, eliminating the need for parts such as piping, and can perform zero point calibration by the differential pressure measuring device itself.

[Brief explanation of drawings]

Figure 1 is an explanatory diagram of the main part configuration of an embodiment of the present invention, Figure 2 is an explanatory diagram of the parts of Figure 1, Figure 3 is a perspective view of Figure 2, and Figures 4 and 5 are FIG. 2 is an explanatory view of parts, and FIG. 6 is an explanatory view of the configuration of a conventional example that has been generally used. DESCRIPTION OF SYMBOLS 10... Differential pressure sensor, 11... Main body, 12... Internal chamber, 13... Measurement diaphragm, 131... Piezo resistance element, 14.15... Measurement chamber, 16.17...
-Measuring pressure introduction path, 161. , 171...pressure receiving chamber, 18
...Communication path, 20...Micro valve, 21...
First silicon leg plate, 211... Opening/closing chamber, 22... Single force hole, 22]... Tube, 23... Second silicon substrate, 231... Tracing hole, 24... recess, 25
...Diaphragm, 251...Small protrusion, 26...
Excitation coil, 27... Communication hole, 28... Magnetic film, 2
9... Third silicon substrate, 31... Pressure chamber, 32
...Output hole, 321...Dube, 33...Subasa, 34...Metal frame. 40...Microvalve control device, 101. , 102... Enclosed liquid. Kasun (VVIr'PI

Claims (1)

[Scope of Claims] A main body made of a block-shaped metal material, an internal chamber provided inside the main body, a measurement diaphragm that divides the internal chamber into two measurement chambers into which measurement pressure is introduced, and the two measurement chambers. A differential pressure sensor body comprising two measurement pressure introduction paths each introducing measurement pressure into a chamber and a communication path connecting the measurement pressure introduction paths midway, a silicon substrate and an input hole provided in the silicon substrate. an output hole that communicates with the input hole; a silicon diaphragm that is provided opposite to the input hole and opens and closes the input hole; an excitation coil provided on the silicon substrate; and an excitation coil provided on the silicon diaphragm that excites the excitation coil. three microvalves provided in the measuring pressure introducing path and the communicating path and opening and closing the measuring pressure introducing path and the communicating path, respectively; A differential pressure measuring device comprising a microvalve control device that instructs a microvalve to perform required opening/closing operations.